EP2913534B1 - Vacuum pump assembly - Google Patents

Vacuum pump assembly Download PDF

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Publication number
EP2913534B1
EP2913534B1 EP15152122.6A EP15152122A EP2913534B1 EP 2913534 B1 EP2913534 B1 EP 2913534B1 EP 15152122 A EP15152122 A EP 15152122A EP 2913534 B1 EP2913534 B1 EP 2913534B1
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EP
European Patent Office
Prior art keywords
vacuum pump
flange
connection element
pump arrangement
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15152122.6A
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German (de)
French (fr)
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EP2913534A2 (en
EP2913534A3 (en
Inventor
Robert Watz
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2913534A2 publication Critical patent/EP2913534A2/en
Publication of EP2913534A3 publication Critical patent/EP2913534A3/en
Application granted granted Critical
Publication of EP2913534B1 publication Critical patent/EP2913534B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a vacuum pump arrangement, in particular a turbo-molecular pump arrangement, with a vacuum pump, in particular a turbo-molecular pump, comprising a rotor, a stator and a housing, with at least one connecting element via which the vacuum pump can be connected to a vacuum chamber, the connecting element being connected to a pump flange assigned to the pump housing can be brought into engagement and can be fixed on a mating flange assigned to the vacuum chamber, and with at least one separate intermediate element, in particular designed as an insert ring.
  • Vacuum pumps such as turbo-molecular pumps can be connected to the vacuum chamber via connecting elements such as, in particular, so-called claws, in order to generate a vacuum in a vacuum chamber or in a recipient.
  • Claws of the type in question are basically known clamping elements with which parts can be fastened to one another.
  • a respective claw can be fastened to the vacuum chamber housing in particular by means of a clamping screw.
  • a reliable attachment of the vacuum pump to the vacuum chamber housing must be ensured in order to exclude a risk to the operating personnel with a high degree of security.
  • relatively high moments suddenly occur, which are transferred from the rotor via the stator to the pump housing and from there via the claws to the vacuum chamber housing become.
  • the pump housing can twist in relation to the vacuum chamber housing, which can damage the vacuum chamber housing in the area of the fastening of the claws.
  • EP 2 133 581 A2 The state of the art is also given on EP 2 290 242 A2 as well as on EP 2 290 242 A2 referenced.
  • the invention is therefore based on the object of specifying an improved vacuum pump arrangement of the type mentioned, which ensures reliable protection against twisting of the connecting elements with a structurally simplified and correspondingly more cost-effective connection between the vacuum pump and the vacuum chamber and correspondingly simplified assembly.
  • the vacuum pump arrangement according to the invention is characterized in that the connecting element is provided with at least one tooth which, when the connecting element is fixed to the mating flange and when the intermediate element is arranged between the mating flange and the connecting element, is pressed into the intermediate element to secure it against rotation or into an in engages the intermediate element provided receiving recess.
  • the connecting element is preferably provided with at least two teeth that are spaced apart from one another. Alternatively, at least one rib-like, elongated tooth can be provided.
  • the assembly is also correspondingly simplified. Since the tooth or teeth are also pressed directly into the material of the intermediate element or engage in the receiving recess provided in this when a respective connecting element is fixed to the counterflange, the connecting elements are prevented from rotating under load relative to the counterflange.
  • the connecting element is provided with at least one tooth which is elongated in the manner of a rib.
  • the connecting element can only have precisely one tooth, which is elongated in the manner of a rib, in order to secure it against rotation.
  • the connecting element is preferably provided with at least one through opening for a fixing element, in particular a tensioning screw, by means of which it can be fixed on the mating flange. If a clamping screw is provided as the fixing element, the mating flange is expediently provided with a threaded hole into which the fixing screw engages.
  • a respective connecting element is provided with at least one tooth to secure against rotation, which is pressed into the intermediate element or engages in a receiving recess provided in this, a single fixing element or a single screw is sufficient for fastening the connecting element to the counter flange, whereby in particular, assembly is also facilitated.
  • the mating flange is made of aluminum.
  • the connecting element can in particular be designed as a clamping element or claw or comprise a claw-like base body.
  • the pump flange preferably has an in particular annular groove into which a shoulder of the connecting element engages.
  • Fig. 1 shows a perspective view of a conventional claw-like connecting element 10.
  • a connecting element 10 is used to connect a vacuum pump comprising a rotor and a stator to a vacuum chamber or a recipient.
  • the connecting element 10 is provided with a shoulder 12 which engages in a circular groove of a pump flange.
  • the connecting element 10 is provided with a through opening 14 for a fixing screw 16, by means of which it can be fixed to a mating flange of the vacuum chamber.
  • the vacuum pump is attached to the vacuum chamber via several such connecting elements 10. With such connecting elements, however, there is now the risk that they will rotate under load, as explained at the beginning.
  • Fig. 2 shows a schematic representation of an exemplary embodiment of a connecting element according to the invention of a vacuum pump arrangement according to the invention, which can in particular be a turbo-molecular pump arrangement.
  • the vacuum pump arrangement in question comprises a vacuum pump having a rotor, a stator and a housing, in particular a turbo molecular pump, which can be connected to a vacuum chamber via at least one such connecting element 18.
