EP1880111B1 - Vacuum pump arrangement - Google Patents

Vacuum pump arrangement Download PDF

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Publication number
EP1880111B1
EP1880111B1 EP06754953A EP06754953A EP1880111B1 EP 1880111 B1 EP1880111 B1 EP 1880111B1 EP 06754953 A EP06754953 A EP 06754953A EP 06754953 A EP06754953 A EP 06754953A EP 1880111 B1 EP1880111 B1 EP 1880111B1
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EP
European Patent Office
Prior art keywords
pump
housing
vacuum chamber
vacuum
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP06754953A
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German (de)
French (fr)
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EP1880111A1 (en
Inventor
Dirk Kalisch
Robert Stolle
Heinz-Dieter Odendahl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
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Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1880111A1 publication Critical patent/EP1880111A1/en
Application granted granted Critical
Publication of EP1880111B1 publication Critical patent/EP1880111B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a vacuum pump arrangement, in particular a turbomolecular pump arrangement.
  • Vacuum pumps such as turbomolecular pumps, are connected to a vacuum chamber housing to create a vacuum in a vacuum chamber.
  • the connection takes place via a pump flange connected to the pump housing and corresponding holding elements, such as so-called claws.
  • the claws are connected to the pump flange on which, for example, a projection of the claw engages in a groove or groove of the pump flange.
  • US 2003/0175113 describes a turbomolecular pump with a pump housing and a vacuum chamber housing, each having a flange.
  • the flange of the pump housing and the flange of the vacuum chamber housing are screwed together by a plurality of screws.
  • a clamp is provided, which encompasses the two flanges. The clamp is bolted to the flange of the pump housing and to the flange of the vacuum chamber housing by means of several screws.
  • WO 2005/015028 describes a retaining clip for securing a generic vacuum pump to a housing, wherein a triangular intermediate element is provided, which is arranged between the retaining clip and the pump housing. If it comes in case of damage to a rotation of the pump housing relative to the retaining clip is by friction forces the Intermediate element taken from the pump housing. The tip of the triangle is in this case arranged such that when driving the intermediate element, the frictional forces between the intermediate element and the pump housing increase and thus a rotation of the pump housing is prevented.
  • a similar pump arrangement is also off JP 2000-073986A known.
  • the object of the invention is to increase the safety of vacuum pump assemblies in case of damage.
  • the vacuum pump arrangement according to the invention which is in particular a turbomolecular pump arrangement, has in particular a pump with high weight and / or high rotational speeds of the rotor.
  • the vacuum pump assembly has a pump housing in which a rotor and a stator are arranged. With the pump housing, a pump flange is connected, wherein the pump flange can also be formed directly as part of the housing.
  • a vacuum chamber housing holding elements are provided for attachment of the pump housing to a vacuum chamber housing holding elements are provided.
  • at least one holding element has an anti-twist device which is connected to the vacuum chamber housing works together.
  • At least one holding element is provided with an anti-rotation device according to the invention.
  • two, in particular opposing holding elements are provided with anti-rotation.
  • the holding element according to the invention can be combined with anti-rotation with conventional single-holding elements.
  • a plurality of retaining elements are provided with anti-rotation, in particular with at least three distributed on the circumference of the pump flange arranged holding elements.
  • the pump flange is preferably formed annular.
  • the holding element may comprise a pin, which preferably engages in a recess or bore provided on the pump chamber housing.
  • the retaining element preferably has a fastening element, such as a screw.
