EP2913534B1 - Agencement de pompe à vide - Google Patents

Agencement de pompe à vide Download PDF

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Publication number
EP2913534B1
EP2913534B1 EP15152122.6A EP15152122A EP2913534B1 EP 2913534 B1 EP2913534 B1 EP 2913534B1 EP 15152122 A EP15152122 A EP 15152122A EP 2913534 B1 EP2913534 B1 EP 2913534B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
flange
connection element
pump arrangement
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15152122.6A
Other languages
German (de)
English (en)
Other versions
EP2913534A3 (fr
EP2913534A2 (fr
Inventor
Robert Watz
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2913534A2 publication Critical patent/EP2913534A2/fr
Publication of EP2913534A3 publication Critical patent/EP2913534A3/fr
Application granted granted Critical
Publication of EP2913534B1 publication Critical patent/EP2913534B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/60Mounting; Assembling; Disassembling
    • F04D29/601Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a vacuum pump arrangement, in particular a turbo-molecular pump arrangement, with a vacuum pump, in particular a turbo-molecular pump, comprising a rotor, a stator and a housing, with at least one connecting element via which the vacuum pump can be connected to a vacuum chamber, the connecting element being connected to a pump flange assigned to the pump housing can be brought into engagement and can be fixed on a mating flange assigned to the vacuum chamber, and with at least one separate intermediate element, in particular designed as an insert ring.
  • Vacuum pumps such as turbo-molecular pumps can be connected to the vacuum chamber via connecting elements such as, in particular, so-called claws, in order to generate a vacuum in a vacuum chamber or in a recipient.
  • Claws of the type in question are basically known clamping elements with which parts can be fastened to one another.
  • a respective claw can be fastened to the vacuum chamber housing in particular by means of a clamping screw.
  • a reliable attachment of the vacuum pump to the vacuum chamber housing must be ensured in order to exclude a risk to the operating personnel with a high degree of security.
  • relatively high moments suddenly occur, which are transferred from the rotor via the stator to the pump housing and from there via the claws to the vacuum chamber housing become.
  • the pump housing can twist in relation to the vacuum chamber housing, which can damage the vacuum chamber housing in the area of the fastening of the claws.
  • EP 2 133 581 A2 The state of the art is also given on EP 2 290 242 A2 as well as on EP 2 290 242 A2 referenced.
  • the invention is therefore based on the object of specifying an improved vacuum pump arrangement of the type mentioned, which ensures reliable protection against twisting of the connecting elements with a structurally simplified and correspondingly more cost-effective connection between the vacuum pump and the vacuum chamber and correspondingly simplified assembly.
  • the vacuum pump arrangement according to the invention is characterized in that the connecting element is provided with at least one tooth which, when the connecting element is fixed to the mating flange and when the intermediate element is arranged between the mating flange and the connecting element, is pressed into the intermediate element to secure it against rotation or into an in engages the intermediate element provided receiving recess.
  • the connecting element is preferably provided with at least two teeth that are spaced apart from one another. Alternatively, at least one rib-like, elongated tooth can be provided.
  • the assembly is also correspondingly simplified. Since the tooth or teeth are also pressed directly into the material of the intermediate element or engage in the receiving recess provided in this when a respective connecting element is fixed to the counterflange, the connecting elements are prevented from rotating under load relative to the counterflange.
  • the connecting element is provided with at least one tooth which is elongated in the manner of a rib.
  • the connecting element can only have precisely one tooth, which is elongated in the manner of a rib, in order to secure it against rotation.
