EP0208894B1 - Spectromètre de masses à temps de vol avec Un réflecteur d'ions - Google Patents

Spectromètre de masses à temps de vol avec Un réflecteur d'ions Download PDF

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Publication number
EP0208894B1
EP0208894B1 EP86107585A EP86107585A EP0208894B1 EP 0208894 B1 EP0208894 B1 EP 0208894B1 EP 86107585 A EP86107585 A EP 86107585A EP 86107585 A EP86107585 A EP 86107585A EP 0208894 B1 EP0208894 B1 EP 0208894B1
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EP
European Patent Office
Prior art keywords
electrode
time
flight mass
mass spectrometer
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP86107585A
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German (de)
English (en)
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EP0208894A2 (fr
EP0208894A3 (en
Inventor
Rüdiger Dr. Frey
Edward William Prof. Dr. Schlag
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Bruker Biospin GmbH
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Bruker Analytische Messtechnik GmbH
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Application filed by Bruker Analytische Messtechnik GmbH filed Critical Bruker Analytische Messtechnik GmbH
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Publication of EP0208894A3 publication Critical patent/EP0208894A3/de
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/40Time-of-flight spectrometers
    • H01J49/405Time-of-flight spectrometers characterised by the reflectron, e.g. curved field, electrode shapes

Definitions

  • the invention relates to a time-of-flight mass spectrometer with an ion reflector which has a reflector electrode and two parallel brake electrodes which are arranged at a distance from it and define a braking field.
  • time-of-flight mass spectrometer is known from US-A-37 27 047.
  • a similar time-of-flight mass spectrometer is also described in DE-A-34 28 944.
  • the ion reflector of these known time-of-flight mass spectrometers formed by grid electrodes has the purpose of time-of-flight differences compensate, which are due to different initial energies of the accelerated ions, thereby improving the mass resolving power of the spectrometer.
  • time-of-flight mass spectrometers provided with such an ion reflector do not yet meet the requirements with regard to sensitivity and resolving power, such as are to be placed on a device which is suitable as a general laboratory device and is also intended to allow mass spectrometric examinations for the not particularly specialized expert.
  • the invention is therefore based on the object of improving the known time-of-flight mass spectrometers so that they have improved resolution and sensitivity with a simple structure.
  • the brake electrodes In the previously known time-of-flight mass spectrometers, it was considered necessary to design the brake electrodes as a grid, because a very homogeneous electric field was regarded as necessary in order to ensure the same time focusing over the entire beam cross section. In fact, however, it has been found that the inhomogeneity caused by the focusing electrode can be set in such a way that both optimal temporal and optimal geometric focusing can be achieved. Such optimal conditions can also be achieved if the brake electrodes as well as the focusing electrode are designed as gridless ring diaphragms.
  • the design of the brake electrodes as grating-free ring diaphragms is not only possible, but rather also extremely advantageous, because it avoids expensive and highly sensitive components such as the grating and also avoids the transmission losses caused by such grating. Even if such grid electrodes have a transmittance as high as 80% for the ion beam, the ion beam suffers attenuation to 40% of the original intensity when passing through such grids four times, which leads to a corresponding loss of sensitivity.
  • the design of the brake electrodes as gridless ring diaphragms consequently achieves both a simplification and an increase in the sensitivity of the time-of-flight mass spectrometer.
