EP2368044B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP2368044B1
EP2368044B1 EP09774877A EP09774877A EP2368044B1 EP 2368044 B1 EP2368044 B1 EP 2368044B1 EP 09774877 A EP09774877 A EP 09774877A EP 09774877 A EP09774877 A EP 09774877A EP 2368044 B1 EP2368044 B1 EP 2368044B1
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EP
European Patent Office
Prior art keywords
vacuum pump
fastening
flange
holes
housing
Prior art date
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Application number
EP09774877A
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German (de)
French (fr)
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EP2368044A1 (en
Inventor
Heinrich Engländer
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Leybold GmbH
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Oerlikon Leybold Vacuum GmbH
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Publication of EP2368044A1 publication Critical patent/EP2368044A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump.
  • Turbomolecular pumps have a rotor element connected to a rotor shaft. Often, the rotor shaft is mounted on one side and the rotor element mounted according to a bell on the free shaft end.
  • the rotor element has substantially radially extending wing disks with rotor blades. Stator disks of the stator element are arranged between the rotor disks.
  • the stator disks are fixed by means of stator rings which completely surround the rotor element. The stator rings are held stationary in the pump housing.
  • Turbomolecular pumps operate at operating speeds of tens of thousands of revolutions per minute. In operation, therefore, the kinetic energy of the rotor is very high. This leads to considerable destructive forces in the case of a rotor crash or rotor burst. The occurring forces are transmitted to the pump housing via the stator elements. This can lead to destruction of the pump housing, possibly parts of the pump housing are thrown away from the pump. This involves a considerable risk of injury in itself.
  • Vacuum pumps have a mounting flange for attachment.
  • the latter has fastening bores along a circular line in order to place the vacuum pump by means of screws or bolts over the fastening flange at a location provided for this purpose To attach receiving element.
  • burst in which a connected to the shaft pump element, such as a rotor of a turbomolecular pump breaks or blocks, the energy occurring due to the abrupt deceleration is transmitted to the pump housing and thus also connected to the pump housing, in particular integrally formed mounting flange. This can lead to a tearing of the fastening screw, so that the vacuum pump may fly several meters through the room. This represents a considerable potential danger.
  • EP 1 413 761 In order to absorb part of the energy occurring in a rotor burst, are in EP 1 413 761 described different ways of designing the mounting holes. By such mounting holes should be possible in case of burst rotation of the flange by a predetermined angle in the direction of rotation of the pumping element. As a result, on the one hand an energy absorption between the mounting flange and the receiving element to which the pump is attached and on the other hand, an energy absorption by occurring deformations and destruction in the mounting flange and in the mounting screws. In the EP 1 413 761 Although proposed embodiments of the mounting flange and the mounting holes cause absorption of a part of the energy occurring in a burst, but represent manufacturing technically complex solutions.
  • the object of the invention is therefore to design the mounting holes provided in a mounting flange of a vacuum pump housing such that they are inexpensive to produce and ensure reliable energy absorption.
  • the vacuum pump according to the invention which may be a conventional turbomolecular pump or the like, has pumping elements arranged in a housing, such as pump rotors.
  • the at least one pumping element is carried on at least one shaft in the pump housing.
  • a shaft carries a plurality of pumping elements arranged one behind the other.
  • the shaft is usually mounted via bearing elements, such as ball or magnetic bearings in the housing.
  • the attachment of the housing via a connected to the housing, in particular integrally formed mounting flange. For this purpose, fastening holes are arranged in the mounting flange along a circular line.
  • the fastening holes are at least partially formed as elongated holes, wherein the longitudinal axis of the elongated holes additionally has an angle not equal to zero degrees to the tangent to the circular line.
  • the longitudinal axis of the fastening holes designed as elongated holes is thus directed inwards or outwards.
  • An advantage of the inventive design or arrangement of the slots is that easily formed mounting holes on the one hand allow twisting of the entire vacuum pump in the event of destruction and thus an energy absorption by friction and on the other hand, an energy absorption by deformation. It is at the inventively provided an angle to the tangential of the circular line of the mounting holes having slots to simply ausgestalte and thus inexpensive to produce mounting holes.
  • the longitudinal axis of the elongated holes preferably faces outwards, ie away from the shaft of the vacuum pump, counter to a direction of rotation of the at least one pump element.
  • the opposite side edges of the slots are arranged parallel to each other.
  • the mutually opposite side flanks in such a way that they converge towards each other or taper in a direction opposite to the direction of rotation of the at least one pumping element.
  • the fastening elements such as the screws
  • the position of the opposite side flanks of the oblong holes in such a way that a one-sided squeezing of the fastening element takes place, such as the screw.
  • the slots are mirror-symmetrical to the longitudinal axis.
  • an absorption element in the free space in which no fastening element is arranged in the fastening state.
  • This may be an element of relatively soft metal or plastic that is squeezed together in the event of a burst, i. is deformed. As a result, a further energy absorption is achieved.
  • an adjustment element is additionally provided, which is preferably provided on the mounting flange.
  • the adjusting element may be a pin provided on the fastening flange, which cooperates with a recess arranged in the receiving element.
  • the mounting flange has a flange opening whose width corresponds to an adjustment pin in the tangential direction.
  • the adjustment element additionally as a fastener to use and as adjustment pin to provide a fastener itself as a fastening screw.
  • one of the fastening openings is thus designed as an adjustment opening, with the remaining fastening openings being designed as inclined slots formed according to the invention.
  • the fastening flange described above is a housing component of the vacuum pump.
  • the mounting flange is then connected to a further flange of a housing part. This has the consequence that individual housing parts of the vacuum pump can rotate in the event of a burst against each other.
  • a vacuum pump such as a turbomolecular pump, has pumping elements such as rotors 12 in a housing 10. These are arranged in the illustrated embodiment on a common shaft 14 which is driven by an electric motor 16. The shaft 14 is supported by two ball bearings 18 in the housing 10 in the illustrated embodiment. With the housing 10, a mounting flange 20 is connected or integrally formed therewith. The mounting flange 20 is formed as screws 22 fasteners with a receiving element 24, wherein it may also be a mounting flange of a vacuum chamber connected.
  • the fastening flange 20 points along a circular line 26 (FIG. FIG. 2 ) several in particular at the same distance regularly distributed around the circumference arranged mounting holes 28.
  • One of the mounting holes is designed for adjustment as a radial opening 30.
  • the fastening holes formed as slots 28 are directed in the illustrated embodiment to the outside.
  • a longitudinal axis 32 ( FIG. 3 ) of the elongated holes 28 has opposite to a tangential 34 to the circular line 26 an angle ⁇ , which is not equal to zero.
  • the angle ⁇ is in the range of about 15 °.
  • the tangential 34 and the longitudinal axis 32 of the slot 28 intersect on the circular line 26th
  • the slots are aligned in the illustrated embodiment, outwardly against a rotational direction 36 of the shaft 14.
  • a fastening screw 22 as in FIG. 3 shown, arranged in the slot 28.
  • the screw moves in the slot 28 outward in the direction of an arrow 38. This results in a deformation of the fastener 22 in addition to the occurrence of friction between a flange inside 40 (FIG. FIG. 1 ) and an abutment side 42 of the receiving element.
  • the two opposite side edges 44 are formed parallel to each other. Furthermore, the side edges 44 are formed parallel to the longitudinal axis 32, which corresponds in the embodiment shown in the embodiment shown, the slots of the axis of symmetry of the slot 28.
  • an absorption element For additional absorption of energy, in a clearance 46 of the slot 28, i. in the room in which the screw 22 is not in the conventional mounting state, an absorption element can be arranged
  • an adjustment element is preferably provided.
  • This is in the illustrated embodiment as an adjustment opening 30 ( FIG. 2 ) educated.
  • This has a width b axially to the circular line 26, which corresponds to the width of an Justageuxes.
  • a fastening screw 22 is also used as an adjustment pin.
  • the flange opening 30 may be formed as a circular hole or as an elongated hole, wherein the longitudinal axis of this elongated hole extends radially. This depends, for example, on how accessible the hole from the pump side is to insert a screw. In case of burst, the screw provided in the flange opening 30 is thus sheared off.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung betrifft eine Vakuumpumpe.The invention relates to a vacuum pump.

