EP2368044A1 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
EP2368044A1
EP2368044A1 EP09774877A EP09774877A EP2368044A1 EP 2368044 A1 EP2368044 A1 EP 2368044A1 EP 09774877 A EP09774877 A EP 09774877A EP 09774877 A EP09774877 A EP 09774877A EP 2368044 A1 EP2368044 A1 EP 2368044A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pump according
fastening
flange
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09774877A
Other languages
German (de)
French (fr)
Other versions
EP2368044B1 (en
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2368044A1 publication Critical patent/EP2368044A1/en
Application granted granted Critical
Publication of EP2368044B1 publication Critical patent/EP2368044B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump.
  • Turbomolecular pumps have a rotor connected to a rotor shaft. Often the Rotorwelie is mounted on one side and the rotor element mounted according to a bell on the free shaft end.
  • the rotor element has essentially radially extending wing disks with rotor blades. Stator disks of the stator element are arranged between the rotor disks.
  • the stator disks are fixed by means of stator rings which completely surround the rotor element.
  • the stator rings are held stationary in the pump housing.
  • Turbomolecular pumps operate at operating speeds of tens of thousands of revolutions per minute. In operation, therefore, the kinetic energy of the rotor is very high. This leads to considerable destructive forces in the case of a rotor crash or rotor burst. The occurring forces are transmitted to the pump housing via the stator elements. This can lead to destruction of the pump housing, which if necessary, parts of the pump housing are thrown away from the pump. This involves a considerable risk of injury in itself.
  • Vacuum pumps have a mounting flange for attachment. In a conventional embodiment, it has mounting holes along a circular line to connect the vacuum pump with screws or bolts over the mounting flange to a dedicated one Attach mounting element.
  • Burstfail in which a connected to the shaft pumping element, such as a rotor of a turbomolecular pump breaks or blocks, the energy occurring due to the sudden braking is transmitted to the pump housing and thus also connected to the Purnpengephase, in particular einstuckig trained mounting flange. This can lead to a tearing of the fastening screw, so that the vacuum pump may fly several meters through the room. This represents a considerable danger potential! represents.
  • EP 1 413 761 In order to absorb part of the energy occurring in a rotor burst, EP 1 413 761 describes different ways of configuring the fastening holes. By such fastening holes should be possible in Burstfail turning the flange by a predetermined angle in the direction of rotation of the pumping element. As a result, on the one hand an energy absorption between the mounting flange and theconseiement to which the pump is attached and on the other hand, an energy absorption by occurring deformations and destruction in Befest Trentsfiansch and in the mounting screws. Although the embodiments of the fastening flange and the fastening holes proposed in EP 1 413 761 bring about an absorption of a part of the energy occurring in the event of a burst, they nevertheless represent production-technically complicated solutions.
  • the object of the invention is therefore to design the attachment holes provided in a mounting flange of a vacuum pump housing in such a way that they are inexpensive to produce and ensure reliable energy absorption.
  • the vacuum pump according to the invention which may be a conventional urburbolekularpumpe or the like, has arranged in a housing pumping elements such as Purnpenrotoren.
  • the at least one pump element is carried on at least one shaft in the pump housing.
  • a shaft carries a plurality of successively arranged Pumpeniemente.
  • the shaft is usually mounted via bearing elements, such as ball or magnetic bearings in the housing.
  • mounting holes are arranged in the mounting flange, along a circular line.
  • the fastening holes are at least partially formed as langiöcher, wherein the longitudinal axis of the slots additionally has an angle not equal to zero degrees to the tangent to the circular line.
  • the longitudinal axis of the fastening holes designed as slots is thus directed inwards or outwards.
  • the longitudinal axis of the elongated holes preferably faces outwards, ie away from the shaft of the vacuum pump, counter to a direction of rotation of the at least one pump element.
  • the opposite side edges of the slots are arranged parallel to each other.
  • the position of the opposite side flanks of the oblong holes in such a way that a one-sided squeezing of the fastening element takes place, such as the screw.
  • the elongated holes are mirror-symmetrical to the longitudinal axis.
  • an adjustment element is additionally provided, which is preferably provided on the mounting flange.
  • the adjustment element can be a pin provided on the fastening flange, which cooperates with a recess arranged in the receiving element.
  • the mounting flange has a flange opening whose width corresponds to an adjustment pin in the tangential direction.
  • the adjustment element additionally as a fastener to use and as adjustment pin to provide a fastener itself as a fastening screw.
  • one of the fastening openings is thus designed as an adjustment opening, with the remaining fastening openings being designed as inclined slots formed according to the invention.
  • the fastening flange described above is a housing component of the vacuum pump.
  • the mounting flange is then connected to a further flange of a housing part. This has the consequence that individual housing parts of the vacuum pump can rotate in the event of a burst against each other.
  • FIG. 1 shows a schematic side view of a vacuum pump
  • Figure 2 is a schematic plan view of the mounting flange
  • Figure 3 is an enlarged view of a trained as La ⁇ gloch
  • a vacuum pump such as a turbomolecular pump, has pumping elements such as rotors 12 in a housing 10. These are shown in the Ausbowungs ⁇ beispie! arranged on a common shaft 14 which is driven by an electric motor 16. The shaft 14 is supported by two ball bearings 18 in the housing 10 in the illustrated embodiment.
  • a mounting flange 20 is connected or integrally formed therewith, the mounting flange 20 is formed as screws 22 fasteners with a receiving element 24, wherein it may also be a Befest Trentsfiansch a vacuum chamber connected.
  • the mounting flange 20 has along a circular line 26 ( Figure 2) a plurality of, in particular at the same distance regularly distributed around the circumference arranged mounting holes 28.
  • One of the fastening holes is designed for adjustment as a radial opening 30.
  • the fastening holes formed as slots 28 are directed in the illustrated embodiment to the outside.
  • a longitudinal axis 32 (FIG. 3) of the oblong holes 28 has an angle ⁇ , which is not equal to zero, in relation to a tangential 34 to the circular line 26.
  • the angle ⁇ is in the range of about 15 °.
  • the tangential 34 and the longitudinal axis 32 of the slot 28 intersect on the circular line 26th
  • the elongated holes in the exemplary embodiment illustrated are aligned outward against a direction of rotation 36 of the shaft 14.
  • the two opposite side edges 44 are formed parallel to each other. Furthermore, the side flanks 44 are formed parallel to the longitudinal axis 32, which corresponds in the embodiment shown in the illustrated embodiment of the slots of the axis of symmetry of the slot 28.
  • an absorption element can be arranged in a free space 46 of the elongated hole 28, ie in the space in which the screw 22 is not located in the conventional fastening state.
  • a suction device In order to unambiguously define the position of the vacuum pump in the state fastened to the receiving element 24, it is preferable to provide a suction device.
  • This is formed in the illustrated embodiment as an adjustment opening 30 ( Figure 2).
  • This has a width b axially to the circular line 26, which corresponds to the width of a Justageuxes
  • a fixing screw 22 is also used as an adjustment pin.
  • the flange opening 30 may be formed as a circular hole or as an elongated hole, wherein the longitudinal axis of this elongated hole extends radially. This depends, for example, on how accessible the hole from the pump side is to insert a screw. In Burstfaii provided in the Fianschö Anlagen devis 30 screw is thus sheared,

