EP2913534A2 - Agencement de pompe à vide - Google Patents
Agencement de pompe à vide Download PDFInfo
- Publication number
- EP2913534A2 EP2913534A2 EP15152122.6A EP15152122A EP2913534A2 EP 2913534 A2 EP2913534 A2 EP 2913534A2 EP 15152122 A EP15152122 A EP 15152122A EP 2913534 A2 EP2913534 A2 EP 2913534A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- connecting element
- vacuum pump
- pump arrangement
- arrangement according
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000000078 claw Anatomy 0.000 claims description 16
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 230000013011 mating Effects 0.000 description 14
- 238000009434 installation Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
Definitions
- the present invention relates to a vacuum pump arrangement, in particular turbomolecular pump arrangement, comprising a vacuum pump comprising a rotor, a stator and a housing, in particular turbomolecular pump, which can be connected to a vacuum chamber via at least one connecting element, wherein the connecting element can be brought into engagement with a pump flange associated with the pump housing and can be fixed to one of the vacuum chamber associated counter flange. It further relates to a connecting element for such a vacuum pump arrangement.
- Vacuum pumps such as turbomolecular pumps
- Claws of the type in question are basically known clamping elements with which parts can be fastened together.
- the attachment of a respective claw to the vacuum chamber housing can be done in particular via a clamping screw.
- a reliable attachment of the vacuum pump to the vacuum chamber housing must be ensured in order to exclude with great certainty a danger to operating personnel.
- a blocking rotor abruptly relatively high moments occur, which are transmitted from the rotor via the stator to the pump housing and from there via the claws on the vacuum chamber housing. Due to the high moments, it may lead to a rotation of the pump housing relative to the vacuum chamber housing, causing damage to the vacuum chamber housing in the region of the attachment Can bring claws.
- the invention is therefore an object of the invention to provide an improved vacuum pump assembly and an improved connection element of the type mentioned above, which ensure a reliable protection against rotation of the connecting elements with structurally simplified and correspondingly less expensive connection between the vacuum pump and the vacuum chamber and correspondingly simplified assembly.
- the vacuum pump arrangement according to the invention is characterized in that the connecting element is provided with at least one tooth which is pressed against rotation in the counter flange when the connecting element is fixed to the counter flange or engages in a receiving recess provided in the counter flange.
- the connecting element is preferably with at least two teeth spaced apart from each other Mistake.
- at least one rib-like, elongated tooth can be provided.
- the connecting element is provided with at least one rib-like elongated tooth.
- the connecting element for securing against rotation only have exactly such a rib-like elongated tooth.
- the connecting element is provided with at least one passage opening for a fixing element, in particular a clamping screw, via which it can be fixed to the counter flange.
- a fixing element in particular a clamping screw
- the counterflange is expediently provided with a threaded bore into which the fixing screw engages.
- a respective connecting element is provided for securing against twisting with at least one tooth which is pressed into the mating flange or engages in a receiving recess provided in this, a single fixing element or a single screw is sufficient for fastening the connecting element to the mating flange, thus in particular, the assembly is facilitated.
- the counter flange consists of aluminum.
- the connecting element may in particular be designed as a clamping element or claw or comprise a claw-like basic body.
- the pump flange preferably has a particular annular groove, in which engages a projection of the connecting element.
- the connecting element according to the invention is characterized in that it is designed as a clamping element or claw or has a claw-like base body, wherein the connecting element is provided for securing against rotation with at least one engageable with a mating flange of a vacuum chamber tooth.
- FIG. 1 shows a perspective view of a conventional claw-like connecting element 10.
- a connecting element 10 serves to connect a rotor comprising a rotor and a stator vacuum pump with a vacuum chamber or a recipient.
- the connecting element 10 is provided with a projection 12 which engages in a circular groove of a pump flange.
- the connecting element 10 is provided with a passage opening 14 for a fixing screw 16, via which it can be fixed to a counter flange of the vacuum chamber.
