DK249189A - Kapacitivt positionsmaalende system - Google Patents

Kapacitivt positionsmaalende system Download PDF

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Publication number
DK249189A
DK249189A DK249189A DK249189A DK249189A DK 249189 A DK249189 A DK 249189A DK 249189 A DK249189 A DK 249189A DK 249189 A DK249189 A DK 249189A DK 249189 A DK249189 A DK 249189A
Authority
DK
Denmark
Prior art keywords
making system
capacitive position
capacitive
making
Prior art date
Application number
DK249189A
Other languages
Danish (da)
English (en)
Other versions
DK249189D0 (da
Inventor
Gabriel Lorimer Miller
Original Assignee
American Telephone & Telegraph
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Telephone & Telegraph filed Critical American Telephone & Telegraph
Publication of DK249189D0 publication Critical patent/DK249189D0/da
Publication of DK249189A publication Critical patent/DK249189A/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R13/00—Arrangements for displaying electric variables or waveforms
    • G01R13/02—Arrangements for displaying electric variables or waveforms for displaying measured electric variables in digital form
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451—Incremental encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DK249189A 1988-05-24 1989-05-23 Kapacitivt positionsmaalende system DK249189A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/197,800 US4893071A (en) 1988-05-24 1988-05-24 Capacitive incremental position measurement and motion control

Publications (2)

Publication Number Publication Date
DK249189D0 DK249189D0 (da) 1989-05-23
DK249189A true DK249189A (da) 1989-11-27

Family

ID=22730820

Family Applications (1)

Application Number Title Priority Date Filing Date
DK249189A DK249189A (da) 1988-05-24 1989-05-23 Kapacitivt positionsmaalende system

Country Status (11)

Country Link
US (1) US4893071A (fr)
EP (2) EP0586023B1 (fr)
JP (1) JPH083426B2 (fr)
KR (1) KR0151854B1 (fr)
AU (1) AU603952B2 (fr)
CA (1) CA1324195C (fr)
DE (2) DE68920204T2 (fr)
DK (1) DK249189A (fr)
ES (2) ES2065377T3 (fr)
HK (2) HK188695A (fr)
SG (1) SG26354G (fr)