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The invention relates to a vacuum pump comprising at least one pump element (12) arranged in a housing (10). The pump element is supported by a shaft (14). A fastening flange (20) is connected to the housing (10) in order to fasten the pump to a holding element (24). The fastening flange comprises fastening holes arranged along a circular line (26). Said fastening holes are designed to absorb energy in the event of bursting as elongated holes (28). The longitudinal axes (32) of the elongated holes (28) have an angle (α) to the tangent lines (34) on the circular line (26) that is not equal to zero.

Description

Vakuumpumpe vacuum pump

Die Erfindung betrifft eine Vakuumpumpe.The invention relates to a vacuum pump.

Turbomolekuiarpumpen weisen ein mit einer Rotorwelle verbundenes Rotoreiement auf. Oft ist die Rotorwelie einseitig gelagert und das Rotorelement entsprechend einer Glocke auf das freie Wellenende montiert. Das Rotoreiement weist im Wesentlichen radial verlaufende Flügelscheiben mit Rotorflügeln auf. Zwischen den Rotorscheiben sind Statorscheiben des Statorelements angeordnet. Die Statorscheiben sind über Statorringe, die das Rotoreiement vollständig umgeben, fixiert. Die Statorringe sind in dem Pumpengehäuse ortsfest gehalten. Turbomolekularpumpen werden mit Betriebs-Drehzahlen von mehreren Zehntausend U/min betrieben. Im Betrieb ist daher die kinetische Energie des Rotors sehr hoch. Dies führt im Fall eines Rotor-Crash bzw. Rotor-Burst zu erheblichen Zerstörungskräften. Die auftretenden Kräfte werden über die Statorelemente auf das Pumpengehäuse übertragen. Dies kann zu Zerstörungen des Pumpengehäuses führen, wobei ggf, Teile des Pumpengehäuses von der Pumpe weg geschleudert werden. Dies birgt eine erhebliche Verletzungsgefahr in sich.Turbomolecular pumps have a rotor connected to a rotor shaft. Often the Rotorwelie is mounted on one side and the rotor element mounted according to a bell on the free shaft end. The rotor element has essentially radially extending wing disks with rotor blades. Stator disks of the stator element are arranged between the rotor disks. The stator disks are fixed by means of stator rings which completely surround the rotor element. The stator rings are held stationary in the pump housing. Turbomolecular pumps operate at operating speeds of tens of thousands of revolutions per minute. In operation, therefore, the kinetic energy of the rotor is very high. This leads to considerable destructive forces in the case of a rotor crash or rotor burst. The occurring forces are transmitted to the pump housing via the stator elements. This can lead to destruction of the pump housing, which if necessary, parts of the pump housing are thrown away from the pump. This involves a considerable risk of injury in itself.

