EP0815582A1 - Mikrofocus-röntgeneinrichtung - Google Patents
Mikrofocus-röntgeneinrichtungInfo
- Publication number
- EP0815582A1 EP0815582A1 EP96907493A EP96907493A EP0815582A1 EP 0815582 A1 EP0815582 A1 EP 0815582A1 EP 96907493 A EP96907493 A EP 96907493A EP 96907493 A EP96907493 A EP 96907493A EP 0815582 A1 EP0815582 A1 EP 0815582A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- target
- electron beam
- layer
- ray
- brake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K7/00—Gamma- or X-ray microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
Definitions
- the invention relates to a device according to the preamble of claim 1.
- a device is known from US Pat. No. 4,344,013 (LedLey).
- Image plane is shown enlarged.
- microfocus X-ray devices have not really been able to establish themselves in practice, particularly in medical diagnostics. This seems to be mainly due to the fact that they can only work with limited X-ray power. Because the very close focus of the electric tetras on the brake target results in a focal spot (focus) of very small diameter with a correspondingly very high energy density. This large specific load leads quickly to the fact that the target, which is usually irradiated in a direction of 10 ° to 45 °, causes a disadvantageous change in its conversion to convert the incident electron energy into x-ray radiation to be emitted Topography with an early malfunction of the brake layer is experienced.
- the exposure time per x-ray exposure would have to be extended if low-power x-ray beams were used, which would contradict the requirement for short exposure times in the range from tenths to hundredths of a second, in order to increase the unnecessarily high radiation exposure and to blur the object movement avoid.
- the smaller the thermal focal spot on the target anode the lower the electrical power that can be absorbed by the small target area before it begins to melt. This behavior contradicts the demand for a higher density of the electron beams hitting the target for higher power of the X-rays. From the above-mentioned US Pat. No. 4,344,013 (Ledley), a microfocus X-ray device is known which already works with a fused target.
- the electron beam falls on a slanted target, so that the generated X-ray radiation is also emitted at an angle from the target.
- a rapidly progressing crater formation leads to the optical axis of the emitted x-ray groove being exposed to shadowing from the swelling crater rim, which largely x-rays absorbed.
- the result is a diffuse X-ray light that cannot be regarded as starting from a point-like source. Therefore, such a device with an inclined to the incident E lekt ronenst rah L position of the target has not proven.
- DE-OS 34 01 749 A1 (Siemens) relates to an X-ray device in which the electron beam on the braking material is deflected continuously and, for example, meanderingly. However, this increases the effective focal spot, causing - as described above - the image sharpness to suffer.
- 1 is a schematic longitudinal section through a Mi Krofocus-Röntgenei device
- FIG. 3 shows the target according to FIG. 2 with a measurement of the target current
- 3A shows the course of the target current as a function of the irradiation time
- Fig. 4 shows a target with a braking volume
- FIG. 4A shows a support with support material doping.
- the microfocus X-ray device 1 consists of an evacuated housing 11, 12 made of glass or non-ferro-magnetic material.
- the tube 12 has an arbitrary, generally round cross section.
- electrical feed wires 13 protrude for a hair Lade ge cathode 14 into the interior of the tube 12.
- the heated cathode 14 acts as an E Lekt ronenque L le, from whose radiation by means of a lattice 15 in the form of a cap, a narrow, di erecting E lekt ronenstrah L 16 is hidden.
- the beam 16 passes through the central opening of a perforated disk anode 17 and is thereby bundled to form a virtual focal spot 18.
- the beam 16 which then widens again, passes through the cross-sectional zone of a deflection coil 19 arranged outside the tube 12 and is im magnetic gap 20 of a subsequent focus they rspu le 21 bundled.
- the focussing coil 21 images as an e-romagnitical lens a reduced image of the virtual focal spot 18 as focal spot 22 on a transmission target 23 which is located in the outlet opening 24 of the tube 12.
- the focus spot 21 generates an extremely flat focal spot 22 of the order of magnitude of typically 0.5 to 100 ⁇ m.
