EP2913534A2 - Vacuum pump assembly - Google Patents
Vacuum pump assembly Download PDFInfo
- Publication number
- EP2913534A2 EP2913534A2 EP15152122.6A EP15152122A EP2913534A2 EP 2913534 A2 EP2913534 A2 EP 2913534A2 EP 15152122 A EP15152122 A EP 15152122A EP 2913534 A2 EP2913534 A2 EP 2913534A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- connecting element
- vacuum pump
- pump arrangement
- arrangement according
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000000078 claw Anatomy 0.000 claims description 16
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 230000013011 mating Effects 0.000 description 14
- 238000009434 installation Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
Definitions
- the present invention relates to a vacuum pump arrangement, in particular turbomolecular pump arrangement, comprising a vacuum pump comprising a rotor, a stator and a housing, in particular turbomolecular pump, which can be connected to a vacuum chamber via at least one connecting element, wherein the connecting element can be brought into engagement with a pump flange associated with the pump housing and can be fixed to one of the vacuum chamber associated counter flange. It further relates to a connecting element for such a vacuum pump arrangement.
- Vacuum pumps such as turbomolecular pumps
- Claws of the type in question are basically known clamping elements with which parts can be fastened together.
- the attachment of a respective claw to the vacuum chamber housing can be done in particular via a clamping screw.
- a reliable attachment of the vacuum pump to the vacuum chamber housing must be ensured in order to exclude with great certainty a danger to operating personnel.
- a blocking rotor abruptly relatively high moments occur, which are transmitted from the rotor via the stator to the pump housing and from there via the claws on the vacuum chamber housing. Due to the high moments, it may lead to a rotation of the pump housing relative to the vacuum chamber housing, causing damage to the vacuum chamber housing in the region of the attachment Can bring claws.
- the invention is therefore an object of the invention to provide an improved vacuum pump assembly and an improved connection element of the type mentioned above, which ensure a reliable protection against rotation of the connecting elements with structurally simplified and correspondingly less expensive connection between the vacuum pump and the vacuum chamber and correspondingly simplified assembly.
- the vacuum pump arrangement according to the invention is characterized in that the connecting element is provided with at least one tooth which is pressed against rotation in the counter flange when the connecting element is fixed to the counter flange or engages in a receiving recess provided in the counter flange.
- the connecting element is preferably with at least two teeth spaced apart from each other Mistake.
- at least one rib-like, elongated tooth can be provided.
- the connecting element is provided with at least one rib-like elongated tooth.
- the connecting element for securing against rotation only have exactly such a rib-like elongated tooth.
- the connecting element is provided with at least one passage opening for a fixing element, in particular a clamping screw, via which it can be fixed to the counter flange.
- a fixing element in particular a clamping screw
- the counterflange is expediently provided with a threaded bore into which the fixing screw engages.
- a respective connecting element is provided for securing against twisting with at least one tooth which is pressed into the mating flange or engages in a receiving recess provided in this, a single fixing element or a single screw is sufficient for fastening the connecting element to the mating flange, thus in particular, the assembly is facilitated.
- the counter flange consists of aluminum.
- the connecting element may in particular be designed as a clamping element or claw or comprise a claw-like basic body.
- the pump flange preferably has a particular annular groove, in which engages a projection of the connecting element.
- the connecting element according to the invention is characterized in that it is designed as a clamping element or claw or has a claw-like base body, wherein the connecting element is provided for securing against rotation with at least one engageable with a mating flange of a vacuum chamber tooth.
- FIG. 1 shows a perspective view of a conventional claw-like connecting element 10.
- a connecting element 10 serves to connect a rotor comprising a rotor and a stator vacuum pump with a vacuum chamber or a recipient.
- the connecting element 10 is provided with a projection 12 which engages in a circular groove of a pump flange.
- the connecting element 10 is provided with a passage opening 14 for a fixing screw 16, via which it can be fixed to a counter flange of the vacuum chamber.
- the vacuum pump is fastened to the vacuum chamber via a plurality of such connecting elements 10. But with such fasteners now there is the danger that they rotate under load, as explained above.
- Fig. 2 shows a schematic representation of an exemplary embodiment of a connecting element according to the invention of a vacuum pump assembly according to the invention, which may be in particular a turbomolecular pump assembly.
- the vacuum pump arrangement in question comprises a vacuum pump, in particular turbomolecular pump, having a rotor, a stator and a housing, which can be connected to a vacuum chamber via at least one such connecting element 18.
- the connecting element 18 can be brought into engagement with a pump flange associated with the pump housing and on a counter flange 20 assigned to the vacuum chamber (cf. Fig. 4 ) fixable.
- the connecting element 18 is provided with at least one tooth 22, which is pressed against its being secured against rotation in the counter-flange 20 when the connecting element 18 is fixed to the mating flange 20 or engages in a receiving recess provided in the mating flange 20.