Vakuumpumpen weisen zur Befestigung einen Befestigungsflansch auf. In herkömmlicher Ausführungsform weist dieser entlang einer Kreislinie Befestigungsbohrungen auf, um die Vakuumpumpe mitteis Schrauben oder Bolzen über dem Befestigungsflansch an einem hierfür vorgesehenen Aufnahmeefement zu befestigen. Im Burstfail, in dem ein mit der Welle verbundenes Pumpelement, wie ein Rotor einer Turbomolekularpumpe bricht oder blockiert, wird die durch das schlagartige Abbremsen auftretende Energie auf das Pumpengehäuse und somit auch auf den mit dem Purnpengehäuse verbundenen, insbesondere einstuckig ausgebildeten Befestigungsflansch übertragen. Dies kann zu einem Abreißen der Befestigungsschraube führen, so dass die Vakuumpumpe gegebenenfalls mehrere Meter durch den Raum fliegt. Dies stellt ein erhebliches Gefahrenpotentia! dar.Vacuum pumps have a mounting flange for attachment. In a conventional embodiment, it has mounting holes along a circular line to connect the vacuum pump with screws or bolts over the mounting flange to a dedicated one Attach mounting element. In Burstfail, in which a connected to the shaft pumping element, such as a rotor of a turbomolecular pump breaks or blocks, the energy occurring due to the sudden braking is transmitted to the pump housing and thus also connected to the Purnpengehäuse, in particular einstuckig trained mounting flange. This can lead to a tearing of the fastening screw, so that the vacuum pump may fly several meters through the room. This represents a considerable danger potential! represents.

Um einen Teil der bei einem Rotorburst auftretenden Energie zu absorbieren, sind in EP 1 413 761 unterschiedliche Arten der Ausgestaltung der Befestigungslöcher beschrieben. Durch derartige Befestigungsiöcher soll im Burstfail ein Drehen des Flansches um einen vorgegebenen Winkel in Rotationsrichtung des Pumpelements möglich sein. Hierdurch erfolgt einerseits eine Energieabsorption zwischen dem Befestigungsflansch und dem Aufnahmeeiement, an dem die Pumpe befestigt ist und andererseits eine Energieabsorption durch auftretende Verformungen und Zerstörungen im Befestigungsfiansch sowie in den Befestigungsschrauben. Die in EP 1 413 761 vorgeschlagenen Ausgestaltungen des Befestigungsflansches und der Befestigungslöcher bewirken zwar ein Absorbieren eines Teilen der bei einem Burst auftretenden Energie, stellen jedoch fertigungstechnisch aufwendige Lösungen dar.In order to absorb part of the energy occurring in a rotor burst, EP 1 413 761 describes different ways of configuring the fastening holes. By such fastening holes should be possible in Burstfail turning the flange by a predetermined angle in the direction of rotation of the pumping element. As a result, on the one hand an energy absorption between the mounting flange and the Aufnahmeeiement to which the pump is attached and on the other hand, an energy absorption by occurring deformations and destruction in Befestigungsfiansch and in the mounting screws. Although the embodiments of the fastening flange and the fastening holes proposed in EP 1 413 761 bring about an absorption of a part of the energy occurring in the event of a burst, they nevertheless represent production-technically complicated solutions.

Aufgabe der Erfindung ist es daher, die in einem Befestigungsflansch eines Vakuumpumpengehäuses vorgesehen Befestigungsiöcher derart auszubilden, dass sie kostengünstig herstellbar sind und eine zuverlässige Energieabsorption gewährleisten.The object of the invention is therefore to design the attachment holes provided in a mounting flange of a vacuum pump housing in such a way that they are inexpensive to produce and ensure reliable energy absorption.

Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale des Anspruchs 1. Die erfindungsgemäße Vakuumpumpe, bei der es sich um eine herkömmliche ϊurbomolekularpumpe oder dergleichen handeln kann, weist in einem Gehäuse angeordnete Pumpelemente wie Purnpenrotoren auf. Das mindestens eine Pumpeiement ist auf mindestens einer Welle in dem Pumpengehäuse getragen. Üblicherweise trägt eine Welle mehrere hintereinander angeordnete Pumpeiemente. Die Welle ist üblicherweise über Lagerelemente, wie Kugeloder Magnetlager in dem Gehäuse gelagert. Die Befestigung des Gehäuses erfoigt über einen mit dem Gehäuse verbundenen, insbesondere einstückig ausgebildeten Befestiguπgsfiansch, Hierzu sind in dem Befestigungsflansch, entlang einer Kreislinie Befestigungslöcher angeordnet. Erfindungsgemäß sind die Befestigungslöcher zumindest teilweise als langiöcher ausgebildet, wobei die Längsachse der Langlöcher zusätzlich einen Winkel ungleich null Grad zur Tangentialen an der Kreislinie aufweist. Die Längsachse der als Langlöcher ausgebildeten Befestigungslöcher ist somit nach Innen oder nach außen gerichtet. Dies hat zur Folge, dass beim Auftreten eines Bursts und der damit verbundenen Verdrehung des Befestigungsflansches, nicht nur eine Energieabsorption durch Reibung zwischen dem Befestigungsflansch und dem Aufnahmeelement der Pumpe erfolgt, sondern auch aufgrund der Verformung und/ oder Verschiebung der Befestigungselemente wie der Schrauben nach innen oder außen. Vorteilhaft bei der erfindungsgemäßen Ausgestaltung bzw„ Anordnung der Langlöcher ist es, dass einfach ausgebildete Befestigungslöcher einerseits ein Verdrehen der gesamten Vakuumpumpe im Zerstörungsfall und hiermit eine Energieabsorption durch Reibung und andererseits zusätzlich eine Energieabsorption durch Verformung ermöglichen. Es handelt sich bei dem erfindungsgemäß vorgesehenen einen Winkel zur Tangentialen der Kreislinie der Befestigungslöcher aufweisenden Langlöchern um einfach ausgestalte und somit kostengünstig herstellbare Befestigungsiöcher.The object is achieved according to the invention by the features of claim 1. The vacuum pump according to the invention, which may be a conventional urburbolekularpumpe or the like, has arranged in a housing pumping elements such as Purnpenrotoren. The at least one pump element is carried on at least one shaft in the pump housing. Usually, a shaft carries a plurality of successively arranged Pumpeniemente. The shaft is usually mounted via bearing elements, such as ball or magnetic bearings in the housing. The attachment of the housing erfoigt via a connected to the housing, in particular integrally formed Befestigungsiguπgsfiansch, For this purpose, mounting holes are arranged in the mounting flange, along a circular line. According to the invention, the fastening holes are at least partially formed as langiöcher, wherein the longitudinal axis of the slots additionally has an angle not equal to zero degrees to the tangent to the circular line. The longitudinal axis of the fastening holes designed as slots is thus directed inwards or outwards. This has the consequence that when a burst and the associated rotation of the mounting flange, not only an energy absorption by friction between the mounting flange and the receiving element of the pump takes place, but also due to the deformation and / or displacement of the fasteners such as the screws inwards or outside. It is advantageous in the embodiment according to the invention or "arrangement of the elongated holes that easily formed mounting holes on the one hand allow twisting of the entire vacuum pump in the event of destruction and thus an energy absorption by friction and on the other hand, an energy absorption by deformation. It is at the inventively provided an angle to the tangential of the circular line of the mounting holes having slots to simply ausgestalte and thus inexpensive to produce Befestigungsiöcher.

Die Längsachse der Langlöcher weist vorzugsweise entgegen einer Rotationsrichtung des mindestens einen Pumpenelements nach außen, d.h. von der Welle der Vakuumpumpe weg. In einer einfachen bevorzugten Ausgestaltung sind die einander gegenüberliegenden Seitenflanken der Langlöcher parallel zueinander angeordnet. Es ist jedoch möglich, die einander gegenüberliegenden Seitenflanken derart auszugestalten, dass sie entgegen der Rotationsrichtung des mindestens einen Pumpelements aufeinander zulaufen bzw. sich verjüngen. Durch diese Verringerung des Abstands der Seitenflanken ist es möglich, zusätzlich im BurstfaSI ein Quetschen der Befestigungselemeπte wie der Schrauben, in deren radialer Richtung zu bewirken. Hierdurch erfolgt eine weitere Absorption von Energie. Hierbei ist es möglich, die Lage der einander gegenüberliegenden Seitenflanken der Langlöcher derart auszugestalten, dass ein einseitiges Quetschen des Befestigungselements wie der Schraube erfolgt. Vorzugsweise sind die Langϊöcher zur Längsachse jedoch spiegelsymmetrisch ausgebildet.The longitudinal axis of the elongated holes preferably faces outwards, ie away from the shaft of the vacuum pump, counter to a direction of rotation of the at least one pump element. In a simple preferred embodiment, the opposite side edges of the slots are arranged parallel to each other. However, it is possible to design the mutually opposite side flanks in such a way that they converge towards each other or taper in a direction opposite to the direction of rotation of the at least one pumping element. By this reduction of the distance of the side flanks, it is possible to additionally cause in BurstfaSI a squeezing of Befestigungselemeπte as the screws, in the radial direction. This results in a further absorption of energy. In this case, it is possible to design the position of the opposite side flanks of the oblong holes in such a way that a one-sided squeezing of the fastening element takes place, such as the screw. Preferably, however, the elongated holes are mirror-symmetrical to the longitudinal axis.