  • the connecting element 18 can be brought into engagement with a pump flange assigned to the pump housing and on a mating flange 20 assigned to the vacuum chamber (see also FIG Fig. 4 ) fixable.
  • a direct fixation of the connecting element 18 on the mating flange 20 without an intermediate element is not part of the invention.
  • the connecting element 18 is provided with at least one tooth 22 which, when the connecting element 18 is fixed to the mating flange 20, is pressed into the mating flange 20 to secure it against rotation or engages in a receiving recess provided in the mating flange 20.
  • the receiving recess can be omitted.
  • the at least one tooth 22 of the connecting element 18 is pressed into the intermediate element or engages in a receiving recess provided in the intermediate element. If such an interaction of the connecting element 18 with the counter flange 20 is mentioned below, then this does not belong to the invention.
  • the invention includes a corresponding interaction of the connecting element 18 with the intermediate element.
  • the connecting element 18 can in particular be provided with at least two spaced apart teeth 22, the connecting element according to the in FIG Fig. 2 illustrated embodiment has exactly two such teeth 22. How with the Fig. 2 can be seen, the Teeth 22 have a pointed shape, with which they can be more easily pressed into the mating flange 20.
  • the connecting element 18 can be provided with a through opening 26 for a fixing element 28 such as, in particular, a tensioning screw or the like, by means of which it can be fixed to the mating flange 20.
  • a fixing element 28 such as, in particular, a tensioning screw or the like
  • the counter flange 20 can be provided with a threaded hole 30 (cf. Fig. 4 ) into which the fixing screw engages.
  • the connecting element 18 can be fixed to the mating flange 20 via just one fixing element 28 or just one clamping screw, whereby the assembly is considerably simplified. Rotation of the connecting element 18 under load is prevented by the teeth 22 engaging with the mating flange 20.
  • the connecting element 18 can in particular comprise a claw-like base body 32 and be provided with a shoulder 34 which engages in a particularly circular groove of a pump flange.
  • Fig. 3 shows a schematic representation of a further exemplary embodiment of a connecting element 18 according to the invention, which is provided with a tooth 22 which is elongated in a rib-like manner transversely to the longitudinal direction of the through opening 26.
  • This rib-like elongated tooth 22 has a cross-section that tapers towards the counter flange 20, which results in a narrow edge facing the counter flange 20, which makes it easier to penetrate the counter flange 20. Incidentally, this can be done in the Fig. 3
  • the connecting element 18 shown can be made at least essentially the same as that in FIG Fig. 2 shown connecting element.
  • the teeth 22 of a respective connecting element 18 can also engage in a receiving recess provided in the mating flange 20 to secure it against rotation.
  • the teeth no longer have to be pressed into this counter flange 20 and the teeth no longer need to be provided with a point or a narrow edge. Securing against rotation is then already ensured by engaging the receiving recess.
  • Fig. 4 shows a schematic partial representation of the counter flange 20 of an exemplary embodiment of a vacuum pump arrangement not belonging to the invention due to the lack of an intermediate element.
  • the mating flange 20 has an elongated recess 24 which is an impression of an indented long tooth 22 according to FIG Fig. 3 represents, which was thus created by pressing in a rib-like tooth 22 of a clamping claw 18 according to the invention.
  • the mating flange 20 can be provided with a receiving recess produced for this purpose for engagement of the at least one tooth 22.
  • this mating flange 20 can in particular consist of aluminum, whereby the penetration of the teeth 22 is facilitated.
  • Other materials for the counter flange 20 are nevertheless possible.
  • an opening 36 of the vacuum chamber can also be seen, in the area of which the vacuum pump is connected to the vacuum chamber.
  • FIG. 5 A vacuum pump 38 and a recipient 40, which are connected to one another by means of a plurality of clamping claws 18 according to the invention, form a vacuum pump arrangement that does not belong to the invention for lack of an intermediate element.
  • FIG. 6 In the embodiment not belonging to the invention due to the lack of an intermediate element Fig. 6 several clamping claws 18 each engage with their tooth 22 in a receiving recess 44.
  • the depressions 44 are each designed as a groove or slot-like recess in the mating flange 20, which is limited in the circumferential direction. This creates a radial mount. In addition, twisting of the claws 18 is prevented.
  • a receiving recess 44 for all clamping claws 18 is formed in the form of a circumferential groove in the mating flange 20. This configuration also creates a radial mount.
  • Fig. 8 shows an alternative embodiment according to the invention in which the mating flange comprises a separate intermediate element 42 in the form of an insert ring which can be inserted into the flange of the vacuum chamber (not shown) or into the flange assigned to the vacuum chamber.
  • the vacuum chamber or its flange when using such an intermediate element, does not need to be adapted and does not need to interact directly with the tooth of the connecting element. Instead, the tooth is pressed into the intermediate element or - as in Fig. 8 shown - the tooth 22 engages in a receiving recess 44 formed in the intermediate element 42.
  • the intermediate element 42 can be regarded as part of the counter flange 20. Such an arrangement is then not according to the invention, because the counter flange does not belong to a vacuum pump arrangement according to the invention.
  • the fixing of the connecting elements 18 to the vacuum chamber or to a Another flange section (not shown) assigned to the vacuum chamber, on which the intermediate element 42 rests, can in turn take place by screwing.
  • the fixing screws then extend through the through openings 26 in the claws 18 and through openings 46 formed in the intermediate element 42.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Mutual Connection Of Rods And Tubes (AREA)

