EP0208894A2 - Spectromètre de masses à temps de vol avec Un réflecteur d'ions - Google Patents
Spectromètre de masses à temps de vol avec Un réflecteur d'ions Download PDFInfo
- Publication number
- EP0208894A2 EP0208894A2 EP86107585A EP86107585A EP0208894A2 EP 0208894 A2 EP0208894 A2 EP 0208894A2 EP 86107585 A EP86107585 A EP 86107585A EP 86107585 A EP86107585 A EP 86107585A EP 0208894 A2 EP0208894 A2 EP 0208894A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrode
- electrodes
- reflector
- brake
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/40—Time-of-flight spectrometers
- H01J49/405—Time-of-flight spectrometers characterised by the reflectron, e.g. curved field, electrode shapes
Definitions
- the invention relates to a time-of-flight mass spectrometer with an ion reflector which has a reflector electrode and two parallel brake electrodes which are arranged at a distance from it and define a braking field.
- time-of-flight mass spectrometer is known from US Pat. No. 3,727,047.
- a similar time-of-flight mass spectrometer is also described in DE-OS 34 28 944.
- the ion reflector of these known time-of-flight mass spectrometers formed by grid electrodes has the purpose of time-of-flight differences compensate, which are due to different initial energies of the accelerated ions, thereby improving the mass resolving power of the spectrometer.
- time-of-flight mass spectrometers provided with such an ion reflector do not yet meet the requirements with regard to sensitivity and resolving power, such as are to be placed on a device which is suitable as a general laboratory device and is also intended to allow mass spectrometric examinations for the not particularly specialized expert.
- the invention is therefore based on the object of improving the known time-of-flight mass spectrometers so that they have improved resolution and sensitivity with a simple structure.
- a focusing electrode is arranged between the rear brake electrode adjacent to the reflector electrode and the reflector electrode, which is designed as a grating-free ring diaphragm and is at a higher potential than the linear potential increase from the rear brake field electrode to the reflector electrode corresponds.
- the brake electrodes In the previously known time-of-flight mass spectrometers, it was considered necessary to design the brake electrodes as a grid, because a very homogeneous electric field was regarded as necessary in order to ensure the same time focusing over the entire beam cross section. In fact, however, it has been found that the inhomogeneity caused by the focusing electrode can be set in such a way that both optimal temporal and optimal geometric focusing can be achieved. Such optimal conditions can also be achieved if the brake electrodes as well as the focusing electrode are designed as gridless ring diaphragms.
- the design of the brake electrodes as grating-free ring diaphragms is not only possible, but rather also extremely advantageous, because it avoids expensive and highly sensitive components such as the grating and also avoids the transmission losses caused by such grating. Even if such grid electrodes have a transmittance as high as 80% for the ion beam, the ion beam suffers attenuation to 40% of the original intensity when passing through such grids four times, which leads to a corresponding loss of sensitivity.
- the design of the brake electrodes as gridless ring diaphragms consequently achieves both a simplification and an increase in the sensitivity of the time-of-flight mass spectrometer.
- the conscious generation of an inhomogeneous electric field in the area of the brake electrodes also offers the possibility of influencing the inhomogeneity of the electric field through the geometry of the brake electrodes. It has proven to be particularly advantageous if the front brake electrode has a larger hole diameter than the rear one.
- the electrode potentials can be established in a known manner by the resistors of a voltage divider, by means of which the electrodes of the ion reflector which are adjacent to one another are electrically connected to one another.
- the time-of-flight mass spectrometer shown schematically in FIG. 1 comprises an ion source 1 and a detector 2, which are connected to one another by flight paths 3, 4 forming an acute angle. In the area of the intersection of the two flight paths 3, 4 there is an ion reflector 5. All components are located within an evacuable housing 6.
- the ion reflector 5 comprises two brake electrodes 7, 8, which are located at the entrance of the ion reflector 5 and of which the front brake electrode 7 delimits the flight routes 3, 4 in which the electric field has no gradient.
- a focusing electrode 10 is arranged between the rear brake electrode 8 and the reflector electrode 9, which results in the formation of an inhomogeneous electric field that forms an electrostatic lens for geometrically focusing the ion beam onto the detector 2.
