EP3171030A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3171030A1
EP3171030A1 EP15195364.3A EP15195364A EP3171030A1 EP 3171030 A1 EP3171030 A1 EP 3171030A1 EP 15195364 A EP15195364 A EP 15195364A EP 3171030 A1 EP3171030 A1 EP 3171030A1
Authority
EP
European Patent Office
Prior art keywords
mounting
vacuum pump
external device
opening
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15195364.3A
Other languages
German (de)
English (en)
Other versions
EP3171030B1 (fr
Inventor
Tobias Stoll
Michael Schweighöfer
Martin Lohse
Jan Hofmann
Robert Walz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15195364.3A priority Critical patent/EP3171030B1/fr
Priority to JP2016224789A priority patent/JP6351693B2/ja
Publication of EP3171030A1 publication Critical patent/EP3171030A1/fr
Application granted granted Critical
Publication of EP3171030B1 publication Critical patent/EP3171030B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the present invention relates to a vacuum pump, in particular turbomolecular pump, with a housing having at least one opening which is connectable to an opening of an external device.
  • Vacuum pumps are used in a wide variety of technical processes in order to create a vacuum that is necessary for the respective process.
  • a vacuum pump typically includes a housing that encloses a pumping chamber with a rotor shaft.
  • a pump structure of the vacuum pump is usually arranged in the pump chamber, which conveys a gas present in the pump space or in a region (recipient) to be evacuated from an inlet to an outlet of the vacuum pump.
  • the opening in the housing of the vacuum pump is preferably an inlet through which a gas present in a region to be evacuated is pumped into the housing interior of the vacuum pump.
  • the opening may also be an outlet of the vacuum pump, through which the gas to be evacuated is expelled from the housing.
  • the external device is preferably a recipient, i. an area to be evacuated, which is connected to the opening of a pump inlet.
  • the recipient may be part of a scientific instrument (e.g., mass spectrometer or electron microscope).
  • the external device can also be a backing pump, for example a diaphragm pump, which is connected to an opening of a pump outlet, so that the vacuum pump according to the invention does not have to expel the gas to be pumped against the atmospheric pressure.
  • the preferably cylindrically shaped mounting section can be a flange, in particular a vacuum flange.
  • the mounting portion may for example be formed as an oval, rectangular, square or hexagonal hollow profile.
  • the separate intended for a stress-free mounting mounting member is preferably adapted to the geometry of the mounting portion; it therefore has essentially the same geometry as the mounting section.
  • the mounting element is annular, wherein the mounting portion is then cylindrical.
  • the mounting element is a coupling ring or a cap sleeve, the one or more can be plugged or pushed onto the mounting portion of the housing or a corresponding mounting portion of an external device.
  • the mounting element is preferably made of metal and is preferably formed in one piece.
  • the fixing means of the mounting member for producing the frictional connection between the mounting member and the mounting portion preferably comprises an expanding in the direction of the external device inner surface which forms a groove for receiving a sealing ring with an outer surface of the mounting portion.
  • the fixing means of the mounting member for making the frictional connection between the mounting member and the external device preferably comprises an opposing direction, i. in the direction of the vacuum pump, expanding inner surface which forms a groove for receiving a sealing ring with an outer surface of the mounting portion of the external device.
  • the fixing means is preferably formed integrally with the mounting element.
  • the sealing ring is preferably made of an elastic material (eg rubber) and is pressed under elastic bias in the groove.
  • the groove depth is typically selected so that the seal ring does not fully insert into the cavity formed by the groove during pre-assembly (ie, before the pump is connected to the external device). In other words, the sealing ring can protrude out of the groove. In this sense, it may be preferred be that the groove depth is less than the cross-sectional diameter of the sealing ring.
  • the sealing ring When assembly, i. when connecting an external device to an opening of the vacuum pump by means of the mounting element, the sealing ring either supports itself on the mounting section (eg on a wall or a flange) of the external device or of the vacuum pump and deforms in the course of further assembly, when the mounting member and the corresponding mounting portion move towards each other. In this case, the sealing ring is axially compressed or compressed within the groove and stretched in the radial direction. This causes a clamping action between the fixing means of the mounting member and the outer surface of the mounting portion of the housing opening or the mounting portion of the external device. This results in a frictional connection.
