EP0632482A2 - Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses - Google Patents

Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses Download PDF

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Publication number
EP0632482A2
EP0632482A2 EP94110274A EP94110274A EP0632482A2 EP 0632482 A2 EP0632482 A2 EP 0632482A2 EP 94110274 A EP94110274 A EP 94110274A EP 94110274 A EP94110274 A EP 94110274A EP 0632482 A2 EP0632482 A2 EP 0632482A2
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EP
European Patent Office
Prior art keywords
ion source
electrodes
time
field
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP94110274A
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German (de)
English (en)
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EP0632482B1 (fr
EP0632482A3 (fr
Inventor
Thorald Dr. Bergmann
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Individual
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Publication of EP0632482A2 publication Critical patent/EP0632482A2/fr
Publication of EP0632482A3 publication Critical patent/EP0632482A3/fr
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers
    • H01J49/403—Time-of-flight spectrometers characterised by the acceleration optics and/or the extraction fields

Definitions

  • the invention relates to a gas phase ion source according to the preamble of claim 1.
  • 1a, 1b show the simplest embodiment of the invention according to claim 1.
  • Ions which are located at the start time in the withdrawal volume (11), are shown by the acceleration field generated by a repeller electrode (1) and an acceleration electrode (2) Paths (12) accelerated, which end on the detector of the time-of-flight mass spectrometer.
  • Known solutions exist for the further guidance of the ions after the ion source in the time-of-flight mass spectrometer, which is why they are not discussed in more detail here.
  • the deflection electrodes (20) are designed as flat deflection plates in this exemplary embodiment. As can be seen in FIG.
  • Gas flow impedances are to be understood here as openings of small cross-section, which are large enough to keep the ions on their tracks to pass to the detector, whose conductance for gases, however, is significantly lower than the pumping capacity of the pump of the area with the lower pressure. This latter range is usually behind the gas flow impedance, as seen in the direction of flight of the ions.
  • FIGS. 1a, 1b The arrangement according to FIGS. 1a, 1b is not yet the optimal solution, since after deduction of the transverse field, ie after equating the potentials of the left and right deflection electrodes, the remaining electric field is not very homogeneous in the area of the discharge volume. This results in flight time errors that are difficult to compensate for. Flight time error generally increase with the distance of an ion trajectory from the ion optical axis. So once you have decided on a certain limit below which flight time errors can be tolerated, an inhomogeneous electric field in the area of the take-off volume reduces the permissible distance of the ion trajectory from the ion-optical axis, ie the usable area in the take-off volume. This reduces the sensitivity of the time-of-flight mass spectrometer.
  • the ions are focused or defocused anisotropically with respect to the ion-optical axis when crossing the acceleration path. It follows that at least one further anisotropic lens element is required in the further course of the ion path.
  • Anisotropic lens elements are generally more complex, expensive and difficult to adjust than cylindrical symmetrical lens elements.
  • 3a, 3b show an example of how two pairs of deflection electrodes (20, 25) can be arranged. This has the advantage that openings do not have to be provided either for the gas or ion beam (10) to be examined or for an ionizing laser beam. In addition, the volume of the acceleration section can be pumped out better. As shown in FIGS. 3a, 3b , the two pairs of deflection electrodes can also have different radii to the axis of the ion source.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
EP94110274A 1993-07-02 1994-07-01 Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses Expired - Lifetime EP0632482B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4322101 1993-07-02
DE4322101A DE4322101C2 (de) 1993-07-02 1993-07-02 Ionenquelle für Flugzeit-Massenspektrometer

Publications (3)

Publication Number Publication Date
EP0632482A2 true EP0632482A2 (fr) 1995-01-04
EP0632482A3 EP0632482A3 (fr) 1995-11-29
EP0632482B1 EP0632482B1 (fr) 2000-03-15

Family

ID=6491835

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94110274A Expired - Lifetime EP0632482B1 (fr) 1993-07-02 1994-07-01 Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses

