EP2209995B1 - Multi-stage pump rotor for turbo-molecular pump - Google Patents

Multi-stage pump rotor for turbo-molecular pump Download PDF

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Publication number
EP2209995B1
EP2209995B1 EP08804453A EP08804453A EP2209995B1 EP 2209995 B1 EP2209995 B1 EP 2209995B1 EP 08804453 A EP08804453 A EP 08804453A EP 08804453 A EP08804453 A EP 08804453A EP 2209995 B1 EP2209995 B1 EP 2209995B1
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EP
European Patent Office
Prior art keywords
rotor
pump
rings
turbomolecular
blade disk
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EP08804453A
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German (de)
French (fr)
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EP2209995A1 (en
Inventor
Heinrich Engländer
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Leybold GmbH
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Oerlikon Leybold Vacuum GmbH
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a multi-stage pump rotor of a turbomolecular pump.
  • Prior art turbomolecular pumps operate at speeds of several 10,000 RPM.
  • the kinetic energy of a pump rotor operated at such a rated speed is in the range of the kinetic energy of a small car at a speed of 50-70 km / h for larger turbomolecular pumps.
  • this high kinetic energy of the rotor represents a high potential for destruction and injury, which can only be mastered with great effort for the mechanical shielding of the rotor.
  • turbomolecular pump pump rotors which are magnetically supported.
  • it is endeavored to arrange at least one radial bearing and the drive motor in the region of the center of gravity of the pump rotor.
  • the pump rotor is bell-shaped to accommodate in the bell cavity within the pump rotor, the magnetic bearing and possibly also the drive motor.
  • the bell-shaped construction of the pump rotor has a design-related mechanical weakening of the rotor result.
  • the usually one-piece turbomolecular pump pump rotors can only be countered by the use of high-strength aluminum alloys because of this design-related weakening, which are extremely expensive.
  • JP 59093993 A EP-A-0 416 841 discloses a turbomolecular pump having circular rotor blades and spacers.
  • JP 61038194 A describes a high-speed rotor which is hollow inside and whose inner diameter is least in a central region and increases in the axial direction of the rotor shaft.
  • JP 60203375 A describes a toroidal rotor for a turbomolecular pump. Along the outer circumference of the annular disc radial slots are formed.
  • JP 2005180265 A describes a vacuum pump with a rotor and a stator in a pump housing, which is cast from a metallic material with high thermal conductivity.
  • the object of the invention is to provide a multi-stage turbomolecular pump pump rotor having improved strength.
  • the pump rotor according to the invention is no longer in one piece and has at least two separate wing disk rings, each with a rotor ring and at least one wing disk.
  • the ends of the two rotor rings of adjacent wing disc rings are on the outside play-free by a cylindrical Arm istsrohr comprises, which is arranged between the adjacent wing discs of the adjacent rotor disc rings.
  • the reinforcing tube is not necessarily the axial and radial fixation of the two rotor rings to each other, but it includes the two rotor rings so tightly that it receives at least a portion of the centrifugal forces in the rotor ring resulting tangential forces and mechanically relieved the rotor rings in this way.
  • the pump rotor is no longer one piece, but designed in several pieces.
  • the pump rotor can be formed from a plurality of rotor rings, each with a single wing disc. Even if a rotor ring by high Centrifugal forces should break tangentially, this fraction remains locally limited to the respective rotor ring and can not readily extend to the entire pump rotor.
  • the respective components are specialized for their function. This makes it possible to optimize both the rotor ring and the reinforcing tube in terms of their function, namely the holding of the rotor blades on the one hand and the inclusion of the tangential forces on the other.
  • the rotor ring may for example consist of inexpensive and average tensile aluminum alloys or other materials.
  • a material is selected that can absorb high tensile forces.
  • the wing disk or the rotor vanes can be made simpler from a manufacturing point of view, or can assume more complex shapes. This can lead to an improvement in the fluid mechanics in the pump stages at higher pressures within the turbomolecular pump receiving the pump rotor.
  • the total weight of the pump rotor can be reduced.
  • the wing disc ring can each, but need not, be integrally formed.
  • the wing disc ring may alternatively be composed of several segments. In the division of the rotor ring into several segments occur in the rotor ring virtually no tangential forces and these are introduced exclusively in the reinforcing tube.
  • the wing disc ring is integrally formed.
  • the closed one-piece wing disc ring is easier to manufacture and assemble.
  • the Arm istsrohr material is different from the material of the wing disc rings.
  • CFRP a material for the reinforcing tube CFRP
  • carbon fiber reinforced plastic is preferably used, which is particularly suitable because of its ability to absorb high tensile forces and because of its low weight as a material for the reinforcing tube.
  • At least one rotor blade disc has a single wing disk made of rotor blades.
