EP0726152B1 - Procédé de fabrication d'une tête d'impression à jet d'encre - Google Patents

Procédé de fabrication d'une tête d'impression à jet d'encre Download PDF

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Publication number
EP0726152B1
EP0726152B1 EP96250101A EP96250101A EP0726152B1 EP 0726152 B1 EP0726152 B1 EP 0726152B1 EP 96250101 A EP96250101 A EP 96250101A EP 96250101 A EP96250101 A EP 96250101A EP 0726152 B1 EP0726152 B1 EP 0726152B1
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EP
European Patent Office
Prior art keywords
chambers
areas
plate
parts
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96250101A
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German (de)
English (en)
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EP0726152A3 (fr
EP0726152A2 (fr
Inventor
Wolfgang Dr. Thiel
Stephan Günther
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Francotyp Postalia GmbH
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Francotyp Postalia GmbH
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Publication of EP0726152A3 publication Critical patent/EP0726152A3/fr
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Publication of EP0726152B1 publication Critical patent/EP0726152B1/fr
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14362—Assembling elements of heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Definitions

  • the invention relates to a manufacturing method for an inkjet printhead according to the preamble of claim 1 specified Art.
  • Such an ink jet print head can be small fast printers. Such will be for example for franking machines for franking Postage used.
  • the chambers are no longer with the smaller chamber area, but now with the larger chamber area parallel to each other.
  • DE 34 45 761 A1 describes a process for the production a single plate converter assembly a transducer material known. After coating the lower plate surface with a membrane layer the material is removed from the upper surface, to create separate areas on the Membrane above each pressure chamber (area 25.4 mm * 2.54 mm) are arranged. This eliminates the Need an adhesive connection with adhesive between transducer material and membrane and the uniformity of all distances is improved. The resulting nozzle spacing is, however, relatively large.
  • the through openings are made by etching, but not in a parallel process, i.e. not in all parts (plates) manufactured at the same time.
  • EP 67 653 already discloses UV exposure and Etching of a photosensitive glass plate known. Indeed here, too, the production of individual ones takes place Serial plates head for head, not parallel. This way of working, in which first separated and then each separated plate part individually edited, gives problems with very small Structures. For high accuracy from very small Structures it is known that when annealing everyone Plate part is subject to an approximately 10% shrinkage. The very small structures result from the Requires a very high image resolution in inkjet printing.
  • the one with the face-shooter-ink-jet module with two Groups of. arranged symmetrically to the nozzle line Ink chambers achieved double nozzle density in one So far, series has been used with edge shooter ink jet modules one row of nozzles is not reached. To double the image density to achieve, several rows of nozzles horizontally and vertically offset from each other.
  • Such an offset arrangement of two rows of nozzles is also in an edge shooter module - shown in Figure 2 known (First Annual Ink Jet Printing Workshop, March 26-27, 1992, Royal Sonesta Hotel, Cambridge, Massachusetts).
  • a module exists from a total of only three parts (glass pieces), one Central part with openings and two side parts each with a row of ink chambers and a row of nozzles on the front of the respective side part.
  • the two rows of ink chambers and the rows of nozzles are on the front of each side part offset from each other, which again the ones already mentioned Disadvantages when assembling the module and when controlling it brings with it.
  • the process of making the inkjet printhead starts from the CAD development of a printhead design and a mask production for a photosensitive Glass plate.
  • nozzle channels are specially treated and the cavities (chambers) and the outer edge the module before the printhead contacts and is assembled.
  • the invention assumes that the edge ejection the row of nozzles with a high number of nozzles in one side part of a module can be accommodated. For the first time is a higher nozzle density in the manner according to the invention, completely independent of the dimensions of the ink chambers, reachable.
  • Such an inkjet print head can advantageously be made up of several modules, whereby only one of the modules carries the nozzle row or off consists of a multi-part module. It is still provided that the front edge of the chambers bearing Part that carries the row of nozzles, on the edge or in the Middle of a module is arranged.
  • FIG. 1a shows the known principle of an edge shooter inkjet print head in perspective view shown. It consists of a module on the Front two offset to each other in the y direction There are rows of nozzles. Thereby belongs to the nozzle group 1.1 the first row a first group 101 of ink chambers and a group to the nozzle group 1.2 of the second row 102 on ink chambers.
  • FIG. 1b shows the known principle of a face shooter ink jet ink jet print head in perspective Shown view. It consists of a module in its base two to each other in the z direction offset nozzle groups 1.1 and 1.2 in a row lie. An intake chamber 151 or 152 becomes in each case a group of ink chambers 101 and 102 for the nozzle group 1.1 or for the offset nozzle group 1.2 inked.
  • Figure 1c shows a perspective view of the invention Principle of an edge shooter ink jet in-line print head (ESIJIL). It consists of a module on the end face k ⁇ 2 horizontally to each other offset nozzle groups 1.1, 1.2 etc. in a row lie. Ink flow from chamber groups 101-104 in the volume of the module is on the front edge of the first Chamber-bearing part, which is quasi a side part of the module forms. The chambers of a group 101-104 are staggered in the y direction and theirs associated outgoing ink channels are thus sent to the Print edge led that they form nozzles 1.1 - 1.4, the however, there are very few in a row Distance. This is achieved in FIG.