Description

Die vorliegende Erfindung betrifft eine Vakuumpumpenanordnung, insbesondere Turbomolekularpumpenanordnung, mit einer einen Rotor, einen Stator sowie ein Gehäuse umfassenden Vakuumpumpe, insbesondere Turbomolekularpumpe, mit wenigstens einem Verbindungselement, über welches die Vakuumpumpe mit einer Vakuumkammer verbindbar ist, wobei das Verbindungselement mit einem dem Pumpengehäuse zugeordneten Pumpenflansch in Eingriff bringbar ist und an einem der Vakuumkammer zugeordneten Gegenflansch fixierbar ist, und mit wenigstens einem separaten, insbesondere als Einlagering ausgebildeten, Zwischenelement.The present invention relates to a vacuum pump arrangement, in particular a turbo-molecular pump arrangement, with a vacuum pump, in particular a turbo-molecular pump, comprising a rotor, a stator and a housing, with at least one connecting element via which the vacuum pump can be connected to a vacuum chamber, the connecting element being connected to a pump flange assigned to the pump housing can be brought into engagement and can be fixed on a mating flange assigned to the vacuum chamber, and with at least one separate intermediate element, in particular designed as an insert ring.

Eine derartige Anordnung ist beispielsweise aus US 2005/0029417 A1 bekannt.Such an arrangement is, for example, off US 2005/0029417 A1 known.

Vakuumpumpen wie beispielsweise Turbomolekularpumpen können zur Erzeugung eines Vakuums in einer Vakuumkammer oder in einem Rezipienten über Verbindungselemente wie insbesondere sogenannte Pratzen mit der Vakuumkammer verbunden sein. Pratzen der hier in Rede stehenden Art sind grundsätzlich bekannte Spannelemente, mit denen Teile aneinander befestigt werden können.Vacuum pumps such as turbo-molecular pumps can be connected to the vacuum chamber via connecting elements such as, in particular, so-called claws, in order to generate a vacuum in a vacuum chamber or in a recipient. Claws of the type in question are basically known clamping elements with which parts can be fastened to one another.

Die Befestigung einer jeweiligen Pratze an dem Vakuumkammergehäuse kann insbesondere über eine Spannschraube erfolgen. Angesichts des relativ hohen Gewichts der Vakuumpumpe sowie der hohen Rotorgeschwindigkeiten muss eine zuverlässige Befestigung der Vakuumpumpe an dem Vakuumkammergehäuse gewährleistet sein, um mit hoher Sicherheit eine Gefährdung des Bedienpersonals auszuschließen. Insbesondere im Fall eines blockierenden Rotors treten schlagartig relativ hohe Momente auf, die vom Rotor über den Stator auf das Pumpengehäuse und von diesem über die Pratzen auf das Vakuumkammergehäuse übertragen werden. Aufgrund der hohen Momente kann es dabei zu einem Verdrehen des Pumpengehäuses gegenüber dem Vakuumkammergehäuse kommen, was eine Beschädigung des Vakuumkammergehäuses im Bereich der Befestigung der Pratzen mit sich bringen kann. Zudem besteht bei der Verwendung solcher Pratzen die Gefahr, dass sich diese im Schadensfall verdrehen und der Pumpenflansch durch die dabei auftretenden Einkerbungen derart beschädigt wird, dass sich die Vakuumpumpe losreißen kann.A respective claw can be fastened to the vacuum chamber housing in particular by means of a clamping screw. In view of the relatively high weight of the vacuum pump and the high rotor speeds, a reliable attachment of the vacuum pump to the vacuum chamber housing must be ensured in order to exclude a risk to the operating personnel with a high degree of security. Particularly in the case of a blocking rotor, relatively high moments suddenly occur, which are transferred from the rotor via the stator to the pump housing and from there via the claws to the vacuum chamber housing become. Due to the high moments, the pump housing can twist in relation to the vacuum chamber housing, which can damage the vacuum chamber housing in the area of the fastening of the claws. In addition, when using such claws, there is a risk that they will twist in the event of damage and the pump flange will be damaged by the notches that occur in such a way that the vacuum pump can tear itself loose.

Bei einer aus der DE 10 2005 020 904 A1 bekannten Vakuumpumpenanordnung der eingangs genannten Art sind die Verbindungselemente zu deren Sicherung gegen ein Verdrehen jeweils über zwei in Umfangsrichtung des Pumpenflansches einen Abstand voneinander aufweisende Schrauben am Vakuumkammergehäuse befestigt. Eine solche Vakuumpumpenanordnung ist nun aber relativ aufwändig und entsprechend kostspielig. Zudem ergibt sich ein erhöhter Montageaufwand.With one of the DE 10 2005 020 904 A1 known vacuum pump arrangement of the type mentioned, the connecting elements to secure them against rotation are each fastened to the vacuum chamber housing by means of two screws spaced from one another in the circumferential direction of the pump flange. Such a vacuum pump arrangement is now relatively complex and correspondingly expensive. In addition, there is an increased installation effort.

Zum Stand der Technik wird außerdem auf EP 2 133 581 A2 sowie auf EP 2 290 242 A2 verwiesen.The state of the art is also given on EP 2 133 581 A2 as well as on EP 2 290 242 A2 referenced.

Der Erfindung liegt somit die Aufgabe zugrunde, eine verbesserte Vakuumpumpenanordnung der eingangs genannten Art anzugeben, die bei konstruktiv vereinfachter und entsprechend kostengünstigerer Verbindung zwischen der Vakuumpumpe und der Vakuumkammer sowie entsprechend vereinfachter Montage eine zuverlässige Sicherung gegen ein Verdrehen der Verbindungselemente gewährleisten.The invention is therefore based on the object of specifying an improved vacuum pump arrangement of the type mentioned, which ensures reliable protection against twisting of the connecting elements with a structurally simplified and correspondingly more cost-effective connection between the vacuum pump and the vacuum chamber and correspondingly simplified assembly.

Diese Aufgabe wird erfindungsgemäß gelöst durch eine Vakuumpumpenanordnung mit den Merkmalen des Anspruchs 1. Bevorzugte Ausführungsformen der erfindungsgemäßen Vakuumpumpenanordnung sind in den Unteransprüchen angegeben.This object is achieved according to the invention by a vacuum pump arrangement having the features of claim 1. Preferred embodiments of the vacuum pump arrangement according to the invention are specified in the subclaims.

