EP0938251B1 - Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen - Google Patents
Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen Download PDFInfo
- Publication number
- EP0938251B1 EP0938251B1 EP99102070A EP99102070A EP0938251B1 EP 0938251 B1 EP0938251 B1 EP 0938251B1 EP 99102070 A EP99102070 A EP 99102070A EP 99102070 A EP99102070 A EP 99102070A EP 0938251 B1 EP0938251 B1 EP 0938251B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- tube
- heating
- heating wire
- gas
- outlet opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
- H05H3/02—Molecular or atomic beam generation
Definitions
- the present invention relates to a device for Generation of a beam of atoms or radicals thermal dissociation of a gas, with a pipe, the can be connected at one end to a gas source and has a gas outlet opening at its other end, and a heater to heat the pipe.
- This type of heating by electron bombardment has although the advantage that a relatively large heating capacity can be applied to the pipe.
- it is associated with the disadvantage that to generate the voltage between the filament and the tube Filament near earth potential and the tube on positive Must be high voltage.
- the accelerated towards the pipe Electrons therefore have sufficient energy near the tube for impact ionization of the gas outlet opening the pipe emerging gas and the residual gas.
- the resulting positive ions are from the tube accelerated away, whereby they can cross the atomic beam and then an undesirable impurity because of its high energy of the atomic beam.
- the object of the invention is therefore to provide a device for Generation of a beam of atoms or radicals thermal dissociation of a gas of the aforementioned Kind so that contamination of the atomic beam largely avoided and at the same time the Effort for electrical supply and electrical Isolation is low.
- the Heating device at least one heating wire for heating of the tube by heat radiation and the Heating wire the pipe in the area of the gas outlet opening Making an electrical contact touched in but the rest surrounds by far.
- heating the pipe to that for thermal dissociation temperature of a gas not as in State of the art through electron bombardment but through heat radiation. This allows the use disadvantages associated with electron bombardment a shock ionization of the emerging from the mouth Gas through the accelerated electrons respectively avoided the need for an electron reflector become.
- the Heating wire for example, helical can be in the area of the gas outlet opening in at least one turn ends, the tight turn the Tube surrounds and abuts this to an electrical To make contact with this.
- the pipe serves as a support for the heating wire in the area of the Gas outlet opening, which can be prevented the heating wire deforms in the hot state in such a way that in the area where it surrounds the pipe at a distance a short circuit to the tube takes place, through which then Parts of the heating wire no longer flow through the current would.
- a short circuit to heat reflectors such as Radiation sheets that form the tube and the Can surround the heating wire in areas to the from Heating wire to effectively use ohmic heat. The risk of such a short circuit would in particular then exist if in deviation from the described Design of the heating wire never touch the pipe would and completely isolated from this would be built up.
- an inventive Device for generating a beam of atoms or radicals by thermal dissociation of one Gases shown.
- this device used to make hydrogen gas by exposure to heat to decompose and so a stream of hydrogen atoms form.
- Thermal dissociation is achieved by the gas to be dissociated passed through a pipe 1 and thereby to a temperature leading to the decomposition of the gas, which can be in the range from 1500 to 2500 K, is heated.
- the device has a tube 1 on, which is connected at one end to a gas line 2 and a gas outlet opening at its other end 3 has.
- the tube 1 has in the illustrated Embodiment a length of 64 mm and one Inside diameter of about one mm.
- a resistance heater trained heater 4 is provided.
- This Heating device 4 includes a helical heating wire 5 from a tungsten material that surrounds the tube 1 and about is arranged coaxially to this.
- the heating wire 5 has Compared to tube 1, a large stretched length of about 300 mm and has a diameter of 0.5 mm.
- Heating wire 5 On his one end facing the gas outlet opening 3 runs Heating wire 5 in two narrow turns 5a, which on the tube 1st apply and form an electrical contact with it, and at its other end the heating wire 5 is insulated attached in a holder 7 and an electrical Line 8 connected to a voltage source.
- the tube 1 supports the heating wire 5 and prevents that it deforms so much when hot, that on the one hand between the two narrow turns 5a and the holder 7, a short circuit from the heating wire 5 to Forms tube 1, which would have the consequence that the heating current directly drain over the pipe 1 and no further through the Heating wire 5 would flow up to the narrow turns 5a, or that on the other hand there is a short circuit between the Heating wire 5 and other components forms. That danger would exist especially if both ends of the Heating wire isolated from that surrounded by radiation plates 6 Room would be led out.
- the tube 1 and the heating wire 5 of heat reflectors in the form of a package of Radiation plates 6 surround the 5 by the heating wire reflect the external heat radiation back to tube 1, around the heat developed by the heating coil 5 effectively to use.
- a housing is located outside the radiation plates 6 9, which is designed as a cylindrical copper jacket and with a water cooling 10 indicated only schematically connected is.
- the radiation sheets are in the housing 9 6 by a component 11 made of a material with higher temperature resistance exists, held.
- a bracket 12 is provided which gas line end of the tube 1 carries and not shown screws against the water-cooled body is tightened and sealed.
- the heating coil 5 with a heating power of 150 watts by a heating voltage of 13 volts and a heating current of 11.5 amps is reached.
- a pipe temperature of approximately 2200 K can be achieved, which is sufficient to hydrogen to dissociate.
- the Spiral temperature at 2350 K and thus only 150 K above the Pipe temperature is.
