EP0768498A3 - Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume - Google Patents

Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume Download PDF

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Publication number
EP0768498A3
EP0768498A3 EP96107219A EP96107219A EP0768498A3 EP 0768498 A3 EP0768498 A3 EP 0768498A3 EP 96107219 A EP96107219 A EP 96107219A EP 96107219 A EP96107219 A EP 96107219A EP 0768498 A3 EP0768498 A3 EP 0768498A3
Authority
EP
European Patent Office
Prior art keywords
clean
plenum chamber
rooms
turbulences
poor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96107219A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0768498A2 (de
Inventor
Heinz Schneider
Klaus Schultz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Jenoptik Jena GmbH
Jenoptik AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena GmbH, Jenoptik AG filed Critical Jenoptik Jena GmbH
Publication of EP0768498A2 publication Critical patent/EP0768498A2/de
Publication of EP0768498A3 publication Critical patent/EP0768498A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/007—Ventilation with forced flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/20—Casings or covers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
EP96107219A 1995-10-13 1996-05-07 Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume Withdrawn EP0768498A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19538040A DE19538040C2 (de) 1995-10-13 1995-10-13 Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume
DE19538040 1995-10-13

Publications (2)

Publication Number Publication Date
EP0768498A2 EP0768498A2 (de) 1997-04-16
EP0768498A3 true EP0768498A3 (de) 1999-11-24

Family

ID=7774679

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96107219A Withdrawn EP0768498A3 (de) 1995-10-13 1996-05-07 Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume

Country Status (6)

Country Link
US (1) US5814116A (ko)
EP (1) EP0768498A3 (ko)
JP (1) JP3091412B2 (ko)
KR (1) KR0173766B1 (ko)
DE (1) DE19538040C2 (ko)
SG (1) SG88724A1 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010113901A (ko) 1999-04-28 2001-12-28 스트라토테크 코포레이션 조정 가능한 청정 공기 유동 환경
US20020071954A1 (en) * 2000-12-08 2002-06-13 Nelson Christopher R. Cellulose gypsum based substrate with increased water resistance and strength by surface application of polymeric diphenylmethane diisocyanate
DE10351848A1 (de) 2003-11-06 2005-06-09 Leica Microsystems Semiconductor Gmbh System zur Detektion von Makrodefekten
DE102004062592B3 (de) * 2004-12-24 2006-06-08 Leica Microsystems Jena Gmbh System zur Untersuchung eines scheibenförmigen Substrats
JP5427833B2 (ja) * 2011-05-18 2014-02-26 パナソニック株式会社 クリーンルームの逆流防止装置
CN107883508A (zh) * 2016-09-29 2018-04-06 殷晓冬 装配式和组装式弱湍流集中送风装置
CN111271870A (zh) * 2020-02-24 2020-06-12 东莞市利人净化科技有限公司 一种带有静压箱的风机过滤器机组

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3513902A1 (de) * 1984-04-17 1985-10-24 Environmental Air Control, Inc., Hagerstown, Md. Raumsparende anordnung von geblaese und filter zur verwendung in reinluftbereichen
EP0340433A2 (de) * 1988-04-30 1989-11-08 BABCOCK-BSH AKTIENGESELLSCHAFT vormals Büttner-Schilde-Haas AG Tunnelmodul zum Aufbau eines Reinraumes in Laminar-Flow-Technik
DE4122582A1 (de) * 1991-07-08 1993-01-14 Babcock Bsh Ag Modul zum aufbau einer reinraumdecke
US5413524A (en) * 1993-02-09 1995-05-09 Kabushiki Kaisha Nikko Method of taking out viscera of fish and apparatus thereof

Family Cites Families (25)