Insbesondere bei den Langlöchern mit zueinander parallel verlaufenden Seitenflaπken ist es vorteilhaft, in dem Freiraum, in dem im Befestigungszustand kein Befestigungselement angeordnet ist, ein Absorptionselement vorzusehen. Hierbei kann es sich um ein Element aus relativ weichem Metall oder Kunststoff handeln, das im Burstfal! zusammengequetscht, d.h. verformt wird. Hierdurch ist eine weitere Energieabsorption erzielt.In particular, in the oblong holes with mutually parallel Seitenflaπken it is advantageous to provide an absorption element in the free space in which no fastener is arranged in the fastening state. This can be an element of relatively soft metal or plastic, which in the Burstfal! squeezed together, i. is deformed. As a result, a further energy absorption is achieved.

In bevorzugter Ausfuhrungsform ist zusätzlich ein Justageelement vorgesehen, das vorzugsweise am Befestigungsflansch vorgesehen ist. Durch ein derartiges justageelement ist gewährleistet, dass der Befestigungsflansch der Vakuumpumpe in der richtigen Lage mit dem Aufnahmeelement verbunden wird. Bei dem Justageelement kann es sich um einen am Befestigungsflansch vorgesehenen Stift handeln, der mit einer in dem Aufnahmeefement angeordneten Ausnehmung zusammenwirkt. Besonders bevorzugt ist es, dass der Befestigungsflansch eine Flanschöffnung aufweist, deren Breite in tangentialer Richtung einem Justagestift entspricht. Hierbei ist es wiederum besonders bevorzugt, das Justageelement zusätzlich als Befestigungselement zu nutzen und als Justagestift ein Befestigungselement selbst wie eine Befestigungsschraube vorzusehen. In bevorzugter Ausführungsform ist somit eine der Befestigungsöffnungen als Justageöffnung ausgebildet, wobei die übrigen Befestigungsöffnungen als erfindungsgemäß ausgebildete geneigte Langlöcher ausgebildet sind.In a preferred embodiment, an adjustment element is additionally provided, which is preferably provided on the mounting flange. By such a adjusting element ensures that the mounting flange of the vacuum pump is connected in the correct position with the receiving element. The adjustment element can be a pin provided on the fastening flange, which cooperates with a recess arranged in the receiving element. It is particularly preferred that the mounting flange has a flange opening whose width corresponds to an adjustment pin in the tangential direction. Here, it is again particularly preferred, the adjustment element additionally as a fastener to use and as adjustment pin to provide a fastener itself as a fastening screw. In a preferred embodiment, one of the fastening openings is thus designed as an adjustment opening, with the remaining fastening openings being designed as inclined slots formed according to the invention.

Ebenso ist es möglich, dass der vorstehend beschriebene Befestigungsflansch eine Gehäusekomponente der Vakuumpumpe ist. Der Befestigungsflansch ist sodann mit einem weiteren Flansch eines Gehäuseteils verbunden. Dies hat zur Folge, dass einzelne Gehäuseteile der Vakuumpumpe sich im Falle eines Bursts gegeneinander verdrehen können.It is also possible that the fastening flange described above is a housing component of the vacuum pump. The mounting flange is then connected to a further flange of a housing part. This has the consequence that individual housing parts of the vacuum pump can rotate in the event of a burst against each other.

Nachfolgend wird die Erfindung anhand einer bevorzugten Ausführungsform unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert.The invention will be explained in more detail with reference to a preferred embodiment with reference to the accompanying drawings.

Es zeigen:Show it:

Figur 1 eine schematische Seitenansicht einer Vakuumpumpe,FIG. 1 shows a schematic side view of a vacuum pump,

Figur 2 eine schematische Draufsicht auf den Befestigungsflansch undFigure 2 is a schematic plan view of the mounting flange and

Figur 3 eine vergrößerte Ansicht eines als Laπgloch ausgebildetenFigure 3 is an enlarged view of a trained as Laπgloch

Befestigungslochs.Mounting hole.

