EP0632482B1 - Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses - Google Patents

Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses Download PDF

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Publication number
EP0632482B1
EP0632482B1 EP94110274A EP94110274A EP0632482B1 EP 0632482 B1 EP0632482 B1 EP 0632482B1 EP 94110274 A EP94110274 A EP 94110274A EP 94110274 A EP94110274 A EP 94110274A EP 0632482 B1 EP0632482 B1 EP 0632482B1
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EP
European Patent Office
Prior art keywords
electrodes
ion source
time
acceleration
field
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP94110274A
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German (de)
English (en)
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EP0632482A3 (fr
EP0632482A2 (fr
Inventor
Thorald Dr. Bergmann
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers
    • H01J49/403—Time-of-flight spectrometers characterised by the acceleration optics and/or the extraction fields

Definitions

  • the invention relates to a gas phase ion source according to the preamble of claim 1.
  • time-of-flight mass analysis there is a start time from which started a group of ions in the time-of-flight mass spectrometer becomes. At the end of a flight route, the time is measured needed each incoming ion and from this the mass of the concerned Ions determined.
  • a gas phase ion source of a time-of-flight mass spectrometer is understood as the withdrawal volume the spatial area of the ion source, from which, starting from the start, ions on the surface of the time-of-flight mass spectrometer detector.
  • the Orbits on which the ions move are determined by the existing electrical fields and arise in a simple manner from the physical laws.
  • a transverse electric field is said to be an electric Field to be understood in the transverse direction, its direction and strength in the area of the ion orbits only slightly different from the Coordinates in the transverse direction.
  • This field is called Deflection field, and the electrodes for its production are called deflection electrodes.
  • the acceleration field and the deflection field are separate arranged from each other, i.e. the deflection field is arranged after the acceleration field.
  • the transverse electric field is created by a parallel plate capacitor generated.
  • the invention is accordingly based on the object of a gas phase ion source indicate with which a larger mass range of ions in the time-of-flight mass spectrometer can be accelerated into it.
  • the deflection field becomes the acceleration field directly superimposed so that the deflection field contains the speed components at the earliest possible time can compensate transverse to the direction of acceleration.
  • the deflection of the ion trajectories from the ion optical axis is kept small, which leads to The consequence of this is that particles with a larger mass still pass through apertures in the beam path can pass through.
  • the deflection field can be directly superimposed on the acceleration field by the electrodes producing the deflection field are integrated into the accelerating field. Usually this means that the electrodes generating the deflection field between the accelerating ones Field-generating electrodes must be arranged.
  • an electric field arises, which is a sum of a transverse electric field and an electric field with high cylindrical symmetry to the ion-optical axis.
  • 1a, 1b show the simplest embodiment of the invention according to claim 1.
  • Ions which are located at the start time in the withdrawal volume (11), are shown by the acceleration field generated by a repeller electrode (1) and an acceleration electrode (2) Paths (12) accelerated, which end on the detector of the time-of-flight mass spectrometer.
  • Known solutions exist for the further guidance of the ions after the ion source in the time-of-flight mass spectrometer, which is why they are not discussed in more detail here.
  • the deflection electrodes (20) are designed as flat deflection plates in this exemplary embodiment. As can be seen in FIG.
  • the deflection electrodes are arranged symmetrically to a normal plane of the gas or ion beam (10) to be examined, indicated by dashed lines ( B - B ' ).
  • the gas or ion beam (10) to be examined crosses the acceleration field through openings (21) in the two deflection electrodes (20).
  • the electrodes (1,2) which generate the accelerating electric field here the acceleration electrode (2) can also be used form the boundary of two areas of different gas pressure.
  • the opening (3) in the middle of the electrode (2) the function of a gas flow impedance.
  • Gas flow impedances are to be understood here as small openings Cross-section, which are large enough to keep the ions on their orbits to pass to the detector, but their conductance for gases is essential is lower than the pumping capacity of the pump in the area with the lower pressure. This latter area is usually seen in the direction of flight of the ions, behind the gas flow impedance.
  • Gas flow impedances thus have the advantage that through them with a high particle density in the discharge volume, the lowest possible residual gas pressure achieved in the remaining areas of the time-of-flight mass spectrometer can be. This is desirable to avoid collisions with the ions Atoms or molecules of the residual gas that cover the dynamic range of the Can minimize time-of-flight mass spectrometers.
  • the electrode arrangement in the exemplary embodiment according to FIGS. 1a, 1b creates a resultant electric field through the superimposition of an accelerating and a transverse field, by means of which the transverse speed components of the charged particles which are still present initially are largely canceled out already in the acceleration phase. In this way, ions of large masses can also be accelerated on orbits into the time-of-flight mass spectrometer.
  • FIGS. 1a, 1b The arrangement according to FIGS. 1a, 1b is not yet the optimal solution, since after deduction of the transverse field, ie after equating the potentials of the left and right deflection electrodes, the remaining electric field is not very homogeneous in the area of the discharge volume. This results in flight time errors that are difficult to compensate for. Flight time errors generally increase with the distance of an ion trajectory from the ion optical axis. If one has therefore decided on a certain limit below which flight time errors can be tolerated, an inhomogeneous electric field in the area of the withdrawal volume reduces the permissible distance of the ion trajectory from the ion-optical axis, ie the usable area in the withdrawal volume. This reduces the sensitivity of the time-of-flight mass spectrometer.
  • the ions are focused or defocused anisotropically with respect to the ion-optical axis when crossing the acceleration path. It follows that at least one further anisotropic lens element is required in the further course of the ion path.
  • Anisotropic lens elements are generally more complex, expensive and difficult to adjust than cylindrical symmetrical lens elements.
  • An electrical field with the required properties is by means of a To produce electrode construction in which the required cylinder symmetry of the remaining electric field can be achieved can, by making the deflection electrodes themselves cylindrical symmetrical Gives shape.
  • the gas flow impedance (3) on the acceleration electrode (2) is designed here as a tube which has a lower conductance for gases than a pinhole of the same cross section. However, as in FIG. 1a, a hole can be provided as the gas flow impedance.
  • the has cylindrical symmetry Training the deflection electrodes the further advantage that the Deflection electrodes can initially be manufactured as a turned part. In in a subsequent operation, they can then be broken down into two parts become.
  • 3a, 3b show an example of how two pairs of deflection electrodes (20, 25) can be arranged. This has the advantage that openings do not have to be provided either for the gas or ion beam (10) to be examined or for an ionizing laser beam. In addition, the volume of the acceleration section can be pumped out better. As shown in FIGS. 3a, 3b , the two pairs of deflection electrodes can also have different radii to the axis of the ion source.
  • the deflecting electrodes (20) can additionally be symmetrically divided along the plane which is defined by the direction of acceleration and the gas or ion beam (10) to be examined.
  • the quadrupole component must be zero due to symmetry considerations.
  • the remaining portion, which is not cylindrically symmetrical, then has octupole symmetry in this case, the strength of which in the lowest order is proportional to the fourth power of the distance to the axis of symmetry. If higher demands are placed on the imaging quality of the ion source, the symmetry of the electric field can be additionally increased in this way.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)