  • the conscious generation of an inhomogeneous electric field in the area of the brake electrodes also offers the possibility of influencing the inhomogeneity of the electric field through the geometry of the brake electrodes. It has proven to be particularly advantageous if the front brake electrode has a larger hole diameter than the rear one.
  • the electrode potentials can be established in a known manner by the resistors of a voltage divider, by means of which the electrodes of the ion reflector which are adjacent to one another are electrically connected to one another.
  • the time-of-flight mass spectrometer shown schematically in FIG. 1 comprises an ion source 1 and a detector 2, which are connected to one another by flight paths 3, 4 forming an acute angle. In the area of the intersection of the two flight paths 3, 4 there is an ion reflector 5. All components are located within an evacuable housing 6.
  • the ion reflector 5 comprises two brake electrodes 7, 8, which are located at the entrance of the ion reflector 5 and of which the front brake electrode 7 delimits the flight routes 3, 4 in which the electric field has no gradient.
  • a focusing electrode 10 is arranged between the rear brake electrode 8 and the reflector electrode 9, which results in the formation of an inhomogeneous electric field that forms an electrostatic lens for geometrically focusing the ion beam onto the detector 2.
  • the two brake electrodes 17, 18 are designed as grid electrodes. Between the rear brake electrode 18 and the reflector electrode 19 formed by a flat plate there is the focusing electrode 20. The focusing electrode 20 is located between the focusing electrode 20 and the reflector electrode 19. There are two linearizing electrodes 21 and 22. The outer diameter of all electrodes is 200 mm.
  • the structure of the ion reflector is characterized by the following values:
  • the ion reflector shown in FIG. 3 has brake electrodes 27, 28 instead of the brake electrodes 17, 18, which are also designed as ring diaphragms. Furthermore, three linearizing electrodes 31, 32, 33 designed as ring diaphragms are arranged between the focusing electrode 30 and the reflector electrode, which is again designed as a closed plate. The following values apply to the electrodes of the ion reflector according to FIG. 3:
  • Both ion reflectors result in a perfect temporal and spatial focusing for an ion energy of 680 V, an angle of incidence of the ion trajectory of 4 ° and a length of the drift distance of 165 cm.
  • the course of the equipotential surfaces leading to focusing, which result in a lens effect, and the focusing effect on the ion beam are shown in FIGS. 2 and 3 by the potential lines 34 and the path lines 35, respectively.
  • This ion reflector comprises electrodes 41 to 46 in the form of ring diaphragms which are mounted on a carrier plate 48 by means of short ceramic tubes 49.
  • the carrier plate 48 with the electrode system is arranged within a vacuum vessel 52 which has a pipe socket 53 for connecting a vacuum pump and a flange 54 for connecting the housing to the other components of the time-of-flight mass spectrometer.
  • the vacuum vessel 52 has, at the end opposite the flange 54, a carrier flange 51 to which the carrier plate 48 is fastened with the electrode system and which has vacuum feedthroughs 50 which allow defined potentials to be applied to the electrodes.
  • the vacuum bushings 50 serve to apply a voltage to a voltage divider, that of resistors 47 is formed, each of which connects two of the adjacent electrodes 41 to 46 to one another.
  • the values of the resistors 47 are selected so that the potential distribution shown in the table below results.
  • This table also shows the internal diameter and the axis position of the electrodes. With an inner diameter of the vacuum vessel 52 of 200 mm, the outer diameter of the orifices here is 170 mm.
  • the desired temporal and spatial focus is again achieved for an ion energy of 680 eV, an ion beam incidence angle of 4 ° and a length of the drift distance of 165 cm.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Claims (5)