  • the connecting element is preferably provided with at least one through opening for a fixing element, in particular a tensioning screw, by means of which it can be fixed on the mating flange. If a clamping screw is provided as the fixing element, the mating flange is expediently provided with a threaded hole into which the fixing screw engages.
  • a respective connecting element is provided with at least one tooth to secure against rotation, which is pressed into the intermediate element or engages in a receiving recess provided in this, a single fixing element or a single screw is sufficient for fastening the connecting element to the counter flange, whereby in particular, assembly is also facilitated.
  • the mating flange is made of aluminum.
  • the connecting element can in particular be designed as a clamping element or claw or comprise a claw-like base body.
  • the pump flange preferably has an in particular annular groove into which a shoulder of the connecting element engages.
  • Fig. 1 shows a perspective view of a conventional claw-like connecting element 10.
  • a connecting element 10 is used to connect a vacuum pump comprising a rotor and a stator to a vacuum chamber or a recipient.
  • the connecting element 10 is provided with a shoulder 12 which engages in a circular groove of a pump flange.
  • the connecting element 10 is provided with a through opening 14 for a fixing screw 16, by means of which it can be fixed to a mating flange of the vacuum chamber.
  • the vacuum pump is attached to the vacuum chamber via several such connecting elements 10. With such connecting elements, however, there is now the risk that they will rotate under load, as explained at the beginning.
  • Fig. 2 shows a schematic representation of an exemplary embodiment of a connecting element according to the invention of a vacuum pump arrangement according to the invention, which can in particular be a turbo-molecular pump arrangement.
  • the vacuum pump arrangement in question comprises a vacuum pump having a rotor, a stator and a housing, in particular a turbo molecular pump, which can be connected to a vacuum chamber via at least one such connecting element 18.
  • the connecting element 18 can be brought into engagement with a pump flange assigned to the pump housing and on a mating flange 20 assigned to the vacuum chamber (see also FIG Fig. 4 ) fixable.
  • a direct fixation of the connecting element 18 on the mating flange 20 without an intermediate element is not part of the invention.
  • the connecting element 18 is provided with at least one tooth 22 which, when the connecting element 18 is fixed to the mating flange 20, is pressed into the mating flange 20 to secure it against rotation or engages in a receiving recess provided in the mating flange 20.
  • the receiving recess can be omitted.
  • the at least one tooth 22 of the connecting element 18 is pressed into the intermediate element or engages in a receiving recess provided in the intermediate element. If such an interaction of the connecting element 18 with the counter flange 20 is mentioned below, then this does not belong to the invention.
  • the invention includes a corresponding interaction of the connecting element 18 with the intermediate element.
  • the connecting element 18 can in particular be provided with at least two spaced apart teeth 22, the connecting element according to the in FIG Fig. 2 illustrated embodiment has exactly two such teeth 22. How with the Fig. 2 can be seen, the Teeth 22 have a pointed shape, with which they can be more easily pressed into the mating flange 20.
  • the connecting element 18 can be provided with a through opening 26 for a fixing element 28 such as, in particular, a tensioning screw or the like, by means of which it can be fixed to the mating flange 20.
  • a fixing element 28 such as, in particular, a tensioning screw or the like
  • the counter flange 20 can be provided with a threaded hole 30 (cf. Fig. 4 ) into which the fixing screw engages.
  • the connecting element 18 can be fixed to the mating flange 20 via just one fixing element 28 or just one clamping screw, whereby the assembly is considerably simplified. Rotation of the connecting element 18 under load is prevented by the teeth 22 engaging with the mating flange 20.