  • a preferred embodiment of the retaining element according to the invention thus has an anti-rotation, for example in the form of a pin engaging in a recess, and a fastening element which is screwed into a provided on the vacuum chamber housing thread.
  • the anti-rotation device is designed as a fastening element, in particular as a screw, so that the holding element according to the invention has at least two, in particular identically designed fastening elements. Since both fasteners provided in the vacuum chamber housing recesses, such as Threaded holes, engage, serve both fasteners both for attachment and to prevent rotation.
  • the pump flange connected to the pump housing or formed as part of the pump housing preferably has an annular groove. This can be interrupted, but preferably runs along the entire circumference.
  • the holding elements preferably have a particular annular segment-shaped approach, which engages in the groove.
  • the radius of the groove substantially corresponds to the radius of the lugs.
  • a vacuum pump arrangement has a pump housing 10, in which a rotor 14 rotating about a longitudinal axis 12 is arranged. Between the individual rotor blades 14 stator blades 16 connected to the housing 10 are arranged. The rotor 14 is fixedly connected via a connecting element 18 to a drive shaft 20. Accordingly, the stator 16 is fixedly connected to the housing 10 via a connecting element 22.
  • the housing 10 is fastened to a vacuum chamber housing 26 in the region of an opening 28.
  • the housing has an annular in the illustrated embodiment, pump flange 30.
  • the pump flange 30 is L-shaped in cross section, so that an annular groove 32 is formed.
  • the pump housing 10 is fastened via the flange 30 to the vacuum chamber housing 26.
  • the holding element 34 has an in particular annular segment-shaped projection 36, which engages in the groove 32 of the pump flange 30.
  • a screw 38 is provided as a fastening element.
  • the holding element 34 according to the invention (FIG. Fig. 2 ), a fastening element 38 and an anti-rotation 40, wherein in the illustrated embodiment, both the fastener 38 and the anti-rotation 40 as Screw are formed.
  • the rotation lock 40 engages in a recess 42, which is a threaded bore in the vacuum chamber housing 26 in the illustrated embodiment.
  • the retaining elements 34 according to the invention have, in addition to a fastening element 38, an anti-rotation lock 40, it is ensured when a damage occurs that twisting of the fastening elements 34 does not occur. Despite the high moments occurring in the event of damage, such as when blocking the rotor 14, which are transmitted from the rotor 14 via the stator 16 into the pump housing 10, no rotation of the holding elements 34 takes place, as is the case with corresponding single holding elements 44 (FIG. Fig. 2 ).
  • FIG. 2 illustrated perspective view of the pump housing 10 is a view of the flange side of the pump housing, wherein on the annular flange 30 four inventive holding elements 34 and four individual holding elements 44 are arranged.
  • the holding elements 34 according to the invention each have an annular projection 36 which in the groove 32 of the pump flange 30 (FIGS. Fig. 1 ) intervenes. Further, each support member 34, two screws 38, 40 are provided which serve as a fastener or rotation.
  • the screws 38, 40 are guided through through holes 46 provided in the holding element 34.
  • a single retaining element 44 shown in case of damage.
  • the single retaining element 44 is fastened in the vacuum chamber housing 10 via a screw 48. Due to the high occurring moments in case of damage, the pump housing 10 is rotated in the direction of an arrow 50. This results in a rotation of a single retaining element 44 in the counterclockwise direction. This can lead to damage of the flange 30 and the vacuum chamber housing 26.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A vacuum pump arrangement, especially a turbomolecular pump arrangement, comprises a rotor (14) and a stator (16) in a pump housing (10). The pump housing (10) is connected to a vacuum chamber housing (26) through a pump flange (10). Retaining elements (34) are provided for this connection. To avoid a twisting of the retaining elements (34) in the event of a damage, such as the blocking of the rotor (14) and the high moments occurring thereby, the retaining element (34) comprises an anti-twist structure (40) cooperating with the vacuum chamber housing (26).