  • the deformability of the sealing ring allows a tolerance compensation between the mounting member and the mounting portion. Vibrations during operation of the pump are also absorbed. In addition, the tolerance compensation causes an improvement in the sealing properties of the pump, since voltage-induced leaks no longer occur.
  • the expanding inner surface of the fixation means is a chamfer or conical surface.
  • the chamfer surface or the conical surface in this case has a bevel or cone angle (inclination angle) between 15 ° and 75 °, preferably between 30 ° and 60 °, particularly preferably between 40 ° and 50 °, in particular of about 45 °.
  • the chamfer width can be, for example, between 0.1 and 4 cm, preferably between 0.2 and 3 cm, particularly preferably between 0.3 and 2 cm.
  • the mounting element in particular the coupling ring, on an inner side acting as a stop shoulder or radial step.
  • the shoulder may abut on attachment of the mounting member to a complementary shoulder or radial step of the mounting portion of the opening or external device so as to define a home position for mounting.
  • the sealing ring can be pressed into this position in the groove formed and preferably remains in this position without jumping out.
  • the mounting element bores and / or radially extending indentations for the axial connection or coupling of the mounting member with the external device or the mounting member with the mounting portion of the vacuum pump.
  • the bores and / or radially extending indentations are preferably distributed uniformly over the circumference of the mounting element.
  • screws or bolts are assigned spacer sleeves to set an optimal distance between the external device and the vacuum pump.
  • the bolts and / or screws may be associated with O-rings, which hold the screws and / or bolts slip-proof or captive in the holes and / or notches.
  • O-rings preferably made of an elastic plastic or rubber O-rings can be inserted through radially extending recesses or slots in the mounting member in the holes and / or radially extending indentations.
  • Such mounting aid facilitates the installation of the pump, especially if it is carried out by one person.
  • the mounting portion of the opening or the mounting portion of the external device may include a positioning aid that cooperates with a mounting device of the external device or the opening of the vacuum pump.
  • the positioning aid sets a starting position for the coupling between the external device and the vacuum pump before the bolts and / or screws of the mounting section are fixed.
  • the positioning aid may be an axial projection of the mounting portion which cooperates with a complementary groove on the side of the external device. In this way mutual slippage during attachment of the bolts and / or screws can be prevented.
  • the positioning aid may also be a centering portion which is inserted into the opening of the external device or the vacuum pump.
  • a first opening in particular a first inlet, is arranged on an axial end face of the vacuum pump (axial opening) with respect to an axis of rotation of a pumping stage arranged in the housing.
  • the housing has at least one second opening, in particular a second inlet, which is arranged on a radial side wall of the housing relative to the axis of rotation (radial opening).
  • both openings have a mounting plane defining mounting portion, wherein the mounting planes of the openings are preferably arranged perpendicular to each other.
  • the vacuum pump may have, in addition to the axial opening, two or more radially arranged openings, in particular inlets.
  • at least one pump stage is arranged between the radial openings, the arrangement of two pump stages being particularly preferred.
  • a pumping stage of a vacuum pump in particular a turbomolecular pump
  • a vacuum pump in particular a turbomolecular pump
  • a vacuum pump usually contains a plurality of pump stages of rotor and stator disks arranged in pairs or in pairs.
  • Each pumping stage when associated with an inlet of the pump, may provide a certain pressure in a recipient connected to the inlet, which pressure increases for pumping stages towards the pump outlet.
  • a pumping stage can also be a backing pump, in particular a molecular pumping stage, for example a Holweck pumping stage or Siegbahn pumping stage.
  • the bearing of the rotor shaft is usually - but not necessarily - a hybrid storage, for example with a ball bearing on an outlet or pre-vacuum side and a magnetic bearing on a high-vacuum side of the pump.
  • Vacuum pumps with two or more, in particular radially arranged, inlets allow the evacuation of several, in particular in series successively arranged, recipients with different, there prevailing pressures.