  • the connecting element 18 can in particular comprise a claw-like base body 32 and be provided with a shoulder 34 which engages in a particularly circular groove of a pump flange.
  • Fig. 3 shows a schematic representation of a further exemplary embodiment of a connecting element 18 according to the invention, which is provided with a tooth 22 which is elongated in a rib-like manner transversely to the longitudinal direction of the through opening 26.
  • This rib-like elongated tooth 22 has a cross-section that tapers towards the counter flange 20, which results in a narrow edge facing the counter flange 20, which makes it easier to penetrate the counter flange 20. Incidentally, this can be done in the Fig. 3
  • the connecting element 18 shown can be made at least essentially the same as that in FIG Fig. 2 shown connecting element.
  • the teeth 22 of a respective connecting element 18 can also engage in a receiving recess provided in the mating flange 20 to secure it against rotation.
  • the teeth no longer have to be pressed into this counter flange 20 and the teeth no longer need to be provided with a point or a narrow edge. Securing against rotation is then already ensured by engaging the receiving recess.
  • Fig. 4 shows a schematic partial representation of the counter flange 20 of an exemplary embodiment of a vacuum pump arrangement not belonging to the invention due to the lack of an intermediate element.
  • the mating flange 20 has an elongated recess 24 which is an impression of an indented long tooth 22 according to FIG Fig. 3 represents, which was thus created by pressing in a rib-like tooth 22 of a clamping claw 18 according to the invention.
  • the mating flange 20 can be provided with a receiving recess produced for this purpose for engagement of the at least one tooth 22.
  • this mating flange 20 can in particular consist of aluminum, whereby the penetration of the teeth 22 is facilitated.
  • Other materials for the counter flange 20 are nevertheless possible.
  • an opening 36 of the vacuum chamber can also be seen, in the area of which the vacuum pump is connected to the vacuum chamber.
  • FIG. 5 A vacuum pump 38 and a recipient 40, which are connected to one another by means of a plurality of clamping claws 18 according to the invention, form a vacuum pump arrangement that does not belong to the invention for lack of an intermediate element.
  • FIG. 6 In the embodiment not belonging to the invention due to the lack of an intermediate element Fig. 6 several clamping claws 18 each engage with their tooth 22 in a receiving recess 44.
  • the depressions 44 are each designed as a groove or slot-like recess in the mating flange 20, which is limited in the circumferential direction. This creates a radial mount. In addition, twisting of the claws 18 is prevented.
  • a receiving recess 44 for all clamping claws 18 is formed in the form of a circumferential groove in the mating flange 20. This configuration also creates a radial mount.
  • Fig. 8 shows an alternative embodiment according to the invention in which the mating flange comprises a separate intermediate element 42 in the form of an insert ring which can be inserted into the flange of the vacuum chamber (not shown) or into the flange assigned to the vacuum chamber.
  • the vacuum chamber or its flange when using such an intermediate element, does not need to be adapted and does not need to interact directly with the tooth of the connecting element. Instead, the tooth is pressed into the intermediate element or - as in Fig. 8 shown - the tooth 22 engages in a receiving recess 44 formed in the intermediate element 42.
  • the intermediate element 42 can be regarded as part of the counter flange 20. Such an arrangement is then not according to the invention, because the counter flange does not belong to a vacuum pump arrangement according to the invention.
  • the fixing of the connecting elements 18 to the vacuum chamber or to a Another flange section (not shown) assigned to the vacuum chamber, on which the intermediate element 42 rests, can in turn take place by screwing.
  • the fixing screws then extend through the through openings 26 in the claws 18 and through openings 46 formed in the intermediate element 42.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Mutual Connection Of Rods And Tubes (AREA)