Description

Die Erfindung betrifft eine Vakuum-Pumpenanordnung, insbesondere eine Turbomolekular-Pumpenanordnung.The invention relates to a vacuum pump arrangement, in particular a turbomolecular pump arrangement.

Vakuum-Pumpen, wie beispielsweise Turbomolekular-Pumpen, sind zur Erzeugung eines Vakuums in einer Vakuumkammer mit einem Vakuumkammergehäuse verbunden. Die Verbindung erfolgt hierbei über einen mit dem Pumpengehäuse verbundenen Pumpenflansch und entsprechenden Halteelementen, wie beispielsweise sogenannten Pratzen. Die Pratzen sind mit dem Pumpenflansch verbunden, an dem beispielsweise ein Ansatz der Pratze in eine Rille oder Nut des Pumpenflansches eingreift. Die Befestigung der Pratzen an dem Vakuumkammergehäuse erfolgt über eine Schraube. Da derartige Vakuum-Pumpen ein Gewicht von bis zu 65 kg aufweisen können und der in dem Pumpengehäuse angeordnete Rotor Drehzahlen im Bereich von 30.000 bis 100.000 U/min erreichen kann, sind an die Sicherheit hohe Anforderungen gestellt. Auf Grund des hohen Gewichts und der hohen Rotorgeschwindigkeiten muss eine sichere Befestigung der Vakuum-Pumpe an dem Vakuum-Kammergehäuse gewährleistet sein, um mit hoher Sicherheit die Gefährdung von Bedienpersonal auszuschließen. Insbesondere bei dem Schadensfall des Blockieren des Rotors treten schlagartig hohe Momente auf, die vom Rotor über den Stator auf das Pumpengehäuse und von dem Pumpengehäuse über die Pratzen auf das Vakuumkammergehäuse übertragen werden. Bei derart großen Momenten, die im Bereich von mehreren tausend Nm liegen können, kann ein Verdrehen des Pumpengehäuses gegenüber dem Vakuumkammergehäuse erfolgen. Dies kann zu Beschädigungen des Vakuumkammergehäuses im Bereich der Befestigung der Pratzen führen. Insbesondere die Beschädigung des Vakuumkammergehäuses ist nachteilig, da zusätzlich zum Austausch der Vakuum-Pumpe auch eine Reparatur des Vakuumkammergehäuses erforderlich ist. Dies ist nicht nur kostenintensiv, sondern unterbricht eine Produktion ggf. für einen längeren Zeitraum. Ggf. kann es sogar vorkommen, dass die Pratzen am Pumpenflansch vollständig ausbrechen und die Vakuum-Pumpe nicht mehr am Vakuumkammergehäuse gehalten wird, so dass die Vakuum-Pumpe herunterfallen kann. Neben Beschädigungen des Vakuumkammergehäuses besteht hierdurch ein hohes Verletzungsrisiko des Bedienpersonals.Vacuum pumps, such as turbomolecular pumps, are connected to a vacuum chamber housing to create a vacuum in a vacuum chamber. The connection takes place via a pump flange connected to the pump housing and corresponding holding elements, such as so-called claws. The claws are connected to the pump flange on which, for example, a projection of the claw engages in a groove or groove of the pump flange. The attachment of the claws to the vacuum chamber housing via a screw. Since such vacuum pumps can have a weight of up to 65 kg and the rotor arranged in the pump housing can reach speeds in the range of 30,000 to 100,000 rpm, high demands are placed on safety. Due to the high weight and the high rotor speeds, a secure attachment of the vacuum pump to the vacuum chamber housing must be ensured in order to exclude with great certainty the risk to operating personnel. Particularly in the case of damage of the blocking of the rotor, abruptly high torques occur, which are transmitted from the rotor via the stator to the pump housing and from the pump housing via the claws to the vacuum chamber housing. With such large moments, in the range of several thousand Nm, the pump housing can be rotated relative to the vacuum chamber housing. This can lead to damage to the vacuum chamber housing in the attachment of the claws. In particular, the damage of the vacuum chamber housing is disadvantageous, since in addition to the replacement of the vacuum pump and a repair of the vacuum chamber housing is required. This is not only costly, but also interrupts a production for a longer period if necessary. Possibly. It may even happen that the claws break completely on the pump flange and the vacuum pump is no longer held on the vacuum chamber housing, so that the vacuum pump can fall down. In addition to damage to the vacuum chamber housing, this results in a high risk of injury to operating personnel.

Untersuchungen haben gezeigt, dass insbesondere ab einem Flanschdurchmesser von 160 mm vorstehende Probleme auftreten können.Investigations have shown that especially with a flange diameter of 160 mm above problems can occur.

