TW200643308A - A vacuum pump system - Google Patents

A vacuum pump system

Info

Publication number
TW200643308A
TW200643308A TW095112443A TW95112443A TW200643308A TW 200643308 A TW200643308 A TW 200643308A TW 095112443 A TW095112443 A TW 095112443A TW 95112443 A TW95112443 A TW 95112443A TW 200643308 A TW200643308 A TW 200643308A
Authority
TW
Taiwan
Prior art keywords
pump system
pump
vacuum pump
housing
rotor
Prior art date
Application number
TW095112443A
Other languages
Chinese (zh)
Other versions
TWI390112B (en
Inventor
Dirk Kalish
Robert Stolle
Heinz-Dieter Odendahl
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of TW200643308A publication Critical patent/TW200643308A/en
Application granted granted Critical
Publication of TWI390112B publication Critical patent/TWI390112B/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)

Abstract

A vacuum pump system, especially a turbomolecular pump system, comprises a rotor (14) and a stator (16) in a pump housing (10). The pump housing (10) is connected to a vacuum chamber housing (26) through a pump flange (10). Retaining elements (34) are provided for this connection. To avoid a twisting of the retaining elements (34) in the event of a damage, such as the blocking of the rotor (14) and the high moments occurring thereby, the retaining ele-ment (34) comprises an anti-twist means (40) cooperating with the vacuum chamber housing (26).
TW095112443A 2005-05-07 2006-04-07 A vacuum pump system TWI390112B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005020904A DE102005020904A1 (en) 2005-05-07 2005-05-07 Vacuum pump assembly

Publications (2)

Publication Number Publication Date
TW200643308A true TW200643308A (en) 2006-12-16
TWI390112B TWI390112B (en) 2013-03-21

Family

ID=36593111

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095112443A TWI390112B (en) 2005-05-07 2006-04-07 A vacuum pump system

Country Status (9)

Country Link
US (1) US20090068011A1 (en)
EP (1) EP1880111B1 (en)
JP (1) JP2009500549A (en)
CN (1) CN100575711C (en)
AT (1) ATE453802T1 (en)
DE (2) DE102005020904A1 (en)
HK (1) HK1109440A1 (en)
TW (1) TWI390112B (en)
WO (1) WO2006120132A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2893094B1 (en) * 2005-11-10 2011-11-11 Cit Alcatel FIXING DEVICE FOR A VACUUM PUMP
DE102006058672B4 (en) * 2006-12-13 2016-09-15 Pfeiffer Vacuum Gmbh Arrangement with vacuum pump
EP2017480A1 (en) * 2007-06-15 2009-01-21 VARIAN S.p.A. Split joint for vacuum pumps and method for obtaining said joint
DE102008028199A1 (en) * 2008-06-12 2009-12-17 Pfeiffer Vacuum Gmbh connecting element
DE102009013244A1 (en) * 2009-03-14 2010-09-16 Pfeiffer Vacuum Gmbh Arrangement with vacuum pump
GB201314841D0 (en) 2013-08-20 2013-10-02 Thermo Fisher Scient Bremen Multiple port vacuum pump system
DE102013222167B4 (en) * 2013-10-31 2024-07-11 Pfeiffer Vacuum Gmbh Vacuum pump
DE102014102680A1 (en) 2014-02-28 2015-09-03 Pfeiffer Vacuum Gmbh vacuum pump arrangement
EP3059450B1 (en) * 2015-02-17 2018-07-18 Pfeiffer Vacuum Gmbh Fastening device for vacuum pump
EP3067565B1 (en) * 2015-03-13 2020-07-22 Pfeiffer Vacuum Gmbh Vacuum pump
JP6507885B2 (en) * 2015-06-29 2019-05-08 株式会社島津製作所 Vacuum pump
EP3171030B1 (en) * 2015-11-19 2020-01-08 Pfeiffer Vacuum Gmbh Vacuum pump
DE202015008803U1 (en) 2015-12-23 2017-03-24 Leybold Gmbh connecting device
CN107461556B (en) 2016-06-03 2024-05-03 开利公司 Flange connection assembly, assembling and disassembling method thereof, pipeline connection device and cooler unit
GB2579791B (en) * 2018-12-13 2021-07-14 Edwards Ltd Vacuum pump with variable axial position

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Publication number Priority date Publication date Assignee Title
US1062438A (en) * 1912-12-30 1913-05-20 S R Dresser Mfg Co Wrought-metal ring for collar-clamps, &c.
US1637944A (en) * 1925-07-22 1927-08-02 Morgan Construction Co Coupling device
US2443187A (en) * 1944-08-15 1948-06-15 James C Hobbs Pipe coupling
DE1149201B (en) * 1959-07-16 1963-05-22 Demag Ag Detachable connection of two components exposed to unequal temperatures and ring-shaped at their connection point
US3165341A (en) * 1962-07-10 1965-01-12 Star Tank And Filter Corp Clamping devices for mated flanges
US3761114A (en) * 1971-08-30 1973-09-25 Victaulic Co Ltd Pipe to flange couplings
CA995711A (en) * 1972-05-26 1976-08-24 Licentia Patent-Verwaltungs-Gmbh Pipe flange
US3850455A (en) * 1972-11-17 1974-11-26 Caterpillar Tractor Co Strain-limiting connector
US4699353A (en) * 1986-12-31 1987-10-13 Weyer Paul P Rotary valve actuator
US4779900A (en) * 1987-02-11 1988-10-25 Ebaa Iron Inc. Segmented pipe joint retainer glands
JPH0291288U (en) * 1988-12-28 1990-07-19
JP2000073986A (en) * 1998-08-28 2000-03-07 Jeol Ltd Vibration restraining unit for turbo-molecular pump
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
JP2002327698A (en) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd Vacuum pump
JP2003148423A (en) * 2001-11-08 2003-05-21 Ishikawajima Harima Heavy Ind Co Ltd Flange connecting structure
DE10208795A1 (en) * 2002-02-28 2003-09-04 Pfeiffer Vacuum Gmbh Machine with a fast rotating rotor
JP4147042B2 (en) * 2002-03-12 2008-09-10 エドワーズ株式会社 Vacuum pump
JP2003336597A (en) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd Turbo molecular pump
JP4051681B2 (en) * 2003-07-25 2008-02-27 ミネベア株式会社 Axial fan motor
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
DE10342907A1 (en) * 2003-09-17 2005-04-21 Pfeiffer Vacuum Gmbh Vacuum pump with fast rotating rotor

Also Published As

Publication number Publication date
CN101171428A (en) 2008-04-30
EP1880111A1 (en) 2008-01-23
CN100575711C (en) 2009-12-30
HK1109440A1 (en) 2008-06-06
US20090068011A1 (en) 2009-03-12
DE102005020904A1 (en) 2006-11-09
TWI390112B (en) 2013-03-21
ATE453802T1 (en) 2010-01-15
DE502006005788D1 (en) 2010-02-11
EP1880111B1 (en) 2009-12-30
WO2006120132A1 (en) 2006-11-16
JP2009500549A (en) 2009-01-08

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees