EP1228668A1 - Strahlungsheizung mit einer hohen infrarot-strahlungsleistung für bearbeitungskammern - Google Patents
Strahlungsheizung mit einer hohen infrarot-strahlungsleistung für bearbeitungskammernInfo
- Publication number
- EP1228668A1 EP1228668A1 EP00987096A EP00987096A EP1228668A1 EP 1228668 A1 EP1228668 A1 EP 1228668A1 EP 00987096 A EP00987096 A EP 00987096A EP 00987096 A EP00987096 A EP 00987096A EP 1228668 A1 EP1228668 A1 EP 1228668A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- radiant heating
- tube
- infrared radiation
- processing chamber
- heating according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/42—Heating elements having the shape of rods or tubes non-flexible
- H05B3/44—Heating elements having the shape of rods or tubes non-flexible heating conductor arranged within rods or tubes of insulating material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/032—Heaters specially adapted for heating by radiation heating
Definitions
- the invention relates to radiant heating with a high infrared radiation power for processing chambers.
- Such radiant heaters are used, for example, inside processing chambers, e.g. Vacuum chambers, used to generate a required working temperature in a given working area. Such temperatures can easily reach 3,000 ° C in the radiator area, whereby a radiator array can also be used for large-area work areas in order to achieve a uniform working temperature over a larger area.
- processing chambers e.g. Vacuum chambers
- the voltage can be reduced, but then the required radiation power cannot be achieved.
- the invention is therefore based on the object of realizing a vacuum-compatible radiation heater in which the disadvantages of the prior art shown are avoided.
- the object on which the invention is based is achieved in the case of radiant heating of the type mentioned at the outset in that an infrared-radiation-permeable tube is provided which extends into the processing chamber and at least one end of which penetrates the wall and that an infrared radiation source is arranged within the tube , the interior of the tube being insulated from the atmosphere inside the processing chamber.
- the invention enables the infrared radiation source to be operated with any operating voltages, that is to say also at high operating voltages, without the risk of electrical flashovers in the processing chamber.
- the invention makes it possible to achieve particularly high work temperatures or radiation powers, since the atmosphere inside the tube is completely independent of the atmosphere in the processing chamber.
- the tube is made of a material that can withstand high temperatures, such as quartz glass.
- Another development of the invention provides that the passages of the tube are sealed gas-tight through the wall. This has the advantage that the radiant heater according to the invention can also be used in the processing chamber in an aggressive atmosphere.
- the infrared radiation source is accommodated in the tube, it is a further development of the invention possible to cool the infrared radiation source by connecting the tube to a cooling device. This is particularly useful when the tube extends through the opposite wall of the processing chamber on both ends.
- the tube is connected to a device for generating an air flow within the tube, which enables intensive cooling of the infrared radiation source, so that particularly high infrared radiation powers can be achieved without problems, without the life of Infrared radiation source would be reduced.
- the infrared radiation source is assigned a radiation reflector in one embodiment of the invention.
- the radiation reflector is preferably arranged in the tube together with the infrared radiation source in order to avoid possible additional thermal effects in the processing chamber.
- a further development of the invention is characterized in that several tubes with infrared radiation sources are arranged in an array. This makes it possible to implement large-area and uniform radiation.
- the array is arranged within the processing chamber, with at least one end of each tube of the array being guided through the wall of the processing chamber.
- the end of each tube of the array extending into the processing chamber must of course be closed.
- these tubes can be connected to a cooling circuit so that the cooling medium can flow through the tubes.
- each infrared radiation source can be connected separately to an energy source.
- this enables the radiation power to be easily adapted to the respective requirements, e.g. by switching on the required number of infrared radiation sources.
- FIG. 1 shows a radiant heater according to the invention, in which the infrared-radiation-permeable tube extends through both opposite walls of the processing chamber;
- Fig. 2 shows a variant in which the infrared radiation-transmissive tube is only guided through a wall and the free end of the tube is closed in the processing chamber.
- the radiant heater according to the invention consists of an infrared radiation-permeable tube 1 which extends through a processing chamber 3 and the wall 6 of which penetrates both ends in a wall opening 4.
- An infrared radiation source 2 is arranged inside the tube 1 and is insulated from the atmosphere inside the processing chamber 3.
- This tube 1 consists of a material which can withstand high temperatures, preferably quartz glass.
- the infrared radiation source 2 in the tube 1 is connected to a cooling circuit, not shown.
- the tube 1 can be connected to a device for generating an air flow within the tube 1. In this way, long-term high radiation powers can also be achieved without the service life of the infrared radiation source 2 being adversely affected thereby.
- the radiation reflector should be arranged together with the infrared radiation source 2 in the tube 1 in order to avoid undesirable thermal effects, or also contamination of the atmosphere in the processing chamber 3, which could be caused by the material of the radiation reflector.
- a plurality of tubes 1 with infrared radiation sources 2 can be arranged to form an array by arranging the array within the processing chamber 3, each tube of the array being guided through the wall 6 of the processing chamber 3 at both ends.
- Each of the infrared radiation sources 2 can be separately connected to an energy source. This enables e.g. a simple adjustment of the radiation power to the respective requirements. In this way, uniform irradiation of the objects to be irradiated is achieved over the entire radiator area of the array.
- FIG. 2 shows a variant in which the infrared radiation-permeable tube 1 is only guided through a wall 6, the free end of the tube 1 being closed in the processing chamber 3.
- This variant can be implemented with less effort and offers the same advantages as the Variant in which both ends of the tube 1 are guided through the wall 6 of the processing chamber.
