DE102015207401A1 - Wire guide roller for a wire saw - Google Patents

Abstract

Wire guide roller (10, 20) for a wire saw for the production of semiconductor wafers with a tubular jacket (12, 22) and two frontally arranged force introduction elements (11, 13, 21, 23) which are respectively connected to the jacket (12, 22), wherein at least one of the force introduction elements (11, 13, 21, 23) has a Hirth toothing (2) for transmitting power from the drive to the wire guide roller (10, 20).

Description

The invention relates to a wire guide roller for a wire saw for the production of semiconductor wafers with a tubular jacket and two frontally arranged force introduction elements, which are each connected to the jacket. The task of these rollers is to guide the wire field of the wire saw and to drive at the same time. For this purpose, power must be transferred from the drive via the end face of the wire guide roller to the jacket. The wire field is formed from one or more saw wires, which are stretched parallel over the rotatably mounted wire guide rollers. If a semiconductor block is now pressed into the clamped and rotating wire field, then the parallel wire sections cut the semiconductor block into thin slices. This requires a particularly high level of precision.

In the DE 1020011083175 A1 Examples of the execution of a wire guide roller are given. These wire guide rollers have an outer jacket with an additional coating for guiding the wires and an inner tube. The inner tube and the jacket are connected via two force introduction elements arranged at each end face. Through threaded holes, the force application elements can be connected to a drive.

A disadvantage of this type of execution is that the glands are extremely loaded and an uneven force is introduced into the roll when a deviation from the ideal state occurs with exactly plane-parallel alignment of the roll end face. Such a deviation always occurs in the above embodiment due to flimsy of the wire guide roller and the high radial load through the tensioned wire field. This leads via increased friction in the bearing to a high alternating load in the joining surface between force application element and roller and possibly also to a faster wear of the wire grooves in relation to the wire guide roller. This reduces the service life of the rollers.

The object of the invention is therefore to develop an improved design of such a wire guide roller having lower deviations and longer life in real operation.

The object is achieved by a wire guide roller according to claim 1. At least one of the force introduction elements has a Hirth toothing for transmitting power from the drive to the wire guide roller. A Hirth toothing is an axially acting, face-side toothing, also called plan-notch toothing. With such a toothing on the force introduction element, a more homogeneous transmission of force to the wire guide roller can be achieved. It provides a flat force input and thus relieves the joining surfaces between force application element and roll shell. The life of such a wire guide roller is significantly extended. The Hirth toothing also has the advantage that it acts self-centering.

Further advantageous features of the embodiment according to the invention, which further improve the power transmission and the service life, can be found in the subclaims.

In a preferred embodiment, the force introduction element with the Hirth toothing is designed in two parts, wherein a first part is connected to the casing and a second part has the Hirth toothing, and is screwed to the first part. Due to the two-part design, the first part can be reworked on the front side after being introduced into the roll shell, before it is connected to the second part of the Hirth toothing. As a result, the effects of flat strokes of the roller body are lower.

Alternatively, the force introduction element with the Hirth toothing can be made in one piece. This offers the advantage that there is no further joining surface. In this case, the Hirth toothing can be applied only after the insertion of the force introduction element in the jacket. Thus, the concentricity properties of the wire guide roller in the application of the teeth are taken into account.

In an advantageous embodiment, the force introduction elements are shrunk or pressed into the jacket. Thus, a reliable power transmission is guaranteed.

Furthermore, the force introduction element with the Hirth toothing can have bores via which a screw connection with a drive element, which in turn has a Hirth toothing, is possible. As a result, an axial tension is achieved, which allows the full adhesion between the two components with Hirth toothing. However, the axial tension between the drive element and the force introduction element necessary for full power transmission via the Hirth toothing can also be applied without screwing.

In a particularly preferred embodiment, the two force introduction elements are additionally connected to one another via an inner tube.

In order to allow overhaul of the roller after wear of the wire grooves, it is of Advantage, if on the jacket on the outside a coating with grooves for guiding wires of the wire saw is present. The coating can then be ground and renewed if necessary.

