EP0938251B1 - Dispositif de production d'un faisceau d'atomes ou de radicales - Google Patents

Dispositif de production d'un faisceau d'atomes ou de radicales Download PDF

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Publication number
EP0938251B1
EP0938251B1 EP99102070A EP99102070A EP0938251B1 EP 0938251 B1 EP0938251 B1 EP 0938251B1 EP 99102070 A EP99102070 A EP 99102070A EP 99102070 A EP99102070 A EP 99102070A EP 0938251 B1 EP0938251 B1 EP 0938251B1
Authority
EP
European Patent Office
Prior art keywords
tube
heating
heating wire
gas
outlet opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99102070A
Other languages
German (de)
English (en)
Other versions
EP0938251A2 (fr
EP0938251A3 (fr
Inventor
Karl G. Dr. Tschersich
Johannes Fleischhauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Forschungszentrum Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich GmbH filed Critical Forschungszentrum Juelich GmbH
Publication of EP0938251A2 publication Critical patent/EP0938251A2/fr
Publication of EP0938251A3 publication Critical patent/EP0938251A3/fr
Application granted granted Critical
Publication of EP0938251B1 publication Critical patent/EP0938251B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
    • H05H3/02—Molecular or atomic beam generation

Definitions

  • the present invention relates to a device for Generation of a beam of atoms or radicals thermal dissociation of a gas, with a pipe, the can be connected at one end to a gas source and has a gas outlet opening at its other end, and a heater to heat the pipe.
  • This type of heating by electron bombardment has although the advantage that a relatively large heating capacity can be applied to the pipe.
  • it is associated with the disadvantage that to generate the voltage between the filament and the tube Filament near earth potential and the tube on positive Must be high voltage.
  • the accelerated towards the pipe Electrons therefore have sufficient energy near the tube for impact ionization of the gas outlet opening the pipe emerging gas and the residual gas.
  • the resulting positive ions are from the tube accelerated away, whereby they can cross the atomic beam and then an undesirable impurity because of its high energy of the atomic beam.
  • the object of the invention is therefore to provide a device for Generation of a beam of atoms or radicals thermal dissociation of a gas of the aforementioned Kind so that contamination of the atomic beam largely avoided and at the same time the Effort for electrical supply and electrical Isolation is low.
  • the Heating device at least one heating wire for heating of the tube by heat radiation and the Heating wire the pipe in the area of the gas outlet opening Making an electrical contact touched in but the rest surrounds by far.
  • heating the pipe to that for thermal dissociation temperature of a gas not as in State of the art through electron bombardment but through heat radiation. This allows the use disadvantages associated with electron bombardment a shock ionization of the emerging from the mouth Gas through the accelerated electrons respectively avoided the need for an electron reflector become.
  • the Heating wire for example, helical can be in the area of the gas outlet opening in at least one turn ends, the tight turn the Tube surrounds and abuts this to an electrical To make contact with this.
  • the pipe serves as a support for the heating wire in the area of the Gas outlet opening, which can be prevented the heating wire deforms in the hot state in such a way that in the area where it surrounds the pipe at a distance a short circuit to the tube takes place, through which then Parts of the heating wire no longer flow through the current would.
  • a short circuit to heat reflectors such as Radiation sheets that form the tube and the Can surround the heating wire in areas to the from Heating wire to effectively use ohmic heat. The risk of such a short circuit would in particular then exist if in deviation from the described Design of the heating wire never touch the pipe would and completely isolated from this would be built up.
  • an inventive Device for generating a beam of atoms or radicals by thermal dissociation of one Gases shown.
  • this device used to make hydrogen gas by exposure to heat to decompose and so a stream of hydrogen atoms form.
  • Thermal dissociation is achieved by the gas to be dissociated passed through a pipe 1 and thereby to a temperature leading to the decomposition of the gas, which can be in the range from 1500 to 2500 K, is heated.
  • the device has a tube 1 on, which is connected at one end to a gas line 2 and a gas outlet opening at its other end 3 has.
  • the tube 1 has in the illustrated Embodiment a length of 64 mm and one Inside diameter of about one mm.
  • a resistance heater trained heater 4 is provided.
  • This Heating device 4 includes a helical heating wire 5 from a tungsten material that surrounds the tube 1 and about is arranged coaxially to this.
  • the heating wire 5 has Compared to tube 1, a large stretched length of about 300 mm and has a diameter of 0.5 mm.
  • Heating wire 5 On his one end facing the gas outlet opening 3 runs Heating wire 5 in two narrow turns 5a, which on the tube 1st apply and form an electrical contact with it, and at its other end the heating wire 5 is insulated attached in a holder 7 and an electrical Line 8 connected to a voltage source.
  • the tube 1 supports the heating wire 5 and prevents that it deforms so much when hot, that on the one hand between the two narrow turns 5a and the holder 7, a short circuit from the heating wire 5 to Forms tube 1, which would have the consequence that the heating current directly drain over the pipe 1 and no further through the Heating wire 5 would flow up to the narrow turns 5a, or that on the other hand there is a short circuit between the Heating wire 5 and other components forms. That danger would exist especially if both ends of the Heating wire isolated from that surrounded by radiation plates 6 Room would be led out.
  • the tube 1 and the heating wire 5 of heat reflectors in the form of a package of Radiation plates 6 surround the 5 by the heating wire reflect the external heat radiation back to tube 1, around the heat developed by the heating coil 5 effectively to use.
  • a housing is located outside the radiation plates 6 9, which is designed as a cylindrical copper jacket and with a water cooling 10 indicated only schematically connected is.
  • the radiation sheets are in the housing 9 6 by a component 11 made of a material with higher temperature resistance exists, held.
  • a bracket 12 is provided which gas line end of the tube 1 carries and not shown screws against the water-cooled body is tightened and sealed.
  • the heating coil 5 with a heating power of 150 watts by a heating voltage of 13 volts and a heating current of 11.5 amps is reached.
  • a pipe temperature of approximately 2200 K can be achieved, which is sufficient to hydrogen to dissociate.
  • the Spiral temperature at 2350 K and thus only 150 K above the Pipe temperature is.
  • a slight overtemperature of the Heating wire compared to the temperature of the tube is cheap for a low evaporation rate of tungsten from that Heating wire 5 and a long service life of the heating wire.