  • ESIJIL edge shooter ink jet in-line print head
  • Fig. 1c in which the outgoing ink channels a certain have a lateral offset in the z direction.
  • the chambers in another embodiment 101 - 104 even this lateral offset in the z direction exhibit.
  • the sequence of such Orders finally give the desired number Nozzles in a row.
  • Fig. 1c are the overview for the sake of only two such arrangements.
  • the ink drops are made from the Nozzles ejected in the x direction.
  • the axes x, y, z are orthogonal to each other.
  • the addition further chambers 105, 106 etc. in the y direction in principle possible, and only from the effort limited. Its positive effect, namely education only a row of nozzles with minimal nozzle spacing the inventive principle already with 2 chamber groups 101 and 102.
  • the structure of a known - shown in Figure 2 - double row edge shooter ink jet module consists of 3 Ceramic or glass parts.
  • a first part which on carries a first chamber group on its left side over a middle part with a second part, which on on its right side carries a second chamber group, see above connected in the y direction that the chambers on the inside of the middle part fit and side to side (horizontal) are offset.
  • Each chamber is through a first channel with a suction space and with a second channel connected to the front edge of the module. Every second Channels form a nozzle. It is relatively difficult Keep the distance between the two rows of nozzles exactly. Deviations lead but with constant timing of the two rows of nozzles to deviations in Print image, which reduces the print quality.
  • the middle part has a first opening that the Intake spaces of both outer parts with each other and with one Ink supply port connects. There are also openings available for the fasteners.
  • An ink chamber group 101 and the suction space 15 are not on the in Figure 3 visible left side of the first part 2.
  • the second Part 4 contained chambers carries no nozzles but only still the second ink chamber group 102, which over the second openings 14 of the middle part 3 supplied with ink becomes.
  • the associated other nozzles are over the third openings of the middle part 3 with the ink chambers of the second part 4 connected.
  • Parts 2 - 4 are mounted in the direction of the y-axis.
  • the X-ray image of the Top view of ESIJIL printhead modules illustrates the in-line arrangement of the nozzles and the lateral offset of the ink chamber groups 101 des first chamber-bearing part 2 and the group 102 of the second chamber-bearing part 4, shows the location the first opening 18 in the middle part 3 to the Ink supply opening 16 and the suction space 15, the second openings 14, which with the suction chamber 15 in Connect and the third openings 9 that the Feed ink to the nozzles of the second nozzle group 1.2. It is envisaged that the nozzles of the nozzle group 101 with the nozzles of the nozzle group 102 within the Alternate row of nozzles.
  • FIG. 5a A detail of the X-ray image is shown in FIG. 5a the figure 4 shown enlarged.
  • the one in the first part 2 located chambers 11 of the first chamber group 101 Nozzles of the first nozzle group 1.1 in the same part 2 assigned.
  • Chamber 11 becomes suction chamber 15 supplied with ink via one of the channels 13.
  • FIG. 5b On corresponding section on line A-A through the Drawing in Figure 5a is shown in Figure 5b.
  • the chambers 12 of the second located in the second part 4 Chamber group 102 are nozzles of the second nozzle group 1.2 assigned in the other chambers bearing part 2, as from the section B-B shown in Figure 5c is.
  • Figures 6a, b, c and d show a second variant the solution according to the invention.
  • Figure 6a again a top view of a detail as an X-ray image
  • Figure 6d is a front view of a Printhead shown as an X-ray image.
  • the x-ray cuts C-C, D-D and E-E are shown in the view Figure 6d overlaid. This becomes in connection with the 6a shows the position of the ink chamber groups 101, 102, 103 and 104 can be seen.
  • Figure 6b shows one Overlays of sections through lines A-A and A1-A1 of Figures 6a and 6d.
  • Figure 6c shows one Overlays of sections through lines B-B and B1-B1 of Figures 6a and 6d.
  • a second group of nozzles each 1.2 in the first part is related to a chamber 12 of the second chamber group 102 in the second chamber Part facing a chamber 11 of the first Chamber group 101 of the first chamber-bearing part 2 is arranged offset, the second chamber group 102 supplied with ink through openings 14 in the center piece 3 becomes.
  • 3 second openings are in the center piece 14 for supplying the second nozzle group 1.2 with ink available.
  • Opposite the openings 9 in each The centerpiece is openings 10 in each of the first chambers supporting part and a connection of the second chambers supporting part for connecting the chambers of each second chamber group 102 with the nozzle channels of the second Nozzle group 1.2 in the first chambers Item available.
  • each The first chamber-bearing part is supplied of the ink chambers 11, 12 in the first and each second chamber-bearing part.
  • the ink supply to the Intake space 15 takes place via an opening 16 in that Part 2, which is a side part of the printhead forms, and via corresponding openings 18, 22 in respective center piece and further openings 17, 19, 21 in the chambers bearing parts 2, 4, 6 and one Opening 20 in the spacer 5.
  • a - not shown in Figures 1 to 6a - piezoelectric Element 31 serves as a well known Means for expelling ink from a chamber and can be placed on the chamber surface or in the chamber to be a pressure over at his arousal the compliant chamber wall onto the ink liquid in the chamber to exercise, causing an ink jet to escape from the nozzle connected to the chamber leads.
  • the chamber 12 of the element 31 through a thin from the material of the chambers load-bearing part 4 existing layer 30 separately, which is so elastic that the bending energy of the Elements 31 is only slightly damped.
  • Spacer 5 has a corresponding recess 32 for the piezoelectric element 31.
  • openings 9 and 10 are also two rows Can be arranged on lines C-C and D-D.
  • a module is composed of 3 parts each and is provided with piezoelectric elements and contacted.
