EP2368044B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP2368044B1
EP2368044B1 EP09774877A EP09774877A EP2368044B1 EP 2368044 B1 EP2368044 B1 EP 2368044B1 EP 09774877 A EP09774877 A EP 09774877A EP 09774877 A EP09774877 A EP 09774877A EP 2368044 B1 EP2368044 B1 EP 2368044B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
fastening
flange
holes
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP09774877A
Other languages
German (de)
English (en)
Other versions
EP2368044A1 (fr
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2368044A1 publication Critical patent/EP2368044A1/fr
Application granted granted Critical
Publication of EP2368044B1 publication Critical patent/EP2368044B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump.
  • Turbomolecular pumps have a rotor element connected to a rotor shaft. Often, the rotor shaft is mounted on one side and the rotor element mounted according to a bell on the free shaft end.
  • the rotor element has substantially radially extending wing disks with rotor blades. Stator disks of the stator element are arranged between the rotor disks.
  • the stator disks are fixed by means of stator rings which completely surround the rotor element. The stator rings are held stationary in the pump housing.
  • Turbomolecular pumps operate at operating speeds of tens of thousands of revolutions per minute. In operation, therefore, the kinetic energy of the rotor is very high. This leads to considerable destructive forces in the case of a rotor crash or rotor burst. The occurring forces are transmitted to the pump housing via the stator elements. This can lead to destruction of the pump housing, possibly parts of the pump housing are thrown away from the pump. This involves a considerable risk of injury in itself.
  • Vacuum pumps have a mounting flange for attachment.
  • the latter has fastening bores along a circular line in order to place the vacuum pump by means of screws or bolts over the fastening flange at a location provided for this purpose To attach receiving element.
  • burst in which a connected to the shaft pump element, such as a rotor of a turbomolecular pump breaks or blocks, the energy occurring due to the abrupt deceleration is transmitted to the pump housing and thus also connected to the pump housing, in particular integrally formed mounting flange. This can lead to a tearing of the fastening screw, so that the vacuum pump may fly several meters through the room. This represents a considerable potential danger.
  • EP 1 413 761 In order to absorb part of the energy occurring in a rotor burst, are in EP 1 413 761 described different ways of designing the mounting holes. By such mounting holes should be possible in case of burst rotation of the flange by a predetermined angle in the direction of rotation of the pumping element. As a result, on the one hand an energy absorption between the mounting flange and the receiving element to which the pump is attached and on the other hand, an energy absorption by occurring deformations and destruction in the mounting flange and in the mounting screws. In the EP 1 413 761 Although proposed embodiments of the mounting flange and the mounting holes cause absorption of a part of the energy occurring in a burst, but represent manufacturing technically complex solutions.
  • the object of the invention is therefore to design the mounting holes provided in a mounting flange of a vacuum pump housing such that they are inexpensive to produce and ensure reliable energy absorption.
  • the vacuum pump according to the invention which may be a conventional turbomolecular pump or the like, has pumping elements arranged in a housing, such as pump rotors.
  • the at least one pumping element is carried on at least one shaft in the pump housing.
  • a shaft carries a plurality of pumping elements arranged one behind the other.
  • the shaft is usually mounted via bearing elements, such as ball or magnetic bearings in the housing.
  • the attachment of the housing via a connected to the housing, in particular integrally formed mounting flange. For this purpose, fastening holes are arranged in the mounting flange along a circular line.
  • the fastening holes are at least partially formed as elongated holes, wherein the longitudinal axis of the elongated holes additionally has an angle not equal to zero degrees to the tangent to the circular line.
  • the longitudinal axis of the fastening holes designed as elongated holes is thus directed inwards or outwards.
  • An advantage of the inventive design or arrangement of the slots is that easily formed mounting holes on the one hand allow twisting of the entire vacuum pump in the event of destruction and thus an energy absorption by friction and on the other hand, an energy absorption by deformation. It is at the inventively provided an angle to the tangential of the circular line of the mounting holes having slots to simply ausgestalte and thus inexpensive to produce mounting holes.
  • the longitudinal axis of the elongated holes preferably faces outwards, ie away from the shaft of the vacuum pump, counter to a direction of rotation of the at least one pump element.
  • the opposite side edges of the slots are arranged parallel to each other.
  • the mutually opposite side flanks in such a way that they converge towards each other or taper in a direction opposite to the direction of rotation of the at least one pumping element.
  • the fastening elements such as the screws
  • the position of the opposite side flanks of the oblong holes in such a way that a one-sided squeezing of the fastening element takes place, such as the screw.
  • the slots are mirror-symmetrical to the longitudinal axis.
  • an absorption element in the free space in which no fastening element is arranged in the fastening state.
  • This may be an element of relatively soft metal or plastic that is squeezed together in the event of a burst, i. is deformed. As a result, a further energy absorption is achieved.
  • an adjustment element is additionally provided, which is preferably provided on the mounting flange.
  • the adjusting element may be a pin provided on the fastening flange, which cooperates with a recess arranged in the receiving element.
  • the mounting flange has a flange opening whose width corresponds to an adjustment pin in the tangential direction.
  • the adjustment element additionally as a fastener to use and as adjustment pin to provide a fastener itself as a fastening screw.
  • one of the fastening openings is thus designed as an adjustment opening, with the remaining fastening openings being designed as inclined slots formed according to the invention.
  • the fastening flange described above is a housing component of the vacuum pump.
  • the mounting flange is then connected to a further flange of a housing part. This has the consequence that individual housing parts of the vacuum pump can rotate in the event of a burst against each other.
  • a vacuum pump such as a turbomolecular pump, has pumping elements such as rotors 12 in a housing 10. These are arranged in the illustrated embodiment on a common shaft 14 which is driven by an electric motor 16. The shaft 14 is supported by two ball bearings 18 in the housing 10 in the illustrated embodiment. With the housing 10, a mounting flange 20 is connected or integrally formed therewith. The mounting flange 20 is formed as screws 22 fasteners with a receiving element 24, wherein it may also be a mounting flange of a vacuum chamber connected.
  • the fastening flange 20 points along a circular line 26 (FIG. FIG. 2 ) several in particular at the same distance regularly distributed around the circumference arranged mounting holes 28.
  • One of the mounting holes is designed for adjustment as a radial opening 30.
  • the fastening holes formed as slots 28 are directed in the illustrated embodiment to the outside.
  • a longitudinal axis 32 ( FIG. 3 ) of the elongated holes 28 has opposite to a tangential 34 to the circular line 26 an angle ⁇ , which is not equal to zero.
  • the angle ⁇ is in the range of about 15 °.
  • the tangential 34 and the longitudinal axis 32 of the slot 28 intersect on the circular line 26th
  • the slots are aligned in the illustrated embodiment, outwardly against a rotational direction 36 of the shaft 14.
  • a fastening screw 22 as in FIG. 3 shown, arranged in the slot 28.
  • the screw moves in the slot 28 outward in the direction of an arrow 38. This results in a deformation of the fastener 22 in addition to the occurrence of friction between a flange inside 40 (FIG. FIG. 1 ) and an abutment side 42 of the receiving element.
  • the two opposite side edges 44 are formed parallel to each other. Furthermore, the side edges 44 are formed parallel to the longitudinal axis 32, which corresponds in the embodiment shown in the embodiment shown, the slots of the axis of symmetry of the slot 28.
  • an absorption element For additional absorption of energy, in a clearance 46 of the slot 28, i. in the room in which the screw 22 is not in the conventional mounting state, an absorption element can be arranged
  • an adjustment element is preferably provided.
  • This is in the illustrated embodiment as an adjustment opening 30 ( FIG. 2 ) educated.
  • This has a width b axially to the circular line 26, which corresponds to the width of an Justageuxes.
  • a fastening screw 22 is also used as an adjustment pin.
  • the flange opening 30 may be formed as a circular hole or as an elongated hole, wherein the longitudinal axis of this elongated hole extends radially. This depends, for example, on how accessible the hole from the pump side is to insert a screw. In case of burst, the screw provided in the flange opening 30 is thus sheared off.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (10)