- the two brake electrodes 17, 18 are designed as grid electrodes. Between the rear brake electrode 18 and the reflector electrode 19 formed by a flat plate there is the focusing electrode 20. The focusing electrode 20 is located between the focusing electrode 20 and the reflector electrode 19. There are two linearizing electrodes 21 and 22. The outer diameter of all electrodes is 200 mm.
- the structure of the ion reflector is characterized by the following values:
- the ion reflector shown in FIG. 3 has brake electrodes 27, 28 instead of the brake electrodes 17, 18, which are also designed as ring diaphragms. Furthermore, three linearizing electrodes 31, 32, 33 designed as ring diaphragms are arranged between the focusing electrode 30 and the reflector electrode, which is again designed as a closed plate. The following values apply to the electrodes of the ion reflector according to FIG. 3:
- Both ion reflectors result in a perfect temporal and spatial focusing for an ion energy of 680 V, an angle of incidence of the ion trajectory of 4 ° and a length of the drift distance of 165 cm.
- the course of the equipotential surfaces leading to focusing, which result in a lens effect, and the focusing effect on the ion beam are shown in FIGS. 2 and 3 by the potential lines 34 and the path lines 35, respectively.
- This ion reflector comprises electrodes 41 to 46 in the form of ring diaphragms which are mounted on a carrier plate 48 by means of short ceramic tubes 49.
- the carrier plate 48 with the .electrode system is arranged within a vacuum vessel 52 which has a pipe socket 53 for connecting a vacuum pump and a flange 54 for connecting the housing to the other components of the time-of-flight mass spectrometer.
- the vacuum vessel 52 has, at the end opposite the flange 54, a carrier flange 51 to which the carrier plate 48 is fastened with the electrode system and which has vacuum feedthroughs 50 which allow defined potentials to be applied to the electrodes.
- the vacuum feedthroughs 50 serve to apply a voltage to a voltage divider that is contra stands 47 is formed, each of which connects two of the adjacent electrodes 41 to 46.
- the values of the resistors 47 are selected so that the potential distribution shown in the table below results.
- This table also shows the internal diameter and the axis position of the electrodes. With an inner diameter of the vacuum vessel 52 of 200 mm, the outer diameter of the orifices here is 170 mm.
- the desired temporal and spatial focus is again achieved for an ion energy of 680 eV, an ion beam incidence angle of 4 ° and a length of the drift distance of 165 cm.
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19853524536 DE3524536A1 (de) | 1985-07-10 | 1985-07-10 | Flugzeit-massenspektrometer mit einem ionenreflektor |
DE3524536 | 1985-07-10 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0208894A2 true EP0208894A2 (fr) | 1987-01-21 |
EP0208894A3 EP0208894A3 (en) | 1988-09-21 |
EP0208894B1 EP0208894B1 (fr) | 1991-10-23 |
Family
ID=6275348
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP86107585A Expired - Lifetime EP0208894B1 (fr) | 1985-07-10 | 1986-06-04 | Spectromètre de masses à temps de vol avec Un réflecteur d'ions |
Country Status (3)
Country | Link |
---|---|
US (1) | US4731532A (fr) |
EP (1) | EP0208894B1 (fr) |
DE (2) | DE3524536A1 (fr) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4742224A (en) * | 1986-12-22 | 1988-05-03 | American Telephone And Telegraph Company At&T Bell Laboratories | Charged particle energy filter |