  • the Limiting the rotor ring or rings to a single wing disc makes it possible to arrange a reinforcing tube between each pair of wing discs of adjacent wing discs. As a result, a maximum of strength of the pump rotor with respect to the tangential forces is achieved.
  • not all of the impeller disk rings of the pump rotor necessarily have only a single disk disk.
  • wing disc rings are provided with a single wing disc, while in other axial areas of the pump rotor, in which lower tagential forces occur or in which the rotor ring can be built radially stronger in that the wing disc ring concerned may also have two or more wing discs.
  • the wing disc rings are clamped axially axially between two rotor shaft clamping bodies.
  • the rotor rings may, for example, be self-centering with corresponding axial annular grooves and annular lands and be clamped together axially by the two rotor shaft clamping bodies.
  • at least one rotor support body may be provided, onto which the rotor rings of the wing disk rings are pushed.
  • the rotor support body may form the clamping body, but the clamping body may, however, also be formed separately from the rotor support bodies carrying the rotor rings.
  • the rotor support body may be made of a different material than the rotor rings or the reinforcing tubes.
  • the pump rotor has a cavity for receiving a rotor bearing, which is preferably a magnetic bearing.
  • a rotor bearing which is preferably a magnetic bearing.
  • the axial denomination of the pump rotor in individual rotor rings is particularly advantageous because in particular the cavity portion of the pump rotor is exposed due to the limitation of the pump rotor space high tangential loads.
  • each is a multi-stage turbomolecular pump pump rotor 10; 40 shown.
  • the pump rotor 10; 40 can rotate at rated speeds between 20,000 and 100,000 rpm.
  • the two pump rotors 10; 40 are essentially the same structure and differ only in their internal structure.
  • the pump rotor 10 of FIG. 1 is essentially formed by eight wing disc rings 17, which are axially braced together by two by a clamping screw 28 and a shaft 30 axially clamped together clamping body 20, 22. Furthermore, the wing disc rings 17 is followed by a rotor-side Holweck cylinder 32.
  • the pump rotor 10 is not formed in one piece, as is usual in pump rotors according to the prior art, but is composed of a plurality of wing disk rings 17.
  • Each wing disc ring 17 is formed by a closed rotor ring 12, protrude from the radially rotor blades 16 to the outside, which in turn form a wing disc 14.
  • the rotor rings 12 are axially held together by the two axial clamping body 20, 22, which are braced axially by the clamping screw 28 and the shaft 30 together.
  • the two clamping bodies 20, 22 each also form outer cylindrical rotor support bodies 24, 26, on whose support cylinders 25, 27, 29, 31 the relevant rotor rings 12 are plugged.
  • the rotor support members 24, 26 are used for the radial positioning or fixing of the rotor rings 12.
  • the outlet-side one-piece clamping body 22 is formed in three stages, and has three support cylinders 27,29,31.
  • the rotor rings 12 sit with a slight clamping fit without gaps on the rotor support bodies 24, 26 and their support cylinders 25, 27, 29, 31.
  • the clamping screw 28 braces the rotor shaft 30, the pressure-side rotor support body 26 and the inlet-side rotor support body 24 axially together.
  • Each rotor ring 12 has an axial shoulder 15 at one or both axial ends.
  • a reinforcing tube 18 made of glass fiber reinforced plastic (CFRP) is placed axially under prestress.
  • the Arm michsrohre 18 take on rotation of the pump rotor 10 substantially on the generated by the centrifugal force in the rotor ring 12 tangential forces. In this way, 17 can be used as a material for the integral wing disk rings relatively inexpensive aluminum alloys.
  • the pressure-side rotor support body 26 has on the inside a cavity 38, which has sufficient space for the arrangement of a rotor bearing of the rotor shaft 30, wherein the rotor bearing is preferably a magnetic bearing.
  • At the pressure-side end of the pressure-side rotor support body 26 may, as in the FIGS. 1 and 2 shown, connect a Holweckzylinder 32.
  • the pump rotor 40 of the FIG. 2 has with respect to the pump rotor 10 of the FIG. 1 only a modified structure of the rotor support body and clamping body.
  • a total of three rotor support bodies 24, 42, 48 are provided.
  • the inlet-side rotor support body 24 forms with the central rotor support body 42 two clamping bodies 20, 43, by means of which the three inlet-side wing disc rings 17 are clamped together axially.
  • the remaining wing disc rings 17 ' are not axially braced, but axially fixed to each other by other design measures.
  • the central rotor support body 42 and the pressure-side rotor support body 48 are each formed in two pieces and each consist of a disk body 44, 52 and a cylindrical support cylinder 46, 50.
  • the disk body 44, 52 is made of aluminum and the support cylinder 46, 50 of carbon fiber reinforced plastic.
  • the two-component structure of the two rotor support bodies 42, 48 allows a further mass reduction of the rotor 40, whereby the kinetic rotational energy is reduced, which in turn has the consequence that the energy released in a rotor burst is lower, and because of the reduced centrifugal forces, higher rotational speeds are realized can be.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung bezieht sich auf einen mehrstufigen Pumpenrotor einer Turbomolekularpumpe.The invention relates to a multi-stage pump rotor of a turbomolecular pump.