Die erfindungsgemäße Vakuumpumpenanordnung zeichnet sich dadurch aus, dass das Verbindungselement mit wenigstens einem Zahn versehen ist, der bei an dem Gegenflansch fixiertem Verbindungselement und bei zwischen dem Gegenflansch und dem Verbindungselement angeordnetem Zwischenelement zu dessen Sicherung gegen ein Verdrehen in das Zwischenelement eingedrückt ist oder in eine in dem Zwischenelement vorgesehene Aufnahmevertiefung eingreift. Dabei ist das Verbindungselement bevorzugt mit wenigstens zwei einen Abstand voneinander aufweisenden Zähnen versehen. Alternativ kann zumindest ein rippenartig ausgebildeter, langgestreckter Zahn vorgesehen sein.The vacuum pump arrangement according to the invention is characterized in that the connecting element is provided with at least one tooth which, when the connecting element is fixed to the mating flange and when the intermediate element is arranged between the mating flange and the connecting element, is pressed into the intermediate element to secure it against rotation or into an in engages the intermediate element provided receiving recess. The connecting element is preferably provided with at least two teeth that are spaced apart from one another. Alternatively, at least one rib-like, elongated tooth can be provided.

Aufgrund dieser Ausbildung ergibt sich nicht nur insbesondere hinsichtlich der Verbindung zwischen der Vakuumpumpe und der Vakuumkammer ein konstruktiv einfacherer Aufbau, es wird auch die Montage entsprechend vereinfacht. Indem mit dem Fixieren eines jeweiligen Verbindungselements an dem Gegenflansch unmittelbar auch der Zahn oder die Zähne in das Material des Zwischenelementes eingedrückt werden bzw. in die in diesem vorgesehene Aufnahmevertiefung eingreifen, wird gleichzeitig verhindert, dass sich die Verbindungselemente unter Belastung relativ zum Gegenflansch drehen.Because of this design, not only does the connection between the vacuum pump and the vacuum chamber result in a structurally simpler structure, the assembly is also correspondingly simplified. Since the tooth or teeth are also pressed directly into the material of the intermediate element or engage in the receiving recess provided in this when a respective connecting element is fixed to the counterflange, the connecting elements are prevented from rotating under load relative to the counterflange.

Gemäß einer vorteilhaften praktischen Ausführungsform der erfindungsgemäßen Vakuumpumpenanordnung ist das Verbindungselement mit zumindest einem rippenartig verlängerten Zahn versehen. Dabei kann das Verbindungselement zur Sicherung gegen ein Verdrehen nur genau einen solchen rippenartig verlängerten Zahn aufweisen.According to an advantageous practical embodiment of the vacuum pump arrangement according to the invention, the connecting element is provided with at least one tooth which is elongated in the manner of a rib. In this case, the connecting element can only have precisely one tooth, which is elongated in the manner of a rib, in order to secure it against rotation.

Bevorzugt ist das Verbindungselement mit zumindest einer Durchgangsöffnung für ein Fixierelement, insbesondere eine Spannschraube, versehen, über das es an dem Gegenflansch fixierbar ist. Ist als Fixierelement eine Spannschraube vorgesehen, so ist der Gegenflansch zweckmäßigerweise mit einer Gewindebohrung versehen, in die die Fixierschraube eingreift.The connecting element is preferably provided with at least one through opening for a fixing element, in particular a tensioning screw, by means of which it can be fixed on the mating flange. If a clamping screw is provided as the fixing element, the mating flange is expediently provided with a threaded hole into which the fixing screw engages.

Nachdem ein jeweiliges Verbindungselement zur Sicherung gegen ein Verdrehen mit wenigstens einem Zahn versehen ist, der in das Zwischenelement eingedrückt wird bzw. in eine in diesem vorgesehene Aufnahmevertiefung eingreift, genügt zur Befestigung des Verbindungselements an dem Gegenflansch ein einziges Fixierelement bzw. eine einzige Schraube, womit insbesondere auch die Montage erleichtert wird.After a respective connecting element is provided with at least one tooth to secure against rotation, which is pressed into the intermediate element or engages in a receiving recess provided in this, a single fixing element or a single screw is sufficient for fastening the connecting element to the counter flange, whereby in particular, assembly is also facilitated.

Gemäß einer mangels Zwischenelement nicht zur Erfindung gehörenden Ausführungsform der Vakuumpumpenanordnung, bei welcher der wenigstens eine Zahn des Verbindungselementes in den Gegenflansch eingedrückt wird, besteht der Gegenflansch aus Aluminium. Grundsätzlich ist es alternativ auch möglich, den zumindest einen Zahn des Verbindungselements in einen aus einem anderen Material bestehenden Gegenflansch einzudrücken.According to an embodiment of the vacuum pump arrangement not belonging to the invention due to the lack of an intermediate element, in which the at least one tooth of the connecting element is pressed into the mating flange, the mating flange is made of aluminum. In principle, it is alternatively also possible to press the at least one tooth of the connecting element into a mating flange made of a different material.

Das Verbindungselement kann insbesondere als Spannelement oder Pratze ausgebildet sein oder einen pratzenartigen Grundkörper umfassen.The connecting element can in particular be designed as a clamping element or claw or comprise a claw-like base body.

Der Pumpenflansch weist bevorzugt eine insbesondere kreisringförmige Nut auf, in die ein Ansatz des Verbindungselements eingreift.The pump flange preferably has an in particular annular groove into which a shoulder of the connecting element engages.