  • a second module is joined together with the first module via a spacer 5 to form an ESIJIL printhead, the second module with parts 6, 7, 8 not having any nozzles, but only corresponding openings which correspond to the openings provided in parts 2 , 3, 4 of the first module are connected.
  • an ESIJIL print head is made built into a single multi-part module.
  • FIG. 7a is a front view with the in-line nozzle row and in FIG. 7b an X-ray image of the front view or an overlay of the cuts lines C-C and E-E are shown.
  • On this line C-C are all third openings.
  • More openings a line D-D are not provided. It is recognizable that only the nozzle dimensions the maximum Determine the number of nozzles in the row. Exists Need for increased chamber dimensions, should only the volume of the printhead can be increased. Of course, it is also possible if necessary, higher tolerance requirements due to such in the Figures 6 explained measures with third openings to solve on a line D-D.
  • the spacers in two parts consist of the same material as the piezoelectric elements (marked in black). These elements are made from the worked out piezoelectric material, which is arranged on the chamber surface, however the edge is preserved and only in the immediate Surroundings of the elements 31 create cavities 32. in the Border are both ink supply openings as well second and third openings worked out. After this the piezoelectric elements are worked out, these are contacted, with conductor tracks also on the chamber floor and / or outside on the layer 30 can.
  • FIG. 8 shows the individual steps for a manufacturing process of the ESIJIL printhead shown.
  • the process of making the inkjet printhead starts from the CAD development of a printhead design and a mask production for a photosensitive Glass plate.
  • Using masks that reflect the structure of the different parts to be produced is a photosensitive Masked from amorphous glass and UV radiation exposed.
  • the irradiated areas can later etched about 100 times faster than unirradiated ones Areas. After a heat treatment repeated UV radiation.
  • To the parallel processing steps for several Part of a module includes masking and subsequent Etching the through openings.
  • the old one Mask layer by fine grinding the surface of the Chamber parts removed. Then the surface masked in areas that are not deeply etched should. After the ink chambers are etched a fine grinding of the individual parts to final dimensions and a subsequent masking to create the supply channels and the ink nozzle channels, which are less Depth than the chambers should have. The material removal done again by etching. In a special case only the etching sensitivity of the UV-irradiated areas exploited the material and a mask can omitted.
  • the depth accuracy when etching the areas for continuous Holes is smaller than when etching very flat areas for the channels in the parts carrying the chambers and first the through holes, then the Chambers and then the nozzle channels are etched. It is further provided that the thickness of the bottom layer 30th is monitored during the etching of the chambers and that the for Completion of the manufacture of the chambers required Thickness of the bottom layer 30 of the chambers by fine grinding each of the parts carrying the chambers is reached.
  • the individual parts are connected in a module, whereby the individual parts are aligned. After sticking together of the individual parts, a module was created, which is then annealed. When tempering finds a phase transition from amorphous to in the glass material crystalline instead.
  • nozzle channels are specially treated and the cavities (chambers) and the outer edge the module before the printhead contacts and is assembled.
  • the application of the electrical conductor tracks to the Chamber surface, the application of the piezo crystals and the contact is made in a known manner Wise.
  • the piezo crystals can be glued on individually are followed by curing.
  • it can also a layer of piezoelectric material be applied to the surface of the chamber, which is then structured and contacted.
  • the coating can be done by sputtering.
  • the manufacture of chambers and through holes in the individual parts can be in a further variant of the manufacturing process in one step. To do this, it is necessary that the UV exposure is repeated through different masks before the Plate is etched. Another possibility is in UV exposure with different intensities. The plate then points in different areas a different sensitivity when etching. The dividing line between the individual parts is also etched with, which simplifies subsequent separation.
  • the mask to be applied contains recessed areas for the chambers and the bores at the same time. After the etching, fine grinding is carried out to the final dimension, when the thickness of the layer 30 reaches the bottom of the chamber becomes.
  • the manufacture of the ink nozzles and the piezoelectric Elements, as well as the edge production, takes place to the above known way. In this variant is used to contact the bottom of the chamber. Subsequently the plate is divided into individual parts that then be assembled into a module.
  • the back the chamber surface with piezoelectric elements assembled and contacted can be provided with conductor tracks. Thereby can lead from the other layers too the upper layers of the module are cross-free, even if there are a lot of elements to contact.
  • the Module parts are aligned and stapled together and annealed, with a phase transition of amorphous too crystalline. It is contemplated that spacers lie between the modules or additionally arranged are and that the spacers from the plate material or from one to the surface of the plate applied layer of piezoelectric material can be produced, structuring by etching he follows.
  • a printhead can be assembled from several modules be or consists of only one module that follows has externally guided conductor tracks, which makes external contact become.
  • the print head is finally in one Housing housed and can function be tested to remove faulty copies.
  • the invention is not based on the present embodiment limited. Rather is a number of Variants conceivable, which of the solution shown even with fundamentally different types Make use.