- the vacuum pump is fastened to the vacuum chamber via a plurality of such connecting elements 10. But with such fasteners now there is the danger that they rotate under load, as explained above.
- Fig. 2 shows a schematic representation of an exemplary embodiment of a connecting element according to the invention of a vacuum pump assembly according to the invention, which may be in particular a turbomolecular pump assembly.
- the vacuum pump arrangement in question comprises a vacuum pump, in particular turbomolecular pump, having a rotor, a stator and a housing, which can be connected to a vacuum chamber via at least one such connecting element 18.
- the connecting element 18 can be brought into engagement with a pump flange associated with the pump housing and on a counter flange 20 assigned to the vacuum chamber (cf. Fig. 4 ) fixable.
- the connecting element 18 is provided with at least one tooth 22, which is pressed against its being secured against rotation in the counter-flange 20 when the connecting element 18 is fixed to the mating flange 20 or engages in a receiving recess provided in the mating flange 20.
- the recording can be omitted.
- the connecting element 18 may in particular be provided with at least two spaced-apart teeth 22, wherein the connecting element according to the in the Fig. 2 illustrated embodiment has exactly two such teeth 22.
- the teeth 22 may have a tapered shape, so that they can be easily pressed into the flange 20.
- the connecting element 18 may be provided with a passage opening 26 for a fixing element 28 such as in particular a clamping screw or the like, via which it can be fixed to the counter flange 20.
- a fixing element 28 such as in particular a clamping screw or the like
- the counter flange 20 can be provided with a threaded bore 30 (cf. Fig. 4 ), in which the fixing screw engages.
- the connecting element 18 via only exactly one fixing element 28 or only exactly one clamping screw on the mating flange 20 fixable, whereby the assembly is much easier. Twisting of the connecting element 18 under load is prevented by the engaging with the mating flange 20 teeth 22.
- the connecting element 18 may in particular comprise a claw-type base body 32 and be provided with a projection 34 which engages in a particular circular groove of a pump flange.
- Fig. 3 shows a schematic representation of another exemplary embodiment of a connecting element 18 according to the invention, which is provided with a transverse to the longitudinal direction of the passage opening 26 rib-like elongated tooth 22.
- this rib-like elongated tooth 22 has a counter flange 20 towards tapered cross section, which results in a counter flange 20 facing narrow edge, which facilitates the penetration into the counter flange 20.
- this in the Fig. 3 illustrated connecting element 18 at least substantially be executed the same again as that in the Fig. 2 illustrated connecting element.
- the teeth 22 of a respective connecting element 18 can also engage in a receiving recess provided in the counter-flange 20 for securing it against rotation.
- the teeth no longer have to be pressed into this counter flange 20 and no longer need to be provided with a tip or narrow edge of the teeth. The protection against rotation is then ensured by the intervention in the receiving recess.
- Fig. 4 shows a schematic partial view of the counter flange 20 of an exemplary embodiment of the vacuum pump assembly according to the invention.
- the counter flange 20 has an elongated recess 24, which is an impression of a depressed long tooth 22 according to Fig. 3 represents, that is was created by pressing a rib-like tooth 22 of a clamping claw 18 according to the invention.
- the mating flange 20 may be provided with a receiving recess made for this purpose for engagement of the at least one tooth 22.
- this counter flange 20 may in particular consist of aluminum, whereby the penetration of the teeth 22 is facilitated.
- Other materials for the mating flange 20 are nevertheless possible.
- FIG. 5 form a vacuum pump 38 and a recipient 40, which are interconnected by means of a plurality of inventive clamping claws 18, a vacuum pump assembly according to the invention.
- Fig. 6 engage a plurality of clamping jaws 18 each with their tooth 22 in a receiving recess 44 a.