- the target 23 consists of a thin brake layer 32 made of a metal of a high atomic number in the periodic system of the elements, such as tungsten, gold, copper or molybdenum, and a weakly x-ray absorbing but good heat-conducting carrier rs ci cht 33, preferably made of aluminum or beryllium.
- a thin brake layer 32 made of a metal of a high atomic number in the periodic system of the elements, such as tungsten, gold, copper or molybdenum, and a weakly x-ray absorbing but good heat-conducting carrier rs ci cht 33, preferably made of aluminum or beryllium.
- the structure of the sample 26, insofar as it is more or less impermeable to the X-ray beam 25, is correspondingly enlarged as a silhouette to a distance behind the sample 26 parallel to the transmission target 23 and thus perpendicular to the beam direction 28 Projected in the picture plane 29.
- a suction system 37 for maintaining the vacuum in the tube 12 and for removing vaporous material from the burning cathode 14 also causes the interior of the tube 12 to be kept clean of melted material from the furnace Leak hole 31 in target 23.
- the particularly high yield of X-ray steel L 25 results from the extremely small-area excited brake volume 40 (FIG. 4) in the transmission target 23.
- the high power density, that is to say the high surface-specific physical stress with the micro focus, the electric light beam L 16 leads to the burning of a Brennf Lee k hole 31 in the target 23, so that in the outgoing direction 28 of the X-ray beams 25 the remaining target material and thus its beam-weakening self-absorption is continuously reduced.
- the brake layer 32 is melted off in a targeted manner by the reflecting electron beam L 16, which in terms of its aggregate state represents a dynamically changing X-ray beam Lungsque l Le.
- the brake material is stored as a thin layer 32, for example made of tungsten, on a carrier layer 33, on the other hand, which is thick and is made of a good heat-conducting material, such as beryllium or aluminum, then it is hardly avoidable but also uncritical that at the bottom of the hole 31 in the brake layer
- the irradiation of the target 23 must be ended at this point, that is, in the application of this X-ray device 1, the recording must have ended; because the exposure of the wearer 33 to electron beams 16 only leads to very soft X-ray radiation 25 and thus to diffuse shadow images of the sample 26 to be illuminated that can hardly be used in the image plane 29.
- the transmission target 23 is again irradiated for a very short time with a microfocused electron beam L 16, for which again the cathode 14 only operated briefly and / or the beam 16 via a ve rs c hwenkba re, not shown in the drawing. Aperture only released for a short time or the beam 16 is briefly pivoted from an inoperative waiting direction into the device and Wi rk axis 10 of the beam device 28 via a corresponding control of the deflection coil 19.
- a spot must not be irradiated again at which a hole 31 had previously been burned in, otherwise the carrier chic chic 33 instead of the brake layer would be used immediately or even immediately
- an offset control 34 is provided, which ensures that the focal spots 22 that follow one another only along a meandering or spiral-arc-shaped path by the above-described beam deflection by means of the deflection coil 19 out of the device axis 10 and / or by displacement of the target 23 relative to the device axis 10 are caused. This ensures that only unused areas of the target 23 are used one after the other and thus destruction of the carrier layer
- the target 23 is thus by the vertical exposure to electrons in the
- a positioning motor 35 is shown in the drawing in the tube.
- the target 23 together with the positioning motor 35 can in principle also be held in a vacuum-tight manner on the end face in front of the outlet opening 24 of the tube 12; or from an external arrangement of the positioning motor 35, a linkage engages through the wall on a rotating or viewing holder 36 for the target in the interior of the tube 12.
- the displacement of the target 23 must always take place when the electric ronst rah L 16 has burned the micro-hole 31 so deep into the brake layer 32 that it reaches the carrier layer 33.
- a simple method for determining this point in time is to end the generation of the focal spot on the target 23 after a short irradiation time of the order of milliseconds or microseconds which can be estimated in terms of power or can be more easily empirically determined, for which purpose the electron beam, as already described above, can be switched off, dimmed or swung out of the target area.