Turbomolekularpumpen weisen ein mit einer Rotorwelle verbundenes Rotorelement auf. Oft ist die Rotorwelle einseitig gelagert und das Rotorelement entsprechend einer Glocke auf das freie Wellenende montiert. Das Rotorelement weist im Wesentlichen radial verlaufende Flügelscheiben mit Rotorflügeln auf. Zwischen den Rotorscheiben sind Statorscheiben des Statorelements angeordnet. Die Statorscheiben sind über Statorringe, die das Rotorelement vollständig umgeben, fixiert. Die Statorringe sind in dem Pumpengehäuse ortsfest gehalten. Turbomolekularpumpen werden mit Betriebs-Drehzahlen von mehreren Zehntausend U/min betrieben. Im Betrieb ist daher die kinetische Energie des Rotors sehr hoch. Dies führt im Fall eines Rotor-Crash bzw. Rotor-Burst zu erheblichen Zerstörungskräften. Die auftretenden Kräfte werden über die Statorelemente auf das Pumpengehäuse ubertragen. Dies kann zu Zerstörungen des Pumpengehäuses führen, wobei ggf. Teile des Pumpengehäuses von der Pumpe weg geschleudert werden. Dies birgt eine erhebliche Verletzungsgefahr in sich.Turbomolecular pumps have a rotor element connected to a rotor shaft. Often, the rotor shaft is mounted on one side and the rotor element mounted according to a bell on the free shaft end. The rotor element has substantially radially extending wing disks with rotor blades. Stator disks of the stator element are arranged between the rotor disks. The stator disks are fixed by means of stator rings which completely surround the rotor element. The stator rings are held stationary in the pump housing. Turbomolecular pumps operate at operating speeds of tens of thousands of revolutions per minute. In operation, therefore, the kinetic energy of the rotor is very high. This leads to considerable destructive forces in the case of a rotor crash or rotor burst. The occurring forces are transmitted to the pump housing via the stator elements. This can lead to destruction of the pump housing, possibly parts of the pump housing are thrown away from the pump. This involves a considerable risk of injury in itself.