Eine Vakuumpumpe wie eine Turbomolekularpumpe weist in einem Gehäuse 10 Pumpelemente wie Rotoren 12 auf. Diese sind im dargestellten Ausfuhrungεbeispie! auf einer gemeinsamen Welle 14 angeordnet, die von einem Elektromotor 16 angetrieben wird. Die Welle 14 ist im dargestellten Ausführungsbeispiel durch zwei Kugellager 18 im Gehäuse 10 gelagert. Mit dem Gehäuse 10 ist ein Befestigungsflansch 20 verbunden bzw. einstückig mit diesem ausgebildet, Der Befestigungsflansch 20 ist über als Schrauben 22 ausgebildete Befestigungselemente mit einem Aufnahmeelement 24, bei dem es sich ebenfalls um einen Befestigungsfiansch einer Vakuumkammer handeln kann, verbunden.A vacuum pump, such as a turbomolecular pump, has pumping elements such as rotors 12 in a housing 10. These are shown in the Ausfuhrungsεbeispie! arranged on a common shaft 14 which is driven by an electric motor 16. The shaft 14 is supported by two ball bearings 18 in the housing 10 in the illustrated embodiment. To the housing 10, a mounting flange 20 is connected or integrally formed therewith, the mounting flange 20 is formed as screws 22 fasteners with a receiving element 24, wherein it may also be a Befestigungsfiansch a vacuum chamber connected.

Der Befestigungsflansch 20 weist entlang einer Kreislinie 26 (Figur 2) mehrere insbesondere im selben Abstand regelmäßig um den Umfang verteilt angeordnete Befestigungslöcher 28 auf. Eines der BefestigungsSöcher ist zur Justage als radiale Öffnung 30 ausgebildet. Die als Langlöcher ausgebildeten Befestigungsiöcher 28 sind im dargestellten Ausführungsbeispiel nach außen gerichtet. Eine Längsachse 32 (Figur 3) der Langlöcher 28 weist gegenüber einer Tangentialen 34 zu der Kreislinie 26 einen Winkel α, der ungleich null ist auf. Vorzugsweise ist der Winkel α in dem Bereich von ca. 15°. Zur Bestimmung des Winkels α schneiden sich im dargestellten Ausfuhrungsbeispiel die Tangentiale 34 und die Längsachse 32 des Langlochs 28 auf der Kreislinie 26.The mounting flange 20 has along a circular line 26 (Figure 2) a plurality of, in particular at the same distance regularly distributed around the circumference arranged mounting holes 28. One of the fastening holes is designed for adjustment as a radial opening 30. The fastening holes formed as slots 28 are directed in the illustrated embodiment to the outside. A longitudinal axis 32 (FIG. 3) of the oblong holes 28 has an angle α, which is not equal to zero, in relation to a tangential 34 to the circular line 26. Preferably, the angle α is in the range of about 15 °. To determine the angle α in the illustrated embodiment, the tangential 34 and the longitudinal axis 32 of the slot 28 intersect on the circular line 26th

Wie insbesondere aus Figur 2 ersichtlich ist, sind die Langlöcher im dargestellten Ausführungsbeispiei nach außen entgegen einer Rotationsrichtung 36 der Welle 14 ausgerichtet.As can be seen in particular from FIG. 2, the elongated holes in the exemplary embodiment illustrated are aligned outward against a direction of rotation 36 of the shaft 14.

Im herkömmlichen Befestigungsfall ist eine Befestigungsschraube 22, wie in Figur 3 dargestellt, in dem Langloch 28 angeordnet. Im Burstfall verschiebt sich die Schraube in dem Langloch 28 nach außen in Richtung eines Pfeils 38. Hierdurch erfolgt ein Verformen des Befestigungsefements 22 neben dem Auftreten von Reibung zwischen einer Flanschinnenseite 40 (Figur 1) und einer Anlageseite 42 des Aufnahmeelements.In the conventional fastening case, a fastening screw 22, as shown in Figure 3, arranged in the slot 28. In case of burst, the screw moves in the slot 28 outward in the direction of an arrow 38. This results in a deformation of the Befestigungssefements 22 next to the occurrence of friction between a Flanschinnenseite 40 (Figure 1) and an abutment side 42 of the receiving element.