Claims (21)

  1. Procédé destiné à la fabrication de têtes d'impression à jet d'encre qui se composent au moins d'un module, ce module étant formé au moins d'une pièce portant des chambres (2) et d'une autre pièce (3), comportant les étapes:
    traitement parallèle de plaques en verre photosensibles lors de la fabrication d'alésages débouchants dans toutes les pièces, des masques étant établis pour le processus de prétraitement du matériau de plaques afin de pouvoir dégager d'une manière ciblée, du matériau de plaques, des zones pour au moins les chambres à encre, canaux de buse et canaux d'alimentation, pour le compartiment d'aspiration et pour des ouvertures débouchantes, des plaques étant soumises, dans le processus de prétraitement, au moins une fois à un rayonnement avec une lumière UV d'une longueur d'onde correspondante, via des masques, suivi d'un traitement thermique, les zones à dégager étant gravées dans la plaque,
    séparation des différentes pièces des plaques en verre et établissement des chambres à encre dans les différentes pièces portant les chambres (2, 4) qui comprend une gravure en profondeur des zones non masquées,
    liaison des différentes pièces (2, 3 et 4) en au moins un module suivi d'un attrempage,
    mise en place et en contact d'éléments piézo-électriques avec des pistes conductives appliquées ainsi que
    assemblage en tête d'imprimante
  2. Procédé selon la revendication 1, caractérisé en ce que, dans le processus de prétraitement des plaques, toutes les zones à dégager sont soumises à une lumière UV de même longueur d'onde et intensité, en ce que, avant la gravure des zones photosensibilisées de la plaque, un premier masque est placé sur la plaque permettant de graver des premières zones dans la plaque, en ce que, après la gravure des premières zones, le premier masque est de nouveau enlevé et un deuxième masque est placé sur la plaque afin de graver des deuxièmes zones dans la plaque, en ce que, après la gravure des deuxièmes zones, le deuxième masque est de nouveau enlevé et en ce que des troisièmes zones sont gravées dans la plaque.
  3. Procédé selon la revendication 1, caractérisé en ce que, dans le processus de prétraitement, différents masques sont utilisés pour le matériau de plaque, des zones de plaques étant soumises à un rayonnement plus fréquent et plus fort avec une lumière UV de longueur d'onde correspondante que d'autres zones de la plaque donnant naissance aux zones du matériau de plaque différemment sensibilisées pour l'agent de gravure, en ce que, dans le processus du traitement parallèle de plaque, un masque est appliqué sur la plaque pour des zones à dégager de profondeur différente et en ce qu'un agent de gravure d'une certaine concentration est utilisé.
  4. Procédé selon la revendication 1, caractérisé en ce que, pour les trois zones, des agents de gravure avec une concentration différente sont utilisés afin de pouvoir dégager les zones correspondantes avec une précision de profondeur différente, cette précision de profondeur étant plus faible lors de la gravure des zones pour des alésages débouchants que lors de la gravure de zones très plates pour les canaux dans les pièces portant des chambres, et les alésages débouchants étant tout d'abord gravée, puis les chambres et puis les canaux de buse.
  5. Procédé selon les revendications 1 à 4, caractérisé en ce que l'épaisseur de la couche de fond (30) est surveillée lors de la gravure des chambres et en ce que l'épaisseur de la couche de fond (30) des chambres nécessaire à la fin de la fabrication des chambres est obtenue par rectification de chaque pièce portant des chambres.
  6. Procédé selon la revendication 5, caractérisé en ce que les pièces portant des chambres sont masquées après la rectification de la surface, en ce que, par la gravure en profondeur des zones non masquées, des cavités ou/et chambres à encre sont produites dans les pièces portant des chambres, en ce que, par la rectification à la cote finale d'une surface, la profondeur des chambres est exactement réglée, en ce que, par la rectification à la cote finale de l'autre surface, l'épaisseur nécessaire de la couche de fond (30) sur le fond de chambre est exactement réglée et en ce que, par la rectification, le masque pour la gravure en profondeur est enlevé et en ce que, ensuite, une gravure des buses à encre a lieu.
  7. Procédé selon la revendication 6, caractérisé en ce que, lors de la gravure des buses à encre, du matériau de plaque photosensibilisé est pour l'essentiel enlevé ou en ce que, avant la gravure, un troisième masque est appliqué.