  • Such pumps typically include two to six inlets along the axis of rotation The pump are arranged spaced from each other.
  • the vacuum pumps usually consist of a stack of successively connected pumping stages within the housing.
  • the pumping stages comprise a turbomolecular unit with at least one set of rotor and stator disks and optionally one or more backing pumps.
  • the highest pumping speed and the lowest pressure range are available at the first intake, ie at all other inlets.
  • the downstream inlets are in higher pressure ranges according to their order and provide lower pumping speeds.
  • the compression ratio - for example for nitrogen - between two radially arranged openings of the pump is greater than 10, in particular greater than or equal to 100.
  • At least two radially arranged openings are surrounded at least in sections by a common mounting section defining a mounting plane.
  • the two radially arranged openings can be sealed against one another such that a first sealing means, in particular a first sealing ring, surrounds both openings, while a second sealing means, in particular a second sealing ring, surrounds only one of the two openings.
  • a first sealing means in particular a first sealing ring
  • a second sealing means in particular a second sealing ring
  • a vacuum pump in particular according to one of the embodiments described above, comprising a housing having at least one opening connectable to an external device, in particular a recipient, connectable opening, the opening at least in sections is surrounded by a mounting device defining a mounting plane.
  • the vacuum pump in each case comprises at least one damping element comprising fastening elements, in particular screws and / or bolts, for the tension-free connection of the mounting device with the external device.
  • the mounting device may in particular be the mounting section described above, which is preferably cylindrical.
  • the platform may have an area that is several times larger than the area of the opening surrounded by the platform.
  • the geometry of the platform is basically arbitrary, but preferably rectangular or round.
  • the external device in particular an opening of the external device, a mounting device of the type described above, to be connected by means of the fasteners with the opening of a vacuum pump.
  • the damping element causes in the coupling of the pump opening associated assembly device to an external device (or vice versa) tolerance compensation.
  • the damping element preferably surrounds a fastening section of the fastening element at least in sections.
  • the damping element comprises a sleeve and / or at least one O-ring.
  • the damping element is a sleeve and / or an O-ring.
  • the damping element consists of an elastomer, in particular of an elastic material, and preferably has a Shore hardness between 70 and 95.
  • the fastening element is a screw and / or bolt, which is surrounded at least in sections by a sleeve below the screw or bolt head, wherein at least one end of the sleeve is assigned an O-ring.
  • the sleeve is flanked at both ends by O-rings.
  • the sleeve and the or the O-rings may have different elasticities.
  • the mounting device bores and / or lateral notches for axial connection with the external device.
  • a damping element in particular a sleeve and / or at least one O-ring, is associated with the bores and / or the lateral notches.
  • the O-ring and / or the sleeve can also act as a loss or slip protection for the fastener.
  • the sleeve can also function as a spacer sleeve to set a desired distance between the external device and mounting device.
  • the sleeve comprises an inner shell and an outer shell, wherein the shells have a different elasticity from each other.
  • the inner jacket is more elastic than the outer.
  • a preferred embodiment of a vacuum pump according to the invention comprises an axially arranged opening, in particular inlet, whose mounting section can be coupled to an external device by means of the separate mounting element. Furthermore, the vacuum pump has at least two radially arranged
  • Openings in particular inlets, which are at least partially surrounded by a mounting device together.
  • the mounting device is coupled with at least one damping element comprehensive fastening element, in particular a screw and / or a bolt to an external device.
  • the mounting planes which are defined by the mounting portion of the axial opening on the one hand and the mounting means of the radial openings on the other hand, are arranged perpendicular to each other. In this way, it is particularly advantageous possible to couple the vacuum pump voltage-free to the respective external devices, regardless of which opening is coupled first.
  • parts of the vacuum pump are enclosed by a housing of the external device.
  • parts of the vacuum pump in particular frontal parts, may protrude into the housing of an external device. For example, this can be accomplished with mounting sections and / or mounting devices that are recessed from the external device.