Im dargestellten Ausführungsbeispiel sind die beiden einander gegenüberliegenden Seitenflanken 44 parallel zueinander ausgebildet. Ferner sind die Seitenflanken 44 parallel zur Längsachse 32 ausgebildet, die in der im dargestellten Ausfuhrungsbeispiel gezeigten Ausgestaltung der Langlöcher der Symmetrieachse des Langlochs 28 entspricht. Zur zusätzlichen Absorption von Energie kann in einem Freiraurn 46 des Langlochs 28, d.h. in dem Raum, in dem sich im herkömmlichen Befestigungszustand die Schraube 22 nicht befindet, ein Absorptionseiement angeordnet werden.In the illustrated embodiment, the two opposite side edges 44 are formed parallel to each other. Furthermore, the side flanks 44 are formed parallel to the longitudinal axis 32, which corresponds in the embodiment shown in the illustrated embodiment of the slots of the axis of symmetry of the slot 28. For additional absorption of energy, an absorption element can be arranged in a free space 46 of the elongated hole 28, ie in the space in which the screw 22 is not located in the conventional fastening state.

Um die Lage der Vakuumpumpe in an dem Aufnahmeeiement 24 befestigten Zustand eindeutig zu definieren, ist vorzugsweise ein .lustageeiement vorgesehen. Dieses ist im dargestellten Ausführungsbeispiel als Justageöffnung 30 (Figur 2) ausgebildet. Diese weist eine Breite b axial zur Kreislinie 26 auf, die der Breite eines Justagestiftes entspricht In besonders bevorzugter Ausführungsform wird als Justagestift ebenfalls eine Befestigungsschraube 22 verwendet. Die Flanschöffnung 30 kann als kreisrundes Loch oder als Langloch ausgebildet sein, wobei die Längsachse dieses Langlochs radial verläuft. Dies hängt beispielsweise davon ab, wie zugänglich das Loch von der Pumpenseite ist, um eine Schraube einzuführen. Im Burstfaii wird die in der Fianschöffnung 30 vorgesehene Schraube somit abgeschert,In order to unambiguously define the position of the vacuum pump in the state fastened to the receiving element 24, it is preferable to provide a suction device. This is formed in the illustrated embodiment as an adjustment opening 30 (Figure 2). This has a width b axially to the circular line 26, which corresponds to the width of a Justagestiftes In a particularly preferred embodiment, a fixing screw 22 is also used as an adjustment pin. The flange opening 30 may be formed as a circular hole or as an elongated hole, wherein the longitudinal axis of this elongated hole extends radially. This depends, for example, on how accessible the hole from the pump side is to insert a screw. In Burstfaii provided in the Fianschöffnung 30 screw is thus sheared,

Das Vorsehen von schrägen Langlöchern bei engen Montageverhältnissen von der Pumpenseite hat generell den Vorteil, dass das Einführen der Schrauben leichter ist. The provision of oblique slots in tight mounting conditions from the pump side generally has the advantage that the insertion of the screws is easier.