  8. Procédé selon les revendications 1, 3, 5 et 7, caractérisé en ce que la fabrication des cavités, chambres et alésages débouchants a lieu parallèlement en une étape après avoir différemment photosensibilisées les zones à enlever sur le matériau de plaque, entraínant une vitesse de gravure différente, en ce que, après la fabrication de la profondeur nécessaire des cavités et des chambres et de l'épaisseur nécessaire de la couche de fond (30) des pièces portant des chambres, une séparation des différentes pièces a lieu, en ce que, ensuite, les buses à encre sont gravées dans les pièces portant des chambres.
  9. Procédé selon la revendication 8, caractérisé en ce que, dans le traitement de plaque parallèle, les lignes de séparation entre les différentes pièces sont également prégravées dans la plaque afin de faciliter la séparation qui s'ensuit.
  10. Procédé selon l'une des revendications précédentes, caractérisé en ce que, après la gravure des buses à encre, au moins des pièces de plaque isolées, comme des pièces portant des chambres, pièces centrales, sont assemblées en un module, après un alignement des différentes pièces un agrafage juxtaposé a lieu, en ce que les différentes pièces agrafées juxtaposément sont reliées durablement les unes aux autres entraínant la naissance d'un bord frontal droit par la coupe des pointes de buse et une surface plane du bord frontal par rectification, en ce que, le rinçage des cavités du module avec un premier liquide spécial donne naissance à un revêtement intérieur hydrophile et le traitement de surface de la face avant avec un deuxième liquide spécial donne naissance à un revêtement extérieur hydrophobe qui, ensuite, sont durcis.
  11. Procédé selon une des revendications précédentes 1 à 10, caractérisé en ce que, après la fabrication des buses et du revêtement, une application des pistes conductives électriques et des cristaux piézo-électriques sur le fond de chambre ou/et sur la surface extérieure de la couche de fond (30) a lieu ainsi qu'une mise en contact.
  12. Procédé selon la revendication 11, caractérisé en ce que les cristaux piézo-électriques sont collés et la liaison collée est durcie.
  13. Procédé selon la revendication 10, caractérisé en ce que la plaque à partir de laquelle sont fabriquées les différentes pièces est en verre photosensible amorphe, en ce que la liaison durable des différentes pièces en un module a lieu par attrempage, la température étant choisie de telle sorte qu'un passage de la phase amorphe à cristalline ait lieu.
  14. Procédé selon la revendication 11, caractérisé en ce que l'application des pistes conductives et /ou une couche de matériau piézo-électrique a lieu par pulvérisation, en ce que la couche piézo-électrique est structurée et mise en contact.
  15. Procédé selon une des revendications précédentes 1 à 14, caractérisé en ce que différents modules reliés entre eux via au moins une pièce d'écartement sont assemblés en une tête d'impression à jet d'encre ou un module à plusieurs pièces est utilisé, et en ce que le montage de la tête d'impression à jet d'encre dans un boítier et un établissement de liaison électrique ont lieu.
  16. Procédé selon l'une des revendications précédentes, caractérisé en ce que les pièces d'écartement sont fabriquées à partir du matériau de plaque ou d'une couche en matériau piézo-électrique appliquée sur la surface de la plaque, une structuration ayant lieu par gravure.
  17. Procédé selon l'une des revendications précédentes, caractérisé en ce que les pièces d'écartement en matériau de plaque sont structurées, avant la séparation, dans le processus de traitement de plaque parallèle.
  18. Procédé selon l'une des revendications précédentes, caractérisé en ce qu'un nettoyage de buse a lieu au moyen d'air comprimé après achèvement de chaque module et/ou achèvement de la tête d'impression.
  19. Procédé selon l'une des revendications précédentes, caractérisé en ce que, après achèvement de la tête d'impression, sa fonctionnalité est testée et en ce que des exemplaires défectueux sont éliminés.
  20. Procédé selon la revendication 19, caractérisé en ce que, pendant le processus de traitement de plaque parallèle ou après, une application de pistes conductives électriques a lieu sur les pièces centrales afin d'obtenir un tracé sans croisement.
  21. Procédé selon l'une des revendications précédentes 1 à 20, caractérisé en ce que le matériau de plaque est en céramique photosensible et/ou un deuxième matériau de plaque est en verre amorphe photosensible, en ce qu'au moins une pièce individuelle d'un module est fabriquée en céramique ou verre et en ce qu'une liaison collée est utilisée pour relier les différentes pièces.
EP96250101A 1992-07-31 1993-01-12 Procédé de fabrication d'une tête d'impression à jet d'encre Expired - Lifetime EP0726152B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4225799A DE4225799A1 (de) 1992-07-31 1992-07-31 Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
DE4225799 1992-07-31
EP93250012A EP0581395B1 (fr) 1992-07-31 1993-01-12 Tête d'impression à jet d'encre