- the recording can be omitted.
- the connecting element 18 may in particular be provided with at least two spaced-apart teeth 22, wherein the connecting element according to the in the Fig. 2 illustrated embodiment has exactly two such teeth 22.
- the teeth 22 may have a tapered shape, so that they can be easily pressed into the flange 20.
- the connecting element 18 may be provided with a passage opening 26 for a fixing element 28 such as in particular a clamping screw or the like, via which it can be fixed to the counter flange 20.
- a fixing element 28 such as in particular a clamping screw or the like
- the counter flange 20 can be provided with a threaded bore 30 (cf. Fig. 4 ), in which the fixing screw engages.
- the connecting element 18 via only exactly one fixing element 28 or only exactly one clamping screw on the mating flange 20 fixable, whereby the assembly is much easier. Twisting of the connecting element 18 under load is prevented by the engaging with the mating flange 20 teeth 22.
- the connecting element 18 may in particular comprise a claw-type base body 32 and be provided with a projection 34 which engages in a particular circular groove of a pump flange.
- Fig. 3 shows a schematic representation of another exemplary embodiment of a connecting element 18 according to the invention, which is provided with a transverse to the longitudinal direction of the passage opening 26 rib-like elongated tooth 22.
- this rib-like elongated tooth 22 has a counter flange 20 towards tapered cross section, which results in a counter flange 20 facing narrow edge, which facilitates the penetration into the counter flange 20.
- this in the Fig. 3 illustrated connecting element 18 at least substantially be executed the same again as that in the Fig. 2 illustrated connecting element.
- the teeth 22 of a respective connecting element 18 can also engage in a receiving recess provided in the counter-flange 20 for securing it against rotation.
- the teeth no longer have to be pressed into this counter flange 20 and no longer need to be provided with a tip or narrow edge of the teeth. The protection against rotation is then ensured by the intervention in the receiving recess.
- Fig. 4 shows a schematic partial view of the counter flange 20 of an exemplary embodiment of the vacuum pump assembly according to the invention.
- the counter flange 20 has an elongated recess 24, which is an impression of a depressed long tooth 22 according to Fig. 3 represents, that is was created by pressing a rib-like tooth 22 of a clamping claw 18 according to the invention.
- the mating flange 20 may be provided with a receiving recess made for this purpose for engagement of the at least one tooth 22.
- this counter flange 20 may in particular consist of aluminum, whereby the penetration of the teeth 22 is facilitated.
- Other materials for the mating flange 20 are nevertheless possible.
- FIG. 5 form a vacuum pump 38 and a recipient 40, which are interconnected by means of a plurality of inventive clamping claws 18, a vacuum pump assembly according to the invention.
- Fig. 6 engage a plurality of clamping jaws 18 each with their tooth 22 in a receiving recess 44 a.
- the recesses 44 are each formed as a circumferentially limited, groove or slot-like recess in the counter flange 20. As a result, a radial support is created. In addition, a rotation of the claws 18 is prevented.
- Fig. 8 shows an alternative embodiment in which the mating flange comprises a separate intermediate element 42 in the form of a deposit ring, which can be inserted into the flange of the vacuum chamber (not shown) or in the flange associated with the vacuum chamber.
- the vacuum chamber or its flange need not be adapted and not directly interact with the tooth of the connecting element. Instead, the tooth is pressed into the intermediate element or - as in Fig. 8 shown - engages in each case the tooth 22 in a formed in the intermediate element 42 receiving recess 44 a.
- the intermediate element 42 can be regarded as part of the counter-flange 20.
- the fixation of the connecting elements 18 to the vacuum chamber or to another, the vacuum chamber associated flange portion (not shown) to which or the intermediate element 42 abuts, in turn, can be done by screwing.
- the fixing screws then extend through the passage openings 26 in the claws 18 and through openings 46 formed in the intermediate element 42.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Mutual Connection Of Rods And Tubes (AREA)
Abstract
Vakuumpumpenanordnung, insbesondere Turbomolekularpumpenanordnung, mit einer einen Rotor, einen Stator sowie ein Gehäuse umfassenden Vakuumpumpe, insbesondere Turbomolekularpumpe, die über wenigstens ein Verbindungselement (18) mit einer Vakuumkammer verbindbar ist, wobei das Verbindungselement (18) mit einem dem Pumpengehäuse zugeordneten Pumpenflansch in Eingriff bringbar und an einem der Vakuumkammer zugeordneten Gegenflansch (20) fixierbar ist. Das Verbindungselement (18) mit wenigstens einem Zahn (22) versehen ist, der bei an dem Gegenflansch (20) fixiertem Verbindungselement (18) zu dessen Sicherung gegen ein Verdrehen in den Gegenflansch (20) eingedrückt ist oder in eine in dem Gegenflansch (20) vorgesehene Aufnahmevertiefung eingreift.Vacuum pump arrangement, in particular turbomolecular pump arrangement, comprising a vacuum pump, in particular turbomolecular pump comprising a rotor, a stator and a housing, which can be connected to a vacuum chamber via at least one connecting element (18), wherein the connecting element (18) can be brought into engagement with a pump flange associated with the pump housing and on one of the vacuum chamber associated counter flange (20) is fixable. The connecting element (18) is provided with at least one tooth (22) which is pressed against rotation in the counter flange (20) when the connecting element (18) is fixed to the counter flange (20) or into a counter flange (20) ) engages receiving recess engages.