Turbomolekularpumpen nach dem Stand der Technik werden mit Drehzahlen von mehreren 10.000 U/min betrieben. Die kinetische Energie eines mit einer derartigen Nenndrehzahl betriebenen Pumpenrotors liegt bei größeren Turbomolekularpumpen im Bereich der kinetischen Energie eines Kleinwagens mit einer Geschwindigkeit von 50 - 70 km/h. Im Falle eines Rotor-Burst stellt diese hohe kinetische Energie des Rotors ein hohes Zerstörungs- und Verletzungspotenzial dar, das nur mit hohem Aufwand für die mechanische Abschirmung des Rotors beherrscht werden kann.Prior art turbomolecular pumps operate at speeds of several 10,000 RPM. The kinetic energy of a pump rotor operated at such a rated speed is in the range of the kinetic energy of a small car at a speed of 50-70 km / h for larger turbomolecular pumps. In the case of a rotor burst, this high kinetic energy of the rotor represents a high potential for destruction and injury, which can only be mastered with great effort for the mechanical shielding of the rotor.

Besonders problematisch bezüglich ihrer Burst-Anfälligkeit sind fliegend gelagerte Turbomolekularpumpen-Pumpenrotoren die magnetisch gelagert sind. Bei magnetgelagerten Pumpenrotoren, die fliegend gelagert sind, ist man bestrebt, mindestens ein Radiallager und den Antriebsmotor im Bereich des Schwerpunktes des Pumpenrotors anzuordnen. Hierzu ist es erforderlich, dass der Pumpenrotor glockenartig ausgebildet ist, um in dem Glocken- Hohlraum innerhalb des Pumpenrotors die Magnetlagerung und gegebenenfalls auch den Antriebsmotor unterzubringen. Der glockenförmige Aufbau des Pumpenrotors hat eine konstruktionsbedingte mechanische Schwächung des Rotors zur Folge. Bei den üblicherweise einstückigen Turbomolekularpumpen-Pumpenrotoren kann wegen dieser konstruktionsbedingten Schwächung nur durch die Verwendung hochfester Aluminiumlegierungen begegnet werden, die äußerst kostspielig sind.Particularly problematic with regard to their burst susceptibility are cantilevered turbomolecular pump pump rotors which are magnetically supported. In the case of magnetically mounted pump rotors which are cantilevered, it is endeavored to arrange at least one radial bearing and the drive motor in the region of the center of gravity of the pump rotor. For this purpose, it is necessary that the pump rotor is bell-shaped to accommodate in the bell cavity within the pump rotor, the magnetic bearing and possibly also the drive motor. The bell-shaped construction of the pump rotor has a design-related mechanical weakening of the rotor result. The usually one-piece turbomolecular pump pump rotors can only be countered by the use of high-strength aluminum alloys because of this design-related weakening, which are extremely expensive.

JP 59093993 A , die elle Merkmale des Oberbegriffs des Anspruchs 1 offenbart, beschreibt eine Turbomolekularpumpe mit kreisförmigen Rotorblättern und Abstandshaltern. JP 59093993 A EP-A-0 416 841 discloses a turbomolecular pump having circular rotor blades and spacers.

JP 61038194 A beschreibt einen Hochgeschwindigkeitsrotor, der innen hohl ist und dessen innerer Durchmesser in einem zentralen Bereich am Geringsten ist und in axialer Richtung der Rotorwelle zunimmt. JP 61038194 A describes a high-speed rotor which is hollow inside and whose inner diameter is least in a central region and increases in the axial direction of the rotor shaft.

JP 60203375 A beschreibt einen kreisringförmigen Rotor für eine Turbomolekularpumpe. Entlang des äußeren Umfangs der Kreisringscheibe sind radiale Schlitze ausgebildet. JP 60203375 A describes a toroidal rotor for a turbomolecular pump. Along the outer circumference of the annular disc radial slots are formed.

JP 2005180265 A beschreibt eine Vakuumpumpe mit einem Rotor und einem Stator in einem Pumpengehäuse, welches aus einem metallischen Material mit hoher Wärmeleitfähigkeit gegossen ist. JP 2005180265 A describes a vacuum pump with a rotor and a stator in a pump housing, which is cast from a metallic material with high thermal conductivity.

Aufgabe der Erfindung ist es, einen mehrstufigen Turbomolekularpumpen-Pumpenrotor zu schaffen, der eine verbesserte Festigkeit aufweist.The object of the invention is to provide a multi-stage turbomolecular pump pump rotor having improved strength.

Der erfindungsgemäße Pumpenrotor ist nicht mehr einstückig und weist mindestens zwei separate Flügelscheibenringe mit jeweils einem Rotorring und mindestens einer Flügelscheibe auf. Die Enden der beiden Rotorringe benachbarter Flügelscheibenringe werden außenseitig spielfrei durch ein zylindrisches Armierungsrohr umfasst, das zwischen den benachbarten Flügelscheiben der benachbarten Rotorscheibenringe angeordnet ist. Das Armierungsrohr dient nicht notwendigerweise der axialen und radialen Fixierung der beiden Rotorringe zueinander, jedoch umfasst es die beiden Rotorringe derart fest, dass es mindestens einen Teil der durch die Fliehkräfte in dem Rotorring entstehenden tangentialen Kräfte aufnimmt und die Rotorringe auf diese Weise mechanisch entlastet.The pump rotor according to the invention is no longer in one piece and has at least two separate wing disk rings, each with a rotor ring and at least one wing disk. The ends of the two rotor rings of adjacent wing disc rings are on the outside play-free by a cylindrical Armierungsrohr comprises, which is arranged between the adjacent wing discs of the adjacent rotor disc rings. The reinforcing tube is not necessarily the axial and radial fixation of the two rotor rings to each other, but it includes the two rotor rings so tightly that it receives at least a portion of the centrifugal forces in the rotor ring resulting tangential forces and mechanically relieved the rotor rings in this way.