- this procedure does not take into account the individual condition of the micro. Hole 31. It may well be that with this method the carrier 33 is already irradiated or, on the other hand, the micro-hole 31 has not yet reached the boundary between the brake layer 32 and carrier 33.
- a much more precise method for determining the point in time t a at which the brake layer 32 has melted and the electrons strike the carrier 33 is the measurement of the target current I Bec shown in FIG. 3, as shown in FIG. 3 , the target current I measured as a function of the irradiation time, then this has the course shown in FIG. 3A.
- the target quantity increases abruptly.
- the point in time t a is the point in time at which the electrons have penetrated the brake layer 32 and the micro-hole 31 extends to the carrier layer 33.
- an electron accelerated in a high voltage penetrates the surface of matter, it experiences in interaction with the matter a series of elastic impacts, during which it loses a part of its kinetic energy, which is converted into radiation. Part of this radiation consists of X-rays.
- the electron passes through a braking volume 40 (FIG. 4) within the target material, the expansion of which is primarily determined by the atomic number Z of the target material, the energy E 0 of the electrons and by the electron beam diameter is.
- the x-ray radiation is generated within the Bremsvo Lumens 40 described.
- the extent of the steel Lenque l Le is thus determined by the size of the B remsvo Lumens 40. Even if an e-ect ron Lahdurc me s rd is assumed, a finite braking volume 40 remains due to the spread of the electrons. Thus, a minimum beam Lenque l length, essentially determined by E 0 and Z, cannot be fallen below in principle.
- target material doping 41 (FIG. 4A) must be introduced into the carrier material ri a L, the volume of each of which is significantly smaller than the above-described braking volume 40 of the electrons in a coherent target ateri al.
- the usable X-ray radiation only arises in the target material with a high atomic number.
- the low ordinal number from the target material dopings 41 into the carrier material penetrated electrons do not contribute to the usable X-ray radiation, just as the electrons that penetrate directly into the carrier material in addition to the dopings 41 do not make any significant contribution to the usable radiation.
- the electron beam Since in the small doping volume na according to FIG. 4A, with the same electron beam, fewer x-ray photons are generated per time than in the larger brake volume Lumi na 40 in a brake layer 32 (FIG. 2), the electron beam must be dic ht e (current) can be increased. Although this leads to a faster melting of the target material dopings 41 and their surrounding of the carrier material, the X-radiation generated during the melting process can also be used. For the next x-ray exposure, the electron beam 16 is directed in a known manner onto a still unused doping point 41, etc.
- the doping 41 can be arranged, for example, in a defined grid.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- X-Ray Techniques (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Radiation-Therapy Devices (AREA)
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19509516A DE19509516C1 (de) | 1995-03-20 | 1995-03-20 | Mikrofokus-Röntgeneinrichtung |
DE19509516 | 1995-03-20 | ||
PCT/EP1996/001145 WO1996029723A1 (de) | 1995-03-20 | 1996-03-16 | Mikrofocus-röntgeneinrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0815582A1 true EP0815582A1 (de) | 1998-01-07 |
