EP0461306B1 - Induktionsschmelzofen - Google Patents

Induktionsschmelzofen Download PDF

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Publication number
EP0461306B1
EP0461306B1 EP90123415A EP90123415A EP0461306B1 EP 0461306 B1 EP0461306 B1 EP 0461306B1 EP 90123415 A EP90123415 A EP 90123415A EP 90123415 A EP90123415 A EP 90123415A EP 0461306 B1 EP0461306 B1 EP 0461306B1
Authority
EP
European Patent Office
Prior art keywords
crucible
melt
melting furnace
induction melting
pressure piston
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90123415A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0461306A1 (de
Inventor
Franz Hugo
Erwin Wanetzky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALD Vacuum Technologies GmbH
Original Assignee
ALD Vacuum Technologies GmbH
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Filing date
Publication date
Application filed by ALD Vacuum Technologies GmbH filed Critical ALD Vacuum Technologies GmbH
Publication of EP0461306A1 publication Critical patent/EP0461306A1/de
Application granted granted Critical
Publication of EP0461306B1 publication Critical patent/EP0461306B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/06Crucible or pot furnaces heated electrically, e.g. induction crucible furnaces with or without any other source of heat
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/06Crucible or pot furnaces heated electrically, e.g. induction crucible furnaces with or without any other source of heat
    • F27B14/061Induction furnaces