Vakuumpumpen weisen zur Befestigung einen Befestigungsflansch auf. In herkömmlicher Ausführungsform weist dieser entlang einer Kreislinie Befestigungsbohrungen auf, um die Vakuumpumpe mittels Schrauben oder Bolzen über dem Befestigungsflansch an einem hierfür vorgesehenen Aufnahmeelement zu befestigen. Im Burstfall, in dem ein mit der Welle verbundenes Pumpelement, wie ein Rotor einer Turbomolekularpumpe bricht oder blockiert, wird die durch das schlagartige Abbremsen auftretende Energie auf das Pumpengehäuse und somit auch auf den mit dem Pumpengehäuse verbundenen, insbesondere einstückig ausgebildeten Befestigungsflansch übertragen. Dies kann zu einem Abreißen der Befestigungsschraube führen, so dass die Vakuumpumpe gegebenenfalls mehrere Meter durch den Raum fliegt. Dies stellt ein erhebliches Gefahrenpotential dar.Vacuum pumps have a mounting flange for attachment. In a conventional embodiment, the latter has fastening bores along a circular line in order to place the vacuum pump by means of screws or bolts over the fastening flange at a location provided for this purpose To attach receiving element. In case of burst, in which a connected to the shaft pump element, such as a rotor of a turbomolecular pump breaks or blocks, the energy occurring due to the abrupt deceleration is transmitted to the pump housing and thus also connected to the pump housing, in particular integrally formed mounting flange. This can lead to a tearing of the fastening screw, so that the vacuum pump may fly several meters through the room. This represents a considerable potential danger.

Um einen Teil der bei einem Rotorburst auftretenden Energie zu absorbieren, sind in EP 1 413 761 unterschiedliche Arten der Ausgestaltung der Befestigungslöcher beschrieben. Durch derartige Befestigungslöcher soll im Burstfall ein Drehen des Flansches um einen vorgegebenen Winkel in Rotationsrichtung des Pumpelements möglich sein. Hierdurch erfolgt einerseits eine Energieabsorption zwischen dem Befestigungsflansch und dem Aufnahmeelement, an dem die Pumpe befestigt ist und andererseits eine Energieabsorption durch auftretende Verformungen und Zerstörungen im Befestigungsflansch sowie in den Befestigungsschrauben. Die in EP 1 413 761 vorgeschlagenen Ausgestaltungen des Befestigungsflansches und der Befestigungslöcher bewirken zwar ein Absorbieren eines Teilen der bei einem Burst auftretenden Energie, stellen jedoch fertigungstechnisch aufwendige Lösungen dar.In order to absorb part of the energy occurring in a rotor burst, are in EP 1 413 761 described different ways of designing the mounting holes. By such mounting holes should be possible in case of burst rotation of the flange by a predetermined angle in the direction of rotation of the pumping element. As a result, on the one hand an energy absorption between the mounting flange and the receiving element to which the pump is attached and on the other hand, an energy absorption by occurring deformations and destruction in the mounting flange and in the mounting screws. In the EP 1 413 761 Although proposed embodiments of the mounting flange and the mounting holes cause absorption of a part of the energy occurring in a burst, but represent manufacturing technically complex solutions.