Description
Die vorliegende Erfindung betrifft eine Vakuumpumpenanordnung, insbesondere Turbomolekularpumpenanordnung, mit einer einen Rotor, einen Stator sowie ein Gehäuse umfassenden Vakuumpumpe, insbesondere Turbomolekularpumpe, die über wenigstens ein Verbindungselement mit einer Vakuumkammer verbindbar ist, wobei das Verbindungselement mit einem dem Pumpengehäuse zugeordneten Pumpenflansch in Eingriff bringbar ist und an einem der Vakuumkammer zugeordneten Gegenflansch fixierbar ist. Sie betrifft ferner ein Verbindungselement für eine solche Vakuumpumpenanordnung.The present invention relates to a vacuum pump arrangement, in particular turbomolecular pump arrangement, comprising a vacuum pump comprising a rotor, a stator and a housing, in particular turbomolecular pump, which can be connected to a vacuum chamber via at least one connecting element, wherein the connecting element can be brought into engagement with a pump flange associated with the pump housing and can be fixed to one of the vacuum chamber associated counter flange. It further relates to a connecting element for such a vacuum pump arrangement.
Vakuumpumpen wie beispielsweise Turbomolekularpumpen können zur Erzeugung eines Vakuums in einer Vakuumkammer oder in einem Rezipienten über Verbindungselemente wie insbesondere sogenannte Pratzen mit der Vakuumkammer verbunden sein. Pratzen der hier in Rede stehenden Art sind grundsätzlich bekannte Spannelemente, mit denen Teile aneinander befestigt werden können.Vacuum pumps, such as turbomolecular pumps, can be connected to the vacuum chamber by means of connecting elements, in particular so-called claws, in order to generate a vacuum in a vacuum chamber or in a recipient. Claws of the type in question are basically known clamping elements with which parts can be fastened together.
Die Befestigung einer jeweiligen Pratze an dem Vakuumkammergehäuse kann insbesondere über eine Spannschraube erfolgen. Angesichts des relativ hohen Gewichts der Vakuumpumpe sowie der hohen Rotorgeschwindigkeiten muss eine zuverlässige Befestigung der Vakuumpumpe an dem Vakuumkammergehäuse gewährleistet sein, um mit hoher Sicherheit eine Gefährdung des Bedienpersonals auszuschließen. Insbesondere im Fall eines blockierenden Rotors treten schlagartig relativ hohe Momente auf, die vom Rotor über den Stator auf das Pumpengehäuse und von diesem über die Pratzen auf das Vakuumkammergehäuse übertragen werden. Aufgrund der hohen Momente kann es dabei zu einem Verdrehen des Pumpengehäuses gegenüber dem Vakuumkammergehäuse kommen, was eine Beschädigung des Vakuumkammergehäuses im Bereich der Befestigung der Pratzen mit sich bringen kann. Zudem besteht bei der Verwendung solcher Pratzen die Gefahr, dass sich diese im Schadensfall verdrehen und der Pumpenflansch durch die dabei auftretenden Einkerbungen derart beschädigt wird, dass sich die Vakuumpumpe losreißen kann.The attachment of a respective claw to the vacuum chamber housing can be done in particular via a clamping screw. In view of the relatively high weight of the vacuum pump and the high rotor speeds, a reliable attachment of the vacuum pump to the vacuum chamber housing must be ensured in order to exclude with great certainty a danger to operating personnel. In particular, in the case of a blocking rotor abruptly relatively high moments occur, which are transmitted from the rotor via the stator to the pump housing and from there via the claws on the vacuum chamber housing. Due to the high moments, it may lead to a rotation of the pump housing relative to the vacuum chamber housing, causing damage to the vacuum chamber housing in the region of the attachment Can bring claws. In addition, when using such claws, there is a risk that they will twist in the event of damage and the pump flange is damaged by the notches occurring in such a way that the vacuum pump can break loose.