Die Erfindung wird im Folgenden anhand eines Ausführungsbeispiels unter Bezugnahme auf die Zeichnung näher beschrieben; in dieser zeigen:

Fig. 1
eine perspektivische Darstellung eines herkömmlichen pratzenartigen Verbindungselements,
Fig. 2
eine schematische Darstellung einer beispielhaften Ausführungsform eines erfindungsgemäßen Verbindungselements,
Fig. 3
eine schematische Darstellung einer weiteren beispielhaften Ausführungsform eines erfindungsgemäßen Verbindungselements,
Fig. 4
eine schematische Teildarstellung des Gegenflansches einer nicht zur Erfindung gehörenden Vakuumpumpenanordnung,
Fig. 5
eine schematische Ansicht einer nicht zur Erfindung gehörenden Anordnung aus Vakuumpumpe und Rezipient, die durch Pratzen miteinander verbunden sind,
Fig. 6 und 7
weitere mangels Zwischenelement nicht zur Erfindung gehörende Ausführungsformen, und
Fig. 8
eine erfindungsgemäße Ausführungsform.
The invention is described in more detail below using an exemplary embodiment with reference to the drawing; in this show:
Fig. 1
a perspective view of a conventional bracket-like connecting element,
Fig. 2
a schematic representation of an exemplary embodiment of a connecting element according to the invention,
Fig. 3
a schematic representation of a further exemplary embodiment of a connecting element according to the invention,
Fig. 4
a schematic partial representation of the mating flange of a vacuum pump arrangement not belonging to the invention,
Fig. 5
a schematic view of an arrangement not belonging to the invention comprising a vacuum pump and recipient, which are connected to one another by claws,
Figures 6 and 7
further embodiments not belonging to the invention due to the lack of an intermediate element, and
Fig. 8
an embodiment of the invention.

Fig. 1 zeigt in perspektivischer Darstellung ein herkömmliches pratzenartiges Verbindungselement 10. Ein solches Verbindungselement 10 dient der Verbindung einer einen Rotor sowie einen Stator umfassenden Vakuumpumpe mit einer Vakuumkammer bzw. einem Rezipienten. Fig. 1 shows a perspective view of a conventional claw-like connecting element 10. Such a connecting element 10 is used to connect a vacuum pump comprising a rotor and a stator to a vacuum chamber or a recipient.

Das Verbindungselement 10 ist mit einem Ansatz 12 versehen, der in eine kreisförmige Nut eines Pumpenflansches eingreift. Zudem ist das Verbindungselement 10 mit einer Durchgangsöffnung 14 für eine Fixierschraube 16 versehen, über die es an einem Gegenflansch der Vakuumkammer fixierbar ist.The connecting element 10 is provided with a shoulder 12 which engages in a circular groove of a pump flange. In addition, the connecting element 10 is provided with a through opening 14 for a fixing screw 16, by means of which it can be fixed to a mating flange of the vacuum chamber.

Die Vakuumpumpe ist über mehrere solche Verbindungselemente 10 an der Vakuumkammer befestigt. Mit solchen Verbindungselementen besteht nun aber die Gefahr, dass diese sich unter Belastung drehen, wie eingangs erläutert.The vacuum pump is attached to the vacuum chamber via several such connecting elements 10. With such connecting elements, however, there is now the risk that they will rotate under load, as explained at the beginning.

Fig. 2 zeigt in schematischer Darstellung eine beispielhafte Ausführungsform eines erfindungsgemäßen Verbindungselements einer erfindungsgemäßen Vakuumpumpenanordnung, bei der es sich insbesondere um eine Turbomolekularpumpenanordnung handeln kann. Fig. 2 shows a schematic representation of an exemplary embodiment of a connecting element according to the invention of a vacuum pump arrangement according to the invention, which can in particular be a turbo-molecular pump arrangement.

Die betreffende Vakuumpumpenanordnung umfasst eine einen Rotor, einen Stator sowie ein Gehäuse aufweisende Vakuumpumpe, insbesondere Turbomolekularpumpe, die über wenigstens ein solches Verbindungselement 18 mit einer Vakuumkammer verbindbar ist. Dabei ist das Verbindungselement 18 mit einem dem Pumpengehäuse zugeordneten Pumpenflansch in Eingriff bringbar und an einem der Vakuumkammer zugeordneten Gegenflansch 20 (vgl. auch Fig. 4) fixierbar. Eine unmittelbare Fixierung des Verbindungselementes 18 am Gegenflansch 20 ohne Zwischenelement gehört nicht zur Erfindung.The vacuum pump arrangement in question comprises a vacuum pump having a rotor, a stator and a housing, in particular a turbo molecular pump, which can be connected to a vacuum chamber via at least one such connecting element 18. The connecting element 18 can be brought into engagement with a pump flange assigned to the pump housing and on a mating flange 20 assigned to the vacuum chamber (see also FIG Fig. 4 ) fixable. A direct fixation of the connecting element 18 on the mating flange 20 without an intermediate element is not part of the invention.

Allgemein ist das Verbindungselement 18 mit wenigstens einem Zahn 22 versehen, der bei an dem Gegenflansch 20 fixiertem Verbindungselement 18 zu dessen Sicherung gegen ein Verdrehen in den Gegenflansch 20 eingedrückt ist oder in eine in dem Gegenflansch 20 vorgesehene Aufnahmevertiefung eingreift. Im ersteren Fall kann die Aufnahmevertiefung entfallen. Erfindungsgemäß ist der wenigstens eine Zahn 22 des Verbindungselementes 18 in das Zwischenelement eingedrückt oder greift in eine in dem Zwischenelement vorgesehene Aufnahmevertiefung ein. Wenn nachfolgend von einem solchen Zusammenwirken des Verbindungselementes 18 mit dem Gegenflansch 20 die Rede ist, dann gehört dies nicht zur Erfindung. Zur Erfindung gehört jeweils ein entsprechendes Zusammenwirken des Verbindungselementes 18 mit dem Zwischenelement.In general, the connecting element 18 is provided with at least one tooth 22 which, when the connecting element 18 is fixed to the mating flange 20, is pressed into the mating flange 20 to secure it against rotation or engages in a receiving recess provided in the mating flange 20. In the first case, the receiving recess can be omitted. According to the invention, the at least one tooth 22 of the connecting element 18 is pressed into the intermediate element or engages in a receiving recess provided in the intermediate element. If such an interaction of the connecting element 18 with the counter flange 20 is mentioned below, then this does not belong to the invention. The invention includes a corresponding interaction of the connecting element 18 with the intermediate element.