- a slight overtemperature of the Heating wire compared to the temperature of the tube is cheap for a low evaporation rate of tungsten from that Heating wire 5 and a long service life of the heating wire.
Description
- Figur 1
- eine Ausführungsform einer Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen gemäß der vorliegenden Erfindung im Längsschnitt und
- Figur 2
- die erfindungswesentlichen Teile der in Figur 1 gezeigten Vorrichtungen in vergrößerter Darstellung.
Claims (6)
- Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen durch thermische Dissoziation eines Gases, mit einem Rohr (1), das an seinem einen Ende an eine Gasquelle (2) anschließbar ist und an seinem anderen Ende eine Gasaustrittsöffnung (3) aufweist, und einer Heizvorrichtung (4), um das Rohr (1) zu erwärmen, dadurch gekennzeichnet, daß die Heizvorrichtung (4) wenigstens einen Heizdraht (5) zur Erwärmung des Rohrs (1) durch Wärmestrahlung aufweist und der Heizdraht (5) das Rohr (1) im Bereich der Gasaustrittsöffnung (3) unter Herstellung eines elektrischen Kontakts berührt, im übrigen aber mit Abstand umgibt.
- Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß der wenigstens eine Heizdraht (5) wendelförmig ausgebildet ist.
- Vorrichtung nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß der Heizdraht (5) im Bereich der Gasaustrittsöffnung (3) in wenigstens einer engen Windung (5a) ausläuft, die am Rohr (1) anliegt und einen elektrischen Kontakt mit diesem bildet.
- Vorrichtung nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Heizvorrichtung (4) mehrere Heizdrähte zur Erwärmung des Rohrs (1) durch Wärmestrahlung aufweist.
- Vorrichtung nach einem der vorherigen Ansprüche, dadurch gekennzeichnet, daß das Rohr (1) und der Heizdraht (5) zumindest in dem Bereich, in dem das Rohr (1) durch den Heizdraht (5) erwärmt wird, von Wärmereflektoren, insbesondere von Strahlungsblechen (6), umgeben sind.
- Vorrichtung nach einem der vorherigen Ansprüche, dadurch gekennzeichnet, daß das Rohr (1) sowie die Heizvorrichtung (4) in einem wassergekühlten Gehäuse (9) angeordnet sind.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19806692A DE19806692C2 (de) | 1998-02-18 | 1998-02-18 | Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen |
DE19806692 | 1998-02-18 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0938251A2 EP0938251A2 (de) | 1999-08-25 |
EP0938251A3 EP0938251A3 (de) | 2002-04-17 |
EP0938251B1 true EP0938251B1 (de) | 2003-07-23 |
Family
ID=7858114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99102070A Expired - Lifetime EP0938251B1 (de) | 1998-02-18 | 1999-02-02 | Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen |
Country Status (3)
Country | Link |
---|---|
US (1) | US6191416B1 (de) |
EP (1) | EP0938251B1 (de) |
DE (2) | DE19806692C2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10047042C2 (de) * | 2000-09-22 | 2002-08-01 | Forschungszentrum Juelich Gmbh | Verfahren und Vorrichtung zur Herstellung von wasserstoffhaltigen Si¶1¶¶-¶¶x¶C¶x¶:H-Schichten |
US7750654B2 (en) * | 2002-09-02 | 2010-07-06 | Octec Inc. | Probe method, prober, and electrode reducing/plasma-etching processing mechanism |
CN105430864B (zh) * | 2015-11-12 | 2017-12-12 | 华中科技大学 | 一种原子发生器 |
CN105376923B (zh) * | 2015-11-12 | 2018-03-09 | 华中科技大学 | 一种能提高原子束密度的原子发生器 |
US20180019169A1 (en) * | 2016-07-12 | 2018-01-18 | QMAT, Inc. | Backing substrate stabilizing donor substrate for implant or reclamation |
CN110290628B (zh) * | 2019-07-02 | 2021-03-30 | 郑州大学 | 一种用于超高真空环境下的原子发生装置 |
CN113398852B (zh) * | 2021-06-21 | 2023-03-28 | 许昌学院 | 一种板式塔的内调温装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4783595A (en) * | 1985-03-28 | 1988-11-08 | The Trustees Of The Stevens Institute Of Technology | Solid-state source of ions and atoms |
US4878989A (en) * | 1986-11-26 | 1989-11-07 | Texas Instruments Incorporated | Chemical beam epitaxy system |
US5541407A (en) * | 1992-09-24 | 1996-07-30 | The United States Of America As Represented By The Secretary Of Commerce | Arsenic atom source |
US5693173A (en) * | 1994-12-21 | 1997-12-02 | Chorus Corporation | Thermal gas cracking source technology |
-
1998
- 1998-02-18 DE DE19806692A patent/DE19806692C2/de not_active Expired - Fee Related
-
1999
- 1999-02-02 DE DE59906316T patent/DE59906316D1/de not_active Expired - Lifetime
- 1999-02-02 EP EP99102070A patent/EP0938251B1/de not_active Expired - Lifetime
- 1999-02-18 US US09/252,349 patent/US6191416B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0938251A3 (de) | 2002-04-17 |
DE59906316D1 (de) | 2003-08-28 |
DE19806692C2 (de) | 2000-03-30 |
DE19806692A1 (de) | 1999-08-26 |
US6191416B1 (en) | 2001-02-20 |
EP0938251A2 (de) | 1999-08-25 |
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