US 2003/0175113 beschreibt eine Turbomolekularpumpe mit einem Pumpengehäuse und einem Vakuumkammergehäuse, die jeweils einen Flansch aufweisen. Der Flansch des Pumpengehäuses und der Flansch des Vakuumkammergehäuses sind durch mehrere Schrauben miteinander verschraubt. Zusätzlich ist eine Klammer vorgesehen, die die beiden Flansche umgreift. Die Klammer ist mit Hilfe mehrerer Schrauben jeweils mit dem Flansch des Pumpengehäuses und mit dem Flansch des Vakuumkammergehäuses verschraubt. US 2003/0175113 describes a turbomolecular pump with a pump housing and a vacuum chamber housing, each having a flange. The flange of the pump housing and the flange of the vacuum chamber housing are screwed together by a plurality of screws. In addition, a clamp is provided, which encompasses the two flanges. The clamp is bolted to the flange of the pump housing and to the flange of the vacuum chamber housing by means of several screws.

WO 2005/015028 beschreibt eine Halteklammer zum Befestigen einer gattungsgemäße Vakuumpumpe an einem Gehäuse, wobei ein dreieckförmiges Zwischenelement vorgesehen ist, das zwischen der Halteklammer und dem Pumpengehäuse angeordnet ist. Kommt es im Schadensfall zu einer Rotation des Pumpengehäuses relativ zur Halteklammer wird durch Friktionskräfte das Zwischenelement vom Pumpengehäuse mitgenommen. Die Spitze des Dreiecks ist hierbei derart angeordnet, dass sich beim Mitnehmen des Zwischenelements die Reibungskräfte zwischen dem Zwischenelement und dem Pumpengehäuse erhöhen und somit eine Rotation des Pumpengehäuses unterbunden wird. Eine ähnliche Pumpenanordnung ist auch aus JP 2000-073986A bekannt. WO 2005/015028 describes a retaining clip for securing a generic vacuum pump to a housing, wherein a triangular intermediate element is provided, which is arranged between the retaining clip and the pump housing. If it comes in case of damage to a rotation of the pump housing relative to the retaining clip is by friction forces the Intermediate element taken from the pump housing. The tip of the triangle is in this case arranged such that when driving the intermediate element, the frictional forces between the intermediate element and the pump housing increase and thus a rotation of the pump housing is prevented. A similar pump arrangement is also off JP 2000-073986A known.

Aufgabe der Erfindung ist es, im Schadensfall die Sicherheit von Vakuum-Pumpenanordnungen zu erhöhen.The object of the invention is to increase the safety of vacuum pump assemblies in case of damage.

Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale des Anspruchs 1.The object is achieved according to the invention by the features of claim 1.

Die erfindungsgemäße Vakuum-Pumpenanordnung, bei der es sich insbesondere um eine Turbomolekular-Pumpenanordnung handelt, weist insbesondere eine Pumpe mit hohem Gewicht und/ oder hohen Rotationsgeschwindigkeiten des Rotors auf. Die Vakuum-Pumpenanordnung weist ein Pumpengehäuse auf, in dem ein Rotor und ein Stator angeordnet sind. Mit dem Pumpengehäuse ist ein Pumpenflansch verbunden, wobei der Pumpenflansch auch unmittelbar als Teil des Gehäuses ausgebildet sein kann. Zur Befestigung des Pumpengehäuses an einem Vakuumkammergehäuse sind Halteelemente vorgesehen. Erfindungsgemäß weist mindestens ein Halteelement eine Verdrehsicherung auf, die mit dem Vakuumkammergehäuse zusammen wirkt. Durch das Vorsehen einer derartigen Verdrehsicherung ist sichergestellt, dass im Schadensfall, insbesondere beim schlagartigen Blockieren des Rotors, auf Grund der auftretenden hohen Momente kein Verdrehen des Halteelements, wie der Pratze, erfolgt. Hierdurch ist insbesondere ein Lösen der Verbindung zwischen dem Pumpenflansch und dem Vakuumkammergehäuse vermieden, so dass die Sicherheit verbessert ist. Ferner ist die Gefahr des Beschädigens des Vakuumkammergehäuses im Bereich der Befestigung des Halteelements verringert.The vacuum pump arrangement according to the invention, which is in particular a turbomolecular pump arrangement, has in particular a pump with high weight and / or high rotational speeds of the rotor. The vacuum pump assembly has a pump housing in which a rotor and a stator are arranged. With the pump housing, a pump flange is connected, wherein the pump flange can also be formed directly as part of the housing. For attachment of the pump housing to a vacuum chamber housing holding elements are provided. According to the invention, at least one holding element has an anti-twist device which is connected to the vacuum chamber housing works together. By providing such a rotation is ensured that in case of damage, especially in the sudden blocking of the rotor, due to the high moments occurring no twisting of the holding element, such as the claw occurs. As a result, in particular a loosening of the connection between the pump flange and the vacuum chamber housing is avoided, so that the safety is improved. Furthermore, the risk of damaging the vacuum chamber housing in the region of the attachment of the retaining element is reduced.