Der Pumpenrotor ist nicht mehr einstückig, sondern mehrstückig ausgebildet. Der Pumpenrotor kann aus einer Vielzahl von Rotorringen mit jeweils einer einzigen Flügelscheibe gebildet werden. Selbst wenn ein Rotorring durch hohe Fliehkräfte tangential zerbrechen sollte, bleibt dieser Bruch auf den betreffenden Rotorring lokal begrenzt und kann sich nicht ohne weiteres auf den gesamten Pumpenrotor ausdehnen.The pump rotor is no longer one piece, but designed in several pieces. The pump rotor can be formed from a plurality of rotor rings, each with a single wing disc. Even if a rotor ring by high Centrifugal forces should break tangentially, this fraction remains locally limited to the respective rotor ring and can not readily extend to the entire pump rotor.

Durch die axiale Stückelung des Pumpenrotors und durch die Verwendung eines Tangentialkräfte aufnehmenden Armierungsrohres, das die Rotorringe umfasst, wird einerseits die Gefahr eines Pumpenrotor-Burst erheblich verringert und andererseits, im Falle eines Burst eines Rotorringes, die damit verbundenen Zerstörungskräfte und die daraus wiederum resultierenden Gefahren für Mensch und Maschine erheblich reduziert.The axial denomination of the pump rotor and the use of a Tangentialkräfte receiving armor tube comprising the rotor rings, on the one hand the risk of pump rotor burst is significantly reduced and on the other hand, in the case of a burst of a rotor ring, the associated destruction forces and the resulting dangers Significantly reduced for man and machine.

Durch die Verwendung mehrerer Rotor-Ringe und der Armierungsrohre werden die jeweiligen Bauteile für ihre Funktion spezialisiert. Hierdurch ist es möglich, sowohl den Rotorring als auch das Armierungsrohr hinsichtlich ihrer Funktion, nämlich dem Halten der Rotorflügel einerseits und der Aufnahme der Tangentialkräfte andererseits, zu optimieren. Der Rotorring kann beispielsweise aus preiswerten und durchschnittlich zugfesten Aluminiumlegierungen oder anderen Werkstoffen bestehen. Für das Armierungsrohr dagegen wird ein Werkstoff gewählt, der hohe Zugkräfte aufnehmen kann.By using several rotor rings and the reinforcing tubes, the respective components are specialized for their function. This makes it possible to optimize both the rotor ring and the reinforcing tube in terms of their function, namely the holding of the rotor blades on the one hand and the inclusion of the tangential forces on the other. The rotor ring may for example consist of inexpensive and average tensile aluminum alloys or other materials. For the reinforcing tube, however, a material is selected that can absorb high tensile forces.

Wie Versuche und Berechnungen mit einstückigen Pumpenrotoren ergeben haben, ist auch bei großen Turbomolekularpumpen die Fliehkraft-Belastung in den Rotorflügeln nicht der drehzahlbegrenzende Faktor. Die Flügel selbst erlauben also eine höhere Drehzahl. Bei einem Burst des glockenförmigen Pumpenrotors verlaufen die Risse im wesentlichen in axialer Richtung, so dass auf diese Weise größere Rotor-Stücke entstehen. Die gesamte Rotationsenergie des Rotors wird dann in sehr kurzer Zeit geschossartig freigesetzt.As experiments and calculations have shown with one-piece pump rotors, the centrifugal load in the rotor blades is not the speed limiting factor, even in large turbomolecular pumps. The wings themselves thus allow a higher speed. In a burst of the bell-shaped pump rotor, the cracks extend substantially in the axial direction, so that arise in this way larger rotor pieces. The entire rotational energy of the rotor is then released in a bullet-like manner in a very short time.

Bei einem Burst eines einzelnen Flügelscheibenringes eines mehrstückigen Rotors ist das dabei entstehende Geschoss erheblich kleiner und wird der Rotor durch den Kontakt des betreffenden Flügelscheibenringes mit dem Stator erheblich langsamer abgebremst, als bei einem Burst eines einstückigen Pumpenrotors.In a burst of a single wing disc ring of a multi-piece rotor, the resulting projectile is considerably smaller and the rotor is through decelerates the contact of the relevant wing disc ring with the stator much slower than a burst of a one-piece pump rotor.

Durch die Bildung des Pumpenrotors aus einzelnen Flügelscheibenringen kann aus fertigungstechnischer Sicht die Flügelscheibe bzw. können die Rotorflügel einfacher hergestellt werden, bzw. komplexere Formen annehmen. Dies kann bei größeren Drücken innerhalb der den Pumpenrotor aufnehmenden Turbomolekularpumpe zu einer Verbesserung der Strömungsmechanik in den Pumpenstufen führen.Due to the formation of the pump rotor from individual wing disk rings, the wing disk or the rotor vanes can be made simpler from a manufacturing point of view, or can assume more complex shapes. This can lead to an improvement in the fluid mechanics in the pump stages at higher pressures within the turbomolecular pump receiving the pump rotor.

