EP0938251A3 - Device for producing an atom -or radical beam - Google Patents

Device for producing an atom -or radical beam Download PDF

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Publication number
EP0938251A3
EP0938251A3 EP99102070A EP99102070A EP0938251A3 EP 0938251 A3 EP0938251 A3 EP 0938251A3 EP 99102070 A EP99102070 A EP 99102070A EP 99102070 A EP99102070 A EP 99102070A EP 0938251 A3 EP0938251 A3 EP 0938251A3
Authority
EP
European Patent Office
Prior art keywords
tube
heating
atom
producing
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99102070A
Other languages
German (de)
French (fr)
Other versions
EP0938251B1 (en
EP0938251A2 (en
Inventor
Karl G. Dr. Tschersich
Johannes Fleischhauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Forschungszentrum Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich GmbH filed Critical Forschungszentrum Juelich GmbH
Publication of EP0938251A2 publication Critical patent/EP0938251A2/en
Publication of EP0938251A3 publication Critical patent/EP0938251A3/en
Application granted granted Critical
Publication of EP0938251B1 publication Critical patent/EP0938251B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
    • H05H3/02—Molecular or atomic beam generation

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Particle Accelerators (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
  • Resistance Heating (AREA)

Abstract

Die Erfindung bezieht sich auf eine Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen durch thermische Dissoziation eines Gases, mit einem Rohr (1), das an seinem einen Ende an eine Gasquelle (2) anschließbar ist und an seinem anderen Ende eine Gasaustrittsöffnung (3) aufweist, und einer Heizvorrichtung (4), um das Rohr (1) zu erwärmen, welche dadurch gekennzeichnet ist, daß die Heizvorrichtung (4) wenigstens einen Heizdraht (5) zur Erwärmung des Rohrs (1) durch Wärmestrahlung aufweist und der Heizdraht (5) das Rohr (1) im Bereich der Gasaustrittsöffnung (3) unter Herstellung eines elektrischen Kontakts berührt, im übrigen aber mit Abstand umgibt.

Figure 00000001
The invention relates to a device for generating a jet of atoms or radicals by thermal dissociation of a gas, with a tube (1) which can be connected at one end to a gas source (2) and at the other end a gas outlet opening (3 ), and a heating device (4) to heat the tube (1), which is characterized in that the heating device (4) has at least one heating wire (5) for heating the tube (1) by thermal radiation and the heating wire ( 5) touches the tube (1) in the area of the gas outlet opening (3) to produce an electrical contact, but otherwise surrounds it at a distance.
Figure 00000001
EP99102070A 1998-02-18 1999-02-02 Device for producing an atom -or radical beam Expired - Lifetime EP0938251B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19806692A DE19806692C2 (en) 1998-02-18 1998-02-18 Device for generating a beam of atoms or radicals
DE19806692 1998-02-18

Publications (3)

Publication Number Publication Date
EP0938251A2 EP0938251A2 (en) 1999-08-25
EP0938251A3 true EP0938251A3 (en) 2002-04-17
EP0938251B1 EP0938251B1 (en) 2003-07-23

Family

ID=7858114

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99102070A Expired - Lifetime EP0938251B1 (en) 1998-02-18 1999-02-02 Device for producing an atom -or radical beam

Country Status (3)

Country Link
US (1) US6191416B1 (en)
EP (1) EP0938251B1 (en)
DE (2) DE19806692C2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10047042C2 (en) * 2000-09-22 2002-08-01 Forschungszentrum Juelich Gmbh Method and device for producing hydrogen-containing Si¶1¶¶-¶¶x¶C¶x¶: H layers
US7750654B2 (en) * 2002-09-02 2010-07-06 Octec Inc. Probe method, prober, and electrode reducing/plasma-etching processing mechanism
CN105430864B (en) * 2015-11-12 2017-12-12 华中科技大学 A kind of atomic generator
CN105376923B (en) * 2015-11-12 2018-03-09 华中科技大学 A kind of atomic generator that can improve atomic beam density
US20180019169A1 (en) * 2016-07-12 2018-01-18 QMAT, Inc. Backing substrate stabilizing donor substrate for implant or reclamation
CN110290628B (en) * 2019-07-02 2021-03-30 郑州大学 Atom generating device used in ultrahigh vacuum environment
CN113398852B (en) * 2021-06-21 2023-03-28 许昌学院 Inner temperature adjusting device of plate tower
CN114710871A (en) * 2022-02-25 2022-07-05 华南师范大学 Internal heating ultra-high temperature device for generating high-collimation atom beam

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783595A (en) * 1985-03-28 1988-11-08 The Trustees Of The Stevens Institute Of Technology Solid-state source of ions and atoms
US4878989A (en) * 1986-11-26 1989-11-07 Texas Instruments Incorporated Chemical beam epitaxy system
US5541407A (en) * 1992-09-24 1996-07-30 The United States Of America As Represented By The Secretary Of Commerce Arsenic atom source
US5693173A (en) * 1994-12-21 1997-12-02 Chorus Corporation Thermal gas cracking source technology

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783595A (en) * 1985-03-28 1988-11-08 The Trustees Of The Stevens Institute Of Technology Solid-state source of ions and atoms
US4878989A (en) * 1986-11-26 1989-11-07 Texas Instruments Incorporated Chemical beam epitaxy system
US5541407A (en) * 1992-09-24 1996-07-30 The United States Of America As Represented By The Secretary Of Commerce Arsenic atom source
US5693173A (en) * 1994-12-21 1997-12-02 Chorus Corporation Thermal gas cracking source technology

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
FRIEDRICH L ET AL: "DIAMETERS OF A 30 K POLARIZED ATOMIC BEAM", NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION - A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, NORTH-HOLLAND PUBLISHING COMPANY. AMSTERDAM, NL, vol. A309, no. 1 / 2, 1 November 1991 (1991-11-01), pages 11 - 16, XP000266926, ISSN: 0168-9002 *

Also Published As

Publication number Publication date
EP0938251B1 (en) 2003-07-23
US6191416B1 (en) 2001-02-20
EP0938251A2 (en) 1999-08-25
DE59906316D1 (en) 2003-08-28
DE19806692C2 (en) 2000-03-30
DE19806692A1 (en) 1999-08-26

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