ATE190751T1 - Gasphasen-ionenquelle für flugzeit- massenspektrometer mit hoher massenauflösung und grossem massenbereich - Google Patents

Gasphasen-ionenquelle für flugzeit- massenspektrometer mit hoher massenauflösung und grossem massenbereich

Info

Publication number
ATE190751T1
ATE190751T1 AT94110274T AT94110274T ATE190751T1 AT E190751 T1 ATE190751 T1 AT E190751T1 AT 94110274 T AT94110274 T AT 94110274T AT 94110274 T AT94110274 T AT 94110274T AT E190751 T1 ATE190751 T1 AT E190751T1
Authority
AT
Austria
Prior art keywords
ion source
mass
gas phase
gas
mass spectrometer
Prior art date
Application number
AT94110274T
Other languages
English (en)
Inventor
Thorald Dr Bergmann
Original Assignee
Bergmann Eva Martina
Bergmann Thorald
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bergmann Eva Martina, Bergmann Thorald filed Critical Bergmann Eva Martina
Application granted granted Critical
Publication of ATE190751T1 publication Critical patent/ATE190751T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers
    • H01J49/403—Time-of-flight spectrometers characterised by the acceleration optics and/or the extraction fields

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
AT94110274T 1993-07-02 1994-07-01 Gasphasen-ionenquelle für flugzeit- massenspektrometer mit hoher massenauflösung und grossem massenbereich ATE190751T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4322101A DE4322101C2 (de) 1993-07-02 1993-07-02 Ionenquelle für Flugzeit-Massenspektrometer

Publications (1)

Publication Number Publication Date
ATE190751T1 true ATE190751T1 (de) 2000-04-15

Family

ID=6491835

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94110274T ATE190751T1 (de) 1993-07-02 1994-07-01 Gasphasen-ionenquelle für flugzeit- massenspektrometer mit hoher massenauflösung und grossem massenbereich

Country Status (6)

Country Link
US (1) US5543624A (de)
EP (1) EP0632482B1 (de)
JP (1) JPH0831370A (de)
AT (1) ATE190751T1 (de)
CA (1) CA2127185A1 (de)
DE (2) DE4322101C2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9525507D0 (en) * 1995-12-14 1996-02-14 Fisons Plc Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source
DE19655304B8 (de) * 1995-12-14 2007-05-31 Micromass Uk Ltd. Massenspektrometer und Verfahren zur Massenspektrometrie
US6137112A (en) * 1998-09-10 2000-10-24 Eaton Corporation Time of flight energy measurement apparatus for an ion beam implanter
US6831280B2 (en) * 2002-09-23 2004-12-14 Axcelis Technologies, Inc. Methods and apparatus for precise measurement of time delay between two signals
JP4691712B2 (ja) * 2005-03-17 2011-06-01 独立行政法人産業技術総合研究所 飛行時間質量分析計
WO2012086630A1 (ja) * 2010-12-20 2012-06-28 国立大学法人神戸大学 飛行時間型質量分析装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3577165A (en) * 1968-05-31 1971-05-04 Perkin Elmer Corp Linear scanning arrangement for a cycloidal mass spectrometer
GB1302193A (de) * 1969-04-18 1973-01-04
DE2242987B2 (de) * 1972-09-01 1980-06-12 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Vorrichtung zur Trennung von neutralen Teilchen und schnellen Ionen von langsamen Ionen
DE2947542A1 (de) * 1979-11-26 1981-06-04 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur ueberwachung und/oder steuerung von plasmaprozessen
FR2514905A1 (fr) * 1981-10-21 1983-04-22 Commissariat Energie Atomique Dispositif de mesure d'un courant ionique produit par un faisceau d'ions
WO1989006044A1 (en) * 1987-12-24 1989-06-29 Unisearch Limited Mass spectrometer
US5073713A (en) * 1990-05-29 1991-12-17 Battelle Memorial Institute Detection method for dissociation of multiple-charged ions

Also Published As

Publication number Publication date
DE4322101C2 (de) 1995-06-14
DE4322101A1 (de) 1995-01-19
EP0632482A3 (de) 1995-11-29
CA2127185A1 (en) 1995-01-03
EP0632482B1 (de) 2000-03-15
JPH0831370A (ja) 1996-02-02
US5543624A (en) 1996-08-06
DE59409199D1 (de) 2000-04-20
EP0632482A2 (de) 1995-01-04

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