Das Verbindungselement 18 kann insbesondere mit wenigstens zwei einen Abstand voneinander aufweisenden Zähnen 22 versehen sein, wobei das Verbindungselement gemäß dem in der Fig. 2 dargestellten Ausführungsbeispiel genau zwei solche Zähne 22 aufweist. Wie anhand der Fig. 2 zu erkennen ist, können die Zähne 22 eine zugespitzte Form aufweisen, womit sie leichter in den Gegenflansch 20 eingedrückt werden können.The connecting element 18 can in particular be provided with at least two spaced apart teeth 22, the connecting element according to the in FIG Fig. 2 illustrated embodiment has exactly two such teeth 22. How with the Fig. 2 can be seen, the Teeth 22 have a pointed shape, with which they can be more easily pressed into the mating flange 20.

Das Verbindungselement 18 kann mit einer Durchgangsöffnung 26 für ein Fixierelement 28 wie insbesondere eine Spannschraube oder dergleichen versehen sein, über das es an dem Gegenflansch 20 fixierbar ist.The connecting element 18 can be provided with a through opening 26 for a fixing element 28 such as, in particular, a tensioning screw or the like, by means of which it can be fixed to the mating flange 20.

Ist als Fixierelement 28 eine solche Spannschraube vorgesehen, so kann der Gegenflansch 20 mit einer Gewindebohrung 30 (vgl. Fig. 4) versehen sein, in die die Fixierschraube eingreift.If such a clamping screw is provided as the fixing element 28, the counter flange 20 can be provided with a threaded hole 30 (cf. Fig. 4 ) into which the fixing screw engages.

Wie anhand der Fig. 2 bis 4 zu erkennen ist, ist das Verbindungselement 18 über nur genau ein Fixierelement 28 bzw. nur genau eine Spannschraube an dem Gegenflansch 20 fixierbar, wodurch die Montage wesentlich vereinfacht wird. Ein Verdrehen des Verbindungselements 18 unter Belastung wird durch die mit dem Gegenflansch 20 in Eingriff tretenden Zähne 22 verhindert.How with the Figs. 2 to 4 As can be seen, the connecting element 18 can be fixed to the mating flange 20 via just one fixing element 28 or just one clamping screw, whereby the assembly is considerably simplified. Rotation of the connecting element 18 under load is prevented by the teeth 22 engaging with the mating flange 20.

Das Verbindungselement 18 kann insbesondere einen pratzenartigen Grundkörper 32 umfassen und mit einem Ansatz 34 versehen sein, der in eine insbesondere kreisförmige Nut eines Pumpenflansches eingreift.The connecting element 18 can in particular comprise a claw-like base body 32 and be provided with a shoulder 34 which engages in a particularly circular groove of a pump flange.

Fig. 3 zeigt in schematischer Darstellung eine weitere beispielhafte Ausführungsform eines erfindungsgemäßen Verbindungselements 18, das mit einem quer zur Längsrichtung der Durchgangsöffnung 26 rippenartig verlängerten Zahn 22 versehen ist. Dabei besitzt dieser rippenartig verlängerte Zahn 22 einen zum Gegenflansch 20 hin sich verjüngenden Querschnitt, womit sich eine dem Gegenflansch 20 zugewandte schmale Kante ergibt, die das Eindringen in den Gegenflansch 20 erleichtert. Im Übrigen kann dieses in der Fig. 3 dargestellte Verbindungselement 18 zumindest im Wesentlichen wieder gleich ausgeführt sein wie das in der Fig. 2 dargestellte Verbindungselement. Fig. 3 shows a schematic representation of a further exemplary embodiment of a connecting element 18 according to the invention, which is provided with a tooth 22 which is elongated in a rib-like manner transversely to the longitudinal direction of the through opening 26. This rib-like elongated tooth 22 has a cross-section that tapers towards the counter flange 20, which results in a narrow edge facing the counter flange 20, which makes it easier to penetrate the counter flange 20. Incidentally, this can be done in the Fig. 3 The connecting element 18 shown can be made at least essentially the same as that in FIG Fig. 2 shown connecting element.

Wie bereits erwähnt, können die Zähne 22 eines jeweiligen Verbindungselements 18 zu dessen Sicherung gegen ein Verdrehen auch in eine in dem Gegenflansch 20 vorgesehene Aufnahmevertiefung eingreifen. In diesem Fall müssen die Zähne nicht mehr in diesen Gegenflansch 20 eingedrückt werden und brauchen die Zähne nicht mehr mit einer Spitze oder schmalen Kante versehen zu sein. Die Sicherung gegen Verdrehen ist dann bereits durch den Eingriff in die Aufnahmevertiefung gewährleistet.As already mentioned, the teeth 22 of a respective connecting element 18 can also engage in a receiving recess provided in the mating flange 20 to secure it against rotation. In this case, the teeth no longer have to be pressed into this counter flange 20 and the teeth no longer need to be provided with a point or a narrow edge. Securing against rotation is then already ensured by engaging the receiving recess.

Fig. 4 zeigt in schematischer Teildarstellung den Gegenflansch 20 einer beispielhaften Ausführungsform einer mangels Zwischenelement nicht zur Erfindung gehörenden Vakuumpumpenanordnung. Dabei weist der Gegenflansch 20 eine langgestreckte Vertiefung 24 auf, die einen Abdruck eines eingedrückten langen Zahns 22 gemäß Fig. 3 darstellt, die also durch Eindrücken eines rippenartigen Zahns 22 einer erfindungsgemäßen Spannpratze 18 entstanden ist. Fig. 4 shows a schematic partial representation of the counter flange 20 of an exemplary embodiment of a vacuum pump arrangement not belonging to the invention due to the lack of an intermediate element. The mating flange 20 has an elongated recess 24 which is an impression of an indented long tooth 22 according to FIG Fig. 3 represents, which was thus created by pressing in a rib-like tooth 22 of a clamping claw 18 according to the invention.