US4810883A (en) * | 1985-05-31 | 1989-03-07 | Turner David W | Device for providing an energy filtered charge particle image |
EP0373550A2 (fr) * | 1988-12-14 | 1990-06-20 | Forschungszentrum Jülich Gmbh | Spectromètre de masse à temps de vol à résolution et transmission élevées |
DE10005698B4 (de) * | 2000-02-09 | 2007-03-01 | Bruker Daltonik Gmbh | Gitterloses Reflektor-Flugzeitmassenspektrometer für orthogonalen Ioneneinschuss |
DE102018122960A1 (de) | 2017-09-28 | 2019-03-28 | Bruker Daltonik Gmbh | Breitbandig hohe Massenauflösungen in Reflektor-Flugzeitmassenspektrometern |
Families Citing this family (60)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3726952A1 (de) * | 1987-08-13 | 1989-02-23 | Kutscher Roland Dipl Phys | Ionenreflektoren mit neuen elektrodengeometrien zur zeit- und ortsfokussierung von ionenstrahlen |
DE3920566A1 (de) * | 1989-06-23 | 1991-01-10 | Bruker Franzen Analytik Gmbh | Ms-ms-flugzeit-massenspektrometer |
GB8915972D0 (en) * | 1989-07-12 | 1989-08-31 | Kratos Analytical Ltd | An ion mirror for a time-of-flight mass spectrometer |
US5026988A (en) * | 1989-09-19 | 1991-06-25 | Vanderbilt University | Method and apparatus for time of flight medium energy particle scattering |
US5017780A (en) * | 1989-09-20 | 1991-05-21 | Roland Kutscher | Ion reflector |
US5070240B1 (en) * | 1990-08-29 | 1996-09-10 | Univ Brigham Young | Apparatus and methods for trace component analysis |
US5210412A (en) * | 1991-01-31 | 1993-05-11 | Wayne State University | Method for analyzing an organic sample |
US5168158A (en) * | 1991-03-29 | 1992-12-01 | The United States Of America As Represented By The United States Department Of Energy | Linear electric field mass spectrometry |
US5202563A (en) * | 1991-05-16 | 1993-04-13 | The Johns Hopkins University | Tandem time-of-flight mass spectrometer |
US5144127A (en) * | 1991-08-02 | 1992-09-01 | Williams Evan R | Surface induced dissociation with reflectron time-of-flight mass spectrometry |
US5160840A (en) * | 1991-10-25 | 1992-11-03 | Vestal Marvin L | Time-of-flight analyzer and method |
DE4442348C2 (de) * | 1994-11-29 | 1998-08-27 | Bruker Franzen Analytik Gmbh | Verfahren und Vorrichtung zur verbesserten Massenauflösung eines Flugzeit-Massenspektrometers mit Ionenreflektor |
US6002127A (en) * | 1995-05-19 | 1999-12-14 | Perseptive Biosystems, Inc. | Time-of-flight mass spectrometry analysis of biomolecules |
US5742049A (en) * | 1995-12-21 | 1998-04-21 | Bruker-Franzen Analytik Gmbh | Method of improving mass resolution in time-of-flight mass spectrometry |
US5814813A (en) * | 1996-07-08 | 1998-09-29 | The Johns Hopkins University | End cap reflection for a time-of-flight mass spectrometer and method of using the same |
US5955730A (en) * | 1997-06-26 | 1999-09-21 | Comstock, Inc. | Reflection time-of-flight mass spectrometer |
US6008491A (en) * | 1997-10-15 | 1999-12-28 | The United States Of America As Represented By The United States Department Of Energy | Time-of-flight SIMS/MSRI reflectron mass analyzer and method |
GB9802115D0 (en) | 1998-01-30 | 1998-04-01 | Shimadzu Res Lab Europe Ltd | Time-of-flight mass spectrometer |
US5969350A (en) * | 1998-03-17 | 1999-10-19 | Comstock, Inc. | Maldi/LDI time-of-flight mass spectrometer |
US5994695A (en) * | 1998-05-29 | 1999-11-30 | Hewlett-Packard Company | Optical path devices for mass spectrometry |
AU750860B2 (en) * | 1998-09-23 | 2002-08-01 | Agilent Technologies Australia (M) Pty Ltd | Ion Optical system for a mass spectrometer |
US6614021B1 (en) | 1998-09-23 | 2003-09-02 | Varian Australian Pty Ltd | Ion optical system for a mass spectrometer |