EP0815582B1 EP0815582B1 (de) | 1999-09-22 |
Family
ID=7756825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP96907493A Expired - Lifetime EP0815582B1 (de) | 1995-03-20 | 1996-03-16 | Mikrofocus-röntgeneinrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5857008A (de) |
EP (1) | EP0815582B1 (de) |
JP (1) | JP3150703B2 (de) |
AT (1) | ATE185021T1 (de) |
DE (2) | DE19509516C1 (de) |
WO (1) | WO1996029723A1 (de) |
Families Citing this family (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2161843C2 (ru) | 1999-02-17 | 2001-01-10 | Кванта Вижн, Инк. | Точечный высокоинтенсивный источник рентгеновского излучения |
GB9906886D0 (en) * | 1999-03-26 | 1999-05-19 | Bede Scient Instr Ltd | Method and apparatus for prolonging the life of an X-ray target |
JP2001035428A (ja) * | 1999-07-22 | 2001-02-09 | Shimadzu Corp | X線発生装置 |
JP3934837B2 (ja) | 1999-10-29 | 2007-06-20 | 浜松ホトニクス株式会社 | 開放型x線発生装置 |
JP3934836B2 (ja) | 1999-10-29 | 2007-06-20 | 浜松ホトニクス株式会社 | 非破壊検査装置 |
UA59495C2 (uk) * | 2000-08-07 | 2003-09-15 | Мурадін Абубєкіровіч Кумахов | Рентгенівський вимірювально-випробувальний комплекс |
WO2003081631A1 (de) * | 2002-03-26 | 2003-10-02 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Roentgenstrahlquelle mit einer kleinen brennfleckgroesse |
US7180981B2 (en) * | 2002-04-08 | 2007-02-20 | Nanodynamics-88, Inc. | High quantum energy efficiency X-ray tube and targets |
US7466799B2 (en) * | 2003-04-09 | 2008-12-16 | Varian Medical Systems, Inc. | X-ray tube having an internal radiation shield |
US6954515B2 (en) * | 2003-04-25 | 2005-10-11 | Varian Medical Systems, Inc., | Radiation sources and radiation scanning systems with improved uniformity of radiation intensity |
DE10352334B4 (de) * | 2003-11-06 | 2010-07-29 | Comet Gmbh | Verfahren zur Regelung einer Mikrofokus-Röntgeneinrichtung |
JP2005276760A (ja) * | 2004-03-26 | 2005-10-06 | Shimadzu Corp | X線発生装置 |
US7139365B1 (en) | 2004-12-28 | 2006-11-21 | Kla-Tencor Technologies Corporation | X-ray reflectivity system with variable spot |
DE102005053386A1 (de) * | 2005-11-07 | 2007-05-16 | Comet Gmbh | Nanofocus-Röntgenröhre |
DE202005017496U1 (de) * | 2005-11-07 | 2007-03-15 | Comet Gmbh | Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre |
DE102006062452B4 (de) * | 2006-12-28 | 2008-11-06 | Comet Gmbh | Röntgenröhre und Verfahren zur Prüfung eines Targets einer Röntgenröhre |
FR2941064B1 (fr) * | 2009-01-13 | 2010-12-31 | Norbert Beyrard | Dispositif d'imagerie x ou infrarouge comprenant un limiteur de dose a vitesse de translation controlee |
DE102009033607A1 (de) | 2009-07-17 | 2011-01-20 | Siemens Aktiengesellschaft | Röntgenröhre und Anode für eine Röntgenröhre |
JP5687001B2 (ja) * | 2009-08-31 | 2015-03-18 | 浜松ホトニクス株式会社 | X線発生装置 |
US9271689B2 (en) * | 2010-01-20 | 2016-03-01 | General Electric Company | Apparatus for wide coverage computed tomography and method of constructing same |
US8831179B2 (en) * | 2011-04-21 | 2014-09-09 | Carl Zeiss X-ray Microscopy, Inc. | X-ray source with selective beam repositioning |
US20150117599A1 (en) | 2013-10-31 | 2015-04-30 | Sigray, Inc. | X-ray interferometric imaging system |
JP2013239317A (ja) * | 2012-05-15 | 2013-11-28 | Canon Inc | 放射線発生ターゲット、放射線発生装置および放射線撮影システム |
US20160020059A1 (en) * | 2012-07-11 | 2016-01-21 | Comet Holding Ag | Cooling arrangement for x-ray generator |
US9129715B2 (en) | 2012-09-05 | 2015-09-08 | SVXR, Inc. | High speed x-ray inspection microscope |