- An array of infrared radiation sources 2 can also be easily implemented, in which all tubes 1 are only guided through one wall 6 of processing chamber 3.
Landscapes
- Resistance Heating (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Furnace Details (AREA)
- Yarns And Mechanical Finishing Of Yarns Or Ropes (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DK00987096T DK1228668T3 (da) | 1999-11-09 | 2000-11-08 | Strålingsopvarmning ved hjælp af en höj infraröd strålingseffekt til bearbejdningskamre |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE29919685U | 1999-11-09 | ||
DE29919685 | 1999-11-09 | ||
PCT/DE2000/003908 WO2001035699A1 (de) | 1999-11-09 | 2000-11-08 | Strahlungsheizung mit einer hohen infrarot-strahlungsleistung für bearbeitungskammern |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1228668A1 true EP1228668A1 (de) | 2002-08-07 |
EP1228668B1 EP1228668B1 (de) | 2005-02-09 |
Family
ID=8081389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00987096A Revoked EP1228668B1 (de) | 1999-11-09 | 2000-11-08 | Strahlungsheizung mit einer hohen infrarot-strahlungsleistung für bearbeitungskammern |
Country Status (7)
Country | Link |
---|---|
US (1) | US7067770B1 (de) |
EP (1) | EP1228668B1 (de) |
AT (1) | ATE289154T1 (de) |
AU (1) | AU2348301A (de) |
DE (1) | DE50009507D1 (de) |
ES (1) | ES2237483T3 (de) |
WO (1) | WO2001035699A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007048564A1 (de) | 2007-10-09 | 2009-04-23 | Heraeus Noblelight Gmbh | Vorrichtung für eine Bestrahlungseinheit |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008063677B4 (de) | 2008-12-19 | 2012-10-04 | Heraeus Noblelight Gmbh | Infrarotstrahler und Verwendung des Infrarotstrahlers in einer Prozesskammer |
TWM413957U (en) * | 2010-10-27 | 2011-10-11 | Tangteck Equipment Inc | Diffusion furnace apparatus |
DE102010064141A1 (de) * | 2010-12-23 | 2012-06-28 | Von Ardenne Anlagentechnik Gmbh | Heizeinrichtung für Substratbehandlungsanlagen und Substratbehandlungsanlage |
DE102011081749B4 (de) * | 2011-04-29 | 2016-04-14 | Von Ardenne Gmbh | Substratbehandlungsanlage |
UA111631C2 (uk) * | 2011-10-06 | 2016-05-25 | Санофі Пастер Са | Нагрівальний пристрій для роторної барабанної ліофільної сушарки |
CN104272047A (zh) * | 2012-02-09 | 2015-01-07 | Xalt能源有限责任公司 | 灯组件 |
DE102015102665A1 (de) | 2015-02-25 | 2016-08-25 | Heraeus Noblelight Gmbh | Bestrahlungsvorrichtung zur Einkopplung von Infrarot-Strahlung in eine Vakuum-Prozesskammer mit einem einseitig gesockelten Infrarotstrahler |
KR102244854B1 (ko) * | 2020-08-13 | 2021-04-27 | 주식회사 세원전자 | 열수축 튜브에 대한 차별적 가열이 가능한 가열장치 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1515086A (en) * | 1975-05-22 | 1978-06-21 | Sun Chemical Corp | Ultraviolet lamp assembly |
GB2136937A (en) * | 1983-03-18 | 1984-09-26 | Philips Electronic Associated | A furnace for rapidly heating semiconductor bodies |
US5551670A (en) * | 1990-10-16 | 1996-09-03 | Bgk Finishing Systems, Inc. | High intensity infrared heat treating apparatus |
FR2671859B1 (fr) * | 1991-01-17 | 1999-01-22 | Moulinex Sa | Appareil de cuisson, par exemple four comportant un protecteur pour un element chauffant electrique. |
US5951896A (en) | 1996-12-04 | 1999-09-14 | Micro C Technologies, Inc. | Rapid thermal processing heater technology and method of use |
US6600138B2 (en) * | 2001-04-17 | 2003-07-29 | Mattson Technology, Inc. | Rapid thermal processing system for integrated circuits |
-
2000
- 2000-11-08 AU AU23483/01A patent/AU2348301A/en not_active Abandoned
- 2000-11-08 EP EP00987096A patent/EP1228668B1/de not_active Revoked
- 2000-11-08 WO PCT/DE2000/003908 patent/WO2001035699A1/de active IP Right Grant
- 2000-11-08 US US10/129,340 patent/US7067770B1/en not_active Expired - Fee Related
- 2000-11-08 ES ES00987096T patent/ES2237483T3/es not_active Expired - Lifetime
- 2000-11-08 DE DE50009507T patent/DE50009507D1/de not_active Expired - Fee Related
- 2000-11-08 AT AT00987096T patent/ATE289154T1/de not_active IP Right Cessation
Non-Patent Citations (1)
Title |
---|
See references of WO0135699A1 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007048564A1 (de) | 2007-10-09 | 2009-04-23 | Heraeus Noblelight Gmbh | Vorrichtung für eine Bestrahlungseinheit |
Also Published As
Publication number | Publication date |
---|---|
ATE289154T1 (de) | 2005-02-15 |
DE50009507D1 (de) | 2005-03-17 |
EP1228668B1 (de) | 2005-02-09 |
AU2348301A (en) | 2001-06-06 |
US7067770B1 (en) | 2006-06-27 |
WO2001035699A1 (de) | 2001-05-17 |
ES2237483T3 (es) | 2005-08-01 |
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