Durch die Verwendung eines leichteren Werkstoffes für das Armierungsrohr kann das Gesamtgewicht des Pumpenrotors reduziert werden.By using a lighter material for the reinforcing tube, the total weight of the pump rotor can be reduced.

Der Flügelscheibenring kann jeweils, muss jedoch nicht, einstückig ausgebildet sein. Der Flügelscheibenring kann alternativ auch aus mehreren Segmenten zusammengesetzt sein. Bei der Aufteilung des Rotorringes in mehrere Segmente treten in dem Rotorring praktisch keine tangentialen Kräfte mehr auf und werden diese ausschließlich in das Armierungsrohr eingeleitet.The wing disc ring can each, but need not, be integrally formed. The wing disc ring may alternatively be composed of several segments. In the division of the rotor ring into several segments occur in the rotor ring virtually no tangential forces and these are introduced exclusively in the reinforcing tube.

Bevorzugt ist der Flügelscheibenring jedoch einstückig ausgebildet. Der geschlossene einstückige Flügelscheibenring ist einfacher herzustellen und zu montieren.Preferably, however, the wing disc ring is integrally formed. The closed one-piece wing disc ring is easier to manufacture and assemble.

Vorzugsweise ist der Armierungsrohr-Werkstoff verschieden von dem Werkstoff der Flügelscheibenringe. Als Werkstoff für das Armierungsrohr wird bevorzugt CFK, also kohlefaserverstärkter Kunststoff, verwendet, der insbesondere wegen seiner Fähigkeit, hohe Zugkräfte aufzunehmen und wegen seines geringen Gewichtes geeignet ist als Werkstoff für das Armierungsrohr.Preferably, the Armierungsrohr material is different from the material of the wing disc rings. As a material for the reinforcing tube CFRP, so carbon fiber reinforced plastic is preferably used, which is particularly suitable because of its ability to absorb high tensile forces and because of its low weight as a material for the reinforcing tube.

Gemäß einer bevorzugten Ausgestaltung weist mindestens eine Rotorflügelscheibe eine einzige Flügelscheibe aus Rotorflügeln auf. Die Begrenzung des bzw. der Rotorringe auf eine einzige Flügelscheibe erlaubt es, zwischen jedem Flügelscheiben-Paar benachbarter Flügelscheiben jeweils ein Armierungsrohr anzuordnen. Hierdurch wird ein Maximum an Festigkeit der Pumpenrotors bezüglich der tangentialen Kräfte erreicht. Allerdings müssen nicht notwendigerweise alle Flügelscheibenringe des Pumpenrotors jeweils nur eine einzige Flügelscheibe aufweisen. So können beispielsweise in dem Bereich des Pumpenrotors, in dem besonders hohe tangentiale Kräfte auftreten, Flügelscheibenringe mit einer einzigen Flügelscheibe vorgesehen werden, während in anderen axialen Bereichen des Pumpenrotors, in denen geringere tagentiale Kräfte auftreten bzw. in dem der Rotorring radial stärker aufgebaut werden kann, der betreffende Flügelscheibenring auch zwei oder mehr Flügelscheiben aufweisen kann.According to a preferred embodiment, at least one rotor blade disc has a single wing disk made of rotor blades. The Limiting the rotor ring or rings to a single wing disc makes it possible to arrange a reinforcing tube between each pair of wing discs of adjacent wing discs. As a result, a maximum of strength of the pump rotor with respect to the tangential forces is achieved. However, not all of the impeller disk rings of the pump rotor necessarily have only a single disk disk. Thus, for example, in the region of the pump rotor, in which particularly high tangential forces occur, wing disc rings are provided with a single wing disc, while in other axial areas of the pump rotor, in which lower tagential forces occur or in which the rotor ring can be built radially stronger in that the wing disc ring concerned may also have two or more wing discs.

Vorzugsweise sind die Flügelscheibenringe axial zwischen zwei Rotorwellen-Spannkörpern axial miteinander verspannt. Die Rotorringe können beispielsweise mit entsprechenden axialen Ringnuten und Ringstegen selbstzentrierend aufeinander liegen und durch die beiden Rotorwellen-Spannkörper entsprechend axial miteinander verspannt sein. Alternativ oder zusätzlich kann auch mindestens ein Rotorstützkörper vorgesehen sein, auf den die Rotorringe der Flügelscheibenringe aufgeschoben sind. Die Rotorstützkörper können die Spannkörper bilden, die Spannkörper können aber jedoch auch separat von den die Rotorringe tragenden Rotorstützkörpern ausgebildet sein.Preferably, the wing disc rings are clamped axially axially between two rotor shaft clamping bodies. The rotor rings may, for example, be self-centering with corresponding axial annular grooves and annular lands and be clamped together axially by the two rotor shaft clamping bodies. Alternatively or additionally, at least one rotor support body may be provided, onto which the rotor rings of the wing disk rings are pushed. The rotor support body may form the clamping body, but the clamping body may, however, also be formed separately from the rotor support bodies carrying the rotor rings.

Der Rotorstützkörper kann aus einem anderen Material gefertigt werden, als die Rotorringe oder die Armierungsrohre.The rotor support body may be made of a different material than the rotor rings or the reinforcing tubes.