Claims (10)

  1. Agencement de pompe à vide, en particulier agencement de pompe turbomoléculaire, comprenant
    une pompe à vide (38), en particulier une pompe turbomoléculaire, qui comprend un rotor, un stator et un carter,
    au moins un élément de liaison (18) permettant de relier la pompe à vide (38) à une chambre à vide (40), l'élément de liaison (18) pouvant être amené en engagement avec une bride de pompe associée au carter de pompe et être fixé à une contre-bride (20) associée à la chambre à vide (40), et au moins un élément intermédiaire séparé (42), réalisé en particulier sous forme de bague d'insertion,
    caractérisé en ce que
    afin de bloquer l'élément de liaison (18) à l'encontre d'une rotation, il est pourvu d'au moins une dent (22) qui, lorsque l'élément de liaison (18) est fixé à la contre-bride (20) et que l'élément intermédiaire (42) est agencé entre la contre-bride (20) et l'élément de liaison (18), est enfoncée dans l'élément intermédiaire (42) ou s'engage dans une cavité de réception (44) prévue dans l'élément intermédiaire (42).
  2. Agencement de pompe à vide selon la revendication 1,
    caractérisé en ce que
    l'élément de liaison (18) est pourvu d'au moins deux dents (22) qui présentent une distance l'une de l'autre.
  3. Agencement de pompe à vide selon la revendication 1 ou 2,
    caractérisé en ce que
    l'élément de liaison (18) est pourvu d'une dent (22) allongée en forme de nervure.
  4. Agencement de pompe à vide selon l'une des revendications précédentes, caractérisé en ce que
    l'élément de liaison (18) est pourvu d'au moins une ouverture traversante (26) pour un élément de fixation (28), en particulier pour une vis de fixation, permettant de le fixer à la contre-bride (20).
  5. Agencement de pompe à vide selon la revendication 4,
    caractérisé en ce que
    une vis de fixation est prévue comme élément de fixation (28), et la contre-bride (20) est pourvue d'un alésage taraudé (30) dans lequel s'engage la vis de fixation.
  6. Agencement de pompe à vide selon la revendication 4 ou 5,
    caractérisé en ce que
    l'élément de liaison (18) peut être fixé à la contre-bride (20) par l'intermédiaire d'un seul et unique élément de fixation (28), en particulier d'une seule et unique vis de fixation.
  7. Agencement de pompe à vide selon l'une des revendications précédentes, caractérisé en ce que
    la contre-bride (20) est en aluminium.
  8. Agencement de pompe à vide selon l'une des revendications précédentes, caractérisé en ce que
    l'élément de liaison (18) est réalisé sous forme d'élément de serrage ou de griffe ou comprend un corps de base (32) en forme de griffe.
  9. Agencement de pompe à vide selon l'une des revendications précédentes, caractérisé en ce que
    la bride de pompe présente une rainure, en particulier en forme d'anneau circulaire, dans laquelle s'engage un talon (34) de l'élément de liaison (18).
  10. Agencement de pompe à vide selon l'une des revendications précédentes, caractérisé en ce que
    au moins une cavité de réception (44) est ménagée dans l'élément intermédiaire (42), dans laquelle s'engage l'élément de liaison (18) à l'état fixé, la cavité de réception (44) étant délimitée dans la direction circonférentielle ou étant réalisée sous forme de rainure circonférentielle.
EP15152122.6A 2014-02-28 2015-01-22 Agencement de pompe à vide Active EP2913534B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014102680.2A DE102014102680A1 (de) 2014-02-28 2014-02-28 Vakuumpumpenanordnung

Publications (3)

Publication Number Publication Date
EP2913534A2 EP2913534A2 (fr) 2015-09-02
EP2913534A3 EP2913534A3 (fr) 2015-09-09
EP2913534B1 true EP2913534B1 (fr) 2021-05-19

Family

ID=52354904

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15152122.6A Active EP2913534B1 (fr) 2014-02-28 2015-01-22 Agencement de pompe à vide

Country Status (3)

Country Link
EP (1) EP2913534B1 (fr)
JP (1) JP2015165134A (fr)
DE (1) DE102014102680A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3171030B1 (fr) * 2015-11-19 2020-01-08 Pfeiffer Vacuum Gmbh Pompe à vide

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2062085A (en) * 1979-10-30 1981-05-20 Pfaudler Werke Ag Clamping Assemblies and Screw Clamps for Use Therewith
US4699353A (en) * 1986-12-31 1987-10-13 Weyer Paul P Rotary valve actuator
US6050614A (en) * 1996-12-17 2000-04-18 General Electric Company Bolted seal joint assembly
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
DE10342907A1 (de) * 2003-09-17 2005-04-21 Pfeiffer Vacuum Gmbh Vakuumpumpe mit schnelldrehendem Rotor
DE102005020904A1 (de) 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung
FR2893094B1 (fr) * 2005-11-10 2011-11-11 Cit Alcatel Dispositif de fixation pour une pompe a vide
DE102008028199A1 (de) * 2008-06-12 2009-12-17 Pfeiffer Vacuum Gmbh Verbindungselement
DE102009039120A1 (de) * 2009-08-28 2011-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
EP2913534A3 (fr) 2015-09-09
JP2015165134A (ja) 2015-09-17
DE102014102680A1 (de) 2015-09-03
EP2913534A2 (fr) 2015-09-02

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