JP5763032B2 (ja) * | 2012-10-02 | 2015-08-12 | 双葉電子工業株式会社 | X線管 |
US10269528B2 (en) | 2013-09-19 | 2019-04-23 | Sigray, Inc. | Diverging X-ray sources using linear accumulation |
US9449781B2 (en) | 2013-12-05 | 2016-09-20 | Sigray, Inc. | X-ray illuminators with high flux and high flux density |
US10295485B2 (en) | 2013-12-05 | 2019-05-21 | Sigray, Inc. | X-ray transmission spectrometer system |
US10297359B2 (en) | 2013-09-19 | 2019-05-21 | Sigray, Inc. | X-ray illumination system with multiple target microstructures |
US9448190B2 (en) | 2014-06-06 | 2016-09-20 | Sigray, Inc. | High brightness X-ray absorption spectroscopy system |
US9570265B1 (en) | 2013-12-05 | 2017-02-14 | Sigray, Inc. | X-ray fluorescence system with high flux and high flux density |
US10304580B2 (en) | 2013-10-31 | 2019-05-28 | Sigray, Inc. | Talbot X-ray microscope |
USRE48612E1 (en) | 2013-10-31 | 2021-06-29 | Sigray, Inc. | X-ray interferometric imaging system |
US9594036B2 (en) | 2014-02-28 | 2017-03-14 | Sigray, Inc. | X-ray surface analysis and measurement apparatus |
US9823203B2 (en) | 2014-02-28 | 2017-11-21 | Sigray, Inc. | X-ray surface analysis and measurement apparatus |
KR102120400B1 (ko) * | 2014-03-26 | 2020-06-09 | 한국전자통신연구원 | 타깃 유닛 및 그를 구비하는 엑스 선 튜브 |
US10401309B2 (en) | 2014-05-15 | 2019-09-03 | Sigray, Inc. | X-ray techniques using structured illumination |
TWI629474B (zh) | 2014-05-23 | 2018-07-11 | 財團法人工業技術研究院 | X光光源以及x光成像的方法 |
US9748070B1 (en) | 2014-09-17 | 2017-08-29 | Bruker Jv Israel Ltd. | X-ray tube anode |
US10352880B2 (en) | 2015-04-29 | 2019-07-16 | Sigray, Inc. | Method and apparatus for x-ray microscopy |
US10295486B2 (en) | 2015-08-18 | 2019-05-21 | Sigray, Inc. | Detector for X-rays with high spatial and high spectral resolution |
US11282668B2 (en) * | 2016-03-31 | 2022-03-22 | Nano-X Imaging Ltd. | X-ray tube and a controller thereof |
US10247683B2 (en) | 2016-12-03 | 2019-04-02 | Sigray, Inc. | Material measurement techniques using multiple X-ray micro-beams |
WO2018175570A1 (en) | 2017-03-22 | 2018-09-27 | Sigray, Inc. | Method of performing x-ray spectroscopy and x-ray absorption spectrometer system |
US10578566B2 (en) | 2018-04-03 | 2020-03-03 | Sigray, Inc. | X-ray emission spectrometer system |
US10845491B2 (en) | 2018-06-04 | 2020-11-24 | Sigray, Inc. | Energy-resolving x-ray detection system |
GB2591630B (en) | 2018-07-26 | 2023-05-24 | Sigray Inc | High brightness x-ray reflection source |
US10656105B2 (en) | 2018-08-06 | 2020-05-19 | Sigray, Inc. | Talbot-lau x-ray source and interferometric system |
DE112019004433T5 (de) | 2018-09-04 | 2021-05-20 | Sigray, Inc. | System und verfahren für röntgenstrahlfluoreszenz mit filterung |
CN112823280A (zh) | 2018-09-07 | 2021-05-18 | 斯格瑞公司 | 用于深度可选x射线分析的系统和方法 |
JP6695011B1 (ja) * | 2018-10-22 | 2020-05-20 | キヤノンアネルバ株式会社 | X線発生装置及びx線撮影システム |
US11467107B2 (en) * | 2018-10-25 | 2022-10-11 | Horiba, Ltd. | X-ray analysis apparatus and x-ray generation unit |
US11302508B2 (en) | 2018-11-08 | 2022-04-12 | Bruker Technologies Ltd. | X-ray tube |
WO2021011209A1 (en) | 2019-07-15 | 2021-01-21 | Sigray, Inc. | X-ray source with rotating anode at atmospheric pressure |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE243171C (de) * | ||||
FR2333344A1 (fr) * | 1975-11-28 | 1977-06-24 | Radiologie Cie Gle | Tube radiogene a cathode chaude avec anode en bout et appareil comportant un tel tube |
US4344013A (en) * | 1979-10-23 | 1982-08-10 | Ledley Robert S | Microfocus X-ray tube |
