EP2913534A3 - Vacuum pump assembly - Google Patents

Vacuum pump assembly Download PDF

Info

Publication number
EP2913534A3
EP2913534A3 EP15152122.6A EP15152122A EP2913534A3 EP 2913534 A3 EP2913534 A3 EP 2913534A3 EP 15152122 A EP15152122 A EP 15152122A EP 2913534 A3 EP2913534 A3 EP 2913534A3
Authority
EP
European Patent Office
Prior art keywords
connecting element
pump
vacuum pump
counter flange
pump assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15152122.6A
Other languages
German (de)
French (fr)
Other versions
EP2913534B1 (en
EP2913534A2 (en
Inventor
Robert Watz
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2913534A2 publication Critical patent/EP2913534A2/en
Publication of EP2913534A3 publication Critical patent/EP2913534A3/en
Application granted granted Critical
Publication of EP2913534B1 publication Critical patent/EP2913534B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Mutual Connection Of Rods And Tubes (AREA)

Abstract

Vakuumpumpenanordnung, insbesondere Turbomolekularpumpenanordnung, mit einer einen Rotor, einen Stator sowie ein Gehäuse umfassenden Vakuumpumpe, insbesondere Turbomolekularpumpe, die über wenigstens ein Verbindungselement (18) mit einer Vakuumkammer verbindbar ist, wobei das Verbindungselement (18) mit einem dem Pumpengehäuse zugeordneten Pumpenflansch in Eingriff bringbar und an einem der Vakuumkammer zugeordneten Gegenflansch (20) fixierbar ist. Das Verbindungselement (18) mit wenigstens einem Zahn (22) versehen ist, der bei an dem Gegenflansch (20) fixiertem Verbindungselement (18) zu dessen Sicherung gegen ein Verdrehen in den Gegenflansch (20) eingedrückt ist oder in eine in dem Gegenflansch (20) vorgesehene Aufnahmevertiefung eingreift.

Figure imgaf001
Vacuum pump arrangement, in particular turbomolecular pump arrangement, comprising a vacuum pump, in particular turbomolecular pump comprising a rotor, a stator and a housing, which can be connected to a vacuum chamber via at least one connecting element (18), wherein the connecting element (18) can be brought into engagement with a pump flange associated with the pump housing and on one of the vacuum chamber associated counter flange (20) is fixable. The connecting element (18) is provided with at least one tooth (22) which is pressed against rotation in the counter flange (20) when the connecting element (18) is fixed to the counter flange (20) or into a counter flange (20) ) engages receiving recess engages.
Figure imgaf001
EP15152122.6A 2014-02-28 2015-01-22 Vacuum pump assembly Active EP2913534B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014102680.2A DE102014102680A1 (en) 2014-02-28 2014-02-28 vacuum pump arrangement

Publications (3)

Publication Number Publication Date
EP2913534A2 EP2913534A2 (en) 2015-09-02
EP2913534A3 true EP2913534A3 (en) 2015-09-09
EP2913534B1 EP2913534B1 (en) 2021-05-19

Family

ID=52354904

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15152122.6A Active EP2913534B1 (en) 2014-02-28 2015-01-22 Vacuum pump assembly

Country Status (3)

Country Link
EP (1) EP2913534B1 (en)
JP (1) JP2015165134A (en)
DE (1) DE102014102680A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3171030B1 (en) * 2015-11-19 2020-01-08 Pfeiffer Vacuum Gmbh Vacuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
EP1517045A2 (en) * 2003-09-17 2005-03-23 Pfeiffer Vacuum GmbH Connecting element
EP2133581A2 (en) * 2008-06-12 2009-12-16 Pfeiffer Vacuum GmbH Connecting element
EP2290242A2 (en) * 2009-08-28 2011-03-02 Pfeiffer Vacuum GmbH Vacuum pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2062085A (en) * 1979-10-30 1981-05-20 Pfaudler Werke Ag Clamping Assemblies and Screw Clamps for Use Therewith
US4699353A (en) * 1986-12-31 1987-10-13 Weyer Paul P Rotary valve actuator
US6050614A (en) * 1996-12-17 2000-04-18 General Electric Company Bolted seal joint assembly
DE102005020904A1 (en) * 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vacuum pump assembly
FR2893094B1 (en) * 2005-11-10 2011-11-11 Cit Alcatel FIXING DEVICE FOR A VACUUM PUMP

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
EP1517045A2 (en) * 2003-09-17 2005-03-23 Pfeiffer Vacuum GmbH Connecting element
EP2133581A2 (en) * 2008-06-12 2009-12-16 Pfeiffer Vacuum GmbH Connecting element
EP2290242A2 (en) * 2009-08-28 2011-03-02 Pfeiffer Vacuum GmbH Vacuum pump

Also Published As

Publication number Publication date
EP2913534B1 (en) 2021-05-19
JP2015165134A (en) 2015-09-17
EP2913534A2 (en) 2015-09-02
DE102014102680A1 (en) 2015-09-03

Similar Documents

Publication Publication Date Title
EP3650060A3 (en) Ambulatory infusion pumps and reservoir assemblies for use with same
EP2398130A3 (en) Small electric motor
EP2842609A3 (en) Pressure release device for housings with flameproof encapsulation comprising a porous body comprising interference fit
IL277832A (en) Corrosion-resistant permanent magnet and intravascular blood pump comprising the magnet
WO2016130477A3 (en) Implantable medical device with radiopaque id tag
WO2016085985A8 (en) Fiducial point optimization
EP2639604A3 (en) Method and system for presenting stress domain
EP3068200A3 (en) Slide rail assembly
EP2886895A3 (en) Rolling bearing with a sealing unit
WO2016018649A3 (en) Gear assembly with spiral gears
EP3067541A3 (en) Geared turbine engine
EP3020691A3 (en) Vacuum module which can be manufactured from different materials
EP3812588B8 (en) Piston pump and piston motor
EP3452724B8 (en) Pump unit with integrated piston pump and electric motor
EP2706237A3 (en) Vacuum pump
EP3351727A3 (en) Bonded fan platform
EP3242003A3 (en) Liquid injection apparatus and compressor assembly having the same
EP2765311A3 (en) Screw spindle pump
EP2913534A3 (en) Vacuum pump assembly
MX2016004346A (en) Brake rotors with inclined posts.
EP2896837A3 (en) Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump
EP3486489A4 (en) Crank shaft, pump body component and compressor
EP3048344A3 (en) Seal housing pre-taper
EP2990656A3 (en) Vacuum pump
EP2511474A3 (en) Housingless positive displacement pump assembly

Legal Events

Date Code Title Description
PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 29/60 20060101ALI20150731BHEP

Ipc: F04D 19/04 20060101AFI20150731BHEP

17P Request for examination filed

Effective date: 20160309

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20190619

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20210129

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502015014717

Country of ref document: DE

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1394241

Country of ref document: AT

Kind code of ref document: T

Effective date: 20210615

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20210519

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210819

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210919

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210820

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210920

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210819

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502015014717

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20220222

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210919

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20220131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220122

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220131

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220131

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220122

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 1394241

Country of ref document: AT

Kind code of ref document: T

Effective date: 20220122

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220122

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20150122

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20210519

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240326

Year of fee payment: 10

Ref country code: CZ

Payment date: 20240115

Year of fee payment: 10

Ref country code: GB

Payment date: 20240123

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20240129

Year of fee payment: 10