Vorzugsweise weist der Pumpenrotor einen Hohlraum zur Aufnahme einer Rotorlagerung auf, die bevorzugt eine Magnetlagerung ist. Wie oben bereits ausführlich dargestellt, wird bei fliegend und magnetgelagerten Turbomolekularpumpen-Pumpenrotoren angestrebt, ein Radiallager und den Antriebsmotor in der Nähe des Pumpenrotor-Schwerpunktes anzuordnen. Hierfür ist ein entsprechender Hohlraum in dem Pumpenrotor unerlässlich, der dadurch eine glockenförmige Form erhält. Gerade bei magnetgelagerten Pumpenrotoren von Turbomolekularpumpen ist die axiale Stückelung des Pumpenrotors in einzelne Rotorringe besonders vorteilhaft, da insbesondere der Hohlraum-Abschnitt des Pumpenrotors wegen der Beschränkung des Pumpenrotor-Bauraumes hohen tangentialen Belastungen ausgesetzt ist.Preferably, the pump rotor has a cavity for receiving a rotor bearing, which is preferably a magnetic bearing. As has already been described in detail above, with centrifugal and magnetically levitated turbomolecular pump pump rotors, it is desired to arrange a radial bearing and the drive motor in the vicinity of the pump rotor center of gravity. Therefor a corresponding cavity in the pump rotor is essential, thereby obtaining a bell-shaped form. Especially with magnetically mounted pump rotors of turbomolecular pumps, the axial denomination of the pump rotor in individual rotor rings is particularly advantageous because in particular the cavity portion of the pump rotor is exposed due to the limitation of the pump rotor space high tangential loads.

Im Folgenden werden zwei Ausführungsbeispiele der Erfindung anhand der Zeichnungen näher erläutert.
Es zeigen:

Fig. 1
ein erstes Ausführungsbeispiel eines mehrstufigen Turbomolekularpumpen-Pumpenrotors mit einkomponentigen Rotorstützkörpern und
Fig. 2
ein zweites Ausführungsbeispiel eines Turbomolekularpumpen-Pumpenrotors mit zweikomponentigen Rotorstützkörpern.
In the following two embodiments of the invention will be explained in more detail with reference to the drawings.
Show it:
Fig. 1
a first embodiment of a multi-stage turbomolecular pump pump rotor with one-component rotor support bodies and
Fig. 2
A second embodiment of a turbomolecular pump pump rotor with two-component rotor support bodies.

In den Figuren 1 und 2 ist jeweils ein mehrstufiger Turbomolekularpumpen-Pumpenrotor 10; 40 dargestellt. Der Pumpenrotor 10; 40 kann sich mit Nenndrehzahlen zwischen 20.000 und 100.000 U/min drehen. Die beiden Pumpenrotoren 10; 40 sind im wesentlichen gleich aufgebaut und unterscheiden sich nur hinsichtlich ihres inneren Aufbaus.In the FIGS. 1 and 2 each is a multi-stage turbomolecular pump pump rotor 10; 40 shown. The pump rotor 10; 40 can rotate at rated speeds between 20,000 and 100,000 rpm. The two pump rotors 10; 40 are essentially the same structure and differ only in their internal structure.

Der Pumpenrotor 10 der Figur 1 wird im wesentlichen gebildet von acht Flügelscheibenringen 17, die durch zwei durch eine Spannschraube 28 und eine Welle 30 axial miteinander verspannte Spannkörper 20, 22 axial miteinander verspannt sind. Ferner schließt sich an die Flügelscheibenringe 17 ein rotorseitiger Holweckzylinder 32 an.The pump rotor 10 of FIG. 1 is essentially formed by eight wing disc rings 17, which are axially braced together by two by a clamping screw 28 and a shaft 30 axially clamped together clamping body 20, 22. Furthermore, the wing disc rings 17 is followed by a rotor-side Holweck cylinder 32.

Der Pumpenrotor 10 ist nicht einstückig ausgebildet, wie dies bei Pumpenrotoren nach dem Stand der Technik üblich ist, sondern ist aus mehreren Flügelscheibenringen 17 zusammengesetzt. Jeder Flügelscheibenring 17 wird von einem geschlossenen Rotorring 12 gebildet, von dem radial Rotorflügel 16 nach außen abragen, die ihrerseits eine Flügelscheibe 14 bilden.The pump rotor 10 is not formed in one piece, as is usual in pump rotors according to the prior art, but is composed of a plurality of wing disk rings 17. Each wing disc ring 17 is formed by a closed rotor ring 12, protrude from the radially rotor blades 16 to the outside, which in turn form a wing disc 14.