Definitions

  • the invention relates to an induction melting furnace for melting difficult-to-melt metals with an induction coil wrapping around the crucible and a molded container which is surrounded by an annular chamber for receiving coolant, the induction melting furnace being surrounded by a housing provided with a vacuum connection.
  • a precision casting device for dental use with a melting chamber and a casting chamber which, under normal operating conditions, are arranged coaxially one above the other in a frame and can be pulled horizontally out of the frame during maintenance for access to lighten her inside.
  • the working chamber is divided into two chambers, namely a melting and a casting chamber. These chambers are held separately on a support frame in a vertical, coaxial arrangement.
  • the casting chamber sits in a cup-shaped cavity of a holding element, which is also carried by the frame.
  • the arrangement is designed so that the casting chamber can be pushed upwards when a gas is to be pressed into the cavity.
  • the upward movement of the casting chamber causes the melting chamber and the casting chamber to touch and form a single chamber.
  • US-A 1,540,515 already shows a melting furnace for melting difficult-to-melt metals and a molding container, the molding container being surrounded by a housing provided with a vacuum connection.
  • a method for melting small amounts of metal which uses a cold crucible for this purpose.
  • the cold melting crucible consists of an upper crucible, which forms the crucible trough by means of appropriately shaped wall segments, and a base part. Cooling channels run along the wall segments, into which the supply lines for the coolant are introduced from below.
  • the base part also has a further flange for receiving a pressure vessel. Furthermore, the individual wall elements are surrounded by a high-frequency coil. This device is not suitable for small batches, because due to the surface tension and the viscosity of the melt, the melt is not sufficiently compressed in the crucible.
  • a casting process of the type mentioned at the outset is also known (DE 39 27 998), in which an inert gas atmosphere is used to cast a material.
  • tilt casting is used so that the melt runs into the mold in the presence of a gas atmosphere.
  • the melt entering the mold must displace the gas present in the mold, before it can penetrate the smallest mold spouts. So gas inclusions or bubbles in the metal can not be excluded.
  • the invention has for its object to design the induction melting furnace with the associated mold container such that even with very small batches in the mold container of the induction melting furnace and correspondingly large surface tension of the melt, the microporosity of the metal, especially titanium, obtained after the casting process is improved.
  • the object is achieved according to the invention in that above the inlet opening of the mold container an insertable pressure stamp is provided, with which the melt is pressed out of the upper crucible through an outlet opening provided in the crucible into the mold container, and the pressure stamp is provided in the interior of the crucible is.
  • the pressure stamp accommodated in the housing is arranged such that it can move vertically in the housing and that the pressure stamp is provided with a ceramic coating on its front end which can be immersed in the melt, in order in this way to make the pressure stamp resistant and also at To make metals with a very high melting point usable. Furthermore, with a pressure stamp designed in this way, the melt can be easily pushed out through the outlet opening of the crucible and ensure sufficient compression of the melt in the molding container.
  • the invention makes it possible in a simple manner that the mold container with its inlet opening can be moved up to the outlet opening of the crucible by means of a lifting device.
  • the mold container consists of an inner and an outer container, between which the annular space is formed, which is surrounded by a porous ceramic material through which liquid argon is passed in order to cool the casting faster to reach. It is particularly advantageous that the cast is cooled very quickly in order to obtain a fine-grained structure.
  • the argon supplied to the ceramic material is evaporated, thereby extracting thermal energy from the melt.
  • the argon then discharged to the outside causes a pressure increase in the interior of the housing and thus a re-compression of the melt in the molding container. It is also possible to spray the mold container with liquid argon.
  • the induction melting furnace for melting difficult-to-melt metals is equipped with a crucible and a mold container which is surrounded by an annular chamber for receiving coolant, the induction melting furnace being surrounded by a housing provided with a vacuum connection and above the inlet opening of the molding container there is a pressure ram which can be inserted into the molding tank and with which the melt is subsequently compressed into the molding tank and the pressure ram is provided in the interior of the crucible, a floating coil being provided above the molding tank, between which the melt is formed or is held. This ensures that the melt falls into the shape below the coil after the melt flow is switched off. It is particularly advantageous that the pressure ram for recompressing the melt immediately after the melt flow has been switched off is pressed into the mold for recompression.
  • the ceramic coating frozen in the mold head is advantageously separated from the casting with the lost mold.
  • the crucible with its discharge funnel provided at the lower end of the crucible is aligned coaxially with the mold container and that the crucible tapers downwards. It is also advantageous that the crucible is surrounded by an annular chamber and that the pressure stamp is preheated.
  • 1 denotes an induction melting furnace which consists of a housing 7 which has at its upper end a cover 18 with a flange 20 which can be pressed against a further flange 21 provided on the housing part 28 via a seal 19.
  • the cover 18 can be provided with a sight glass 23 in order to observe the pouring process or the solidification of the melt.
  • a sight glass 23 in order to observe the pouring process or the solidification of the melt.
  • in the cover 18 there is also an inlet opening 22 through which the melt is introduced.
  • the housing 7 consists of an upper and a lower housing part 28 and 30.
  • the two housing parts 28 and 30 are connected to one another by two flanges 25 and 27, a seal 26 being provided between the two flanges 25 and 27.
  • the housing 7 of the induction melting furnace 1 is placed on a base 31, which is only schematically indicated in the drawing.
  • the housing 7 has a base 29 with a connecting piece 32, to which a connecting line 33 is connected, via which argon is supplied.
  • the connecting line 33 is in flow connection via a reservoir (not shown in the drawing) for receiving argon.
  • the connecting line 33 is led into the interior of the housing 7 and connected to an inlet opening 34 of the molded container 4.
  • the molded container 4 has a can 35 in its interior. Between the can 35 and the outer wall 37 of the molded container 4, an annular space 5 is formed, which serves to receive a porous ceramic material. Argon can be passed through the porous ceramic material 36 in order to accelerate the cooling process during the solidification process of the melt. After the evaporation process, the argon is passed outside through the opening 44 into the interior of the housing 7, so that pressure can build up in the interior and therefore also above the melt. This ensures sufficient recompaction of the melt during the solidification process.
  • the mold container 4 there is a crucible 3 for melting metals which are difficult to melt, for example titanium.
  • the crucible or cold crucible 3 can be constructed in segments in its interior.
  • the crucible 3 tapers downward and has an outlet opening 11 at its lower end, so that the melt can be fed to the interior of the molded container 4 via the bottom tapping.
  • the upper end of the crucible 3 is designed as an inlet opening 40. It is also possible to close the inlet opening 40 of the crucible 3 with a pressure cap, not shown in the drawing, in order to conduct argon into the interior of the crucible via a corresponding inlet opening and thereby build up the desired pressure above the melt.
  • a pressure ram 9 in the interior of the crucible 3, which can be inserted through an inlet opening 40 of the crucible 3.
  • the pressure stamp 9 is made of high temperature resistant metal. It tapers towards the front and has a ceramic coating 10 at its downward end.
  • the melt is compressed again by pressing the melt by means of the pressure ram 9.
  • the pressure plunger 9 is guided through the outlet opening 11 and then into the inlet opening 13 of the mold container 4.
  • argon is passed into the annular space 5, as already explained. The rapid evaporation of the argon results in a rapid pressure increase when using a titanium melt of approx. 10 bar. Solidification under pressure improves microporosity.
  • a flange 41 connected to a vacuum pump (not shown in the drawing) with a nozzle 6, via which the housing 7 can be evacuated.
  • the melted material received in the crucible 3 is melted with an induction coil 2 wrapping around the crucible 3.
  • the induction coil 2 includes a yoke 24 which surrounds the induction coil 2 and which is at a sufficient distance from the outer wall of the crucible 3 so that thermal energy is not supplied to the wall but only to the melt.
  • the molded container 4 provided below the crucible 3 is arranged on a table 42 which is fastened on a lifting column 43.
  • the lifting column 43 is guided through the connecting piece 32 and is of hollow design. In its interior, it receives the connecting line 33 via which the argon is fed to the annular space 5 of the molded container 4.
  • the molded container 4 can be placed exactly below the crucible 3.
  • the melt is produced and tapped as described below.
  • the melting material is introduced into the housing 7 or into the melting crucible 3 and then the housing 7 is closed by means of the cover 18.
  • the induction melting furnace 1 is then evacuated via a vacuum pump connected to the flange 41 and not shown in the drawing. Now the melting material under the existing vacuum can be melted by means of the induction coil 2. After the melting material has completely melted, tapping takes place via the outlet opening 11 and the melting material is passed into the molding container 4. By means of the pressure ram 9, the entire melt material is pressed into the molding container without further notice. This ensures that the molding container is completely and evenly loaded.
  • argon is now fed into the annular space 5 via the connecting line 33 and thermal energy is removed from the melt by the rapid evaporation of the argon.
  • the pressure in the housing 7 is increased, since the annular space 5 is connected to the interior of the housing 7 via the opening 44.
  • the rapid rise in pressure to approx. 10 bar during the solidification process ensures good microstructure formation, since the normally occurring dendrites cannot form.
  • the gas pressure and the pressure ram 9 also ensure that even the finest ramifications of the form are filled with melt material.
  • the arrangement according to the invention is particularly suitable for very small batches, in particular for titanium in the gram range, that is to say for casting sizes such as are customary in dentures.
  • the embodiment shown in Figure 2 differs only slightly from the embodiment of Figure 1.
  • a coil 2 a is provided in the ring coil 2 according to FIG.
  • the melt falls into the mold container 4 provided below the crucible 3.
  • the pressure ram 9 can be preheated for post-compression and can be pressed into the mold immediately after the melt flow has been switched off.
  • the ceramic coating frozen in the stamp 9 is then separated from the casting with the lost shape.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Furnace Details (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Manufacture And Refinement Of Metals (AREA)
EP90123415A 1990-06-13 1990-12-06 Induktionsschmelzofen Expired - Lifetime EP0461306B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4018925A DE4018925A1 (de) 1990-06-13 1990-06-13 Induktionsschmelzofen
DE4018925 1990-06-13