Bei einer aus der
Der Erfindung liegt somit die Aufgabe zugrunde, eine verbesserte Vakuumpumpenanordnung sowie ein verbessertes Verbindungselement der eingangs genannten Art anzugeben, die bei konstruktiv vereinfachter und entsprechend kostengünstigerer Verbindung zwischen der Vakuumpumpe und der Vakuumkammer sowie entsprechend vereinfachter Montage eine zuverlässige Sicherung gegen ein Verdrehen der Verbindungselemente gewährleisten.The invention is therefore an object of the invention to provide an improved vacuum pump assembly and an improved connection element of the type mentioned above, which ensure a reliable protection against rotation of the connecting elements with structurally simplified and correspondingly less expensive connection between the vacuum pump and the vacuum chamber and correspondingly simplified assembly.
Diese Aufgabe wird erfindungsgemäß gelöst durch eine Vakuumpumpenanordnung mit den Merkmalen des Anspruchs 1 sowie ein Verbindungselement mit den Merkmalen des Anspruchs 10. Bevorzugte Ausführungsformen der erfindungsgemäßen Vakuumpumpenanordnung sind in den Unteransprüchen angegeben.This object is achieved by a vacuum pump assembly with the features of claim 1 and a connecting element with the features of claim 10. Preferred embodiments of the vacuum pump according to the invention are given in the dependent claims.
Die erfindungsgemäße Vakuumpumpenanordnung zeichnet sich dadurch aus, dass das Verbindungselement mit wenigstens einem Zahn versehen ist, der bei an dem Gegenflansch fixiertem Verbindungselement zu dessen Sicherung gegen ein Verdrehen in den Gegenflansch eingedrückt ist oder in eine in dem Gegenflansch vorgesehene Aufnahmevertiefung eingreift. Dabei ist das Verbindungselement bevorzugt mit wenigstens zwei einen Abstand voneinander aufweisenden Zähnen versehen. Alternativ kann zumindest ein rippenartig ausgebildeter, langgestreckter Zahn vorgesehen sein.The vacuum pump arrangement according to the invention is characterized in that the connecting element is provided with at least one tooth which is pressed against rotation in the counter flange when the connecting element is fixed to the counter flange or engages in a receiving recess provided in the counter flange. In this case, the connecting element is preferably with at least two teeth spaced apart from each other Mistake. Alternatively, at least one rib-like, elongated tooth can be provided.
Aufgrund dieser Ausbildung ergibt sich nicht nur insbesondere hinsichtlich der Verbindung zwischen der Vakuumpumpe und der Vakuumkammer ein konstruktiv einfacherer Aufbau, es wird auch die Montage entsprechend vereinfacht. Indem mit dem Fixieren eines jeweiligen Verbindungselements an dem Gegenflansch unmittelbar auch der Zahn oder die Zähne in das Material des Gegenflansches eingedrückt werden bzw. in die in diesem vorgesehene Aufnahmevertiefung eingreifen, wird gleichzeitig verhindert, dass sich die Verbindungselemente unter Belastung relativ zum Gegenflansch drehen.Due to this design, not only in particular with regard to the connection between the vacuum pump and the vacuum chamber results in a structurally simpler structure, it also simplifies the installation accordingly. By directly pressing the tooth or the teeth into the material of the mating flange or engaging in the receptacle recess provided in this, by fixing a respective connecting element on the mating flange, it is simultaneously prevented that the connecting elements rotate under load relative to the mating flange.
Gemäß einer vorteilhaften praktischen Ausführungsform der erfindungsgemäßen Vakuumpumpenanordnung ist das Verbindungselement mit zumindest einem rippenartig verlängerten Zahn versehen. Dabei kann das Verbindungselement zur Sicherung gegen ein Verdrehen nur genau einen solchen rippenartig verlängerten Zahn aufweisen.According to an advantageous practical embodiment of the vacuum pump arrangement according to the invention, the connecting element is provided with at least one rib-like elongated tooth. In this case, the connecting element for securing against rotation only have exactly such a rib-like elongated tooth.
Bevorzugt ist das Verbindungselement mit zumindest einer Durchgangsöffnung für ein Fixierelement, insbesondere eine Spannschraube, versehen, über das es an dem Gegenflansch fixierbar ist. Ist als Fixierelement eine Spannschraube vorgesehen, so ist der Gegenflansch zweckmäßigerweise mit einer Gewindebohrung versehen, in die die Fixierschraube eingreift.Preferably, the connecting element is provided with at least one passage opening for a fixing element, in particular a clamping screw, via which it can be fixed to the counter flange. If a clamping screw is provided as the fixing element, the counterflange is expediently provided with a threaded bore into which the fixing screw engages.