Vorzugsweise ist mindestens ein Halteelement mit einer erfindungsgemäßen Verdrehsicherung vorgesehen. Vorzugsweise sind zwei, insbesondere einander gegenüberliegende Halteelemente mit Verdrehsicherung vorgesehen. Hierbei kann das erfindungsgemäße Halteelement mit Verdrehsicherung mit herkömmlichen Einzel-Halteelementen kombiniert sein. Vorzugsweise sind mehrere Halteelemente mit Verdrehsicherung, insbesondere mit mindestens drei am Umfang des Pumpenflansches verteilt angeordneten Halteelementen vorgesehen. Hierbei ist der Pumpenflansch vorzugsweise kreisringförmig ausgebildet.Preferably, at least one holding element is provided with an anti-rotation device according to the invention. Preferably, two, in particular opposing holding elements are provided with anti-rotation. Here, the holding element according to the invention can be combined with anti-rotation with conventional single-holding elements. Preferably, a plurality of retaining elements are provided with anti-rotation, in particular with at least three distributed on the circumference of the pump flange arranged holding elements. Here, the pump flange is preferably formed annular.

Als Verdrehsicherung kann das Halteelement einen Stift aufweisen, der vorzugsweise in eine am Pumpenkammergehäuse vorgesehene Ausnehmung bzw. Bohrung eingreift. Zusätzlich weist das Halteelement vorzugsweise ein Befestigungselement, wie eine Schraube, auf. Eine bevorzugte Ausführungsform des erfindungsgemäßen Halteelements weist somit eine Verdrehsicherung, beispielsweise in Form eines in eine Ausnehmung eingreifenden Stiftes, und ein Befestigungselement auf, das in ein an dem Vakuumkammergehäuse vorgesehenes Gewinde eingeschraubt wird. Bei einer weiteren bevorzugten Ausführungsform ist auch die Verdrehsicherung als Befestigungselement, insbesondere als Schraube, ausgebildet, so dass das erfindungsgemäße Halteelement mindestens zwei insbesondere identisch ausgebildete Befestigungselemente aufweist. Da beide Befestigungselemente in in dem Vakuumkammergehäuse vorgesehene Ausnehmungen, wie Gewindebohrungen, eingreifen, dienen beide Befestigungselemente sowohl zur Befestigung als auch zur Verdrehsicherung.To prevent rotation, the holding element may comprise a pin, which preferably engages in a recess or bore provided on the pump chamber housing. In addition, the retaining element preferably has a fastening element, such as a screw. A preferred embodiment of the retaining element according to the invention thus has an anti-rotation, for example in the form of a pin engaging in a recess, and a fastening element which is screwed into a provided on the vacuum chamber housing thread. In a further preferred embodiment, the anti-rotation device is designed as a fastening element, in particular as a screw, so that the holding element according to the invention has at least two, in particular identically designed fastening elements. Since both fasteners provided in the vacuum chamber housing recesses, such as Threaded holes, engage, serve both fasteners both for attachment and to prevent rotation.

Der mit dem Pumpengehäuse verbundene oder als Teil des Pumpengehäuses ausgebildete Pumpenflansch weist vorzugsweise eine kreisringförmige Nut auf. Diese kann unterbrochen sein, verläuft vorzugsweise jedoch am gesamten Umfang. Die Halteelemente weisen vorzugsweise einen insbesondere kreisringsegmentförmigen Ansatz auf, der in die Nut eingreift. Hierdurch ist die Montage der Pumpe erheblich vereinfacht, da die Lage des Pumpengehäuses relativ zum Vakuumkammergehäuse variiert werden kann, ohne das die Lage der Halteelemente verändert werden muss.The pump flange connected to the pump housing or formed as part of the pump housing preferably has an annular groove. This can be interrupted, but preferably runs along the entire circumference. The holding elements preferably have a particular annular segment-shaped approach, which engages in the groove. As a result, the mounting of the pump is considerably simplified, since the position of the pump housing can be varied relative to the vacuum chamber housing without the position of the holding elements must be changed.

