GB201205230D0 - Vacuum pump stators and vacuum pumps - Google Patents

Vacuum pump stators and vacuum pumps

Info

Publication number
GB201205230D0
GB201205230D0 GBGB1205230.4A GB201205230A GB201205230D0 GB 201205230 D0 GB201205230 D0 GB 201205230D0 GB 201205230 A GB201205230 A GB 201205230A GB 201205230 D0 GB201205230 D0 GB 201205230D0
Authority
GB
United Kingdom
Prior art keywords
pump
cavities
vacuum pump
rotor
receiving portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB1205230.4A
Other versions
GB2500603A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1205230.4A priority Critical patent/GB2500603A/en
Publication of GB201205230D0 publication Critical patent/GB201205230D0/en
Priority to US13/849,936 priority patent/US20140093412A1/en
Publication of GB2500603A publication Critical patent/GB2500603A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01CROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10Outer members for co-operation with rotary pistons; Casings
    • F01C21/104Stators; Members defining the outer boundaries of the working chamber
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/0096Heating; Cooling
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • F04C18/086Carter
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00Rotary-piston machines or pumps
    • F04C2/08Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Combined booster and primary pump arrangements can be bulky and require separate supplies of purge gas and cooling water. In order to overcome this problem invention provides a vacuum pump in which two or more pumping mechanisms, i.e. the booster pump 52 and main pump 54, are housed in the same stator 56 forming a multi stage vacuum pump 50 with a clam-shell casing. The invention further provides a vacuum pump stator comprising at least two cavities 64 operatively interconnected by a through hole 70 such that the outlet of booster pump 52 is connected to the inlet of the main pump 54 , wherein at least two of the cavities each comprise at least one rotor-receiving portion shaped to receive two or more at least partially intermeshing rotors 66, 68, and wherein an axis of a rotor-receiving portion of a first one of the cavities is offset with respect to an axis of a rotor-receiving portion of a second one of the cavities.
GB1205230.4A 2012-03-26 2012-03-26 Vacuum pump stators and vacuum pumps Withdrawn GB2500603A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1205230.4A GB2500603A (en) 2012-03-26 2012-03-26 Vacuum pump stators and vacuum pumps
US13/849,936 US20140093412A1 (en) 2012-03-26 2013-03-25 Vacuum pump stators and vacuum pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1205230.4A GB2500603A (en) 2012-03-26 2012-03-26 Vacuum pump stators and vacuum pumps

Publications (2)

Publication Number Publication Date
GB201205230D0 true GB201205230D0 (en) 2012-05-09
GB2500603A GB2500603A (en) 2013-10-02

Family

ID=46087083

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1205230.4A Withdrawn GB2500603A (en) 2012-03-26 2012-03-26 Vacuum pump stators and vacuum pumps

Country Status (2)

Country Link
US (1) US20140093412A1 (en)
GB (1) GB2500603A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112128101A (en) * 2020-09-17 2020-12-25 淄博双环真空泵厂 Roots vacuum pump

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2558954B (en) 2017-01-24 2019-10-30 Edwards Ltd Pump sealing
CN108194353B (en) * 2018-02-02 2019-12-13 中山市天元真空设备技术有限公司 Multistage roots dry vacuum pump with independent paired rotor rotating shafts and capable of directly discharging air
JP7179316B2 (en) * 2018-09-05 2022-11-29 株式会社宇野澤組鐵工所 multi-stage roots pump
JP7179315B2 (en) * 2018-09-05 2022-11-29 株式会社宇野澤組鐵工所 multi-stage roots pump
CN109026682A (en) * 2018-09-11 2018-12-18 江阴爱尔姆真空设备有限公司 A kind of new structure and its manufacturing process of rotor
FR3089261B1 (en) * 2018-12-03 2022-05-13 Pfeiffer Vacuum Pumping group
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
GB2623108B (en) * 2022-10-06 2024-10-16 Edwards Ltd Multistage vacuum pump and a stator for a multistage pump

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2481047A (en) * 1945-05-04 1949-09-06 Goodman Mfg Co Mountings for fluid pumps
US2691482A (en) * 1952-07-17 1954-10-12 Equi Flow Inc Method and apparatus for compressing and expanding gases
US2937807A (en) * 1956-12-26 1960-05-24 Heraeus Gmbh W C High vacuum pumps
US3214907A (en) * 1961-04-19 1965-11-02 Martin Erich Multi-stage engine and method for operating the engine by combustion
GB1361604A (en) * 1970-07-09 1974-07-30 Svenska Rotor Maskiner Ab Meshing screw rotor positive-displacement machines
US3910731A (en) * 1970-07-09 1975-10-07 Svenska Rotor Maskiner Ab Screw rotor machine with multiple working spaces interconnected via communication channel in common end plate
USRE29627E (en) * 1974-02-12 1978-05-09 Calspan Corporation Rotary compressor
EP0439660B1 (en) * 1990-02-01 1994-11-23 Aerzener Maschinenfabrik Gmbh Twin-shaft rotary piston machine
JPH05231366A (en) * 1991-07-09 1993-09-07 Ebara Corp Multistage vacuum pump device
JPH0658278A (en) * 1992-08-05 1994-03-01 Ebara Corp Multistage screw type vacuum pump
JP2618826B2 (en) * 1994-03-10 1997-06-11 株式会社アンレット Intercooler-less water-cooled 4-stage roots type vacuum pump
JP2004100594A (en) * 2002-09-10 2004-04-02 Toyota Industries Corp Vacuum pump device
GB0310615D0 (en) * 2003-05-08 2003-06-11 Boc Group Plc Improvements in seal assemblies
GB0620144D0 (en) * 2006-10-11 2006-11-22 Boc Group Plc Vacuum pump
US20090110583A1 (en) * 2007-10-29 2009-04-30 Paul Xiubao Huang Rotary blower with super-charged injection cooling
EP2180188B1 (en) * 2008-10-24 2016-09-07 Edwards Limited Improvements in and relating to Roots pumps
US9273568B2 (en) * 2010-11-17 2016-03-01 Ulvac, Inc. Coupling structure for vacuum exhaust device and vacuum exhaust system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112128101A (en) * 2020-09-17 2020-12-25 淄博双环真空泵厂 Roots vacuum pump

Also Published As

Publication number Publication date
US20140093412A1 (en) 2014-04-03
GB2500603A (en) 2013-10-02

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)