Nachdem ein jeweiliges Verbindungselement zur Sicherung gegen ein Verdrehen mit wenigstens einem Zahn versehen ist, der in den Gegenflansch eingedrückt wird bzw. in eine in diesem vorgesehene Aufnahmevertiefung eingreift, genügt zur Befestigung des Verbindungselements an dem Gegenflansch ein einziges Fixierelement bzw. eine einzige Schraube, womit insbesondere auch die Montage erleichtert wird.After a respective connecting element is provided for securing against twisting with at least one tooth which is pressed into the mating flange or engages in a receiving recess provided in this, a single fixing element or a single screw is sufficient for fastening the connecting element to the mating flange, thus in particular, the assembly is facilitated.
Gemäß einer bevorzugten Ausführungsform der erfindungsgemäßen Vakuumpumpenanordnung besteht der Gegenflansch aus Aluminium. Grundsätzlich ist es alternativ auch möglich, den zumindest einen Zahn des Verbindungselements in einen aus einem anderen Material bestehenden Gegenflansch einzudrücken.According to a preferred embodiment of the vacuum pump arrangement according to the invention, the counter flange consists of aluminum. In principle, it is alternatively also possible to press the at least one tooth of the connecting element into a counter flange consisting of a different material.
Das Verbindungselement kann insbesondere als Spannelement oder Pratze ausgebildet sein oder einen pratzenartigen Grundkörper umfassen.The connecting element may in particular be designed as a clamping element or claw or comprise a claw-like basic body.
Der Pumpenflansch weist bevorzugt eine insbesondere kreisringförmige Nut auf, in die ein Ansatz des Verbindungselements eingreift.The pump flange preferably has a particular annular groove, in which engages a projection of the connecting element.
Das erfindungsgemäße Verbindungselement zeichnet sich dadurch aus, dass es als Spannelement oder Pratze ausgebildet ist oder einen pratzenartigen Grundkörper aufweist, wobei das Verbindungselement zur Sicherung gegen ein Verdrehen mit wenigstens einem mit einem Gegenflansch einer Vakuumkammer in Eingriff bringbaren Zahn versehen ist.The connecting element according to the invention is characterized in that it is designed as a clamping element or claw or has a claw-like base body, wherein the connecting element is provided for securing against rotation with at least one engageable with a mating flange of a vacuum chamber tooth.
Die Erfindung wird im Folgenden anhand eines Ausführungsbeispiels unter Bezugnahme auf die Zeichnung näher beschrieben; in dieser zeigen:
- Fig. 1
- eine perspektivische Darstellung eines herkömmlichen pratzenartigen Verbindungselements,
- Fig. 2
- eine schematische Darstellung einer beispielhaften Ausführungsform eines erfindungsgemäßen Verbindungselements,
- Fig. 3
- eine schematische Darstellung einer weiteren beispielhaften Ausführungsform eines erfindungsgemäßen Verbindungselements,
- Fig. 4
- eine schematische Teildarstellung des Gegenflansches einer Vakuumpumpenanordnung,
- Fig. 5
- eine schematische Ansicht einer erfindungsgemäßen Anordnung aus Vakuumpumpe und Rezipient, die durch erfindungsgemäße Pratzen miteinander verbunden sind, und
- Fig. 6
bis 8 - weitere erfindungsgemäße Ausführungsformen.
- Fig. 1
- a perspective view of a conventional claw-type connecting element,
- Fig. 2
- a schematic representation of an exemplary embodiment of a connecting element according to the invention,
- Fig. 3
- a schematic representation of another exemplary embodiment of a connecting element according to the invention,
- Fig. 4
- a schematic partial view of the mating flange of a vacuum pump assembly,
- Fig. 5
- a schematic view of an inventive arrangement of vacuum pump and recipient, which are interconnected by claws according to the invention, and
- Fig. 6 to 8
- further embodiments of the invention.
Das Verbindungselement 10 ist mit einem Ansatz 12 versehen, der in eine kreisförmige Nut eines Pumpenflansches eingreift. Zudem ist das Verbindungselement 10 mit einer Durchgangsöffnung 14 für eine Fixierschraube 16 versehen, über die es an einem Gegenflansch der Vakuumkammer fixierbar ist.The connecting element 10 is provided with a
Die Vakuumpumpe ist über mehrere solche Verbindungselemente 10 an der Vakuumkammer befestigt. Mit solchen Verbindungselementen besteht nun aber die Gefahr, dass diese sich unter Belastung drehen, wie eingangs erläutert.The vacuum pump is fastened to the vacuum chamber via a plurality of such connecting elements 10. But with such fasteners now there is the danger that they rotate under load, as explained above.