Die Rotorringe 12 werden axial zusammengehalten durch die beiden Axial-Spannkörper 20, 22, die durch die Spannschraube 28 und die Welle 30 axial miteinander verspannt sind. Die beiden Spannkörper 20, 22 bilden jeweils auch außenzylindrische Rotorstützkörper 24, 26, auf deren Stützzylindern 25, 27, 29, 31 die betreffenden Rotorringe 12 aufgesteckt sind. Die Rotorstützkörper 24, 26 dienen der radialen Positionierung bzw. Fixierung der Rotorringe 12. Der auslassseitige einstückige Spannkörper 22 ist dreifach gestuft ausgebildet, und weist drei Stützzylinder 27,29,31 auf. Die Rotorringe 12 sitzen mit leichtem Spannsitz spaltfrei auf den Rotorstützkörpern 24, 26 bzw. ihren Stützzylindern 25, 27, 29, 31 auf.The rotor rings 12 are axially held together by the two axial clamping body 20, 22, which are braced axially by the clamping screw 28 and the shaft 30 together. The two clamping bodies 20, 22 each also form outer cylindrical rotor support bodies 24, 26, on whose support cylinders 25, 27, 29, 31 the relevant rotor rings 12 are plugged. The rotor support members 24, 26 are used for the radial positioning or fixing of the rotor rings 12. The outlet-side one-piece clamping body 22 is formed in three stages, and has three support cylinders 27,29,31. The rotor rings 12 sit with a slight clamping fit without gaps on the rotor support bodies 24, 26 and their support cylinders 25, 27, 29, 31.

Die Spannschraube 28 verspannt die Rotorwelle 30, den druckseitigen Rotorstützkörper 26 und den einlassseitigen Rotorstützkörper 24 axial miteinander.The clamping screw 28 braces the rotor shaft 30, the pressure-side rotor support body 26 and the inlet-side rotor support body 24 axially together.

Jeder Rotorring 12 weist jeweils an einem bzw. an beiden axialen Enden einen axialen Absatz 15 auf. Im Bereich der Absätze 15 der benachbarten Rotorringe 12 ist jeweils ein Armierungsrohr 18 aus glasfaserverstärktem Kunststoff (CFK) unter Vorspannung axial aufgesetzt. Die Armierungsrohre 18 nehmen bei Rotation des Pumpenrotors 10 im wesentlichen die durch die Fliehkraft in dem Rotorring 12 generierten tangentialen Kräfte auf. Auf diese Weise können als Material für die einstückigen Flügelscheibenringe 17 relativ preiswerte Aluminiumlegierungen verwendet werden.Each rotor ring 12 has an axial shoulder 15 at one or both axial ends. In the area of paragraphs 15 of the adjacent rotor rings 12, a reinforcing tube 18 made of glass fiber reinforced plastic (CFRP) is placed axially under prestress. The Armierungsrohre 18 take on rotation of the pump rotor 10 substantially on the generated by the centrifugal force in the rotor ring 12 tangential forces. In this way, 17 can be used as a material for the integral wing disk rings relatively inexpensive aluminum alloys.

Der druckseitige Rotorstützkörper 26 weist innenseitig einen Hohlraum 38 auf, der genügend Raum für die Anordnung einer Rotorlagerung der Rotorwelle 30 aufweist, wobei die Rotorlagerung bevorzugt eine Magnetlagerung ist.The pressure-side rotor support body 26 has on the inside a cavity 38, which has sufficient space for the arrangement of a rotor bearing of the rotor shaft 30, wherein the rotor bearing is preferably a magnetic bearing.

An das druckseitige Ende des druckseitigen Rotorstützkörpers 26 kann, wie in den Figuren 1 und 2 dargestellt, ein Holweckzylinder 32 anschließen.At the pressure-side end of the pressure-side rotor support body 26 may, as in the FIGS. 1 and 2 shown, connect a Holweckzylinder 32.

Der Pumpenrotor 40 der Figur 2 weist gegenüber dem Pumpenrotor 10 der Figur 1 lediglich einen veränderten Aufbau der Rotorstützkörper und Spannkörper auf. Vorliegend sind insgesamt drei Rotorstützkörper 24, 42, 48 vorgesehen. Der einlassseitige Rotorstützkörper 24 bildet mit dem mittleren Rotorstützkörper 42 zwei Spannkörper 20, 43, durch die die drei einlassseitigen Flügelscheibenringe 17 axial miteinander verspannt sind. Die übrigen Flügelscheibenringe 17' sind axial nicht verspannt, sondern durch andere konstruktive Maßnahmen axial zueinander fixiert.The pump rotor 40 of the FIG. 2 has with respect to the pump rotor 10 of the FIG. 1 only a modified structure of the rotor support body and clamping body. In the present case, a total of three rotor support bodies 24, 42, 48 are provided. The inlet-side rotor support body 24 forms with the central rotor support body 42 two clamping bodies 20, 43, by means of which the three inlet-side wing disc rings 17 are clamped together axially. The remaining wing disc rings 17 'are not axially braced, but axially fixed to each other by other design measures.

Der mittlere Rotorstützkörper 42 sowie der druckseitige Rotorstützkörper 48 sind jeweils zweistückig ausgebildet und bestehen jeweils aus einem Scheibenkörper 44, 52 und einem zylindrischen Stützzylinder 46, 50. Der Scheibenkörper 44, 52 besteht jeweils aus Aluminium und der Stützzylinder 46, 50 aus kohlefaserverstärktem Kunststoff.The central rotor support body 42 and the pressure-side rotor support body 48 are each formed in two pieces and each consist of a disk body 44, 52 and a cylindrical support cylinder 46, 50. The disk body 44, 52 is made of aluminum and the support cylinder 46, 50 of carbon fiber reinforced plastic.