Claims (10)

  1. Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol,
    dans laquelle le jet de gaz ou d'ions à étudier (10) a une composante de vitesse perpendiculaire à la direction d'accélération de la source d'ions,
    dans laquelle un domaine de l'espace est défini comme volume de sortie (11) dans lequel des ions devant être analysés se trouvent à un instant initial de l'analyse de masse,
    ayant des électrodes accélératrices (1, 2) et
    des électrodes de déflexion (20, 25),
    avec
    un domaine de l'espace géométriquement d'un seul tenant, dans lequel les champs électriques accélérateur et transversal se superposent, et
    ce domaine de l'espace contenant le volume de sortie (11),
    caractérisée en ce que
    les électrodes de déflexion (20, 25) sont distinctes des électrodes accélératrices (1,2).
  2. Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol selon la première revendication, caractérisée en ce que les électrodes (20, 25) qui engendrent un champ transversal se trouvent dans le champ accélérateur.
  3. Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol selon la deuxième revendication, caractérisée en ce que les électrodes (20, 25) qui engendrent un champ transversal se trouvent entre les électrodes (1, 2) qui définissent le champ accélérateur.
  4. Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol selon l'une des revendications précédentes, caractérisée en ce que les électrodes (20, 25) qui engendrent le champ électrique transversal
    sont sensiblement de forme cylindrique symétrique par rapport à l'axe dans la direction d'accélération de la source d'ions,
    sont divisées, le long du plan ( B - B') normal à la direction du jet de gaz ou d'ions à étudier, en deux moitiés symétriques par rapport à ce plan.
  5. Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol selon l'une des revendications précédentes, caractérisée en ce que les électrodes (1, 2) qui engendrent le champ accélérateur et les électrodes (20, 25) qui engendrent le champ électrique transversal sont à des potentiels constants dans le temps.
  6. Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol selon l'une des revendications 1 à 4, caractérisée en ce que les électrodes (1, 2) qui engendrent le champ accélérateur et les électrodes (20, 25) qui engendrent le champ électrique transversal sont en partie à des potentiels constants dans le temps et en partie à des potentiels variables avec le temps.
  7. Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol selon l'une des revendications précédentes, caractérisée en ce que les électrodes (1, 2) qui engendrent le champ accélérateur et les électrodes (20, 25) qui engendrent le champ électrique transversal sont à des potentiels variables dans le temps.
  8. Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol selon l'une des revendications précédentes, caractérisée en ce que les électrodes (20, 25) qui engendrent le champ électrique transversal sont en outre divisées symétriquement le long du plan défini par la direction d'accélération et le jet de gaz ou d'ions (10) à étudier.
  9. Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol selon l'une des revendications précédentes, caractérisée en ce qu'une ou plusieurs des électrodes (1, 2) constituent une cloison séparatrice entre des zones de pressions différentes dans le spectromètre de masse à temps de vol, et en ce qu'une impédance (3) d'écoulement de gaz est intégrée aux électrodes considérées.
  10. Spectromètre de masse à temps de vol, équipé d'une source d'ions en phase gazeuse selon une ou plusieurs des revendications précédentes.
EP94110274A 1993-07-02 1994-07-01 Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses Expired - Lifetime EP0632482B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4322101 1993-07-02
DE4322101A DE4322101C2 (de) 1993-07-02 1993-07-02 Ionenquelle für Flugzeit-Massenspektrometer