Die betreffende Vakuumpumpenanordnung umfasst eine einen Rotor, einen Stator sowie ein Gehäuse aufweisende Vakuumpumpe, insbesondere Turbomolekularpumpe, die über wenigstens ein solches Verbindungselement 18 mit einer Vakuumkammer verbindbar ist. Dabei ist das Verbindungselement 18 mit einem dem Pumpengehäuse zugeordneten Pumpenflansch in Eingriff bringbar und an einem der Vakuumkammer zugeordneten Gegenflansch 20 (vgl. auch
Allgemein ist das Verbindungselement 18 mit wenigstens einem Zahn 22 versehen, der bei an dem Gegenflansch 20 fixiertem Verbindungselement 18 zu dessen Sicherung gegen ein Verdrehen in den Gegenflansch 20 eingedrückt ist oder in eine in dem Gegenflansch 20 vorgesehene Aufnahmevertiefung eingreift. Im ersteren Fall kann die Aufnahmevertiefung entfallen.Generally, the connecting
Das Verbindungselement 18 kann insbesondere mit wenigstens zwei einen Abstand voneinander aufweisenden Zähnen 22 versehen sein, wobei das Verbindungselement gemäß dem in der
Das Verbindungselement 18 kann mit einer Durchgangsöffnung 26 für ein Fixierelement 28 wie insbesondere eine Spannschraube oder dergleichen versehen sein, über das es an dem Gegenflansch 20 fixierbar ist.The connecting
Ist als Fixierelement 28 eine solche Spannschraube vorgesehen, so kann der Gegenflansch 20 mit einer Gewindebohrung 30 (vgl.
Wie anhand der
Das Verbindungselement 18 kann insbesondere einen pratzenartigen Grundkörper 32 umfassen und mit einem Ansatz 34 versehen sein, der in eine insbesondere kreisförmige Nut eines Pumpenflansches eingreift.The connecting
Wie bereits erwähnt, können die Zähne 22 eines jeweiligen Verbindungselements 18 zu dessen Sicherung gegen ein Verdrehen auch in eine in dem Gegenflansch 20 vorgesehene Aufnahmevertiefung eingreifen. In diesem Fall müssen die Zähne nicht mehr in diesen Gegenflansch 20 eingedrückt werden und brauchen die Zähne nicht mehr mit einer Spitze oder schmalen Kante versehen zu sein. Die Sicherung gegen Verdrehen ist dann bereits durch den Eingriff in die Aufnahmevertiefung gewährleistet.As already mentioned, the
Alternativ kann der Gegenflansch 20 mit einer zu diesem Zweck hergestellten Aufnahmevertiefung für einen Eingriff des wenigstens einen Zahns 22 versehen sein.Alternatively, the
Insbesondere dann, wenn die Zähne 22 in den Gegenflansch 20 eingedrückt werden, kann dieser Gegenflansch 20 insbesondere aus Aluminium bestehen, womit das Eindringen der Zähne 22 erleichtert wird. Andere Materialien für den Gegenflansch 20 sind gleichwohl möglich.In particular, when the
In der
In
In dem Ausführungsbeispiel der
Hiervon unterscheidet sich die Ausführungsform der
Generell, d.h. allgemein und unabhängig von einer konkreten Ausführung, braucht bei Verwendung eines solchen Zwischenelementes die Vakuumkammer bzw. deren Flansch nicht angepasst zu werden und nicht unmittelbar mit dem Zahn des Verbindungselementes zusammenzuwirken. Stattdessen wird der Zahn in das Zwischenelement eingedrückt oder - wie in
Das Zwischenelement 42 kann als Bestandteil des Gegenflansches 20 angesehen werden. Die Fixierung der Verbindungselemente 18 an der Vakuumkammer bzw. an einem weiteren, der Vakuumkammer zugeordneten Flanschabschnitt (nicht gezeigt), an der bzw. dem das Zwischenelement 42 anliegt, kann wiederum durch Verschrauben erfolgen. Die Fixierschrauben erstrecken sich dann durch die Durchgangsöffnungen 26 in den Pratzen 18 und durch im Zwischenelement 42 ausgebildete Öffnungen 46 hindurch.The intermediate element 42 can be regarded as part of the counter-flange 20. The fixation of the connecting
- 1010
- Verbindungselementconnecting element
- 1212
- Ansatzapproach
- 1414
- DurchgangsöffnungThrough opening
- 1616
- Fixierschraubefixing screw
- 1818
- Verbindungselementconnecting element
- 2020
- Gegenflanschcounterflange
- 2222
- Zahntooth
- 2424
- Vertiefung (Abdruck)Depression (impression)
- 2626
- DurchgangsöffnungThrough opening
- 2828
- Fixierelementfixing
- 3030
- Gewindebohrungthreaded hole
- 3232
- Grundkörperbody
- 3434
- Ansatzapproach
- 3636
- Öffnungopening
- 3838
- Vakuumpumpevacuum pump
- 4040
- Vakuumkammer, RezipientVacuum chamber, recipient
- 4242
- Zwischenelement, EinlegeringIntermediate element, insert ring
- 4444
- Aufnahmevertiefungreceiving recess
- 4646
- Öffnungopening
Claims (14)
dadurch gekennzeichnet, dass das Verbindungselement (18) mit wenigstens einem Zahn (22) versehen ist, der bei an dem Gegenflansch (20) fixiertem Verbindungselement (18) zu dessen Sicherung gegen ein Verdrehen in den Gegenflansch (20) eingedrückt ist oder in eine in dem Gegenflansch (20) vorgesehene Aufnahmevertiefung eingreift.Vacuum pump arrangement, in particular turbomolecular pump arrangement, comprising a vacuum pump, in particular turbomolecular pump comprising a rotor, a stator and a housing, which can be connected to a vacuum chamber via at least one connecting element (18), wherein the connecting element (18) can be brought into engagement with a pump flange associated with the pump housing and can be fixed to one of the vacuum chamber associated counter flange (20),
characterized in that the connecting element (18) is provided with at least one tooth (22) which is pressed in against the counter flange (20) fixed connecting element (18) for securing against rotation in the counter flange (20) or in an in the receiving flange (20) provided receiving recess engages.
