EP0002430A1 - Spectromètre de masse - Google Patents

Spectromètre de masse Download PDF

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Publication number
EP0002430A1
EP0002430A1 EP78100261A EP78100261A EP0002430A1 EP 0002430 A1 EP0002430 A1 EP 0002430A1 EP 78100261 A EP78100261 A EP 78100261A EP 78100261 A EP78100261 A EP 78100261A EP 0002430 A1 EP0002430 A1 EP 0002430A1
Authority
EP
European Patent Office
Prior art keywords
mass filter
ion
mass
mass spectrometer
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP78100261A
Other languages
German (de)
English (en)
Other versions
EP0002430B1 (fr
Inventor
Jochen Dr. Franzen
Gerhard Weiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bruker Daltonics GmbH and Co KG
Original Assignee
Dr Franzen Analysentechnik GmbH and Co KG
Bruken Franzen Analytik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Franzen Analysentechnik GmbH and Co KG, Bruken Franzen Analytik GmbH filed Critical Dr Franzen Analysentechnik GmbH and Co KG
Publication of EP0002430A1 publication Critical patent/EP0002430A1/fr
Application granted granted Critical
Publication of EP0002430B1 publication Critical patent/EP0002430B1/fr
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/062—Ion guides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0095—Particular arrangements for generating, introducing or analyzing both positive and negative analyte ions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers

