DE68926355T2 - Kapazitives System zum Positionsgeben - Google Patents

Kapazitives System zum Positionsgeben

Info

Publication number
DE68926355T2
DE68926355T2 DE68926355T DE68926355T DE68926355T2 DE 68926355 T2 DE68926355 T2 DE 68926355T2 DE 68926355 T DE68926355 T DE 68926355T DE 68926355 T DE68926355 T DE 68926355T DE 68926355 T2 DE68926355 T2 DE 68926355T2
Authority
DE
Germany
Prior art keywords
positioning
capacitive system
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68926355T
Other languages
English (en)
Other versions
DE68926355D1 (de
Inventor
Gabriel Lorimer Miller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Application granted granted Critical
Publication of DE68926355D1 publication Critical patent/DE68926355D1/de
Publication of DE68926355T2 publication Critical patent/DE68926355T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R13/00—Arrangements for displaying electric variables or waveforms
    • G01R13/02—Arrangements for displaying electric variables or waveforms for displaying measured electric variables in digital form
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451—Incremental encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
DE68926355T 1988-05-24 1989-05-17 Kapazitives System zum Positionsgeben Expired - Fee Related DE68926355T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/197,800 US4893071A (en) 1988-05-24 1988-05-24 Capacitive incremental position measurement and motion control

Publications (2)

Publication Number Publication Date
DE68926355D1 DE68926355D1 (de) 1996-05-30
DE68926355T2 true DE68926355T2 (de) 1996-11-28

Family

ID=22730820

Family Applications (2)

Application Number Title Priority Date Filing Date
DE68926355T Expired - Fee Related DE68926355T2 (de) 1988-05-24 1989-05-17 Kapazitives System zum Positionsgeben
DE68920204T Expired - Fee Related DE68920204T2 (de) 1988-05-24 1989-05-17 Kapazitive Inkrementalwegmessung und Kontrolle.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE68920204T Expired - Fee Related DE68920204T2 (de) 1988-05-24 1989-05-17 Kapazitive Inkrementalwegmessung und Kontrolle.

Country Status (11)

Country Link
US (1) US4893071A (de)
EP (2) EP0586023B1 (de)
JP (1) JPH083426B2 (de)
KR (1) KR0151854B1 (de)
AU (1) AU603952B2 (de)
CA (1) CA1324195C (de)
DE (2) DE68926355T2 (de)
DK (1) DK249189A (de)
ES (2) ES2086871T3 (de)
HK (2) HK188695A (de)
SG (1) SG26354G (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017178243A1 (de) * 2016-04-12 2017-10-19 Robert Bosch Gmbh Werkstückträgersystem

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US5237307A (en) * 1991-11-27 1993-08-17 The United States Of America As Represented By The United States Department Of Energy Non-contact tamper sensing by electronic means
JP2509067B2 (ja) * 1992-03-13 1996-06-19 エイ・ティ・アンド・ティ・コーポレーション デバイス作製方法および導電膜の共鳴周波数測定装置
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JP5171395B2 (ja) * 2007-07-31 2013-03-27 京セラ株式会社 ステージの位置変動検出装置およびこれを備えた搬送装置
CN100487361C (zh) * 2007-09-06 2009-05-13 浙江大学 基于电容测量原理的平面电容传感器
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CN102853753B (zh) * 2012-09-05 2014-10-08 和瑞电子(中山)有限公司 一种测试smt贴片元件电极共平面的装置及测试方法
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CN104919282B (zh) * 2012-12-27 2017-11-17 广东盈动高科自动化有限公司 线性电容式编码器和位置确定方法
JP6633516B2 (ja) 2013-09-21 2020-01-22 マグネモーション インコーポレイテッド パッケージングおよび他の用途のためのリニアモータ輸送
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017178243A1 (de) * 2016-04-12 2017-10-19 Robert Bosch Gmbh Werkstückträgersystem

Also Published As

Publication number Publication date
US4893071A (en) 1990-01-09
EP0586023B1 (de) 1996-04-24
DE68920204T2 (de) 1995-05-11
AU603952B2 (en) 1990-11-29
DK249189A (da) 1989-11-27
DK249189D0 (da) 1989-05-23
CA1324195C (en) 1993-11-09
HK179896A (en) 1996-10-04
EP0586023A2 (de) 1994-03-09
JPH083426B2 (ja) 1996-01-17
KR0151854B1 (ko) 1998-12-15
ES2086871T3 (es) 1996-07-01
DE68920204D1 (de) 1995-02-09
DE68926355D1 (de) 1996-05-30
EP0344942B1 (de) 1994-12-28
EP0344942A2 (de) 1989-12-06
ES2065377T3 (es) 1995-02-16
AU3404289A (en) 1989-11-30
EP0344942A3 (de) 1991-07-31
JPH0224512A (ja) 1990-01-26
KR890017537A (ko) 1989-12-16
HK188695A (en) 1995-12-22
EP0586023A3 (de) 1994-04-13
SG26354G (en) 1995-09-18

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