dadurch gekennzeichnet, dass das Verbindungselement (18) mit wenigstens zwei einen Abstand voneinander aufweisenden Zähnen (22) versehen ist.Vacuum pump arrangement according to claim 1,
characterized in that the connecting element (18) is provided with at least two spaced-apart teeth (22).
dadurch gekennzeichnet, dass das Verbindungselement (18) mit einem rippenartig verlängerten Zahn (22) versehen ist.Vacuum pump arrangement according to claim 1 or 2,
characterized in that the connecting element (18) is provided with a rib-like elongated tooth (22).
dadurch gekennzeichnet, dass das Verbindungselement (18) mit zumindest einer Durchgangsöffnung (26) für ein Fixierelement (28), insbesondere eine Fixierschraube, versehen ist, über das es an dem Gegenflansch (20) fixierbar ist.Vacuum pump arrangement according to one of the preceding claims,
characterized in that the connecting element (18) with at least one passage opening (26) for a fixing element (28), in particular a fixing screw, is provided, via which it can be fixed to the counter flange (20).
dadurch gekennzeichnet, dass als Fixierelement (28) eine Fixierschraube vorgesehen und der Gegenflansch (20) mit einer Gewindebohrung (30) versehen ist, in die die Fixierschraube eingreift.Vacuum pump arrangement according to claim 4,
characterized in that as fixing element (28) provided a fixing screw and the counter flange (20) with a threaded bore (30) is provided, into which engages the fixing screw.
dadurch gekennzeichnet, dass das Verbindungselement (18) über nur genau ein Fixierelement (28), insbesondere nur genau eine Fixierschraube, an dem Gegenflansch (20) fixierbar ist.Vacuum pump arrangement according to claim 4 or 5,
characterized in that the connecting element (18) via only one fixing element (28), in particular only exactly one fixing screw, on the counter flange (20) is fixable.
dadurch gekennzeichnet, dass der Gegenflansch (20) aus Aluminium besteht.Vacuum pump arrangement according to one of the preceding claims,
characterized in that the counter flange (20) consists of aluminum.
dadurch gekennzeichnet, dass das Verbindungselement (18) als Spannelement oder Pratze ausgebildet ist oder einen pratzenartigen Grundkörper (32) umfasst.Vacuum pump arrangement according to one of the preceding claims,
characterized in that the connecting element (18) is designed as a clamping element or claw or a pratzenartigen base body (32).
dadurch gekennzeichnet, dass der Pumpenflansch eine insbesondere kreisringförmige Nut aufweist, in die ein Ansatz (34) des Verbindungselements (18) eingreift.Vacuum pump arrangement according to one of the preceding claims,
characterized in that the pump flange has a particular annular groove into which a projection (34) of the connecting element (18) engages.
dadurch gekennzeichnet, dass der Gegenflansch (20) ein separates, insbesondere als Einlegering ausgebildetes, Zwischenelement (42) umfasst, mit dem das Verbindungselement (18) im fixierten Zustand zusammenwirkt.Vacuum pump arrangement according to one of the preceding claims,
characterized in that the counter flange (20) comprises a separate, in particular designed as a insert ring, intermediate element (42), with which the connecting element (18) cooperates in the fixed state.
dadurch gekennzeichnet, dass im Zwischenelement (42) zumindest eine Aufnahmevertiefung (44) ausgebildet ist, in die das Verbindungselement (18) im fixierten Zustand eingreift, wobei die Aufnahmevertiefung (44) in Umfangsrichtung begrenzt oder als umlaufende Nut ausgebildet ist.Vacuum pump arrangement according to one of the preceding claims,
characterized in that in the intermediate element (42) at least one receiving recess (44) is formed, in which the connecting element (18) engages in the fixed state, wherein the receiving recess (44) bounded in the circumferential direction or is formed as a circumferential groove.