  • Another aspect of the invention relates to a vacuum system with a plurality of external devices, in particular receptacles, and at least one vacuum pump according to the invention, wherein at least one external device with an opening, in particular inlet, the voltage is coupled to the pump.
  • the Fig. 1A shows a vacuum pump 10 with a housing 12. Within the housing 12 and not visible at least three pumping stages are arranged, which are assigned to a common rotor shaft. The rotor shaft also defines an axis of rotation A.
  • the vacuum pump 10 has at its axial end face 11 an axial opening 14 and at its radial side wall 13 two radial openings 15a, 15b.
  • the openings 14, 15a, 15b are inlets, to each of which a pumping stage is assigned.
  • the vacuum pump 10 is a split-flow vacuum pump, which enables the pumping of three receivers, which can be connected to the openings 14, 15a, 15b, in which different pressures prevail.
  • the vacuum pump 10 is shown in cross section.
  • the opening 14 has a round cross-section and is surrounded by a cylindrical mounting portion 18 which defines a mounting plane 16.
  • a mounting member 20a is plugged for stress-free coupling with a recipient.
  • the mounting element 20a is a coupling ring which has on its inside a shoulder 34 which can abut against a shoulder 35 formed on an outer surface 26 of the mounting section 18 (see also FIG Fig. 1 B) ,
  • the mounting member 20a further comprises a fixing means 22a for producing a frictional connection between the mounting member 20a and the mounting portion 18th
  • the fixing means 22a which is detailed in detail in FIG Fig. 1 B is shown, it is a chamfered inner edge of the mounting member 20a with a widening toward the external device towards the inner surface 24.
  • the phase angle or the inclination angle of the inner surface 24 is approximately 45 °, but can be selected larger or smaller if necessary become.
  • the sealing ring 30 is made of an elastomer and has for example a Shore hardness between 70 and 95.
  • the Fig. 1 C shows a detailed view of an external device 70 with a mounting member 20b, with the mounting portion of a vacuum pump according to the invention (not shown) can be coupled.
  • An opening 71 of the external device 70 is surrounded by a mounting portion 73, on which the mounting member 20b is attached.
  • the mounting member 20b comprises a fixing means 22b for establishing a frictional connection between the mounting member 20b and the mounting portion 73 of the external device 70.
  • the fixing means 22b forms with an outer surface 72 of the mounting portion 73 a groove 28 in which a sealing ring 30 is arranged.
  • the mounting member 20a comprises a total of four holes 36, which in each case a slot 38 is assigned, which extends from an outer side of the mounting member 20a radially to the bore 36.
  • Fig. 2A shows a partial cross section of one of the bores 36 of the vacuum pump 10 from Fig. 1A , A detailed view of this cross section is in the Fig. 2B shown.
  • the vacuum pump 10 according to Fig. 2A is in a ready-to-mount state, since screws 39 are already in the holes 36.
  • an O-ring 40 which has been inserted through the slot 38 in the bore 36 before the screw 52 is sunk in the bore 36. If the screw 39 in the bore 36 and through the O-ring 40, the latter prevents slipping or falling out of the screw 39 during assembly.
  • the mounting member 20b according to Fig. 1C can be designed accordingly.
  • the pump 10 according to the Figs. 1A, 1B and 2A, 2B also has a mounting device 46b, which surrounds the openings 15a, 15b.
  • the mounting device 46b defines a mounting plane 44b, which is arranged perpendicular to the mounting plane 16 in the present embodiment (other relative positions of the planes 16, 44b are quite conceivable).
  • the mounting device 46b will be described in more detail below.
  • the mounting member 20a is screwed by means of the screws 39 with a flange or a wall of the external device.
  • the external device moves - seen from the viewpoint of the pump 10 - to the mounting member 20a, and protruding from the groove 28 sealing ring 30 is compressed on further approach in the axial direction.
  • In the radial direction of the sealing ring 30 is stretched, resulting in a clamping action between the fixing means 22 a of the mounting member 20 a and the outer surface 26 of the mounting portion 18 of the vacuum pump 10.