US6518569B1 (en) | 1999-06-11 | 2003-02-11 | Science & Technology Corporation @ Unm | Ion mirror |
DE19940932A1 (de) * | 1999-08-27 | 2001-03-01 | Alban Kellerbauer | Einrichtung zur Transformation eines Primär-Ionenstrahls hoher Energie in einen Ionenstrahl niedriger Energie |
US6744040B2 (en) | 2001-06-13 | 2004-06-01 | Bruker Daltonics, Inc. | Means and method for a quadrupole surface induced dissociation quadrupole time-of-flight mass spectrometer |
JP3797200B2 (ja) * | 2001-11-09 | 2006-07-12 | 株式会社島津製作所 | 飛行時間型質量分析装置 |
DE10156604A1 (de) * | 2001-11-17 | 2003-05-28 | Bruker Daltonik Gmbh | Raumwinkelfokussierender Reflektor für Flugzeitmassenspektrometer |
US6888130B1 (en) | 2002-05-30 | 2005-05-03 | Marc Gonin | Electrostatic ion trap mass spectrometers |
US6818887B2 (en) * | 2002-11-25 | 2004-11-16 | DRäGERWERK AKTIENGESELLSCHAFT | Reflector for a time-of-flight mass spectrometer |
US7157701B2 (en) * | 2004-05-20 | 2007-01-02 | Mississippi State University Research And Technology Corporation | Compact time-of-flight mass spectrometer |
GB2426120A (en) * | 2005-05-11 | 2006-11-15 | Polaron Plc | A reflectron for use in a three-dimensional atom probe |
DE102008058144B4 (de) * | 2008-11-20 | 2011-07-14 | Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, 14109 | Elektrostatischer Energieanalysator für geladene Teilchen, Spektrometer und Monochromator mit einem solchen Analysator |
GB2476964A (en) | 2010-01-15 | 2011-07-20 | Anatoly Verenchikov | Electrostatic trap mass spectrometer |
EP2355129B1 (fr) | 2010-01-29 | 2013-01-09 | Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH | Reflecteur pour un spectromètre de masse à temps de vol |
CN103201821B (zh) * | 2010-09-08 | 2015-08-26 | 株式会社岛津制作所 | 飞行时间型质量分析装置 |
CN103907171B (zh) | 2011-10-28 | 2017-05-17 | 莱克公司 | 静电离子镜 |
EP2908329B1 (fr) * | 2012-10-10 | 2022-01-12 | Shimadzu Corporation | Spectromètre de masse à temps de vol |
GB2526450B (en) | 2013-03-14 | 2021-08-04 | Leco Corp | Multi-reflecting mass spectrometer |
GB201408392D0 (en) * | 2014-05-12 | 2014-06-25 | Shimadzu Corp | Mass Analyser |
GB201507363D0 (en) | 2015-04-30 | 2015-06-17 | Micromass Uk Ltd And Leco Corp | Multi-reflecting TOF mass spectrometer |
GB201520130D0 (en) | 2015-11-16 | 2015-12-30 | Micromass Uk Ltd And Leco Corp | Imaging mass spectrometer |
GB201520134D0 (en) | 2015-11-16 | 2015-12-30 | Micromass Uk Ltd And Leco Corp | Imaging mass spectrometer |
GB201520540D0 (en) | 2015-11-23 | 2016-01-06 | Micromass Uk Ltd And Leco Corp | Improved ion mirror and ion-optical lens for imaging |
GB201613988D0 (en) | 2016-08-16 | 2016-09-28 | Micromass Uk Ltd And Leco Corp | Mass analyser having extended flight path |
GB2567794B (en) | 2017-05-05 | 2023-03-08 | Micromass Ltd | Multi-reflecting time-of-flight mass spectrometers |
GB2563571B (en) | 2017-05-26 | 2023-05-24 | Micromass Ltd | Time of flight mass analyser with spatial focussing |
WO2019030475A1 (fr) | 2017-08-06 | 2019-02-14 | Anatoly Verenchikov | Spectromètre de masse à multipassage |
US11295944B2 (en) | 2017-08-06 | 2022-04-05 | Micromass Uk Limited | Printed circuit ion mirror with compensation |
EP3662501A1 (fr) | 2017-08-06 | 2020-06-10 | Micromass UK Limited | Miroir ionique servant à des spectromètres de masse à réflexion multiple |
WO2019030477A1 (fr) | 2017-08-06 | 2019-02-14 | Anatoly Verenchikov | Accélérateur pour spectromètres de masse à passages multiples |
US11081332B2 (en) | 2017-08-06 | 2021-08-03 | Micromass Uk Limited | Ion guide within pulsed converters |
CN111164731B (zh) | 2017-08-06 | 2022-11-18 | 英国质谱公司 | 进入多通道质谱分析仪的离子注入 |