Publications (2)

Publication Number Publication Date
EP0461306A1 EP0461306A1 (de) 1991-12-18
EP0461306B1 true EP0461306B1 (de) 1997-04-16

Family

ID=6408340

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90123415A Expired - Lifetime EP0461306B1 (de) 1990-06-13 1990-12-06 Induktionsschmelzofen

Country Status (6)

Country Link
US (1) US5121406A (ja)
EP (1) EP0461306B1 (ja)
JP (1) JP2935281B2 (ja)
KR (1) KR920001164A (ja)
AT (1) ATE151862T1 (ja)
DE (2) DE4018925A1 (ja)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5272718A (en) * 1990-04-09 1993-12-21 Leybold Aktiengesellschaft Method and apparatus for forming a stream of molten material
JP3047056B2 (ja) * 1992-06-02 2000-05-29 科学技術庁金属材料技術研究所長 浮上溶解装置とその運転方法
DE4228402C2 (de) * 1992-08-26 2000-08-03 Ald Vacuum Techn Ag Zur Atmosphäre hin abgeschlossene Induktionsschmelzvorrichtung
US5528620A (en) * 1993-10-06 1996-06-18 Fuji Electric Co., Ltd. Levitating and melting apparatus and method of operating the same
US6097750A (en) * 1997-12-31 2000-08-01 General Electric Company Electroslag refining hearth
DE19800853A1 (de) * 1998-01-13 1999-07-15 Ald Vacuum Techn Gmbh Geschlossener, evakuierbarer Tiegel zum induktiven Schmelzen oder Überhitzen von Metallen, Legierungen oder anderen elektrisch leitfähigen Werkstoffen
JPH11226976A (ja) * 1998-02-10 1999-08-24 Yamato Scient Co Ltd 加圧式成形装置
DE19904863C1 (de) * 1999-02-06 2000-04-20 Ald Vacuum Techn Ag Verfahren und Vorrichtung zum Ausdampfen von Komponenten aus Mehrstoffgemischen und Mehrstoffsystemen
US6144690A (en) * 1999-03-18 2000-11-07 Kabushiki Kaishi Kobe Seiko Sho Melting method using cold crucible induction melting apparatus
IT1318408B1 (it) * 2000-03-20 2003-08-25 Melt Italiana S A S Lega per la produzione di oro bianco, e relativo procedimento.
US6589607B1 (en) 2000-06-29 2003-07-08 Material Sciences Corporation Method of coating a continuously moving substrate with thermoset material and corresponding apparatus
JP5706633B2 (ja) * 2010-06-18 2015-04-22 日新技研株式会社 誘導炉
KR101763278B1 (ko) 2010-07-28 2017-07-31 볼보 컨스트럭션 이큅먼트 에이비 건설기계용 운전실 리어 유리 고정장치
CN102494534B (zh) * 2011-12-06 2015-03-11 四川鑫龙碲业科技开发有限责任公司 一种节能型真空蒸馏炉系统
CN102974802B (zh) * 2012-12-19 2013-09-25 攀枝花市立宇矿业有限公司 挤压式铸造装置及采用该装置生产铸件的方法
DE102014017925B4 (de) 2013-12-04 2017-02-09 Horst Diesing Vorrichtung und Verfahren zur Mikrochargierung und/oder Mikrolegierung von Metallschmelzen
CN105903931B (zh) * 2016-05-04 2018-03-06 上海大学 阵列式块体非晶合金的高通量制备装置及方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3108336A1 (de) * 1980-03-05 1982-01-07 Sansha Electric Manufacturing Co., Ltd., Osaka Giessverfahren und -vorrichtung