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP93250012.7 Division 1993-01-12
EP93250012A Division EP0581395B1 (fr) 1992-07-31 1993-01-12 Tête d'impression à jet d'encre

Publications (3)

Publication Number Publication Date
EP0726152A2 EP0726152A2 (fr) 1996-08-14
EP0726152A3 EP0726152A3 (fr) 1996-10-09
EP0726152B1 true EP0726152B1 (fr) 2001-04-18

Family

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EP93250012A Expired - Lifetime EP0581395B1 (fr) 1992-07-31 1993-01-12 Tête d'impression à jet d'encre
EP96250101A Expired - Lifetime EP0726152B1 (fr) 1992-07-31 1993-01-12 Procédé de fabrication d'une tête d'impression à jet d'encre

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP93250012A Expired - Lifetime EP0581395B1 (fr) 1992-07-31 1993-01-12 Tête d'impression à jet d'encre

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US (2) US5592203A (fr)
EP (2) EP0581395B1 (fr)
JP (2) JP3199917B2 (fr)
CA (1) CA2101683C (fr)
DE (3) DE4225799A1 (fr)

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JP3466577B2 (ja) 2003-11-10
JP3199917B2 (ja) 2001-08-20
JPH06155739A (ja) 1994-06-03
EP0581395A2 (fr) 1994-02-02
DE59305846D1 (de) 1997-04-24
JP2001293866A (ja) 2001-10-23
CA2101683C (fr) 1998-11-24
DE59310165D1 (de) 2001-05-23
EP0726152A3 (fr) 1996-10-09
EP0581395B1 (fr) 1997-03-19
DE4225799A1 (de) 1994-02-03
US5592203A (en) 1997-01-07
CA2101683A1 (fr) 1994-02-01
EP0726152A2 (fr) 1996-08-14
EP0581395A3 (en) 1994-08-24
US5802687A (en) 1998-09-08

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