Vorzugsweise entspricht der Radius der Nut im Wesentlichen dem Radius der Ansätze. Dies hat insbesondere den Vorteil, dass beim Auftreten eines sehr großen Moments im Schadensfall das Pumpengehäuse gegenüber den Halteelementen eine Drehung ausführen kann, sobald die durch das auftretende Moment zwischen dem Pumpenflansch und den Ansätzen der Halteelemente auftretenden Kräfte größer als die Reibungskräfte in diesem Bereich sind.Preferably, the radius of the groove substantially corresponds to the radius of the lugs. This has the particular advantage that when a very large moment occurs in the event of damage, the pump housing can rotate relative to the holding elements as soon as the forces occurring between the pump flange and the lugs of the holding elements are greater than the frictional forces in this area.

Nachfolgend wird die Erfindung anhand einer bevorzugten Ausführungsform unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert.The invention will be explained in more detail with reference to a preferred embodiment with reference to the accompanying drawings.

Es zeigen:

Fig. 1
eine schematische Schnittansicht einer Vakuum-Pumpenanordnung,
Fig. 2
eine schematische, perspektivische Ansicht eines Pumpengehäuses,
Fig. 3
eine schematische, perspektivische Ansicht eines erfindungsgemäßen Halteelements, und
Fig. 4
eine schematische Draufsicht eines Teils einer Vakuum-Pumpenanordnung mit einem Halteelement nach dem Stand der Technik im Schadensfall.
Show it:
Fig. 1
a schematic sectional view of a vacuum pump assembly,
Fig. 2
a schematic, perspective view of a pump housing,
Fig. 3
a schematic, perspective view of a holding element according to the invention, and
Fig. 4
a schematic plan view of a portion of a vacuum pump assembly with a holding element according to the prior art in case of damage.

Eine Vakuum-Pumpenanordnung weist ein Pumpengehäuse 10 auf, in dem ein um eine Längsachse 12 rotierender Rotor 14 angeordnet ist. Zwischen den einzelnen Rotorblättern 14 sind mit dem Gehäuse 10 verbundene Statorschaufeln 16 angeordnet. Der Rotor 14 ist über ein Verbindungselement 18 mit einer Antriebswelle 20 fest verbunden. Entsprechend ist der Stator 16 über ein Verbindungselement 22 mit dem Gehäuse 10 fest verbunden.A vacuum pump arrangement has a pump housing 10, in which a rotor 14 rotating about a longitudinal axis 12 is arranged. Between the individual rotor blades 14 stator blades 16 connected to the housing 10 are arranged. The rotor 14 is fixedly connected via a connecting element 18 to a drive shaft 20. Accordingly, the stator 16 is fixedly connected to the housing 10 via a connecting element 22.

Zur Erzeugung eines Vakuums in einer Vakuumkammer 24 ist das Gehäuse 10 an einem Vakuumkammergehäuse 26 im Bereich einer Öffnung 28 befestigt.To generate a vacuum in a vacuum chamber 24, the housing 10 is fastened to a vacuum chamber housing 26 in the region of an opening 28.

Zur Befestigung weist das Gehäuse einen im dargestellten Ausführungsbeispiel kreisringförmigen Pumpenflansch 30 auf. Der Pumpenflansch 30 ist im Querschnitt L-förmig, so dass eine kreisringförmige Nut 32 ausgebildet ist.For attachment, the housing has an annular in the illustrated embodiment, pump flange 30. The pump flange 30 is L-shaped in cross section, so that an annular groove 32 is formed.