Aufgabe der Erfindung ist es daher, die in einem Befestigungsflansch eines Vakuumpumpengehäuses vorgesehen Befestigungslöcher derart auszubilden, dass sie kostengünstig herstellbar sind und eine zuverlässige Energieabsorption gewährleisten.The object of the invention is therefore to design the mounting holes provided in a mounting flange of a vacuum pump housing such that they are inexpensive to produce and ensure reliable energy absorption.

Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale des Anspruchs 1.The object is achieved according to the invention by the features of claim 1.

Die erfindungsgemäße Vakuumpumpe, bei der es sich um eine herkömmliche Turbomolekularpumpe oder dergleichen handeln kann, weist in einem Gehäuse angeordnete Pumpelemente wie Pumpenrotoren auf. Das mindestens eine Pumpelement ist auf mindestens einer Welle in dem Pumpengehäuse getragen, Üblicherweise trägt eine Welle mehrere hintereinander angeordnete Pumpelemente. Die Welle ist üblicherweise über Lagerelemente, wie Kugel- oder Magnetlager in dem Gehäuse gelagert. Die Befestigung des Gehäuses erfolgt über einen mit dem Gehäuse verbundenen, insbesondere einstückig ausgebildeten Befestigungsflansch. Hierzu sind in dem Befestigungsflansch, entlang einer Kreislinie Befestigungslöcher angeordnet. Erfindungsgemäß sind die Befestigungslöcher zumindest teilweise als Langlöcher ausgebildet, wobei die Längsachse der Langlöcher zusätzlich einen Winkel ungleich null Grad zur Tangentialen an der Kreislinie aufweist. Die Längsachse der als Langlöcher ausgebildeten Befestigungslöcher ist somit nach innen oder nach außen gerichtet. Dies hat zur Folge, dass beim Auftreten eines Bursts und der damit verbundenen Verdrehung des Befestigungsflansches, nicht nur eine Energieabsorption durch Reibung zwischen dem Befestigungsflansch und dem Aufnahmeelement der Pumpe erfolgt, sondern auch aufgrund der Verformung und/ oder Verschiebung der Befestigungselemente wie der Schrauben nach innen oder außen. Vorteilhaft bei der erfindungsgemäßen Ausgestaltung bzw. Anordnung der Langlöcher ist es, dass einfach ausgebildete Befestigungslöcher einerseits ein Verdrehen der gesamten Vakuumpumpe im Zerstörungsfall und hiermit eine Energieabsorption durch Reibung und andererseits zusätzlich eine Energieabsorption durch Verformung ermöglichen. Es handelt sich bei dem erfindungsgemäß vorgesehenen einen Winkel zur Tangentialen der Kreislinie der Befestigungslöcher aufweisenden Langlöchern um einfach ausgestalte und somit kostengünstig herstellbare Befestigungslöcher.The vacuum pump according to the invention, which may be a conventional turbomolecular pump or the like, has pumping elements arranged in a housing, such as pump rotors. The at least one pumping element is carried on at least one shaft in the pump housing. Usually, a shaft carries a plurality of pumping elements arranged one behind the other. The shaft is usually mounted via bearing elements, such as ball or magnetic bearings in the housing. The attachment of the housing via a connected to the housing, in particular integrally formed mounting flange. For this purpose, fastening holes are arranged in the mounting flange along a circular line. According to the invention, the fastening holes are at least partially formed as elongated holes, wherein the longitudinal axis of the elongated holes additionally has an angle not equal to zero degrees to the tangent to the circular line. The longitudinal axis of the fastening holes designed as elongated holes is thus directed inwards or outwards. This has the consequence that when a burst and the associated rotation of the mounting flange, not only an energy absorption by friction between the mounting flange and the receiving element of the pump takes place, but also due to the deformation and / or displacement of the fasteners such as the screws inwards or outside. An advantage of the inventive design or arrangement of the slots is that easily formed mounting holes on the one hand allow twisting of the entire vacuum pump in the event of destruction and thus an energy absorption by friction and on the other hand, an energy absorption by deformation. It is at the inventively provided an angle to the tangential of the circular line of the mounting holes having slots to simply ausgestalte and thus inexpensive to produce mounting holes.