  1. Spectromètre de masse à temps de vol comportant un réflecteur d'ions, qui possède une électrode de réflexion (29) et deux électrodes parallèles de freinage (27,28), qui sont situées à une certaine distance devant l'électrode de réflexion et définissent un champ de freinage,
    caractérisé par le fait
    qu'entre l'électrode de freinage arrière (28), voisine de l'électrode de réflexion (29), et cette dernière est disposée au moins une électrode de focalisation (30), qui est réalisée sous la forme d'un diaphragme annulaire sans grille, qui, pendant le fonctionnement, est placé à un potentiel supérieur à ce qui correspond à l'accroissement linéaire de potentiel depuis l'électrode de freinage arrière (28) jusqu'à l'électrode de réflexion (29), le potentiel et le diamètre intérieur étant choisis de manière à obtenir, en plus d'une focalisation temporelle, également une focalisation géométrique indépendante de la masse.
  2. Spectromètre de masse à temps de vol suivant la revendication 1, caractérisé par le fait que les électrodes de freinage (27,28) sont également réalisées sous la forme de diaphragmes annulaires sans grille.
  3. Spectromètre de masse à temps de vol suivant la revendication 2, caractérisé par le fait que l'électrode de freinage avant (27) possède un trou dont le diamètre est supérieur à celui de l'électrode de freinage arrière.
  4. Spectromètre de masse à temps de vol suivant l'une des revendications précédentes, caractérisé par le fait que plusieurs électrodes de linéarisation (31,32,33) sont disposées entre l'électrode de focalisation (30) et l'électrode de réflexion (29).
  5. Spectromètre de masse à temps de vol suivant l'une des revendications précédentes, caractérisé par le fait que ces électrodes respectivement voisines (41 à 46) sont raccordées électriquement entre elles par les résistances (47) d'un diviseur de tension déterminant les potentiels des électrodes.
EP86107585A 1985-07-10 1986-06-04 Spectromètre de masses à temps de vol avec Un réflecteur d'ions Expired - Lifetime EP0208894B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3524536 1985-07-10
DE19853524536 DE3524536A1 (de) 1985-07-10 1985-07-10 Flugzeit-massenspektrometer mit einem ionenreflektor

Publications (3)

Publication Number Publication Date
EP0208894A2 EP0208894A2 (fr) 1987-01-21
EP0208894A3 EP0208894A3 (en) 1988-09-21
EP0208894B1 true EP0208894B1 (fr) 1991-10-23

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ID=6275348

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Application Number Title Priority Date Filing Date
EP86107585A Expired - Lifetime EP0208894B1 (fr) 1985-07-10 1986-06-04 Spectromètre de masses à temps de vol avec Un réflecteur d'ions

Country Status (3)

Country Link
US (1) US4731532A (fr)
EP (1) EP0208894B1 (fr)
DE (2) DE3524536A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
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CN103201821A (zh) * 2010-09-08 2013-07-10 株式会社岛津制作所 飞行时间型质量分析装置
DE102018122960B4 (de) 2017-09-28 2024-05-08 Bruker Daltonics GmbH & Co. KG Breitbandig hohe Massenauflösungen in Reflektor-Flugzeitmassenspektrometern

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CN111164731B (zh) 2017-08-06 2022-11-18 英国质谱公司 进入多通道质谱分析仪的离子注入
US11211238B2 (en) 2017-08-06 2021-12-28 Micromass Uk Limited Multi-pass mass spectrometer
US11817303B2 (en) 2017-08-06 2023-11-14 Micromass Uk Limited Accelerator for multi-pass mass spectrometers
EP3662501A1 (fr) 2017-08-06 2020-06-10 Micromass UK Limited Miroir ionique servant à des spectromètres de masse à réflexion multiple
US11081332B2 (en) 2017-08-06 2021-08-03 Micromass Uk Limited Ion guide within pulsed converters
US11049712B2 (en) 2017-08-06 2021-06-29 Micromass Uk Limited Fields for multi-reflecting TOF MS
EP3662502A1 (fr) 2017-08-06 2020-06-10 Micromass UK Limited Miroir ionique à circuit imprimé avec compensation
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CN103201821A (zh) * 2010-09-08 2013-07-10 株式会社岛津制作所 飞行时间型质量分析装置
CN103201821B (zh) * 2010-09-08 2015-08-26 株式会社岛津制作所 飞行时间型质量分析装置
DE102018122960B4 (de) 2017-09-28 2024-05-08 Bruker Daltonics GmbH & Co. KG Breitbandig hohe Massenauflösungen in Reflektor-Flugzeitmassenspektrometern

Also Published As

Publication number Publication date
US4731532A (en) 1988-03-15
DE3524536A1 (de) 1987-01-22
DE3682127D1 (de) 1991-11-28
EP0208894A2 (fr) 1987-01-21
EP0208894A3 (en) 1988-09-21

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