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1540515A (en) * 1922-08-08 1925-06-02 Paul A Cuenot Crucible-steel-melting furnace
US2021221A (en) * 1933-01-20 1935-11-19 Carborundum Co Method of and apparatus for producing fused refractory and abrasive materials
US2686864A (en) * 1951-01-17 1954-08-17 Westinghouse Electric Corp Magnetic levitation and heating of conductive materials
US2686865A (en) * 1951-10-20 1954-08-17 Westinghouse Electric Corp Stabilizing molten material during magnetic levitation and heating thereof
US3180633A (en) * 1962-07-18 1965-04-27 Pennsalt Chemicals Corp Apparatus for producing ultraclean alloy steels
US3413401A (en) * 1966-02-02 1968-11-26 Northwestern Steel & Wire Co Method and apparatus for melting metals by induction heating
FR1492063A (fr) * 1966-04-05 1967-08-18 Commissariat Energie Atomique Perfectionnement aux fours électriques haute fréquence pour la fabrication en continu de réfractaires électrofondus
US3484840A (en) * 1968-01-26 1969-12-16 Trw Inc Method and apparatus for melting and pouring titanium
DE3026721C2 (de) * 1980-07-15 1982-11-11 Leybold-Heraeus GmbH, 5000 Köln Geschlossener Induktionsschmelz- und Gießofen mit auswechselbarem Schmelztiegel
DE3026720C2 (de) * 1980-07-15 1982-09-23 Leybold-Heraeus GmbH, 5000 Köln Geschlossener Induktionsschmelz und -Gießofen mit einer Hubvorrichtung für eine Gießform
JPS57160864U (ja) * 1981-04-03 1982-10-08
US4403955A (en) * 1982-02-22 1983-09-13 General Signal Corporation Receptacle for support of a melt containing crucible
JPS596739A (ja) * 1982-07-02 1984-01-13 Hitachi Ltd 回転電機の回転子
CH668699A5 (de) * 1986-01-17 1989-01-31 Sonja Wohlwend Erne Verfahren zum herstellen von zahnersatzteilen.
FR2595716B1 (fr) * 1986-03-13 1992-07-10 Technogenia Sa Procede et dispositif pour l'elaboration de materiaux refractaires par induction
DE3819153A1 (de) * 1988-06-04 1989-12-07 Kernforschungsanlage Juelich Verfahren zum herstellen eines kalt-schmelz-tiegels
JPH0259168A (ja) * 1988-08-25 1990-02-28 Reiichi Okuda 精密鋳造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3108336A1 (de) * 1980-03-05 1982-01-07 Sansha Electric Manufacturing Co., Ltd., Osaka Giessverfahren und -vorrichtung

Also Published As

Publication number Publication date
JPH0510676A (ja) 1993-01-19
JP2935281B2 (ja) 1999-08-16
US5121406A (en) 1992-06-09
DE4018925C2 (ja) 1993-04-15
DE59010700D1 (de) 1997-05-22
KR920001164A (ko) 1992-01-30
EP0461306A1 (de) 1991-12-18
ATE151862T1 (de) 1997-05-15
DE4018925A1 (de) 1991-12-19

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