  • This purely frictional connection between the mounting member 20a and the mounting portion 18 keeps the vacuum pump 10 in place relative to the external device.
  • the flexibility of the seal ring 30 also provides a tolerance compensation with respect to the angle that the vacuum pump 10 must occupy relative to the external device. In other words, a certain misalignment - due to mounting and / or vibration - is absorbed and compensated by the sealing ring 30, without sacrificing the tightness properties of the compound.
  • connection of the external device 70 with a vacuum pump is analogous, except that here the mounting member 20b is screwed to the mounting portion of the vacuum pump.
  • a flange on the pump 10 is provided.
  • FIG. 3A shows a vacuum pump 100 according to the invention, which differs from the previously described vacuum pump 10 by the nature of the connecting means with which the axial opening 14 coupled to an external device becomes.
  • the remaining features of the vacuum pump 100 reference may be made to the previous embodiments.
  • the vacuum pump 100 includes a mounting device 46a that surrounds the axial opening 14 and defines a mounting plane 44a. Furthermore, the vacuum pump 100 comprises a further mounting device 46b, which surrounds the radial openings 15a, 15b (not visible) and defines a mounting plane 44b.
  • the mounting planes 44a, 44b are arranged perpendicular to each other (other relative positions of the planes 44a, 44b are quite conceivable).
  • the mounting device 46a has four holes 54, of which only two are visible due to the presentation.
  • the mounting means 46b associated with the radial openings 15a, 15b has a total of four notches 56, of which only two are visible due to the illustration.
  • Each bore 54 and each notch 56 is a fastener 50, in the present case screws 52 assigned.
  • the screws 52 are partially surrounded by a damping element 47, which allows a voltage-free connection with an external device.
  • the damping element 47 which surrounds the screws 52 of the mounting device 46b in sections, comprises two O-rings 49 and arranged between the O-rings 49 sleeve 48.
  • the screws 52 of the mounting device 46a are surrounded by a damping element 47 in sections, which a sleeve 48th and only one O-ring 49 includes.
  • rings with a rectangular cross-section can be used if necessary.
  • FIG. 3B The detailed view of a screw 52 received by a notch 56 of the mounting device 46b with a longitudinal axis A S according to FIG Fig. 3B shows that an associated with the screw head 53 O-ring 49 on one side 57 of Mounting device 46b is applied.
  • An O-ring 49 assigned to the end of the screw 55 is partially arranged in a recess 58, which partially surrounds the lateral notch 56, on the side 57 of the mounting device 46b opposite the side 57.
  • the screw head 53 associated O-ring 49 has a rectangular cross-sectional area and is wider than the end of the screw 55 associated O-ring 49, which has a round cross-sectional area.
  • a sleeve 48 is arranged, which also acts as a spacer sleeve and thus prevents excessive compression of the O-rings 49 during assembly.
  • Both the O-rings 49 and the sleeve 48 - possibly also the damping element 47 - consist for example of an elastomer, which in particular has a Shore hardness between 70 and 95.
  • the longitudinal screw axis A S it is necessary for the longitudinal screw axis A S to coincide with a longitudinal axis of the corresponding bores or bores (ie, external device and vacuum pump 100).
  • the damping elements 47 surrounding the screws 52 in sections introduce a certain tolerance with respect to this requirement.
  • the damping element 47 partially surrounding the screws 52 is able to compensate for inclinations of the screws 52 in the bores 54 caused by material defects / vibration and / or occurring during installation, without impairing the tightness of the connection.
  • Fig. 4 shows the vacuum pump 100 Fig. 3A , wherein the representation of the mounting device 46a has been omitted for reasons of clarity.
  • Recognizable in this illustration is the axial opening 14, which is surrounded by a sealing ring 60.
  • the opening 14 has a cylindrical positioning aid 42 which is connected to a complementary portion of an external device to be connected cooperates (eg, in this is plugged) to facilitate the assembly of the vacuum pump 100.
  • Visible in this illustration are also the radial openings 15a, 15b, which are jointly surrounded by the mounting device 46b.