WO2019030473A1 (fr) | 2017-08-06 | 2019-02-14 | Anatoly Verenchikov | Champs servant à des sm tof à réflexion multiple |
GB201806507D0 (en) | 2018-04-20 | 2018-06-06 | Verenchikov Anatoly | Gridless ion mirrors with smooth fields |
GB201807605D0 (en) | 2018-05-10 | 2018-06-27 | Micromass Ltd | Multi-reflecting time of flight mass analyser |
GB201807626D0 (en) | 2018-05-10 | 2018-06-27 | Micromass Ltd | Multi-reflecting time of flight mass analyser |
GB201808530D0 (en) | 2018-05-24 | 2018-07-11 | Verenchikov Anatoly | TOF MS detection system with improved dynamic range |
GB201810573D0 (en) | 2018-06-28 | 2018-08-15 | Verenchikov Anatoly | Multi-pass mass spectrometer with improved duty cycle |
GB201901411D0 (en) | 2019-02-01 | 2019-03-20 | Micromass Ltd | Electrode assembly for mass spectrometer |
CN112435914B (zh) * | 2020-12-28 | 2024-10-11 | 安图实验仪器(郑州)有限公司 | 离子质量分析器 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3423394A1 (de) * | 1983-11-30 | 1985-06-05 | Shimadzu Corp., Kyoto | Laufzeit-massenspektrometer |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE956450C (de) * | 1953-11-25 | 1957-01-17 | Tno | Massenspektrometer |
US3727047A (en) * | 1971-07-22 | 1973-04-10 | Avco Corp | Time of flight mass spectrometer comprising a reflecting means which equalizes time of flight of ions having same mass to charge ratio |
US4072862A (en) * | 1975-07-22 | 1978-02-07 | Mamyrin Boris Alexandrovich | Time-of-flight mass spectrometer |
DE2540505A1 (de) * | 1975-09-11 | 1977-03-24 | Leybold Heraeus Gmbh & Co Kg | Flugzeit-massenspektrometer fuer ionen mit unterschiedlichen energien |
DE3025764C2 (de) * | 1980-07-08 | 1984-04-19 | Hermann Prof. Dr. 6301 Fernwald Wollnik | Laufzeit-Massenspektrometer |
US4611118A (en) * | 1983-08-16 | 1986-09-09 | Institut Kosmicheskish Issledovany Akademi Nauk Sss | Time-of-flight ion mass analyzer |
-
1985
- 1985-07-10 DE DE19853524536 patent/DE3524536A1/de not_active Withdrawn
-
1986
- 1986-06-04 DE DE8686107585T patent/DE3682127D1/de not_active Expired - Lifetime
- 1986-06-04 EP EP86107585A patent/EP0208894B1/fr not_active Expired - Lifetime
- 1986-06-18 US US06/875,476 patent/US4731532A/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3423394A1 (de) * | 1983-11-30 | 1985-06-05 | Shimadzu Corp., Kyoto | Laufzeit-massenspektrometer |
Non-Patent Citations (1)
Title |
---|
SOVIET PHYSICS TECHNICAL PHYSICS, Band 28, Nr. 10, Oktober 1983, Seiten 1250-1253, American Institute of Physics, New York, US; M.A. IVANOV et al.: "Mass reflectron for studying interaction between laser light and molecules in a supersonic gas jet" * |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4810883A (en) * | 1985-05-31 | 1989-03-07 | Turner David W | Device for providing an energy filtered charge particle image |
US4742224A (en) * | 1986-12-22 | 1988-05-03 | American Telephone And Telegraph Company At&T Bell Laboratories | Charged particle energy filter |
EP0373550A2 (fr) * | 1988-12-14 | 1990-06-20 | Forschungszentrum Jülich Gmbh | Spectromètre de masse à temps de vol à résolution et transmission élevées |
EP0373550A3 (fr) * | 1988-12-14 | 1991-05-22 | Forschungszentrum Jülich Gmbh | Spectromètre de masse à temps de vol à résolution et transmission élevées |
DE10005698B4 (de) * | 2000-02-09 | 2007-03-01 | Bruker Daltonik Gmbh | Gitterloses Reflektor-Flugzeitmassenspektrometer für orthogonalen Ioneneinschuss |
DE102018122960A1 (de) | 2017-09-28 | 2019-03-28 | Bruker Daltonik Gmbh | Breitbandig hohe Massenauflösungen in Reflektor-Flugzeitmassenspektrometern |