DE3307019A1 (de) * | 1983-02-28 | 1984-08-30 | Scanray Scandinavian X-Ray Deutschland GmbH, 3050 Wunstorf | Roentgenroehre mit mikrofokus |
DE3401749A1 (de) * | 1984-01-19 | 1985-08-01 | Siemens AG, 1000 Berlin und 8000 München | Roentgendiagnostikeinrichtung mit einer roentgenroehre |
US4896341A (en) * | 1984-11-08 | 1990-01-23 | Hampshire Instruments, Inc. | Long life X-ray source target |
EP0319912A3 (de) * | 1987-12-07 | 1990-05-09 | Nanodynamics, Incorporated | Verfahren und Vorrichtung zum Analysieren von Materialien mittels Röntgenstrahlen |
JPH07119837B2 (ja) * | 1990-05-30 | 1995-12-20 | 株式会社日立製作所 | Ct装置及び透過装置並びにx線発生装置 |
-
1995
- 1995-03-20 DE DE19509516A patent/DE19509516C1/de not_active Expired - Fee Related
-
1996
- 1996-03-16 US US08/913,714 patent/US5857008A/en not_active Expired - Fee Related
- 1996-03-16 AT AT96907493T patent/ATE185021T1/de not_active IP Right Cessation
- 1996-03-16 DE DE59603163T patent/DE59603163D1/de not_active Expired - Fee Related
- 1996-03-16 JP JP52806796A patent/JP3150703B2/ja not_active Expired - Fee Related
- 1996-03-16 EP EP96907493A patent/EP0815582B1/de not_active Expired - Lifetime
- 1996-03-16 WO PCT/EP1996/001145 patent/WO1996029723A1/de active IP Right Grant
Non-Patent Citations (1)
Title |
---|
See references of WO9629723A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP3150703B2 (ja) | 2001-03-26 |
ATE185021T1 (de) | 1999-10-15 |
US5857008A (en) | 1999-01-05 |
DE59603163D1 (de) | 1999-10-28 |
WO1996029723A1 (de) | 1996-09-26 |
EP0815582B1 (de) | 1999-09-22 |
JPH10503618A (ja) | 1998-03-31 |
DE19509516C1 (de) | 1996-09-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0815582A1 (de) | Mikrofocus-röntgeneinrichtung | |
EP0584871B1 (de) | Röntgenröhre mit einer Transmissionsanode | |
DE3330806C2 (de) | ||
EP0292055B1 (de) | Strahlenquelle zur Erzeugung einer im wesentlichen monochromatischen Röntgenstrahlung | |
DE102010060484B4 (de) | System und Verfahren zum Fokussieren und Regeln/Steuern eines Strahls in einer indirekt geheizten Kathode | |
DE10147473C2 (de) | Drehanodenröntgenröhre | |
DE19957559A1 (de) | Wärmeenergiespeicher- und Übertragungsvorrichtung | |
DE69728885T2 (de) | Detektorvorrichtungen | |
DE2807735A1 (de) | Roentgenroehre mit einem aus metall bestehenden roehrenkolben | |
DE102010009276A1 (de) | Röntgenröhre sowie System zur Herstellung von Röntgenbildern für die zahnmedizinische oder kieferorthopädische Diagnostik | |
EP1783809A2 (de) | Nanofocus-Röntgenröhre | |
DE19544203A1 (de) | Röntgenröhre, insbesondere Mikrofokusröntgenröhre | |
DE102010061584A1 (de) | Röntgenstrahlkathode und Verfahren zum Herstellen derselben | |
DE102004018765A1 (de) | Stationäres Computertomographiesystem mit kompakter Röntgenquellen-Baueinheit | |
DE102008007413A1 (de) | Röntgentarget | |
DE102007046278A1 (de) | Röntgenröhre mit Transmissionsanode | |
DE19510047C2 (de) | Anode für eine Röntgenröhre | |
DE2719609A1 (de) | Roentgenroehre | |
DE102013107736A1 (de) | Röntgenprüfvorrichtung für die Materialprüfung und Verfahren zur Erzeugung hochaufgelöster Projektionen eines Prüflings mittels Röntgenstrahlen | |
EP3629361A1 (de) | Röntgenanode, röntgenstrahler und verfahren zur herstellung einer röntgenanode | |
DE4230047C1 (de) | Röntgenröhre | |
WO2016102370A1 (de) | Metallstrahlröntgenröhre | |
DE102012103974A1 (de) | Vorrichtung und Verfahren zur Erzeugung zumindest eines Röntgenstrahlen abgebenden Brennflecks | |
EP2301042B1 (de) | Röntgentarget und ein verfahren zur erzeugung von röntgenstrahlen | |