Der zweikomponentige Aufbau der beiden Rotorstützkörper 42, 48 erlaubt eine weitere Massenreduzierung des Rotors 40, wodurch die kinetische Rotationsenergie verringert ist, was wiederum zur Folge hat, dass die bei einem Rotor-Burst freigesetzte Energie geringer ist, und wegen der reduzierten Fliehkräfte höhere Drehzahlen realisiert werden können.The two-component structure of the two rotor support bodies 42, 48 allows a further mass reduction of the rotor 40, whereby the kinetic rotational energy is reduced, which in turn has the consequence that the energy released in a rotor burst is lower, and because of the reduced centrifugal forces, higher rotational speeds are realized can be.

Claims (9)

  1. A multi-stage pump rotor (10;40) for a turbomolecular pump, said pump rotor comprising
    at least two separate blade disk rings (17,17') respectively having a rotor ring (12) and at least one blade disk (14),
    characterized by
    a cylindrical reinforcement pipe (18) arranged between the blade disks (14) of adjacent blade disk rings (17,17') and enclosing the rotor rings (12) of the blade disk rings (17,17') on the outside without clearance.
  2. The multi-stage pump rotor (10;40) for a turbomolecular pump according to claim 1, characterized in that the material of the reinforcement pipe (18) is different from that of the blade disk rings (17).
  3. The multi-stage pump rotor (10;40) for a turbomolecular pump according to claim 2, characterized in that the material of the reinforcement pipe (18) is carbon-fiber-reinforced plastic.
  4. The multi-stage pump rotor (10;40) for a turbomolecular pump according to any one of claims 1 - 3, characterized in that at least one blade disk ring (17) comprises a sole blade disk (14).
  5. The multi-stage pump rotor (10;40) for a turbomolecular pump according to any one of claims 1 - 4, characterized in that the blade disk rings are axially clamped between two rotor-shaft clamping bodies (20,22).
  6. The multi-stage pump rotor (10;40) for a turbomolecular pump according to any one of claims 1 - 5, characterized in that the rotor rings (12) of the blade disk rings (17,17') are mounted on at least one rotor support body (24,26;42,48).
  7. The multi-stage pump rotor (40) for a turbomolecular pump according to claim 6, characterized in that the rotor support body (42,48) is made at least partially of carbon-fiber-reinforced plastic.
  8. The multi-stage pump rotor (10;40) for a turbomolecular pump according to any one of claims 1 - 7, characterized in that the pump rotor (10;40) comprises a cavity (38) for accommodation of a rotor bearing.
  9. A turbomolecular pump comprising a multi-stage pump rotor (10;40) for a turbomolecular pump according to claim 8 and a rotor bearing, characterized in that said rotor bearing is a magnetic bearing.
EP08804453A 2007-10-11 2008-09-19 Multi-stage pump rotor for turbo-molecular pump Active EP2209995B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007048703A DE102007048703A1 (en) 2007-10-11 2007-10-11 Multi-stage turbomolecular pump pump rotor
PCT/EP2008/062519 WO2009049988A1 (en) 2007-10-11 2008-09-19 Multi-stage pump rotor for turbo-molecular pump

Publications (2)

Publication Number Publication Date
EP2209995A1 EP2209995A1 (en) 2010-07-28
EP2209995B1 true EP2209995B1 (en) 2012-11-14

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EP08804453A Active EP2209995B1 (en) 2007-10-11 2008-09-19 Multi-stage pump rotor for turbo-molecular pump

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US (1) US8562293B2 (en)
EP (1) EP2209995B1 (en)
JP (1) JP5674468B2 (en)
CN (1) CN101828040B (en)
DE (1) DE102007048703A1 (en)
TW (1) TWI453345B (en)
WO (1) WO2009049988A1 (en)

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JP5704157B2 (en) 2010-02-16 2015-04-22 株式会社島津製作所 Vacuum pump
EP2623791B1 (en) * 2010-09-28 2019-12-04 Edwards Japan Limited Exhaust pump
CN102011745B (en) * 2010-12-31 2013-08-07 清华大学 Neural network control system and method of magnetic suspension molecular pump
JP5664253B2 (en) * 2011-01-12 2015-02-04 株式会社島津製作所 High vacuum pump
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DE202013006436U1 (en) * 2013-07-17 2014-10-22 Oerlikon Leybold Vacuum Gmbh Rotor element for a vacuum pump
US9827349B1 (en) 2013-11-26 2017-11-28 Abyrx Inc. Settable surgical implants and their packaging
DE202013010937U1 (en) 2013-11-30 2015-03-02 Oerlikon Leybold Vacuum Gmbh Rotor disc and rotor for a vacuum pump
DE102014100622A1 (en) 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump
CN104929978B (en) * 2015-06-17 2018-01-05 川北真空科技(北京)有限公司 A kind of novel shock-resistant molecular pump rotor
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WO2009049988A1 (en) 2009-04-23
US20100290915A1 (en) 2010-11-18
JP2011501010A (en) 2011-01-06
CN101828040B (en) 2012-05-30
TW200925431A (en) 2009-06-16
DE102007048703A1 (en) 2009-04-16
EP2209995A1 (en) 2010-07-28
CN101828040A (en) 2010-09-08
TWI453345B (en) 2014-09-21
US8562293B2 (en) 2013-10-22
JP5674468B2 (en) 2015-02-25

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