Publications (3)

Publication Number Publication Date
EP0632482A2 EP0632482A2 (fr) 1995-01-04
EP0632482A3 EP0632482A3 (fr) 1995-11-29
EP0632482B1 true EP0632482B1 (fr) 2000-03-15

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EP94110274A Expired - Lifetime EP0632482B1 (fr) 1993-07-02 1994-07-01 Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses

Country Status (6)

Country Link
US (1) US5543624A (fr)
EP (1) EP0632482B1 (fr)
JP (1) JPH0831370A (fr)
AT (1) ATE190751T1 (fr)
CA (1) CA2127185A1 (fr)
DE (2) DE4322101C2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19655304B8 (de) * 1995-12-14 2007-05-31 Micromass Uk Ltd. Massenspektrometer und Verfahren zur Massenspektrometrie
GB9525507D0 (en) * 1995-12-14 1996-02-14 Fisons Plc Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source
US6137112A (en) * 1998-09-10 2000-10-24 Eaton Corporation Time of flight energy measurement apparatus for an ion beam implanter
US6831280B2 (en) * 2002-09-23 2004-12-14 Axcelis Technologies, Inc. Methods and apparatus for precise measurement of time delay between two signals
WO2006098086A1 (fr) * 2005-03-17 2006-09-21 National Institute Of Advanced Industrial Science And Technology Spectromètre de masse à temps de vol
CN103380479B (zh) * 2010-12-20 2016-01-20 株式会社岛津制作所 飞行时间型质量分析装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3577165A (en) * 1968-05-31 1971-05-04 Perkin Elmer Corp Linear scanning arrangement for a cycloidal mass spectrometer
GB1302193A (fr) * 1969-04-18 1973-01-04
DE2242987B2 (de) * 1972-09-01 1980-06-12 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Vorrichtung zur Trennung von neutralen Teilchen und schnellen Ionen von langsamen Ionen
DE2947542A1 (de) * 1979-11-26 1981-06-04 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur ueberwachung und/oder steuerung von plasmaprozessen
FR2514905A1 (fr) * 1981-10-21 1983-04-22 Commissariat Energie Atomique Dispositif de mesure d'un courant ionique produit par un faisceau d'ions
WO1989006044A1 (fr) * 1987-12-24 1989-06-29 Unisearch Limited Spectrometre de masse
US5073713A (en) * 1990-05-29 1991-12-17 Battelle Memorial Institute Detection method for dissociation of multiple-charged ions

Also Published As

Publication number Publication date
EP0632482A3 (fr) 1995-11-29
DE4322101A1 (de) 1995-01-19
ATE190751T1 (de) 2000-04-15
DE59409199D1 (de) 2000-04-20
CA2127185A1 (fr) 1995-01-03
EP0632482A2 (fr) 1995-01-04
JPH0831370A (ja) 1996-02-02
DE4322101C2 (de) 1995-06-14
US5543624A (en) 1996-08-06

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