Country Status (6)

Country Link
US (1) US5543624A (fr)
EP (1) EP0632482B1 (fr)
JP (1) JPH0831370A (fr)
AT (1) ATE190751T1 (fr)
CA (1) CA2127185A1 (fr)
DE (2) DE4322101C2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19652021B4 (de) * 1995-12-14 2006-12-14 Micromass Uk Ltd. Ionen-Quelle und Ionisationsverfahren
DE19655304B4 (de) * 1995-12-14 2007-02-15 Micromass Uk Ltd. Massenspektrometer und Verfahren zur Massenspektrometrie

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6137112A (en) * 1998-09-10 2000-10-24 Eaton Corporation Time of flight energy measurement apparatus for an ion beam implanter
US6831280B2 (en) * 2002-09-23 2004-12-14 Axcelis Technologies, Inc. Methods and apparatus for precise measurement of time delay between two signals
JP4691712B2 (ja) * 2005-03-17 2011-06-01 独立行政法人産業技術総合研究所 飛行時間質量分析計
EP3306640B1 (fr) * 2010-12-20 2024-04-10 Shimadzu Corporation Spectromètre de masse à temps de vol

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5073713A (en) * 1990-05-29 1991-12-17 Battelle Memorial Institute Detection method for dissociation of multiple-charged ions

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3577165A (en) * 1968-05-31 1971-05-04 Perkin Elmer Corp Linear scanning arrangement for a cycloidal mass spectrometer
GB1302193A (fr) * 1969-04-18 1973-01-04
DE2242987B2 (de) * 1972-09-01 1980-06-12 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Vorrichtung zur Trennung von neutralen Teilchen und schnellen Ionen von langsamen Ionen
DE2947542A1 (de) * 1979-11-26 1981-06-04 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur ueberwachung und/oder steuerung von plasmaprozessen
FR2514905A1 (fr) * 1981-10-21 1983-04-22 Commissariat Energie Atomique Dispositif de mesure d'un courant ionique produit par un faisceau d'ions
JPH03503815A (ja) * 1987-12-24 1991-08-22 ユニサーチ　リミテッド 質量分析計

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5073713A (en) * 1990-05-29 1991-12-17 Battelle Memorial Institute Detection method for dissociation of multiple-charged ions

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ANALYTICAL CHEMISTRY, Bd. 63, Nr. 24, 15.Dezember 1991 COLUMBUS US, Seiten 2897-2900, CHUNG HANG SIN 'ATMOSPHERIC PRESSURE IONIZATION TIME-OF-FLIGHT MASS SPECTROMETRY WITH A SUPERSONIC BEAM' *
REVIEW OF SCIENTIFIC INSTRUMENTS, Bd. 60, Nr. 6, Juni 1989 Seiten 1065-1070, XP 000035873 CONOVER C W S ET AL 'A TIME-OF-FLIGHT MASS SPECTROMETER FOR LARGE MOLECULAR CLUSTERS PRODUCED IN SUPERSONIC EXPANSIONS' *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19652021B4 (de) * 1995-12-14 2006-12-14 Micromass Uk Ltd. Ionen-Quelle und Ionisationsverfahren
DE19655304B4 (de) * 1995-12-14 2007-02-15 Micromass Uk Ltd. Massenspektrometer und Verfahren zur Massenspektrometrie
DE19655304B8 (de) * 1995-12-14 2007-05-31 Micromass Uk Ltd. Massenspektrometer und Verfahren zur Massenspektrometrie

Also Published As

Publication number Publication date
US5543624A (en) 1996-08-06
ATE190751T1 (de) 2000-04-15
EP0632482B1 (fr) 2000-03-15
JPH0831370A (ja) 1996-02-02
CA2127185A1 (fr) 1995-01-03
DE4322101A1 (de) 1995-01-19
EP0632482A3 (fr) 1995-11-29
DE4322101C2 (de) 1995-06-14
DE59409199D1 (de) 2000-04-20

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