Definitions

  • the invention relates to a mass spectrometer with an ion source, a mass filter and at least one ion detector, the mass filter and ion detector not being laterally offset with respect to one another.
  • a mass spectrometer of the type considered here generally consists of an ion source of any type, for example an ionization chamber for chemical ionization, as described in DT-OS . « (patent application P 27 37 852.5), a mass filter, in particular a quadrupole mass filter, of the type described in the DT-P S 444 900, as is carried out, for example, in accordance with the DT-OS . « and its first additional patent, and an ion detector.
  • mass filters in particular quadrupole mass filters, and "off-axis" ion detector have to be coupled ion-optically.
  • this is mainly done by electrostatic deflection fields, which are generated by suitably shaped sheet metal electrodes.
  • Arrangements are also known which take advantage of the positive ion attraction of the high negative potential of the first dynode of a secondary electron multiplier, this potential typically being in the range from 2000 to 3000 V.
  • the invention has for its object to improve a mass spectrometer of the type mentioned while avoiding the disadvantages described above.
  • a mass spectrometer is to be created which ensures reliable guidance of the ions to be examined between the mass filter and the ion detector.
  • this object is achieved in a mass spectrometer of the type mentioned at the outset in that an elongated electrostatic, essentially cylindrical, radial, guiding field is arranged between the mass filter and the ion detector, which ions have an axial velocity component to the guiding field in elliptical helical paths about its axis to the input of the Leads detector.
  • a preferred embodiment is characterized in that the guide field is generated by an essentially linear conductor which extends essentially between the mass filter and the ion detector and is charged opposite to the charge of the ions to be examined.
  • the conductor is an electrically live metal wire, a further embodiment providing that the conductor is insulated in an elongated housing. An electrical voltage is applied between the wire and the housing in such a way that the wire has an average voltage opposite to the sign of the ion charge carries, the wire is in particular for guiding positive ions on a negative voltage.
  • a coaxial arrangement of electrical conductors has a potential distribution corresponding to the following equation:
  • r i and r a are the radii of the inner and outer conductors, the outer conductor in the present case being a housing which has a circular cross section.
  • U o is the potential of the inner conductor relative to the outer conductor. If charged particles (charge q) reach the area of the guide field, they experience a force of the magnitude directed radially to the conductor arrangement under the effect of which they move on elliptical orbits around the central conductor. If the charged particles have an axial drift, the flat tracks merge into elliptical screw tracks around the conductor. The movement of the ions is thus guided by the radial field in the axial direction of the guide field.
  • the housing has lateral openings for the entry or exit of the ions to be examined and any interfering neutral particles that may be present.
  • One embodiment of the invention provides that two ion detectors are arranged offset relative to the mass filter; and that the mass filter is connected to each detector by an elongated guide field. Vorzu g s-wise can be provided thereby, that an electrically biased conductor is disposed between the mass filter and each of the two ion detectors, respectively, said conductors being insulated from each other. If the conductors are then provided with voltages of opposite signs, positive and negative ions can be measured simultaneously in this way.
  • the double design of the particle guide arrangement for two separate ion detectors, in particular secondary electron multipliers opens up the possibility of a quasi-simultaneous measurement of single ion currents and total ion currents through rapid switching of the voltage of the wires is achievable. Sensitive single-current measurements are carried out with the strongly amplifying detector, while the low-amplifying detector is intended for measuring the total ion current.
  • the respective ion currents are supplied to the assigned detectors.
  • the mass spectrometer shown in parts in FIG. 1 consists of a quadrupole mass filter 10 and one of the two. Axis 11, which is indicated by dash-dotted lines, offset secondary electron multiplier (SEV) 12 as an ion detector.
  • Quadrupole mass filter 10 and secondary electron multiplier 12 are ion-optically connected by a particle guide arrangement 13.
  • the particle guide arrangement 13 consists of a housing 14 which extends between the quadrupole mass filter 10 and the secondary electron multiplier 12 perpendicularly to the longitudinal axes thereof and in the longitudinal axis of which a metal wire 16 is stretched, which is fastened to the end faces 17 of the housing 14 by means of insulation 18.
  • the wire 16 is biased to an electrical potential, which attracts the ions emerging from the quadupole mass filter 10, which are detected by means of the secondary electron multiplier 12.
  • the housing 14 has one with the quadrupole mass filter 10 and the secondary electron multiplier 12 communicating opening 19 or 21, the openings 19, 21 being arranged so that the major part of the ions to be examined from the quadrupole mass filter 10 enter the housing 14 through the opening 19 and out of the housing 14 through the Opening 21 can exit to the secondary electron multiplier 12.
  • the housing 14 In the direction of the axis 11 of the quadrupole mass filter, the housing 14 has an opening 22 for the exit of neutral particles which may be present or which are formed by discharging ions on the metal wire 16.
  • the opening 22 lies opposite the opening 19 for the entry of the particles from the quadrupole mass filter 10.
  • a tubular extension 23 is connected to the first dynode of the secondary electron multiplier 12 at the opening 21 and forms an ion-optical lens with the opening 21 for the ions to emerge from the particle guide arrangement 13.
  • the tubular extension 11 is electrically attractively biased for the ions to be examined.
  • the housing 14 is optionally held at a voltage which is opposite in sign to the voltage of the metal wire 16.
  • the metal wire 16 has an electrical voltage.
  • the housing 14 is also electrically biased. In this way, a cylindrical guide field is formed in the interior of the housing 14 that a force in the direction of the metal is exerted on the ions in the housing 14 exercise wire. This force forces the ions around the metal wire 16 on elliptical paths.
  • the metal wire 16 is clamped at only one end, namely in the vicinity of the secondary electron multiplier 12, insulated against the housing 14 on the end face 17 located there, while the metal wire 16 in the housing 14 at the opening 19 to the quadrupole -Mass filter 10 ends freely.
  • a pusher plate 27 Opposite the free end 26 of the metal wire 16 is a pusher plate 27 which is biased in the same direction as the charge of the ions to be examined, so that it repels them.
  • the mode of operation of the embodiment of the mass spectrometer or the particle guide arrangement 13 shown in FIG. 2 essentially corresponds to that of the one shown in FIG. 1, with only the particles being repelled by the pusher plate 27 and thus giving them an enlarged speed component along the metal wire 16 Secondary electron multiplier 12 is forced out.
  • the one near the secondary electron multiplier 12 is located there End face 17 clamped metal wire 16 with its free end at the mass filter 10 bent into the opening 19 for the entry of the ions to be examined into the housing 14 such that its free end 28 is substantially aligned with the axis of the quadrupole mass filter 1 0 .
  • the ions emerging from the quadrupole mass filter 10 through the opening 19 can thus be taken up directly by the leading metal wire 16 and guided along it in elliptical screw paths up to the level of the outlet opening 21.
  • FIG. 4 shows a mass spectrometer with a double particle guidance arrangement, which is constructed symmetrically to the multipole axis.
  • the housing 14 has, in alignment with the axis 11 of the quadrupole mass filter 10, an opening 19 for the entry of the particles and a passage opening 22 for any neutral particles that may be present.
  • a secondary electron multiplier 12, 12 is arranged on the side of the housing 14 opposite the quadrupole mass filter 10. The ions to be examined enter the secondary electron multiplier from the housing 14 through openings 21.
  • the ion-conducting metal wire 16, 16 is clamped on the two end faces 17 of the housing 14 by means of insulation 18 and divided in the middle between the openings 19 and 22 in two halves 16, 16, so that both wire halves 16, 16 are aligned in their axes stand flush in the center of the entrance opening without touching.
  • the wire ends facing each other are mechanically stable and at the same time electrically insulated by means of a small glass bead 29.
  • the mass spectrometer of the exemplary embodiment in FIG. 4 essentially functions like that of the exemplary embodiment in FIG.
  • both wires can be brought to different electrical voltages, one half of the wire preferably having a positive potential, while the second half of the wire is at a negative potential.
  • the ion current to be examined is then directed to separate detectors.
  • one secondary electron multiplier 12 is equipped with a high gain in order to be able to carry out sensitive single ion current measurements, while the second secondary electron multiplier 12 has a correspondingly low gain for measuring the total ion current.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP78100261A 1977-12-08 1978-06-28 Spectromètre de masse Expired EP0002430B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2754685A DE2754685C2 (de) 1977-12-08 1977-12-08 Vorrichtung zum Überführen von Ionen aus einem Massenfilter in einen Ionendetektor
DE2754685 1977-12-08