Claims (6)

  1. Dispositif de production d'un faisceau d'atomes ou de radicaux par la dissociation thermique d'un gaz, avec un tube (1) qui peut être raccordé sur une de ses extrémités à une source de gaz (2) et présente sur son autre extrémité une ouverture de sortie de gaz (3) et un dispositif de chauffage (4) pour chauffer le tube (1), caractérisé en ce que le dispositif de chauffage (4) comporte au moins un fil chauffant (5) pour chauffer le tube (1) par rayonnement thermique et en ce que le fil chauffant (5) touche le tube (1) dans la zone de l'ouverture de sortie de gaz (3) en provoquant un contact électrique et autrement entoure ladite ouverture à une certaine distance .
  2. Dispositif selon la revendication 1, caractérisé en ce qu'au moins un fil chauffant (5) est formé de manière hélicoïdale .
  3. Dispositif selon la revendication 1 ou 2, caractérisé en ce que le fil chauffant (5) s'arrête peu à peu dans la zone d'ouverture de sortie du gaz (3) dans au moins un tour étroit (5a) qui est appliqué au tube (1) et forme un contact électrique avec celui-ci.
  4. Dispositif selon une des revendications 1 à 3, caractérisé en ce que le dispositif de chauffage (4) comporte plusieurs fils chauffants pour chauffer le tube (1) par rayonnement thermique.
  5. Dispositif selon une des revendications précédentes, caractérisé en ce que le tube (1) et le fil chauffant (5) est entouré de réflecteurs de chaleur , notamment des tôles de rayonnement (6) dans la zone où le tube (1) est chauffé par le fil chauffant (5).
  6. Dispositif selon une des revendications précédentes, caractérisé en ce que le tube (1) ainsi que le dispositif de chauffage (4) sont disposés dans un boítier (9) refroidi par de l'eau .
EP99102070A 1998-02-18 1999-02-02 Dispositif de production d'un faisceau d'atomes ou de radicales Expired - Lifetime EP0938251B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19806692 1998-02-18
DE19806692A DE19806692C2 (de) 1998-02-18 1998-02-18 Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen

Publications (3)

Publication Number Publication Date
EP0938251A2 EP0938251A2 (fr) 1999-08-25
EP0938251A3 EP0938251A3 (fr) 2002-04-17
EP0938251B1 true EP0938251B1 (fr) 2003-07-23

Family

ID=7858114

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99102070A Expired - Lifetime EP0938251B1 (fr) 1998-02-18 1999-02-02 Dispositif de production d'un faisceau d'atomes ou de radicales

Country Status (3)

Country Link
US (1) US6191416B1 (fr)
EP (1) EP0938251B1 (fr)
DE (2) DE19806692C2 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10047042C2 (de) * 2000-09-22 2002-08-01 Forschungszentrum Juelich Gmbh Verfahren und Vorrichtung zur Herstellung von wasserstoffhaltigen Si¶1¶¶-¶¶x¶C¶x¶:H-Schichten
US7750654B2 (en) * 2002-09-02 2010-07-06 Octec Inc. Probe method, prober, and electrode reducing/plasma-etching processing mechanism
CN105430864B (zh) * 2015-11-12 2017-12-12 华中科技大学 一种原子发生器
CN105376923B (zh) * 2015-11-12 2018-03-09 华中科技大学 一种能提高原子束密度的原子发生器
US20180019169A1 (en) * 2016-07-12 2018-01-18 QMAT, Inc. Backing substrate stabilizing donor substrate for implant or reclamation
CN110290628B (zh) * 2019-07-02 2021-03-30 郑州大学 一种用于超高真空环境下的原子发生装置
CN113398852B (zh) * 2021-06-21 2023-03-28 许昌学院 一种板式塔的内调温装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783595A (en) * 1985-03-28 1988-11-08 The Trustees Of The Stevens Institute Of Technology Solid-state source of ions and atoms
US4878989A (en) * 1986-11-26 1989-11-07 Texas Instruments Incorporated Chemical beam epitaxy system
US5541407A (en) * 1992-09-24 1996-07-30 The United States Of America As Represented By The Secretary Of Commerce Arsenic atom source
US5693173A (en) * 1994-12-21 1997-12-02 Chorus Corporation Thermal gas cracking source technology

Also Published As

Publication number Publication date
EP0938251A2 (fr) 1999-08-25
EP0938251A3 (fr) 2002-04-17
DE59906316D1 (de) 2003-08-28
DE19806692A1 (de) 1999-08-26
DE19806692C2 (de) 2000-03-30
US6191416B1 (en) 2001-02-20

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