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US5237307A (en) * 1991-11-27 1993-08-17 The United States Of America As Represented By The United States Department Of Energy Non-contact tamper sensing by electronic means
JP2509067B2 (ja) * 1992-03-13 1996-06-19 エイ・ティ・アンド・ティ・コーポレーション デバイス作製方法および導電膜の共鳴周波数測定装置
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US5463388A (en) * 1993-01-29 1995-10-31 At&T Ipm Corp. Computer mouse or keyboard input device utilizing capacitive sensors
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US5434504A (en) * 1993-10-01 1995-07-18 International Business Machines Corporation Position sensors for linear motors including plural symmetrical fluxes generated by a planar drive coil and received by planar sense coils being colinear along an axis of motion
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KR0151447B1 (ko) * 1994-09-16 1998-11-02 김광호 스피커 폰의 통화로 자동 형성 전화장치 및 그 제어방법
US5828142A (en) * 1994-10-03 1998-10-27 Mrs Technology, Inc. Platen for use with lithographic stages and method of making same
DE19511646C2 (de) * 1995-03-30 1999-01-07 Fife Gmbh Vorrichtung zum berührungslosen Erfassen der Lage eines laufenden Materialbandes
US5620573A (en) * 1995-04-28 1997-04-15 Lucent Technologies Inc. Reduced stress tungsten deposition
EP0743508A2 (fr) * 1995-05-16 1996-11-20 Mitutoyo Corporation Capteur de position employant un courant d'induction
JP3625530B2 (ja) * 1995-06-12 2005-03-02 ヒューレット・パッカード・カンパニー 位置検出装置及び位置検出方法
US5847690A (en) * 1995-10-24 1998-12-08 Lucent Technologies Inc. Integrated liquid crystal display and digitizer having a black matrix layer adapted for sensing screen touch location
US5973494A (en) * 1996-05-13 1999-10-26 Mitutoyo Corporation Electronic caliper using a self-contained, low power inductive position transducer
US6002250A (en) * 1996-05-13 1999-12-14 Mitutoyo Corporation Electronic linear scale using a self-contained, low-power inductive position transducer
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JP3620998B2 (ja) * 1999-06-08 2005-02-16 株式会社ニレコ 導電性物体の端部検出装置
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DE19954267A1 (de) * 1999-07-30 2001-08-02 Univ Ilmenau Tech Verfahren zur automatischen Einstellung der Schaltschwelle kapazitiver sowie induktiver Näherungssensoren
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DE50114040D1 (de) * 2000-09-18 2008-07-31 Heidenhain Gmbh Dr Johannes Vorrichtung und verfahren zur erfassung der rotationsbewegung eines um eine achse drehbar gelagerten elementes
KR20030033351A (ko) * 2001-10-22 2003-05-01 엘지이노텍 주식회사 비유전 물질 감지 장치
US7142500B2 (en) * 2002-01-11 2006-11-28 Hewlett-Packard Development Company, L.P. Sensor with varying capacitance based on relative position between objects
US7057163B2 (en) * 2002-06-25 2006-06-06 Chong-Hin Chee Optical position sensing device
US20040155534A1 (en) * 2003-02-07 2004-08-12 Engwall Mats Anders Structure integrating gas support bearing and a planar electromagnetic drive and levitation system
US7148074B1 (en) * 2003-09-22 2006-12-12 Sun Microsystems, Inc. Method and apparatus for using a capacitor array to measure alignment between system components
US7135827B1 (en) 2004-04-15 2006-11-14 Lampson Clark E Sawyer motor forcer with integrated drive electronics
US7458454B2 (en) * 2004-05-07 2008-12-02 Magnemotion, Inc. Three-dimensional motion using single-pathway based actuators
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US7583006B2 (en) * 2005-07-26 2009-09-01 Siimpel Corporation MEMS digital linear actuator
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JP5171395B2 (ja) * 2007-07-31 2013-03-27 京セラ株式会社 ステージの位置変動検出装置およびこれを備えた搬送装置
CN100487361C (zh) * 2007-09-06 2009-05-13 浙江大学 基于电容测量原理的平面电容传感器
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EP2078981A1 (fr) 2008-01-10 2009-07-15 Dialog Imaging Systems GmbH Système de positionnement de lentille
US7936144B2 (en) * 2008-03-06 2011-05-03 Allegro Microsystems, Inc. Self-calibration algorithms in a small motor driver IC with an integrated position sensor
JP5153457B2 (ja) * 2008-05-29 2013-02-27 京セラ株式会社 ステージの位置変動検出装置およびこれを備えた搬送装置
US8125385B2 (en) * 2008-08-13 2012-02-28 Los Alamos National Security, Llc Apparatus and method for phase fronts based on superluminal polarization current
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JP6457250B2 (ja) * 2014-11-19 2019-01-23 日本電産サンキョー株式会社 位置検出装置、駆動装置、および位置検出用スケール部材
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Also Published As

Publication number Publication date
HK179896A (en) 1996-10-04
AU3404289A (en) 1989-11-30
US4893071A (en) 1990-01-09
EP0344942B1 (fr) 1994-12-28
AU603952B2 (en) 1990-11-29
CA1324195C (fr) 1993-11-09
EP0586023B1 (fr) 1996-04-24
DK249189D0 (da) 1989-05-23
EP0344942A3 (fr) 1991-07-31
DE68926355D1 (de) 1996-05-30
ES2065377T3 (es) 1995-02-16
EP0586023A3 (fr) 1994-04-13
JPH083426B2 (ja) 1996-01-17
EP0344942A2 (fr) 1989-12-06
KR890017537A (ko) 1989-12-16
DE68920204T2 (de) 1995-05-11
KR0151854B1 (ko) 1998-12-15
DE68920204D1 (de) 1995-02-09
EP0586023A2 (fr) 1994-03-09
SG26354G (en) 1995-09-18
ES2086871T3 (es) 1996-07-01
DE68926355T2 (de) 1996-11-28
JPH0224512A (ja) 1990-01-26
HK188695A (en) 1995-12-22

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