Publications (2)

Publication Number Publication Date
EP0002430A1 true EP0002430A1 (fr) 1979-06-27
EP0002430B1 EP0002430B1 (fr) 1981-08-12

Family

ID=6025612

Family Applications (1)

Application Number Title Priority Date Filing Date
EP78100261A Expired EP0002430B1 (fr) 1977-12-08 1978-06-28 Spectromètre de masse

Country Status (3)

Country Link
US (1) US4230943A (fr)
EP (1) EP0002430B1 (fr)
DE (1) DE2754685C2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2147140A (en) * 1983-09-20 1985-05-01 Cambridge Mass Spectrometry Li Mass spectrometers

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4481415A (en) * 1982-10-27 1984-11-06 Shimadzu Corporation Quadrupole mass spectrometer
US4680468A (en) * 1985-08-05 1987-07-14 Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee Particle detector
DE4019005C2 (de) * 1990-06-13 2000-03-09 Finnigan Mat Gmbh Vorrichtungen zur Analyse von Ionen hoher Masse
US5298745A (en) * 1992-12-02 1994-03-29 Hewlett-Packard Company Multilayer multipole
US6091068A (en) * 1998-05-04 2000-07-18 Leybold Inficon, Inc. Ion collector assembly
CN110612595B (zh) * 2017-05-17 2022-02-08 株式会社岛津制作所 离子检测装置及质谱分析装置
US20210151304A1 (en) * 2018-04-13 2021-05-20 Adaptas Solutions Pty Ltd Sample analysis apparatus having improved input optics and component arrangement
EP4162518A4 (fr) * 2020-06-09 2024-07-10 Adaptas Solutions Pty Ltd Plaque de conversion d'ions améliorée

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1598072A1 (de) * 1964-09-08 1970-01-02 Bell & Howell Co Multipol-Massenfilter

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2911532A (en) * 1956-03-26 1959-11-03 Beckman Instruments Inc Ion collector for mass spectrometry
US3244990A (en) * 1963-02-26 1966-04-05 Wisconsin Alumni Res Found Electron vacuum tube employing orbiting electrons
US3209147A (en) * 1963-03-05 1965-09-28 Centre Nat Rech Scient Electron lens spherical aberration correcting device comprising a current carrying wire section on the lens axis
DE7615493U1 (de) * 1976-05-15 1976-12-16 Balzers Hochvakuum Gmbh, 6201 Nordenstadt Vorrichtung zum massenspektrometrischen nachweis von negativen ionen

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1598072A1 (de) * 1964-09-08 1970-01-02 Bell & Howell Co Multipol-Massenfilter

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
APPLIED PHYSICS, Vol. 14, Nr. 1, September 1977, New York, USA, A.R. KRAUSS et al. "Relative ion sputtering yield measurement by integration of secondary ion energy distribution using a retarding-dispersive ion energy analyser", Seiten 89-97 * Figur 2 * *
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PHYSICS, Vol. 9, Nr. 4, September 1972, Amsterdam, NL, J.M. GOODINGS et al., "Electron multiplier operation for negative ions", Seiten 417-420 * Seite 417, Zeilen 11-14; Figur 1 * *
NASA CONTRACTOR REPORT, CR-1747, Marz 1971, Washington, D.C., USA, F.L. TORNEY et al., "Research and development program on the use of counting techniques" * Seite 1, Zeilen 11-14; Seite 18, Zeile 21 bis Seite 19, Zeile 19; Seite 38, Zeilen 15-24; Figuren 1, 10 * *
REVIEW OF SCIENTIFIC INSTRUMENTS, Vol. 41, Nr. 10, Oktober 1970, New York, USA E. LESTER "Off-axis cha unreadable tekst eltron multiplier for quadrupole mass Spectrometers", Seite 151. * Linke Spalte, Zeilen 1-2 ; Figuren 1, 2 * *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2147140A (en) * 1983-09-20 1985-05-01 Cambridge Mass Spectrometry Li Mass spectrometers

Also Published As

Publication number Publication date
EP0002430B1 (fr) 1981-08-12
DE2754685C2 (de) 1982-04-15
US4230943A (en) 1980-10-28
DE2754685A1 (de) 1979-06-13

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