Die Längsachse der Langlöcher weist vorzugsweise entgegen einer Rotationsrichtung des mindestens einen Pumpenelements nach außen, d.h. von der Welle der Vakuumpumpe weg.The longitudinal axis of the elongated holes preferably faces outwards, ie away from the shaft of the vacuum pump, counter to a direction of rotation of the at least one pump element.

In einer einfachen bevorzugten Ausgestaltung sind die einander gegenüberliegenden Seitenflanken der Langlöcher parallel zueinander angeordnet. Es ist jedoch möglich, die einander gegenüberliegenden Seitenflanken derart auszugestalten, dass sie entgegen der Rotationsrichtung des mindestens einen Pumpelements aufeinander zulaufen bzw. sich verjüngen. Durch diese Verringerung des Abstands der Seitenflanken ist es möglich, zusätzlich im Burstfall ein Quetschen der Befestigungselemente wie der Schrauben, in deren radialer Richtung zu bewirken. Hierdurch erfolgt eine weitere Absorption von Energie. Hierbei ist es möglich, die Lage der einander gegenüberliegenden Seitenflanken der Langlöcher derart auszugestalten, dass ein einseitiges Quetschen des Befestigungselements wie der Schraube erfolgt. Vorzugsweise sind die Langlöcher zur Längsachse jedoch spiegelsymmetrisch ausgebildet.In a simple preferred embodiment, the opposite side edges of the slots are arranged parallel to each other. However, it is possible to design the mutually opposite side flanks in such a way that they converge towards each other or taper in a direction opposite to the direction of rotation of the at least one pumping element. As a result of this reduction in the spacing of the side flanks, it is possible, in addition in the event of a burst, to cause the fastening elements, such as the screws, to be squeezed in their radial direction. This results in a further absorption of energy. In this case, it is possible to design the position of the opposite side flanks of the oblong holes in such a way that a one-sided squeezing of the fastening element takes place, such as the screw. Preferably, however, the slots are mirror-symmetrical to the longitudinal axis.

Insbesondere bei den Langlöchern mit zueinander parallel verlaufenden Seitenflanken ist es vorteilhaft, in dem Freiraum, in dem im Befestigungszustand kein Befestigungselement angeordnet ist, ein Absorptionselement vorzusehen. Hierbei kann es sich um ein Element aus relativ weichem Metall oder Kunststoff handeln, das im Burstfall zusammengequetscht, d.h. verformt wird. Hierdurch ist eine weitere Energieabsorption erzielt.In particular, in the oblong holes with mutually parallel side edges, it is advantageous to provide an absorption element in the free space in which no fastening element is arranged in the fastening state. This may be an element of relatively soft metal or plastic that is squeezed together in the event of a burst, i. is deformed. As a result, a further energy absorption is achieved.

In bevorzugter Ausführungsform ist zusätzlich ein Justageelement vorgesehen, das vorzugsweise am Befestigungsflansch vorgesehen ist. Durch ein derartiges Justageelement ist gewährleistet, dass der Befestigungsflansch der Vakuumpumpe in der richtigen Lage mit dem Aufnahmeelement verbunden wird. Bei dem Justageelement kann es sich um einen am Befestigungsflansch vorgesehenen Stift handeln, der mit einer in dem Aufnahmeelement angeordneten Ausnehmung zusammenwirkt. Besonders bevorzugt ist es, dass der Befestigungsflansch eine Flanschöffnung aufweist, deren Breite in tangentialer Richtung einem Justagestift entspricht. Hierbei ist es wiederum besonders bevorzugt, das Justageelement zusätzlich als Befestigungselement zu nutzen und als Justagestift ein Befestigungselement selbst wie eine Befestigungsschraube vorzusehen. In bevorzugter Ausführungsform ist somit eine der Befestigungsöffnungen als Justageöffnung ausgebildet, wobei die übrigen Befestigungsöffnungen als erfindungsgemäß ausgebildete geneigte Langlöcher ausgebildet sind.In a preferred embodiment, an adjustment element is additionally provided, which is preferably provided on the mounting flange. By such an adjustment element ensures that the mounting flange of the vacuum pump is connected in the correct position with the receiving element. The adjusting element may be a pin provided on the fastening flange, which cooperates with a recess arranged in the receiving element. It is particularly preferred that the mounting flange has a flange opening whose width corresponds to an adjustment pin in the tangential direction. Here, it is again particularly preferred, the adjustment element additionally as a fastener to use and as adjustment pin to provide a fastener itself as a fastening screw. In a preferred embodiment, one of the fastening openings is thus designed as an adjustment opening, with the remaining fastening openings being designed as inclined slots formed according to the invention.