  1. Pompe à vide, comprenant
    au moins un élément de pompe (12) disposé dans un carter (10),
    au moins un arbre (14) portant l'élément de pompe (12), au moins au nombre de un,
    une bride de fixation (20) reliée au carter (10), et
    des trous de fixation (28) disposés dans la bride de fixation (20) le long d'une ligne circonférentielle (26),
    caractérisé en ce que
    les trous de fixation sont des trous longitudinaux (28) dont l'axe longitudinal (32) présente un angle (α) différent de zéro degré par rapport à la tangente (34) à la ligne circonférentielle (26).
  2. Pompe à vide selon la revendication 1, caractérisée en ce que l'axe longitudinal (32) des trous longitudinaux (28) est orienté vers l'extérieur dans une direction opposée à une direction de rotation (36) de l'élément de pompe (12), au moins au nombre de un.
  3. Pompe à vide selon la revendication 1 ou 2, caractérisée en ce que les flancs latéraux (44) opposés des trous longitudinaux (28) sont parallèles entre eux.
  4. Pompe à vide selon la revendication 1 ou 2, caractérisée en ce que les flancs latéraux opposés des trous longitudinaux convergent l'un vers l'autre à l'opposé de la direction de rotation (36).
  5. Pompe à vide selon l'une des revendications 1 à 4, caractérisée en ce que les trous longitudinaux (28) sont en symétrie miroir par rapport à l'axe longitudinal (22).
  6. Pompe à vide selon l'une des revendications 1 à 5, caractérisée par un élément d'absorption disposé dans les trous longitudinaux (28), qui remplit de préférence l'espace libre (46) présent dans le trou longitudinal à l'état de fixation.
  7. Pompe à vide selon l'une des revendications 1 à 6, caractérisée par un élément d'ajustement prévu de préférence sur la bride de fixation (20) pour ajuster la pompe à vide sur un élément de réception (24).
  8. Pompe à vide selon la revendication 7, caractérisée en ce que l'élément d'ajustement est conçu sous forme d'ouverture de bride (30) dont la largeur (b) en direction tangentielle (34) correspond à celle d'une goupille d'ajustement reliée à l'élément de réception (24).
  9. Pompe à vide selon la revendication 7 ou 8, caractérisée en ce que l'élément d'ajustement sert en outre d'élément de fixation, et de préférence la goupille d'ajustement est réalisée sous la forme d'une vis de fixation.
  10. Pompe à vide selon l'une des revendications 1 à 9, caractérisée en ce que la bride de fixation (20) est conçue sous la forme d'une flasque de carter reliée à un autre flasque de carter.
EP09774877A 2008-12-19 2009-12-08 Pompe à vide Active EP2368044B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200820016905 DE202008016905U1 (de) 2008-12-19 2008-12-19 Vakuumpumpe
PCT/EP2009/066587 WO2010069814A1 (fr) 2008-12-19 2009-12-08 Pompe à vide