Mit Hilfe eines Halteelements 34 erfolgt eine Befestigung des Pumpengehäuses 10 über den Flansch 30 an dem Vakuumkammergehäuse 26. Hierzu weist im dargestellten Ausführungsbeispiel das Halteelement 34 einen insbesondere kreisringsegmentförmigen Ansatz 36 auf, der in die Nut 32 des Pumpenflansches 30 eingreift.With the aid of a holding element 34, the pump housing 10 is fastened via the flange 30 to the vacuum chamber housing 26. For this purpose, in the exemplary embodiment shown, the holding element 34 has an in particular annular segment-shaped projection 36, which engages in the groove 32 of the pump flange 30.

Zur Befestigung des Halteelements 34 an dem Vakuumkammergehäuse ist als Befestigungselement eine Schraube 38 vorgesehen. Hierbei weist das erfindungsgemäße Halteelement 34 (Fig. 2) ein Befestigungselement 38 sowie eine Verdrehsicherung 40 auf, wobei im dargestellten Ausführungsbeispiel sowohl das Befestigungselement 38 als auch die Verdrehsicherung 40 als Schraube ausgebildet sind. Die Verdrehsicherung 40 greift in eine Ausnehmung 42 ein, bei der es sich im dargestellten Ausführungsbeispiel um eine Gewindebohrung in dem Vakuumkammergehäuse 26 handelt.For fastening the holding element 34 to the vacuum chamber housing, a screw 38 is provided as a fastening element. In this case, the holding element 34 according to the invention (FIG. Fig. 2 ), a fastening element 38 and an anti-rotation 40, wherein in the illustrated embodiment, both the fastener 38 and the anti-rotation 40 as Screw are formed. The rotation lock 40 engages in a recess 42, which is a threaded bore in the vacuum chamber housing 26 in the illustrated embodiment.

Da die erfindungsgemäßen Halteelemente 34 neben einem Befestigungselement 38 eine Verdrehsicherung 40 aufweisen, ist beim Auftreten eines Schadensfalls gewährleistet, dass ein Verdrehen der Befestigungselemente 34 nicht auftritt. Trotz der im Schadensfall, wie beim Blockieren des Rotors 14, auftretenden hohen Momente, die von dem Rotor 14 über den Stator 16 in das Pumpengehäuse 10 übertragen werden, erfolgt hierbei kein Verdrehen der Halteelemente 34, wie es bei entsprechenden Einfach-Halteelementen 44 (Fig. 2) erfolgen kann.Since the retaining elements 34 according to the invention have, in addition to a fastening element 38, an anti-rotation lock 40, it is ensured when a damage occurs that twisting of the fastening elements 34 does not occur. Despite the high moments occurring in the event of damage, such as when blocking the rotor 14, which are transmitted from the rotor 14 via the stator 16 into the pump housing 10, no rotation of the holding elements 34 takes place, as is the case with corresponding single holding elements 44 (FIG. Fig. 2 ).

Bei der in Fig. 2 dargestellten perspektivischen Ansicht des Pumpengehäuses 10 handelt es sich um eine Ansicht auf die Flanschseite des Pumpengehäuses, wobei an dem kreisringförmigen Flansch 30 vier erfindungsgemäße Halteelemente 34 sowie vier Einzel-Halteelemente 44 angeordnet sind. Die erfindungsgemäßen Halteelemente 34 weisen jeweils einen kreisringförmigen Ansatz 36 auf, der in die Nut 32 des Pumpenflansches 30 (Fig. 1) eingreift. Ferner sind je Halteelement 34 zwei Schrauben 38, 40 vorgesehen, die als Befestigungselement bzw. Verdrehsicherung dienen.At the in Fig. 2 illustrated perspective view of the pump housing 10 is a view of the flange side of the pump housing, wherein on the annular flange 30 four inventive holding elements 34 and four individual holding elements 44 are arranged. The holding elements 34 according to the invention each have an annular projection 36 which in the groove 32 of the pump flange 30 (FIGS. Fig. 1 ) intervenes. Further, each support member 34, two screws 38, 40 are provided which serve as a fastener or rotation.

Die Schrauben 38, 40 sind durch in dem Halteelement 34 vorgesehene Durchgangsbohrungen 46 geführt.The screws 38, 40 are guided through through holes 46 provided in the holding element 34.