Ebenso ist es möglich, dass der vorstehend beschriebene Befestigungsflansch eine Gehäusekomponente der Vakuumpumpe ist. Der Befestigungsflansch ist sodann mit einem weiteren Flansch eines Gehäuseteils verbunden. Dies hat zur Folge, dass einzelne Gehäuseteile der Vakuumpumpe sich im Falle eines Bursts gegeneinander verdrehen können.It is also possible that the fastening flange described above is a housing component of the vacuum pump. The mounting flange is then connected to a further flange of a housing part. This has the consequence that individual housing parts of the vacuum pump can rotate in the event of a burst against each other.

Nachfolgend wird die Erfindung anhand einer bevorzugten Ausführungsform unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert.The invention will be explained in more detail with reference to a preferred embodiment with reference to the accompanying drawings.

Es zeigen:

Figur 1
eine schematische Seitenansicht einer Vakuumpumpe,
Figur 2
eine schematische Draufsicht auf den Befestigungsflansch und
Figur 3
eine vergrößerte Ansicht eines als Langloch ausgebildeten Befestigungslochs.
Show it:
FIG. 1
a schematic side view of a vacuum pump,
FIG. 2
a schematic plan view of the mounting flange and
FIG. 3
an enlarged view of a trained as a slot mounting hole.

Eine Vakuumpumpe wie eine Turbomolekularpumpe weist in einem Gehäuse 10 Pumpelemente wie Rotoren 12 auf. Diese sind im dargestellten Ausführungsbeispiel auf einer gemeinsamen Welle 14 angeordnet, die von einem Elektromotor 16 angetrieben wird. Die Welle 14 ist im dargestellten Ausführungsbeispiel durch zwei Kugellager 18 im Gehäuse 10 gelagert. Mit dem Gehäuse 10 ist ein Befestigungsflansch 20 verbunden bzw. einstückig mit diesem ausgebildet. Der Befestigungsflansch 20 ist über als Schrauben 22 ausgebildete Befestigungselemente mit einem Aufnahmeelement 24, bei dem es sich ebenfalls um einen Befestigungsflansch einer Vakuumkammer handeln kann, verbunden.A vacuum pump, such as a turbomolecular pump, has pumping elements such as rotors 12 in a housing 10. These are arranged in the illustrated embodiment on a common shaft 14 which is driven by an electric motor 16. The shaft 14 is supported by two ball bearings 18 in the housing 10 in the illustrated embodiment. With the housing 10, a mounting flange 20 is connected or integrally formed therewith. The mounting flange 20 is formed as screws 22 fasteners with a receiving element 24, wherein it may also be a mounting flange of a vacuum chamber connected.

Der Befestigungsflansch 20 weist entlang einer Kreislinie 26 (Figur 2) mehrere insbesondere im selben Abstand regelmäßig um den Umfang verteilt angeordnete Befestigungslöcher 28 auf. Eines der Befestigungslöcher ist zur Justage als radiale Öffnung 30 ausgebildet. Die als Langlöcher ausgebildeten Befestigungslöcher 28 sind im dargestellten Ausführungsbeispiel nach außen gerichtet. Eine Längsachse 32 (Figur 3) der Langlöcher 28 weist gegenüber einer Tangentialen 34 zu der Kreislinie 26 einen Winkel α, der ungleich null ist auf. Vorzugsweise ist der Winkel α in dem Bereich von ca. 15°. Zur Bestimmung des Winkels α schneiden sich im dargestellten Ausfuhrungsbeispiel die Tangentiale 34 und die Längsachse 32 des Langlochs 28 auf der Kreislinie 26.The fastening flange 20 points along a circular line 26 (FIG. FIG. 2 ) several in particular at the same distance regularly distributed around the circumference arranged mounting holes 28. One of the mounting holes is designed for adjustment as a radial opening 30. The fastening holes formed as slots 28 are directed in the illustrated embodiment to the outside. A longitudinal axis 32 ( FIG. 3 ) of the elongated holes 28 has opposite to a tangential 34 to the circular line 26 an angle α, which is not equal to zero. Preferably, the angle α is in the range of about 15 °. To determine the angle α in the illustrated embodiment, the tangential 34 and the longitudinal axis 32 of the slot 28 intersect on the circular line 26th