By way of embodiments, further advantageous embodiments of the invention will be explained with reference to the drawings. The features mentioned can not only be implemented advantageously in the illustrated combination, but also individually combined with each other. The figures show in detail:

1 Wire saw with two wire guide rollers according to the invention

2 Force introduction element or part of such with Hirth toothing with complementary drive element

The figures are described in more detail below. 1 shows an arrangement for a wire saw with two parallel wire guide rollers 10 . 20 , Between these is a wire field 30 spanned from one or more circumferential saw wires. Becomes a semiconductor block 40 in the rotating wire field 30 pressed, it is divided into thin slices. On the wire guide rollers 10 . 20 The wire is guided in parallel grooves.

The wire guide rollers according to the invention have a jacket 12 . 22 on and two frontally arranged force introduction elements 11 . 13 respectively 21 . 23 , Not shown in detail is the corresponding Hirth toothing on the front side of the force introduction elements 11 . 21 , About this gearing, the driving force can be introduced evenly and flat. The force introduction elements 11 . 21 can preferably be made in two parts, so that initially the first part with the jacket 12 . 22 is connected, then the front side can be revised and then the second part of the force introduction element 11 . 21 is attached with the Hirth toothing. In particular, by the two-part design, the burden on the wire guide roller 10 . 20 reduced and thus the service life can be increased.

In 2 is a force introduction element or a part thereof 1 shown schematically. This has a Hirth serration on the front 2 on. To drive the wire guide roller is a drive element 1a , which likewise has a frontal Hirth toothing 2a owns, with the Hirth gearing 1a of the force introduction element 1 engaged. 2 shows a section of how the power transmission from the drive to the wire guide roller is done. In a preferred embodiment, the force introduction element 1 Have holes through which it can be screwed to the drive element and thus axially clamped. Likewise, it may have holes, with which the illustrated part of the force introduction element 1 with a first part of the force introduction element, which is connected to the jacket, can be screwed. Optionally, the force introduction element 1 also be connected via the radial outer surfaces directly to the shell of the wire guide roller.

LIST OF REFERENCE NUMBERS

1

 Force introduction element or part of such with Hirth toothing

1a

 Drive element with Hirth toothing

2, 2a

 Face with Hirth toothing

10, 20

 Wire feed roll

11, 13, 21, 23

 Force application element

12, 22

 tubular jacket

30

 wire frame

40

 Semiconductor block

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 1020011083175 A1 [0002]

Claims (7)

Wire guide roller ( 10 . 20 ) for a wire saw for the production of semiconductor wafers with a tubular jacket ( 12 . 22 ) and two frontally arranged force introduction elements ( 11 . 13 . 21 . 23 ), each with the coat ( 12 . 22 ), characterized in that at least one of the force introduction elements ( 11 . 13 . 21 . 23 ) a Hirth gearing ( 2 ) for transmitting power from the drive to the wire guide roller ( 10 . 20 ) having. Wire guide roller according to claim 1, characterized in that the force introduction element ( 11 . 13 . 21 . 23 ) is executed in two parts with the Hirth toothing, wherein a first part with the jacket ( 12 . 22 ) and a second part of the Hirth gearing ( 2 ), and wherein the first and the second part are screwed together. Wire guide roller according to claim 1, characterized in that the force introduction element ( 11 . 13 . 21 . 23 ) is made in one piece with the Hirth toothing. Wire guide roller according to one of the preceding claims, characterized in that the force introduction elements ( 11 . 13 . 21 . 23 ) in the coat ( 12 . 22 ) shrunk or pressed or glued. Wire guide roller according to one of the preceding claims, characterized in that the force introduction element ( 11 . 13 . 21 . 23 ) has bores with the Hirth toothing, via which a screw connection and thus an axial clamping with a drive element ( 1a ), which in turn is a Hirth gearing ( 2a ) is possible. Wire guide roller according to one of the preceding claims, characterized in that the two force introduction elements ( 11 . 13 . 21 . 23 ) are connected to each other via an inner tube. Device according to one of the preceding claims, characterized in that on the jacket ( 12 . 22 ) on the outside a coating with grooves for guiding wires ( 30 ) of the wire saw is present.

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