Zur Verdeutlichung des Standes der Technik ist in Fig. 4 ein Einzel-Halteelement 44 im Schadensfall dargestellt. Das Einzel-Halteelement 44 ist über eine Schraube 48 in dem Vakuumkammergehäuse 10 befestigt. Auf Grund der hohen auftretenden Momente im Schadensfall erfolgt ein Drehen des Pumpengehäuses 10 in Richtung eines Pfeils 50. Hierdurch erfolgt ein Verdrehen eines Einzel-Halteelements 44 im Gegen-Uhrzeigersinn. Dies kann zu Beschädigungen des Flansches 30 sowie des Vakuumkammergehäuses 26 führen.To clarify the state of the art is in Fig. 4 a single retaining element 44 shown in case of damage. The single retaining element 44 is fastened in the vacuum chamber housing 10 via a screw 48. Due to the high occurring moments in case of damage, the pump housing 10 is rotated in the direction of an arrow 50. This results in a rotation of a single retaining element 44 in the counterclockwise direction. This can lead to damage of the flange 30 and the vacuum chamber housing 26.

Claims (5)

  1. A vacuum pump system, especially a turbomolecular pump system, comprising:
    a rotor (14) and a stator (16), both arranged in a pump housing (10),
    a pump flange (30) connected to the pump housing (10), and
    at least one retaining element (34) connected to the pump housing (10) and to a vacuum chamber housing (26) for fastening the pump housing (10) to the vacuum chamber housing (26),
    the retaining element (34) being connected to an anti-twist means (40) cooperating with the vacuum chamber housing (26),
    wherein the pump flange (30) has an annular groove (32) in which engages a ring segment-shaped projection (36) of the retaining element (34),
    characterized in that
    the radius of the groove (32) substantially corresponds to the radius of the projection (36), so that in the event of a damage the pump housing (10) can rotate with respect to the retaining element (34) as soon as the forces occurring due to the moment prevailing between the pump flange (30) and the projection (36) of the retaining element (34) are greater that the friction forces in this region.
  2. The vacuum pump system of claim 1, wherein the anti-twist means (40) engages a recess (42) provided in the vacuum chamber housing (26).
  3. The vacuum pump system of claim 1 or 2, wherein the retaining element (34) comprises a fastening element (38) provided in addition to the anti-twist means (40).
  4. The vacuum pump system of one of claims 1-3, wherein the anti-twist means (40) is additionally designed as another fastening element.
  5. The vacuum pump system of one of claims 1-4, wherein at least three retaining elements (34) are provided along the circumference of the preferably annular pump flange (30).
EP06754953A 2005-05-07 2006-05-02 Vacuum pump arrangement Not-in-force EP1880111B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005020904A DE102005020904A1 (en) 2005-05-07 2005-05-07 Vacuum pump assembly
PCT/EP2006/061977 WO2006120132A1 (en) 2005-05-07 2006-05-02 Vacuum pump arrangement

Publications (2)

Publication Number Publication Date
EP1880111A1 EP1880111A1 (en) 2008-01-23
EP1880111B1 true EP1880111B1 (en) 2009-12-30

Family

ID=36593111

Family Applications (1)

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EP06754953A Not-in-force EP1880111B1 (en) 2005-05-07 2006-05-02 Vacuum pump arrangement

Country Status (9)

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US (1) US20090068011A1 (en)
EP (1) EP1880111B1 (en)
JP (1) JP2009500549A (en)
CN (1) CN100575711C (en)
AT (1) ATE453802T1 (en)
DE (2) DE102005020904A1 (en)
HK (1) HK1109440A1 (en)
TW (1) TWI390112B (en)
WO (1) WO2006120132A1 (en)

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Also Published As

Publication number Publication date
CN101171428A (en) 2008-04-30
CN100575711C (en) 2009-12-30
JP2009500549A (en) 2009-01-08
HK1109440A1 (en) 2008-06-06
EP1880111A1 (en) 2008-01-23
ATE453802T1 (en) 2010-01-15
DE502006005788D1 (en) 2010-02-11
US20090068011A1 (en) 2009-03-12
TW200643308A (en) 2006-12-16
TWI390112B (en) 2013-03-21
WO2006120132A1 (en) 2006-11-16
DE102005020904A1 (en) 2006-11-09

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