Alternativ kann der Gegenflansch 20 mit einer zu diesem Zweck hergestellten Aufnahmevertiefung für einen Eingriff des wenigstens einen Zahns 22 versehen sein.Alternatively, the mating flange 20 can be provided with a receiving recess produced for this purpose for engagement of the at least one tooth 22.

Insbesondere dann, wenn die Zähne 22 in den Gegenflansch 20 eingedrückt werden, kann dieser Gegenflansch 20 insbesondere aus Aluminium bestehen, womit das Eindringen der Zähne 22 erleichtert wird. Andere Materialien für den Gegenflansch 20 sind gleichwohl möglich.In particular when the teeth 22 are pressed into the mating flange 20, this mating flange 20 can in particular consist of aluminum, whereby the penetration of the teeth 22 is facilitated. Other materials for the counter flange 20 are nevertheless possible.

In der Fig. 4 ist zudem eine Öffnung 36 der Vakuumkammer zu erkennen, in deren Bereich die Vakuumpumpe an die Vakuumkammer angeschlossen wird.In the Fig. 4 an opening 36 of the vacuum chamber can also be seen, in the area of which the vacuum pump is connected to the vacuum chamber.

In Fig. 5 bilden eine Vakuumpumpe 38 und ein Rezipient 40, die mittels mehrerer erfindungsgemäßer Spannpratzen 18 miteinander verbunden sind, eine mangels Zwischenelement nicht zur Erfindung gehörende Vakuumpumpenanordnung.In Fig. 5 A vacuum pump 38 and a recipient 40, which are connected to one another by means of a plurality of clamping claws 18 according to the invention, form a vacuum pump arrangement that does not belong to the invention for lack of an intermediate element.

In dem mangels Zwischenelement nicht zur Erfindung gehörenden Ausführungsbeispiel der Fig. 6 greifen mehrere Spannpratzen 18 jeweils mit ihrem Zahn 22 in eine Aufnahmevertiefung 44 ein. Die Vertiefungen 44 sind jeweils als in Umfangsrichtung begrenzte, nut- oder schlitzartige Aussparung im Gegenflansch 20 ausgebildet. Hierdurch wird eine radiale Halterung geschaffen. Außerdem wird ein Verdrehen der Pratzen 18 verhindert.In the embodiment not belonging to the invention due to the lack of an intermediate element Fig. 6 several clamping claws 18 each engage with their tooth 22 in a receiving recess 44. The depressions 44 are each designed as a groove or slot-like recess in the mating flange 20, which is limited in the circumferential direction. This creates a radial mount. In addition, twisting of the claws 18 is prevented.

Hiervon unterscheidet sich die mangels Zwischenelement nicht zur Erfindung gehörende Ausführungsform der Fig. 7 dadurch, dass eine Aufnahmevertiefung 44 für alle Spannpratzen 18 in Form einer umlaufenden Nut im Gegenflansch 20 ausgebildet ist. Auch durch diese Ausgestaltung wird eine radiale Halterung geschaffen.This differs from the embodiment of FIG Fig. 7 in that a receiving recess 44 for all clamping claws 18 is formed in the form of a circumferential groove in the mating flange 20. This configuration also creates a radial mount.

Fig. 8 zeigt eine alternative, erfindungsgemäße Ausgestaltung, in welcher der Gegenflansch ein separates Zwischenelement 42 in Form eines Einlegerings umfasst, der in den Flansch der Vakuumkammer (nicht gezeigt) bzw. in den der Vakuumkammer zugeordneten Flansch eingelegt werden kann. Fig. 8 shows an alternative embodiment according to the invention in which the mating flange comprises a separate intermediate element 42 in the form of an insert ring which can be inserted into the flange of the vacuum chamber (not shown) or into the flange assigned to the vacuum chamber.

Generell, d.h. allgemein und unabhängig von einer konkreten Ausführung, braucht bei Verwendung eines solchen Zwischenelementes die Vakuumkammer bzw. deren Flansch nicht angepasst zu werden und nicht unmittelbar mit dem Zahn des Verbindungselementes zusammenzuwirken. Stattdessen wird der Zahn in das Zwischenelement eingedrückt oder - wie in Fig. 8 gezeigt - greift jeweils der Zahn 22 in eine im Zwischenelement 42 ausgebildete Aufnahmevertiefung 44 ein.In general, ie generally and independently of a specific embodiment, when using such an intermediate element, the vacuum chamber or its flange does not need to be adapted and does not need to interact directly with the tooth of the connecting element. Instead, the tooth is pressed into the intermediate element or - as in Fig. 8 shown - the tooth 22 engages in a receiving recess 44 formed in the intermediate element 42.

Das Zwischenelement 42 kann als Bestandteil des Gegenflansches 20 angesehen werden. Eine solche Anordnung ist dann nicht erfindungsgemäß, denn zu einer erfindungsgemäßen Vakuumpumpenanordnung gehört der Gegenflansch nicht. Die Fixierung der Verbindungselemente 18 an der Vakuumkammer bzw. an einem weiteren, der Vakuumkammer zugeordneten Flanschabschnitt (nicht gezeigt), an der bzw. dem das Zwischenelement 42 anliegt, kann wiederum durch Verschrauben erfolgen. Die Fixierschrauben erstrecken sich dann durch die Durchgangsöffnungen 26 in den Pratzen 18 und durch im Zwischenelement 42 ausgebildete Öffnungen 46 hindurch.The intermediate element 42 can be regarded as part of the counter flange 20. Such an arrangement is then not according to the invention, because the counter flange does not belong to a vacuum pump arrangement according to the invention. The fixing of the connecting elements 18 to the vacuum chamber or to a Another flange section (not shown) assigned to the vacuum chamber, on which the intermediate element 42 rests, can in turn take place by screwing. The fixing screws then extend through the through openings 26 in the claws 18 and through openings 46 formed in the intermediate element 42.