dadurch gekennzeichnet, dass das Verbindungselement (18) als Spannelement oder Pratze ausgebildet ist oder einen pratzenartigen Grundkörper (32) umfasst, und dass das Verbindungselement (18) zur Sicherung gegen ein Verdrehen mit wenigstens einem mit einem Gegenflansch (20) einer Vakuumkammer in Eingriff bringbaren Zahn (22) versehen ist.Connecting element for a vacuum pump arrangement according to at least one of the preceding claims,
characterized in that the connecting element (18) is designed as a clamping element or claw or comprises a claw-like base body (32), and that the connecting element (18) for securing against rotation with at least one with a counter flange (20) of a vacuum chamber engageable Tooth (22) is provided.
dadurch gekennzeichnet, dass das Zwischenelement (42) dazu ausgebildet ist, mit dem Verbindungselement (18) im fixierten Zustand zusammenzuwirken, wobei insbesondere das Zwischenelement (42) als Einlegering ausgebildet ist.Intermediate element for a vacuum pump arrangement according to at least one of claims 1 to 11,
characterized in that the intermediate element (42) is adapted to cooperate with the connecting element (18) in the fixed state, wherein in particular the intermediate element (42) is designed as a Einlegering.
dadurch gekennzeichnet, dass das System wenigstens ein Verbindungselement (18) nach Anspruch 12 und zumindest ein Zwischenelement (42) nach Anspruch 13 umfasst.System for a vacuum pump arrangement according to at least one of claims 1 to 11,
characterized in that the system comprises at least one connecting element (18) according to claim 12 and at least one intermediate element (42) according to claim 13.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014102680.2A DE102014102680A1 (en) | 2014-02-28 | 2014-02-28 | vacuum pump arrangement |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2913534A2 true EP2913534A2 (en) | 2015-09-02 |
EP2913534A3 EP2913534A3 (en) | 2015-09-09 |
EP2913534B1 EP2913534B1 (en) | 2021-05-19 |
Family
ID=52354904
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP15152122.6A Active EP2913534B1 (en) | 2014-02-28 | 2015-01-22 | Vacuum pump assembly |
Country Status (3)
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EP (1) | EP2913534B1 (en) |
JP (1) | JP2015165134A (en) |
DE (1) | DE102014102680A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3171030A1 (en) * | 2015-11-19 | 2017-05-24 | Pfeiffer Vacuum Gmbh | Vacuum pump |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005020904A1 (en) | 2005-05-07 | 2006-11-09 | Leybold Vacuum Gmbh | Vacuum pump assembly |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2062085A (en) * | 1979-10-30 | 1981-05-20 | Pfaudler Werke Ag | Clamping Assemblies and Screw Clamps for Use Therewith |
US4699353A (en) * | 1986-12-31 | 1987-10-13 | Weyer Paul P | Rotary valve actuator |
US6050614A (en) * | 1996-12-17 | 2000-04-18 | General Electric Company | Bolted seal joint assembly |
US20050029417A1 (en) * | 2003-08-08 | 2005-02-10 | Richard Scheps | Mounting bracket for a rotary pump |
DE10342907A1 (en) * | 2003-09-17 | 2005-04-21 | Pfeiffer Vacuum Gmbh | Vacuum pump with fast rotating rotor |
FR2893094B1 (en) * | 2005-11-10 | 2011-11-11 | Cit Alcatel | FIXING DEVICE FOR A VACUUM PUMP |
DE102008028199A1 (en) * | 2008-06-12 | 2009-12-17 | Pfeiffer Vacuum Gmbh | connecting element |
DE102009039120A1 (en) * | 2009-08-28 | 2011-03-03 | Pfeiffer Vacuum Gmbh | vacuum pump |
-
2014
- 2014-02-28 DE DE102014102680.2A patent/DE102014102680A1/en active Pending
-
2015
- 2015-01-22 EP EP15152122.6A patent/EP2913534B1/en active Active
- 2015-02-24 JP JP2015033586A patent/JP2015165134A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005020904A1 (en) | 2005-05-07 | 2006-11-09 | Leybold Vacuum Gmbh | Vacuum pump assembly |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3171030A1 (en) * | 2015-11-19 | 2017-05-24 | Pfeiffer Vacuum Gmbh | Vacuum pump |
Also Published As
Publication number | Publication date |
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DE102014102680A1 (en) | 2015-09-03 |
EP2913534B1 (en) | 2021-05-19 |
JP2015165134A (en) | 2015-09-17 |
EP2913534A3 (en) | 2015-09-09 |
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