Publications (2)

Publication Number Publication Date
EP2368044A1 EP2368044A1 (fr) 2011-09-28
EP2368044B1 true EP2368044B1 (fr) 2012-11-28

Family

ID=42102409

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09774877A Active EP2368044B1 (fr) 2008-12-19 2009-12-08 Pompe à vide

Country Status (4)

Country Link
EP (1) EP2368044B1 (fr)
JP (1) JP5583687B2 (fr)
DE (1) DE202008016905U1 (fr)
WO (1) WO2010069814A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009039119B4 (de) 2009-08-28 2022-11-03 Pfeiffer Vacuum Gmbh Vakuumpumpe und Anordnung mit Vakuumpumpe
DE102013222167A1 (de) * 2013-10-31 2015-04-30 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN113531986A (zh) * 2020-04-17 2021-10-22 海信（山东）冰箱有限公司 冰箱

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4484470B2 (ja) 2002-10-23 2010-06-16 エドワーズ株式会社 分子ポンプ、及びフランジ
US7182574B2 (en) * 2004-11-05 2007-02-27 Fasco Industries, Inc. Draft inducer blower with fastener retention
GB0520750D0 (en) * 2005-10-12 2005-11-23 Boc Group Plc Vacuum pumping arrangement
JP4949746B2 (ja) * 2006-03-15 2012-06-13 エドワーズ株式会社 分子ポンプ、及びフランジ
JP2007278164A (ja) * 2006-04-06 2007-10-25 Shimadzu Corp 締結構造および回転式真空ポンプ
JP4978489B2 (ja) * 2008-01-30 2012-07-18 株式会社島津製作所 ケーシングのフランジ構造、ターボ分子ポンプおよび真空ポンプ