- the recesses 44 are each formed as a circumferentially limited, groove or slot-like recess in the counter flange 20. As a result, a radial support is created. In addition, a rotation of the claws 18 is prevented.
- Fig. 8 shows an alternative embodiment in which the mating flange comprises a separate intermediate element 42 in the form of a deposit ring, which can be inserted into the flange of the vacuum chamber (not shown) or in the flange associated with the vacuum chamber.
- the vacuum chamber or its flange need not be adapted and not directly interact with the tooth of the connecting element. Instead, the tooth is pressed into the intermediate element or - as in Fig. 8 shown - engages in each case the tooth 22 in a formed in the intermediate element 42 receiving recess 44 a.
- the intermediate element 42 can be regarded as part of the counter-flange 20.
- the fixation of the connecting elements 18 to the vacuum chamber or to another, the vacuum chamber associated flange portion (not shown) to which or the intermediate element 42 abuts, in turn, can be done by screwing.
- the fixing screws then extend through the passage openings 26 in the claws 18 and through openings 46 formed in the intermediate element 42.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Mutual Connection Of Rods And Tubes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014102680.2A DE102014102680A1 (de) | 2014-02-28 | 2014-02-28 | Vakuumpumpenanordnung |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2913534A2 true EP2913534A2 (fr) | 2015-09-02 |
EP2913534A3 EP2913534A3 (fr) | 2015-09-09 |
EP2913534B1 EP2913534B1 (fr) | 2021-05-19 |
Family
ID=52354904
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP15152122.6A Active EP2913534B1 (fr) | 2014-02-28 | 2015-01-22 | Agencement de pompe à vide |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2913534B1 (fr) |
JP (1) | JP2015165134A (fr) |
DE (1) | DE102014102680A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3171030A1 (fr) * | 2015-11-19 | 2017-05-24 | Pfeiffer Vacuum Gmbh | Pompe à vide |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005020904A1 (de) | 2005-05-07 | 2006-11-09 | Leybold Vacuum Gmbh | Vakuum-Pumpenanordnung |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2062085A (en) * | 1979-10-30 | 1981-05-20 | Pfaudler Werke Ag | Clamping Assemblies and Screw Clamps for Use Therewith |
US4699353A (en) * | 1986-12-31 | 1987-10-13 | Weyer Paul P | Rotary valve actuator |
US6050614A (en) * | 1996-12-17 | 2000-04-18 | General Electric Company | Bolted seal joint assembly |
US20050029417A1 (en) * | 2003-08-08 | 2005-02-10 | Richard Scheps | Mounting bracket for a rotary pump |
DE10342907A1 (de) * | 2003-09-17 | 2005-04-21 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit schnelldrehendem Rotor |
FR2893094B1 (fr) * | 2005-11-10 | 2011-11-11 | Cit Alcatel | Dispositif de fixation pour une pompe a vide |
DE102008028199A1 (de) * | 2008-06-12 | 2009-12-17 | Pfeiffer Vacuum Gmbh | Verbindungselement |
DE102009039120A1 (de) * | 2009-08-28 | 2011-03-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
-
2014
- 2014-02-28 DE DE102014102680.2A patent/DE102014102680A1/de active Pending
-
2015
- 2015-01-22 EP EP15152122.6A patent/EP2913534B1/fr active Active
- 2015-02-24 JP JP2015033586A patent/JP2015165134A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005020904A1 (de) | 2005-05-07 | 2006-11-09 | Leybold Vacuum Gmbh | Vakuum-Pumpenanordnung |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3171030A1 (fr) * | 2015-11-19 | 2017-05-24 | Pfeiffer Vacuum Gmbh | Pompe à vide |
Also Published As
Publication number | Publication date |
---|---|
JP2015165134A (ja) | 2015-09-17 |
EP2913534A3 (fr) | 2015-09-09 |
EP2913534B1 (fr) | 2021-05-19 |
DE102014102680A1 (de) | 2015-09-03 |
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