  • Fig. 5 shows the radial openings 15a, 15b and the surrounding mounting device 46b from above.
  • the openings 15a, 15b have approximately the same axial width L B , wherein the axial distance L A between the openings 15a, 15b is smaller than L B.
  • the distance L A is preferably by a factor 0.75, in particular 0.5, smaller than the length L B.
  • the openings 15a, 15b are surrounded by a sealing means 62a which seals both openings from the environment / atmosphere when the mounting means 46b is coupled to an external device.
  • a sealing means 62a which seals both openings from the environment / atmosphere when the mounting means 46b is coupled to an external device.
  • the opening 15a is surrounded by a sealing means 62b.
  • an external device comprising two regions to be evacuated can be coupled to the mounting device 46b.
  • the sealing means 62a, 62b are, for example, annular rubber seals with a Shore hardness between 70 and 95.
  • sealing means 62a, 62b Due to the special arrangement of the sealing means 62a, 62b, it is possible to keep the distance L A between the openings 15a, 15b low, since only one opening 15a has to be surrounded by a sealing means 62b in order to seal the openings 15a, 15b against each other realize.
  • the axial length of the pump L C can also be kept low in this way and is typically by a factor of 2.5, preferably 2.4, more preferably 2.3, smaller than the diameter of a rotor disk, as in the interior of the vacuum pump 10th , 100 is arranged.
  • the ratio of the axial length L B to the rotor diameter is preferably less than 1/4, more preferably less than 9/40, in particular less than 1/5.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP15195364.3A 2015-11-19 2015-11-19 Pompe à vide Active EP3171030B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15195364.3A EP3171030B1 (fr) 2015-11-19 2015-11-19 Pompe à vide
JP2016224789A JP6351693B2 (ja) 2015-11-19 2016-11-18 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15195364.3A EP3171030B1 (fr) 2015-11-19 2015-11-19 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3171030A1 true EP3171030A1 (fr) 2017-05-24
EP3171030B1 EP3171030B1 (fr) 2020-01-08

Family

ID=54601693

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15195364.3A Active EP3171030B1 (fr) 2015-11-19 2015-11-19 Pompe à vide

Country Status (2)

Country Link
EP (1) EP3171030B1 (fr)
JP (1) JP6351693B2 (fr)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5163712A (en) * 1991-10-28 1992-11-17 Varian Associates, Inc. Rotatable vacuum flange
EP1302667A1 (fr) * 2001-10-15 2003-04-16 The BOC Group plc Pompes à vide
DE102004012677A1 (de) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Vakuumsystem
DE102005020904A1 (de) * 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung
EP1837521A1 (fr) * 2004-12-20 2007-09-26 BOC Edwards Japan Limited Structure pour relier des parties d'extrémité et système de vide utilisant cette structure
EP2913534A2 (fr) * 2014-02-28 2015-09-02 Pfeiffer Vacuum GmbH Agencement de pompe à vide
EP2918843A1 (fr) * 2014-03-14 2015-09-16 Pfeiffer Vacuum Gmbh Amortisseur pour pompes à vide

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5163712A (en) * 1991-10-28 1992-11-17 Varian Associates, Inc. Rotatable vacuum flange
EP1302667A1 (fr) * 2001-10-15 2003-04-16 The BOC Group plc Pompes à vide
DE102004012677A1 (de) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Vakuumsystem
EP1837521A1 (fr) * 2004-12-20 2007-09-26 BOC Edwards Japan Limited Structure pour relier des parties d'extrémité et système de vide utilisant cette structure
DE102005020904A1 (de) * 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung
EP2913534A2 (fr) * 2014-02-28 2015-09-02 Pfeiffer Vacuum GmbH Agencement de pompe à vide
EP2918843A1 (fr) * 2014-03-14 2015-09-16 Pfeiffer Vacuum Gmbh Amortisseur pour pompes à vide

Also Published As

Publication number Publication date
JP6351693B2 (ja) 2018-07-04
JP2017096286A (ja) 2017-06-01
EP3171030B1 (fr) 2020-01-08

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