DE102005018342B4 (de) | Vorrichtung und Verfahren zur Erzeugung von Röntgenstrahlung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19970818 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH DE FR GB IT LI NL |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
17Q | First examination report despatched |
Effective date: 19981116 |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE CH DE FR GB IT LI NL |
|
REF | Corresponds to: |
Ref document number: 185021 Country of ref document: AT Date of ref document: 19991015 Kind code of ref document: T |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REF | Corresponds to: |
Ref document number: 59603163 Country of ref document: DE Date of ref document: 19991028 |
|
ITF | It: translation for a ep patent filed |
Owner name: DE DOMINICIS & MAYER S.R.L. |
|
GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) |
Effective date: 19991207 |
|
ET | Fr: translation filed | ||
REG | Reference to a national code |
Ref country code: CH Ref legal event code: NV Representative=s name: ROTTMANN, ZIMMERMANN + PARTNER AG |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed | ||
REG | Reference to a national code |
Ref country code: GB Ref legal event code: 732E |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: IF02 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: TP |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PUE Owner name: MEDIXTEC GMBH MEDIZINISCHE GERAETE TRANSFER- MEDIX Ref country code: CH Ref legal event code: NV Representative=s name: BOVARD AG PATENTANWAELTE |
|
NLS | Nl: assignments of ep-patents |
Owner name: MEDIXTEC GMBH |
|
NLT1 | Nl: modifications of names registered in virtue of documents presented to the patent office pursuant to art. 16 a, paragraph 1 |
Owner name: RASCHER GMBH |
|
BECA | Be: change of holder's address |
Free format text: 20020416 *MEDIXTEC G.M.B.H.:NEUE WEILHERMER STRASSE 24, D-73230 KIRCHHEIM-TECK |
|
BECH | Be: change of holder |
Free format text: 20020416 *MEDIXTEC G.M.B.H. |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 20080314 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 20080318 Year of fee payment: 13 Ref country code: GB Payment date: 20080320 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: AT Payment date: 20080314 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20080314 Year of fee payment: 13 Ref country code: DE Payment date: 20080321 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: IT Payment date: 20080328 Year of fee payment: 13 Ref country code: BE Payment date: 20080430 Year of fee payment: 13 |
|
BERE | Be: lapsed |
Owner name: *MEDIXTEC G.M.B.H. Effective date: 20090331 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090316 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20090316 |
|
NLV4 | Nl: lapsed or anulled due to non-payment of the annual fee |
Effective date: 20091001 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20091130 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090331 Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20091001 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090331 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090331 Ref country code: NL Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20091001 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090316 Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20091123 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20090316 |