Claims

Ansprücheclaims 1, Vakuumpumpe, mit1, vacuum pump, with mindestens einem in einem Gehäuse (10) angeordneten Pumpelement (12),at least one pumping element (12) arranged in a housing (10), mindestens einer das mindestens eine Pumpelement (12) tragenden Welle (14),at least one shaft (14) carrying the at least one pump element (12), einem mit dem Gehäuse (10) verbundenen Befestigungsffansch (20) undone with the housing (10) connected to the mounting flange (20) and in dem Befestigungsflansch (20) entlang einer Kreislinie (26) angeordneten Befestigungslöchern (28),in the mounting flange (20) along a circular line (26) arranged mounting holes (28), d a d u r c h g e k e n n z e i c h n e t , dassd a d u r c h e c e n c i n e s that die Befestigungslöcher a!s Langlöcher (28) ausgebildet sind, deren Längsachse (32) einen Winkel (α) ungleich null Grad zur Tangentialen (34) an die Kreislinie (26) aufweist.the fastening holes are formed as elongated holes (28) whose longitudinal axis (32) has an angle (α) not equal to zero degrees to the tangential (34) to the circular line (26). 2, Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Längsachse (32) der Langlöcher (28) entgegen einer Rotationsrichtung (36) des mindestens einen Pumpetements (12) nach außen gerichtet ist2, vacuum pump according to claim 1, characterized in that the longitudinal axis (32) of the elongated holes (28) opposite to a direction of rotation (36) of the at least one pumping element (12) is directed outwards 3- Vakuumpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die einander gegenüberliegenden Seitenfianken (44) der Langlöcher (28) zueinander parallel verlaufen,3- Vacuum pump according to claim 1 or 2, characterized in that the opposing Seitenfianken (44) of the elongated holes (28) extend parallel to each other, 4. Vakuumpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die einander gegenüberliegenden Seitenflanken der Langlöcher entgegen der Rotationsrichtung (36) aufeinander zu laufen. 4. Vacuum pump according to claim 1 or 2, characterized in that the opposite side flanks of the elongated holes counter to the direction of rotation (36) to run towards each other. 5. Vakuumpumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die Langlöcher (28) zur Längsachse (22) spiegeisymmetrisch sind.5. Vacuum pump according to one of claims 1 to 4, characterized in that the slots (28) to the longitudinal axis (22) are mirror symmetrical. 6. Vakuumpumpe nach einem der Ansprüche 1 bis 5, gekennzeichnet durch ein in den Laπgiöchern (28) angeordnetes Absorptionselement, das vorzugsweise den im Befestigungszustand im Langloch vorhandenen Freiraum (46) ausfüllt.6. Vacuum pump according to one of claims 1 to 5, characterized by an in the Laπgiöchern (28) arranged absorption element, which preferably fills the existing in the fastening state in the slot free space (46). 7. Vakuumpumpe nach einem der Ansprüche 1 bis 6, gekennzeichnet durch ein vorzugsweise am Befestigungsflansch (20) vorgesehenes Justageelement zur Justage der Vakuumpumpe an ein Aufnahmeelement (24).7. Vacuum pump according to one of claims 1 to 6, characterized by a preferably on the mounting flange (20) provided adjustment element for adjusting the vacuum pump to a receiving element (24). 8. Vakuumpumpe nach Anspruch 7, dadurch gekennzeichnet, dass das Justageelement als Flanschöffnung (30) ausgebildet ist, deren Breite (b) in tangentialer Richtung (34), der eines mit dem Aufnahmeelement (24) verbundenen Justagestiftes entspricht8. Vacuum pump according to claim 7, characterized in that the adjustment element is designed as a flange opening (30), the width (b) in the tangential direction (34), which corresponds to an associated with the receiving element (24) Justagestiftes 9. Vakuumpumpe nach Anspruch 7 oder 8, dadurch gekennzeichnet, dass das Justageelement zusätzlich als Befestigungselement dient, vorzugsweise der Justagestift als Befestigungsschraube ausgebildet ist.9. Vacuum pump according to claim 7 or 8, characterized in that the adjusting element additionally serves as a fastening element, preferably the alignment pin is designed as a fastening screw. 10. Vakuumpumpe nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass der Befestigungsflansch (20) als Gehäuseflansch ausgebildet ist, der mit einem weiteren Gehäuseflansch verbunden ist. 10. Vacuum pump according to one of claims 1 to 9, characterized in that the fastening flange (20) is designed as a housing flange which is connected to a further housing flange.
EP09774877A 2008-12-19 2009-12-08 Vacuum pump Active EP2368044B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200820016905 DE202008016905U1 (en) 2008-12-19 2008-12-19 vacuum pump
PCT/EP2009/066587 WO2010069814A1 (en) 2008-12-19 2009-12-08 Vacuum pump

Publications (2)

Publication Number Publication Date
EP2368044A1 true EP2368044A1 (en) 2011-09-28
EP2368044B1 EP2368044B1 (en) 2012-11-28

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ID=42102409

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Application Number Title Priority Date Filing Date
EP09774877A Active EP2368044B1 (en) 2008-12-19 2009-12-08 Vacuum pump

Country Status (4)

Country Link
EP (1) EP2368044B1 (en)
JP (1) JP5583687B2 (en)
DE (1) DE202008016905U1 (en)
WO (1) WO2010069814A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009039119B4 (en) 2009-08-28 2022-11-03 Pfeiffer Vacuum Gmbh Vacuum pump and arrangement with vacuum pump
DE102013222167B4 (en) * 2013-10-31 2024-07-11 Pfeiffer Vacuum Gmbh Vacuum pump
CN113531986A (en) * 2020-04-17 2021-10-22 海信（山东）冰箱有限公司 Refrigerator with a door

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Publication number Priority date Publication date Assignee Title
JP4484470B2 (en) 2002-10-23 2010-06-16 エドワーズ株式会社 Molecular pump and flange
US7182574B2 (en) * 2004-11-05 2007-02-27 Fasco Industries, Inc. Draft inducer blower with fastener retention
GB0520750D0 (en) * 2005-10-12 2005-11-23 Boc Group Plc Vacuum pumping arrangement
JP4949746B2 (en) * 2006-03-15 2012-06-13 エドワーズ株式会社 Molecular pump and flange
JP2007278164A (en) * 2006-04-06 2007-10-25 Shimadzu Corp Fastening structure and rotary vacuum pump
JP4978489B2 (en) * 2008-01-30 2012-07-18 株式会社島津製作所 Casing flange structure, turbo molecular pump and vacuum pump

Non-Patent Citations (1)

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Title
See references of WO2010069814A1 *

Also Published As

Publication number Publication date
EP2368044B1 (en) 2012-11-28
WO2010069814A1 (en) 2010-06-24
JP2012512984A (en) 2012-06-07
JP5583687B2 (en) 2014-09-03
DE202008016905U1 (en) 2010-05-12

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