BezugszeichenlisteList of reference symbols

1010
VerbindungselementConnecting element
1212th
Ansatzapproach
1414th
DurchgangsöffnungThrough opening
1616
FixierschraubeFixing screw
1818th
VerbindungselementConnecting element
2020th
GegenflanschCounter flange
2222nd
Zahntooth
2424
Vertiefung (Abdruck)Depression (impression)
2626th
DurchgangsöffnungThrough opening
2828
FixierelementFixing element
3030th
GewindebohrungThreaded hole
3232
GrundkörperBase body
3434
Ansatzapproach
3636
Öffnungopening
3838
VakuumpumpeVacuum pump
4040
Vakuumkammer, RezipientVacuum chamber, recipient
4242
Zwischenelement, EinlegeringIntermediate element, insert ring
4444
AufnahmevertiefungReceiving recess
4646
Öffnungopening

Claims (10)

  1. A vacuum pump arrangement, in particular a turbomolecular pump arrangement,
    comprising a vacuum pump (38), in particular a turbomolecular pump, which comprises a rotor, a stator and a housing;
    at least one connection element (18) via which the vacuum pump (38) is connectable to a vacuum chamber (40), wherein the connection element (18) can be brought into engagement with a pump flange, which is associated with the pump housing, and can be fixed to a counter-flange (20) associated with the vacuum chamber (40); and
    at least one separate intermediate element (42) in particular configured as an insert ring,
    characterized in that
    the connection element (18) is provided with at least one tooth (22) which, when the connection element (18) is fixed to the counter-flange (20) and the intermediate element (42) is arranged between the counter-flange (20) and the connection element (18), is pressed into the intermediate element (42) or engages into a reception recess (44) provided in the intermediate element (42) in order to secure said connection element (18) against a rotation.
  2. A vacuum pump arrangement in accordance with claim 1,
    characterized in that the connection element (18) is provided with at least two teeth (22) having a spacing from one another.
  3. A vacuum pump arrangement in accordance with claim 1 or claim 2,
    characterized in that the connection element (18) is provided with a tooth (22) extended in a rib-like manner.
  4. A vacuum pump arrangement in accordance with any one of the preceding claims,
    characterized in that the connection element (18) is provided with at least one passage opening (26) for a fixing element (28), in particular a fixing screw, via which it can be fixed to the counter-flange (20).
  5. A vacuum pump arrangement in accordance with claim 4,
    characterized in that a fixing screw is provided as the fixing element (28) and the counter-flange (20) is provided with a threaded bore (30) into which the fixing screw engages.
  6. A vacuum pump arrangement in accordance with claim 4 or claim 5, characterized in that the connection element (18) can be fixed to the counter-flange (20) via only exactly one fixing element (28), in particular only exactly one fixing screw.
  7. A vacuum pump arrangement in accordance with any one of the preceding claims,
    characterized in that the counter-flange (20) is composed of aluminum.
  8. A vacuum pump arrangement in accordance with any one of the preceding claims,
    characterized in that the connection element (18) is configured as a clamping element or a claw or comprises a claw-like base body (32).
  9. A vacuum pump arrangement in accordance with any one of the preceding claims,
    characterized in that the pump flange has a groove, in particular a circular ring-shaped groove, into which a nose (34) of the connection element (18) engages.
  10. A vacuum pump arrangement in accordance with any one of the preceding claims,
    characterized in that
    at least one reception recess (44), into which the connection element (18) engages in the fixed state, is formed in the intermediate element (42), with the reception recess (44) being bounded in the peripheral direction or being configured as a peripheral groove.
EP15152122.6A 2014-02-28 2015-01-22 Vacuum pump assembly Active EP2913534B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014102680.2A DE102014102680A1 (en) 2014-02-28 2014-02-28 vacuum pump arrangement

Publications (3)

Publication Number Publication Date
EP2913534A2 EP2913534A2 (en) 2015-09-02
EP2913534A3 EP2913534A3 (en) 2015-09-09
EP2913534B1 true EP2913534B1 (en) 2021-05-19

Family

ID=52354904

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15152122.6A Active EP2913534B1 (en) 2014-02-28 2015-01-22 Vacuum pump assembly

Country Status (3)

Country Link
EP (1) EP2913534B1 (en)
JP (1) JP2015165134A (en)
DE (1) DE102014102680A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3171030B1 (en) * 2015-11-19 2020-01-08 Pfeiffer Vacuum Gmbh Vacuum pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2062085A (en) * 1979-10-30 1981-05-20 Pfaudler Werke Ag Clamping Assemblies and Screw Clamps for Use Therewith
US4699353A (en) * 1986-12-31 1987-10-13 Weyer Paul P Rotary valve actuator
US6050614A (en) * 1996-12-17 2000-04-18 General Electric Company Bolted seal joint assembly
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
DE10342907A1 (en) * 2003-09-17 2005-04-21 Pfeiffer Vacuum Gmbh Vacuum pump with fast rotating rotor
DE102005020904A1 (en) 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vacuum pump assembly
FR2893094B1 (en) * 2005-11-10 2011-11-11 Cit Alcatel FIXING DEVICE FOR A VACUUM PUMP
DE102008028199A1 (en) * 2008-06-12 2009-12-17 Pfeiffer Vacuum Gmbh connecting element
DE102009039120A1 (en) * 2009-08-28 2011-03-03 Pfeiffer Vacuum Gmbh vacuum pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
EP2913534A2 (en) 2015-09-02
DE102014102680A1 (en) 2015-09-03
EP2913534A3 (en) 2015-09-09
JP2015165134A (en) 2015-09-17

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