Wie insbesondere aus Figur 2 ersichtlich ist, sind die Langlöcher im dargestellten Ausführungsbeispiel nach außen entgegen einer Rotationsrichtung 36 der Welle 14 ausgerichtet.As in particular from FIG. 2 it can be seen, the slots are aligned in the illustrated embodiment, outwardly against a rotational direction 36 of the shaft 14.

Im herkömmlichen Befestigungsfall ist eine Befestigungsschraube 22, wie in Figur 3 dargestellt, in dem Langloch 28 angeordnet. Im Burstfall verschiebt sich die Schraube in dem Langloch 28 nach außen in Richtung eines Pfeils 38. Hierdurch erfolgt ein Verformen des Befestigungselements 22 neben dem Auftreten von Reibung zwischen einer Flanschinnenseite 40 (Figur 1) und einer Anlageseite 42 des Aufnahmeelements.In the conventional mounting case, a fastening screw 22, as in FIG. 3 shown, arranged in the slot 28. In case of burst, the screw moves in the slot 28 outward in the direction of an arrow 38. This results in a deformation of the fastener 22 in addition to the occurrence of friction between a flange inside 40 (FIG. FIG. 1 ) and an abutment side 42 of the receiving element.

Im dargestellten Ausführungsbeispiel sind die beiden einander gegenüberliegenden Seitenflanken 44 parallel zueinander ausgebildet. Ferner sind die Seitenflanken 44 parallel zur Längsachse 32 ausgebildet, die in der im dargestellten Ausführungsbeispiel gezeigten Ausgestaltung der Langlöcher der Symmetrieachse des Langlochs 28 entspricht.In the illustrated embodiment, the two opposite side edges 44 are formed parallel to each other. Furthermore, the side edges 44 are formed parallel to the longitudinal axis 32, which corresponds in the embodiment shown in the embodiment shown, the slots of the axis of symmetry of the slot 28.

Zur zusätzlichen Absorption von Energie kann in einem Freiraum 46 des Langlochs 28, d.h. in dem Raum, in dem sich im herkömmlichen Befestigungszustand die Schraube 22 nicht befindet, ein Absorptionselement angeordnet werdenFor additional absorption of energy, in a clearance 46 of the slot 28, i. in the room in which the screw 22 is not in the conventional mounting state, an absorption element can be arranged

Um die Lage der Vakuumpumpe in an dem Aufnahmeelement 24 befestigten Zustand eindeutig zu definieren, ist vorzugsweise ein Justageelement vorgesehen. Dieses ist im dargestellten Ausführungsbeispiel als Justageöffnung 30 (Figur 2) ausgebildet. Diese weist eine Breite b axial zur Kreislinie 26 auf, die der Breite eines Justagestiftes entspricht. In besonders bevorzugter Ausführungsform wird als Justagestift ebenfalls eine Befestigungsschraube 22 verwendet. Die Flanschöffnung 30 kann als kreisrundes Loch oder als Langloch ausgebildet sein, wobei die Längsachse dieses Langlochs radial verläuft. Dies hängt beispielsweise davon ab, wie zugänglich das Loch von der Pumpenseite ist, um eine Schraube einzuführen. Im Burstfall wird die in der Flanschöffnung 30 vorgesehene Schraube somit abgeschert.In order to uniquely define the position of the vacuum pump in the state fastened to the receiving element 24, an adjustment element is preferably provided. This is in the illustrated embodiment as an adjustment opening 30 ( FIG. 2 ) educated. This has a width b axially to the circular line 26, which corresponds to the width of an Justagestiftes. In a particularly preferred embodiment, a fastening screw 22 is also used as an adjustment pin. The flange opening 30 may be formed as a circular hole or as an elongated hole, wherein the longitudinal axis of this elongated hole extends radially. This depends, for example, on how accessible the hole from the pump side is to insert a screw. In case of burst, the screw provided in the flange opening 30 is thus sheared off.

Das Vorsehen von schrägen Langlöchern bei engen Montageverhältnissen von der Pumpenseite hat generell den Vorteil, dass das Einführen der Schrauben leichter ist.The provision of oblique slots in tight mounting conditions from the pump side generally has the advantage that the insertion of the screws is easier.

