EP0938251A3 - Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen - Google Patents

Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen Download PDF

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Publication number
EP0938251A3
EP0938251A3 EP99102070A EP99102070A EP0938251A3 EP 0938251 A3 EP0938251 A3 EP 0938251A3 EP 99102070 A EP99102070 A EP 99102070A EP 99102070 A EP99102070 A EP 99102070A EP 0938251 A3 EP0938251 A3 EP 0938251A3
Authority
EP
European Patent Office
Prior art keywords
tube
heating
atom
producing
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99102070A
Other languages
English (en)
French (fr)
Other versions
EP0938251A2 (de
EP0938251B1 (de
Inventor
Karl G. Dr. Tschersich
Johannes Fleischhauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Forschungszentrum Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich GmbH filed Critical Forschungszentrum Juelich GmbH
Publication of EP0938251A2 publication Critical patent/EP0938251A2/de
Publication of EP0938251A3 publication Critical patent/EP0938251A3/de
Application granted granted Critical
Publication of EP0938251B1 publication Critical patent/EP0938251B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
    • H05H3/02—Molecular or atomic beam generation

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Particle Accelerators (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
  • Resistance Heating (AREA)

Abstract

Die Erfindung bezieht sich auf eine Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen durch thermische Dissoziation eines Gases, mit einem Rohr (1), das an seinem einen Ende an eine Gasquelle (2) anschließbar ist und an seinem anderen Ende eine Gasaustrittsöffnung (3) aufweist, und einer Heizvorrichtung (4), um das Rohr (1) zu erwärmen, welche dadurch gekennzeichnet ist, daß die Heizvorrichtung (4) wenigstens einen Heizdraht (5) zur Erwärmung des Rohrs (1) durch Wärmestrahlung aufweist und der Heizdraht (5) das Rohr (1) im Bereich der Gasaustrittsöffnung (3) unter Herstellung eines elektrischen Kontakts berührt, im übrigen aber mit Abstand umgibt.
EP99102070A 1998-02-18 1999-02-02 Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen Expired - Lifetime EP0938251B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19806692 1998-02-18
DE19806692A DE19806692C2 (de) 1998-02-18 1998-02-18 Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen

Publications (3)

Publication Number Publication Date
EP0938251A2 EP0938251A2 (de) 1999-08-25
EP0938251A3 true EP0938251A3 (de) 2002-04-17
EP0938251B1 EP0938251B1 (de) 2003-07-23

Family

ID=7858114

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99102070A Expired - Lifetime EP0938251B1 (de) 1998-02-18 1999-02-02 Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen

Country Status (3)

Country Link
US (1) US6191416B1 (de)
EP (1) EP0938251B1 (de)
DE (2) DE19806692C2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10047042C2 (de) * 2000-09-22 2002-08-01 Forschungszentrum Juelich Gmbh Verfahren und Vorrichtung zur Herstellung von wasserstoffhaltigen Si¶1¶¶-¶¶x¶C¶x¶:H-Schichten
US7750654B2 (en) * 2002-09-02 2010-07-06 Octec Inc. Probe method, prober, and electrode reducing/plasma-etching processing mechanism
CN105430864B (zh) * 2015-11-12 2017-12-12 华中科技大学 一种原子发生器
CN105376923B (zh) * 2015-11-12 2018-03-09 华中科技大学 一种能提高原子束密度的原子发生器
US20180019169A1 (en) * 2016-07-12 2018-01-18 QMAT, Inc. Backing substrate stabilizing donor substrate for implant or reclamation
CN110290628B (zh) * 2019-07-02 2021-03-30 郑州大学 一种用于超高真空环境下的原子发生装置
CN113398852B (zh) * 2021-06-21 2023-03-28 许昌学院 一种板式塔的内调温装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783595A (en) * 1985-03-28 1988-11-08 The Trustees Of The Stevens Institute Of Technology Solid-state source of ions and atoms
US4878989A (en) * 1986-11-26 1989-11-07 Texas Instruments Incorporated Chemical beam epitaxy system
US5541407A (en) * 1992-09-24 1996-07-30 The United States Of America As Represented By The Secretary Of Commerce Arsenic atom source
US5693173A (en) * 1994-12-21 1997-12-02 Chorus Corporation Thermal gas cracking source technology

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783595A (en) * 1985-03-28 1988-11-08 The Trustees Of The Stevens Institute Of Technology Solid-state source of ions and atoms
US4878989A (en) * 1986-11-26 1989-11-07 Texas Instruments Incorporated Chemical beam epitaxy system
US5541407A (en) * 1992-09-24 1996-07-30 The United States Of America As Represented By The Secretary Of Commerce Arsenic atom source
US5693173A (en) * 1994-12-21 1997-12-02 Chorus Corporation Thermal gas cracking source technology

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
FRIEDRICH L ET AL: "DIAMETERS OF A 30 K POLARIZED ATOMIC BEAM", NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION - A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, NORTH-HOLLAND PUBLISHING COMPANY. AMSTERDAM, NL, vol. A309, no. 1 / 2, 1 November 1991 (1991-11-01), pages 11 - 16, XP000266926, ISSN: 0168-9002 *

Also Published As

Publication number Publication date
US6191416B1 (en) 2001-02-20
DE59906316D1 (de) 2003-08-28
EP0938251A2 (de) 1999-08-25
EP0938251B1 (de) 2003-07-23
DE19806692C2 (de) 2000-03-30
DE19806692A1 (de) 1999-08-26

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