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Publication number Priority date Publication date Assignee Title
US3251177A (en) * 1963-05-15 1966-05-17 Arthur K Baker Dust-free bench
US3301167A (en) * 1964-05-04 1967-01-31 Ray Products Company Inc Anticontaminant work bench
US3290866A (en) * 1964-08-26 1966-12-13 Schonrock Verlie Evaporative cooler
US3284148A (en) * 1965-02-24 1966-11-08 Ramniceanu Tiberiu Justinian Blower-contained vibration-free work bench
DE2138985A1 (de) * 1971-08-04 1973-02-15 Buettner Schilde Haas Ag Belueftungseinrichtung
US3828530A (en) * 1971-09-01 1974-08-13 M Peters Filter system
US3935803A (en) * 1972-10-12 1976-02-03 Flanders Filters, Inc. Air filtration apparatus
CA988357A (en) * 1973-01-26 1976-05-04 Her Majesty The Queen, In Right Of Canada, As Represented By The Minister Of National Defence Back table clean station
US3838556A (en) * 1973-04-06 1974-10-01 Med Assists Inc Air filtration device with oriented output
JPS5520886B2 (ko) * 1974-04-26 1980-06-05
JPS51136570A (en) * 1975-05-22 1976-11-26 Mitsubishi Heavy Ind Ltd Coarse packed bed
JPS52142851A (en) * 1976-05-22 1977-11-29 Hosokawa Kankiyou Enjiniaringu Distribution controlled air feeder assembled in interior building structure
US4412849A (en) * 1981-04-09 1983-11-01 Klenzaids Engineers Private Limited Method and apparatus for control of gas-borne particulates
DE3484603D1 (de) * 1983-12-16 1991-06-20 Nitta Co Luftreiniger.
JPS6171829A (ja) * 1984-09-14 1986-04-12 Fuji Electric Co Ltd 移動磁界式処理装置
JPS61175834A (ja) * 1985-01-31 1986-08-07 Toshiba Corp マイクロプログラムデバツグ機能付きデ−タ処理装置
JPS61175834U (ko) * 1985-04-22 1986-11-01
JPS62183832A (ja) * 1985-10-23 1987-08-12 Hitachi Ltd 半導体製造装置
US5053065A (en) * 1988-05-16 1991-10-01 Garay Charles J Low-profile blower and filter apparatus for supplying clean air
JPH02183832A (ja) * 1989-01-11 1990-07-18 Nec Corp 推論処理装置
DE4303805A1 (en) * 1992-02-12 1993-09-09 Helios Klima Kaelte Supporting frame for air conditioning plant - comprises inner frame attached to outer frame by continuous rubber bead or by six rocker bolts
JP3309416B2 (ja) * 1992-02-13 2002-07-29 松下電器産業株式会社 連結式クリーン空間装置
KR970006728B1 (ko) * 1992-08-31 1997-04-29 마쯔시다 덴기 산교 가부시끼가이샤 환경제어장치
DE4236031C2 (de) * 1992-10-24 1996-07-11 Jenoptik Jena Gmbh Vorrichtung zur Erzeugung eines Reinluftstromes
DE4238895C1 (de) * 1992-11-19 1993-12-16 Howatherm Klimatech Gmbh Ventilatoraggregat zum Einbau in einen Luftkanal eines raumlufttechnischen Gerätes

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3513902A1 (de) * 1984-04-17 1985-10-24 Environmental Air Control, Inc., Hagerstown, Md. Raumsparende anordnung von geblaese und filter zur verwendung in reinluftbereichen
EP0340433A2 (de) * 1988-04-30 1989-11-08 BABCOCK-BSH AKTIENGESELLSCHAFT vormals Büttner-Schilde-Haas AG Tunnelmodul zum Aufbau eines Reinraumes in Laminar-Flow-Technik
DE4122582A1 (de) * 1991-07-08 1993-01-14 Babcock Bsh Ag Modul zum aufbau einer reinraumdecke
US5413524A (en) * 1993-02-09 1995-05-09 Kabushiki Kaisha Nikko Method of taking out viscera of fish and apparatus thereof

Also Published As

Publication number Publication date
SG88724A1 (en) 2002-05-21
EP0768498A2 (de) 1997-04-16
KR970022014A (ko) 1997-05-28
DE19538040A1 (de) 1997-04-17
DE19538040C2 (de) 1998-08-13
JPH09126511A (ja) 1997-05-16
JP3091412B2 (ja) 2000-09-25
KR0173766B1 (ko) 1999-03-20
US5814116A (en) 1998-09-29

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