Claims (10)

  1. A vacuum pump comprising
    at least one pumping element (12) arranged in a housing (10),
    at least one shaft (14) supporting the at least one pumping element (12), a fastening flange (20) connected with the housing (10), and
    fastening holes (28) arranged along a circular line (26) in the fastening flange (20),
    characterized in that
    the fastening holes are formed as oblong holes (28) whose longitudinal axis (32) is oriented under an angle (α) other than zero degrees with respect to the tangential (34) to the circular line (26).
  2. The vacuum pump of claim 1, characterized in that the longitudinal axis (32) of the oblong holes (28) is directed outward against the direction of rotation (36) of the at least one pumping element (12).
  3. The vacuum pump of claim 1 or 2, characterized in that the opposite side flanks (44) of the oblong holes (28) are parallel to each other.
  4. The vacuum pump of claim 1 or 2, characterized in that the opposite side flanks of the oblong holes converge against the direction of rotation (36).
  5. The vacuum pump of one of claims 1 to 4, characterized in that the oblong holes (28) are mirror-symmetric with respect to the longitudinal axis (22).
  6. The vacuum pump of one of claims 1 to 5, characterized by an absorption element arranged in the oblong holes (28), which element preferably fills the free space (46) present in the oblong hole in the mounted condition.
  7. The vacuum pump of one of claims 1 to 6, characterized by an adjustment element for adjusting the vacuum pump to a receiving element (24), the adjustment element preferably being provided at the fastening flange (20).
  8. The vacuum pump of claim 7, characterized in that the adjustment element is in the form of a flange opening (30) whose width (b) in the tangential direction (34) corresponds to that of an adjustment pin connected with the receiving element (24).
  9. The vacuum pump of claim 7 or 8, characterized in that the adjustment element further serves as a fastening element, wherein the adjustment pin is preferably formed as a fastening screw.
  10. The vacuum pump of one of claims 1 to 9, characterized in that the fastening flange (20) is formed as a housing flange connected to another housing flange.
EP09774877A 2008-12-19 2009-12-08 Vacuum pump Active EP2368044B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200820016905 DE202008016905U1 (en) 2008-12-19 2008-12-19 vacuum pump
PCT/EP2009/066587 WO2010069814A1 (en) 2008-12-19 2009-12-08 Vacuum pump

Publications (2)

Publication Number Publication Date
EP2368044A1 EP2368044A1 (en) 2011-09-28
EP2368044B1 true EP2368044B1 (en) 2012-11-28

Family

ID=42102409

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09774877A Active EP2368044B1 (en) 2008-12-19 2009-12-08 Vacuum pump

Country Status (4)

Country Link
EP (1) EP2368044B1 (en)
JP (1) JP5583687B2 (en)
DE (1) DE202008016905U1 (en)
WO (1) WO2010069814A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009039119B4 (en) 2009-08-28 2022-11-03 Pfeiffer Vacuum Gmbh Vacuum pump and arrangement with vacuum pump
DE102013222167B4 (en) * 2013-10-31 2024-07-11 Pfeiffer Vacuum Gmbh Vacuum pump
CN113531986A (en) * 2020-04-17 2021-10-22 海信（山东）冰箱有限公司 Refrigerator with a door

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4484470B2 (en) * 2002-10-23 2010-06-16 エドワーズ株式会社 Molecular pump and flange
US7182574B2 (en) * 2004-11-05 2007-02-27 Fasco Industries, Inc. Draft inducer blower with fastener retention
GB0520750D0 (en) * 2005-10-12 2005-11-23 Boc Group Plc Vacuum pumping arrangement
JP4949746B2 (en) * 2006-03-15 2012-06-13 エドワーズ株式会社 Molecular pump and flange
JP2007278164A (en) * 2006-04-06 2007-10-25 Shimadzu Corp Fastening structure and rotary vacuum pump
JP4978489B2 (en) * 2008-01-30 2012-07-18 株式会社島津製作所 Casing flange structure, turbo molecular pump and vacuum pump

Also Published As

Publication number Publication date
EP2368044A1 (en) 2011-09-28
JP2012512984A (en) 2012-06-07
JP5583687B2 (en) 2014-09-03
WO2010069814A1 (en) 2010-06-24
DE202008016905U1 (en) 2010-05-12

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