Also Published As

Publication number Publication date
JP2012512984A (ja) 2012-06-07
JP5583687B2 (ja) 2014-09-03
WO2010069814A1 (fr) 2010-06-24
EP2368044A1 (fr) 2011-09-28
DE202008016905U1 (de) 2010-05-12

Similar Documents

Publication Publication Date Title
EP1880111B1 (fr) Systeme de pompe a vide
EP2209995B1 (fr) Rotor de pompe à plusieurs étages pour pompes turbomoléculaires
DE2639886C2 (de) Windkraftmaschine
EP2419992B1 (fr) Système de freinage d'une génératrice d'une éolienne
DE69827553T2 (de) Turbomolekularpumpe
EP1002949A2 (fr) Eolienne à axe vertical
DE60202740T2 (de) Vakuumpumpe
EP3550140B1 (fr) Support de machine pour éolienne
EP2368044B1 (fr) Pompe à vide
EP2149710B1 (fr) Agencement de pompe à vide
EP1519058B1 (fr) Éolienne comprenant un palier pour le rotor
EP2133581B1 (fr) Elément de liaison
DE102007051988A1 (de) Turbomolekularpumpe
EP2491641B1 (fr) Moteur électrique, unité hydraulique
EP1498612B1 (fr) Pompe turbomoléculaire
EP3844410B1 (fr) Ensemble de paliers pour le rotor d'une eolienne
DE102008058149A1 (de) Turbomolekularpumpe
DE60300490T2 (de) Vakuumpumpe
EP3502516A1 (fr) Engrenage planétaire, groupe motopropulseur et éolienne
DE102006001909B4 (de) Laufrad eines Ventilators
DE202011002809U1 (de) Statorelement sowie Hochvakuumpumpe
WO2010057834A1 (fr) Pompe turbomoléculaire
DE102014100207B4 (de) Statorscheibe
EP2982834B1 (fr) Palier a roulement, en particulier palier a aiguilles, destine a l'agencement sur un pivot d'une aube variable de turbomachine
EP3844392B1 (fr) Ensemble de paliers pour une eolienne et eolienne

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20110510

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 586328

Country of ref document: AT

Kind code of ref document: T

Effective date: 20121215

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502009005523

Country of ref document: DE

Effective date: 20130124

REG Reference to a national code

Ref country code: NL

Ref legal event code: VDEP

Effective date: 20121128

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130311

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130328

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130301

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

BERE Be: lapsed

Owner name: OERLIKON LEYBOLD VACUUM G.M.B.H.

Effective date: 20121231

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20121231

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130228

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20121231

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20121208

26N No opposition filed

Effective date: 20130829

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502009005523

Country of ref document: DE

Effective date: 20130829

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20121208

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20091208

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20131231

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20131231

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 7

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 586328

Country of ref document: AT

Kind code of ref document: T

Effective date: 20141208

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20141208

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121128

REG Reference to a national code

Ref country code: DE

Ref legal event code: R082

Ref document number: 502009005523

Country of ref document: DE

Representative=s name: DOMPATENT VON KREISLER SELTING WERNER - PARTNE, DE

Ref country code: DE

Ref legal event code: R081

Ref document number: 502009005523

Country of ref document: DE

Owner name: LEYBOLD GMBH, DE

Free format text: FORMER OWNER: OERLIKON LEYBOLD VACUUM GMBH, 50968 KOELN, DE

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 8

REG Reference to a national code

Ref country code: FR

Ref legal event code: CD

Owner name: LEYBOLD GMBH, DE

Effective date: 20170313

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 9

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230422

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20231220

Year of fee payment: 15

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20231219

Year of fee payment: 15

Ref country code: CZ

Payment date: 20231127

Year of fee payment: 15

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20231222

Year of fee payment: 15