Also Published As
Publication number | Publication date |
---|---|
DE3524536A1 (de) | 1987-01-22 |
DE3682127D1 (de) | 1991-11-28 |
EP0208894B1 (fr) | 1991-10-23 |
EP0208894A3 (en) | 1988-09-21 |
US4731532A (en) | 1988-03-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0208894B1 (fr) | Spectromètre de masses à temps de vol avec Un réflecteur d'ions | |
DE69033353T2 (de) | Massenspektrometer mit einem mehrkanaldetektor | |
DE69906935T2 (de) | Flugzeitmassenspektrometer | |
EP0396019A2 (fr) | Spectromètre ionique à résonance cyclotronique | |
DE1539659B2 (de) | Stigmatisches abbildungssystem fuer ein doppelfokussierendes massenspektrometer | |
DE3913965A1 (de) | Direkt abbildendes sekundaerionen-massenspektrometer mit laufzeit-massenspektrometrischer betriebsart | |
DE2730985C2 (de) | Bestrahlungsvorrichtung unter Verwendung geladener Teilchen | |
DE4442348C2 (de) | Verfahren und Vorrichtung zur verbesserten Massenauflösung eines Flugzeit-Massenspektrometers mit Ionenreflektor | |
DE1598072A1 (de) | Multipol-Massenfilter | |
DE1937482A1 (de) | Mikrostrahlsonde | |
DE2628422C3 (de) | Verfahren zur Massenspektroskopie | |
DE3522340C2 (fr) | ||
DE19635645A1 (de) | Hochauflösende Ionendetektion für lineare Flugzeitmassenspektrometer | |
DE2705430A1 (de) | Elektrostatischer analysator fuer geladene teilchen | |
EP0086431A2 (fr) | Système générateur de faisceau de particules et méthode d'utilisation | |
EP0633601B1 (fr) | Détecteur pour spectromètre de masse à temps de vol présentant des distorsions réduites des temps de vols à ouverture élevée | |
EP0002430A1 (fr) | Spectromètre de masse | |
DE2659385C3 (de) | Ionen-Mikrosonden-Analysator | |
EP0632482B1 (fr) | Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses | |
DE2054579A1 (de) | Massenspektrometer | |
EP0087152A2 (fr) | Spectromètre d'électrons secondaires et méthode d'utilisation | |
DE102020133974B3 (de) | Energieanalysator für elektrisch geladene Teilchen | |
DE2539161C2 (de) | Massenspektrometer | |
EP0185789B1 (fr) | Analyseur pour particules chargées | |
DE2322203C2 (de) | Massenspektrometer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): DE FR GB |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): DE FR GB |
|
17P | Request for examination filed |
Effective date: 19881105 |
|
17Q | First examination report despatched |
Effective date: 19900405 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): DE FR GB |
|
GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) | ||
REF | Corresponds to: |
Ref document number: 3682127 Country of ref document: DE Date of ref document: 19911128 |
|
ET | Fr: translation filed | ||
PLBI | Opposition filed |
Free format text: ORIGINAL CODE: 0009260 |
|
26 | Opposition filed |
Opponent name: WOLLNIK, HERMANN, DR., PROFESSOR Effective date: 19920708 |
|
PLBN | Opposition rejected |
Free format text: ORIGINAL CODE: 0009273 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: OPPOSITION REJECTED |
|
27O | Opposition rejected |
Effective date: 19940203 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: IF02 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20040623 Year of fee payment: 19 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20040628 Year of fee payment: 19 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20050604 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20050629 Year of fee payment: 20 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20060228 |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20050604 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20060228 |