WO2014101031A1 - Codeur capacitif linéaire et procédé de détermination de position - Google Patents

Codeur capacitif linéaire et procédé de détermination de position Download PDF

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Publication number
WO2014101031A1
WO2014101031A1 PCT/CN2012/087622 CN2012087622W WO2014101031A1 WO 2014101031 A1 WO2014101031 A1 WO 2014101031A1 CN 2012087622 W CN2012087622 W CN 2012087622W WO 2014101031 A1 WO2014101031 A1 WO 2014101031A1
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WO
WIPO (PCT)
Prior art keywords
incremental
absolute
movable plate
signal
reflector
Prior art date
Application number
PCT/CN2012/087622
Other languages
English (en)
Inventor
Yanling LIN
Yirong Yang
Zhaohui Du
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Priority to CN201280078066.1A priority Critical patent/CN104919282B/zh
Priority to PCT/CN2012/087622 priority patent/WO2014101031A1/fr
Publication of WO2014101031A1 publication Critical patent/WO2014101031A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/2403—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by moving plates, not forming part of the capacitor itself, e.g. shields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains

Definitions

  • Embodiments of the invention are directed to linear encoders and the corresponding position determing method, in particular, capacitive linear encoders which can provide absolute position measurement and relatively high measurement resolution.
  • linear encoders which measure motion displacement
  • encoders use one of two types of measurement schemes: absolute and incremental.
  • absolute encoders can provide absolute position measurement immediately, without prior use of a homing routine. Absolute encoders, however, are typically higher in cost, and larger in size, than incremental encoders.
  • incremental encoders calculate absolute position through the measurement of relative displacement, and require a reference point to do so.
  • an initial homing routine is used to provide the required reference point. In many applications, however, the use of a homing routine is not practical.
  • Encoders also can employ different types of sensing mechanisms, two types being optical encoders and magnetic encoders.
  • Optical-type encoders are widely used for speed and position feedback.
  • Optical encoders typically do not perform robustly in electrical motors. Under hard environmental influences, such as mechanical shock and/or vibrations, or high temperatures, damage of the optical component inside the encoder is likely.
  • magnetic encoders do have mechanical robustness. Magnetic encoders, however, typically do not provide sufficient speed for control behaviour in a servo driver.
  • Some encoders employ yet another known sensing mechanism that makes use of capacitive detection. While, in general, most encoders of the capacitive detection type make use of incremental- only measurement, some capacitive detection type encoders do make use of absolute measurement.
  • Conventional encoders typically include a static, or stationary part and a movable part, which moves relative to the static part. Regardless of their working principles, these conventional encoders typically include cabling to both the static and movable parts. Such cabling can be a large problem in certain applications. For example, force sensitive systems may suffer from the mechanical disturbance caused by the cabling, or high-speed systems can have a problem regarding the breakings of wires. In addition, such cabling to the sliding parts can make the system structure complicated.
  • U.S. Patent No. 7,199,727 the contents of which are also incorporated by reference herein, describes a capacitive encoder that includes a wireless sensor slider.
  • the sensor includes a long receiver film and a transmitter film, respectively containing four-phase and two-phase electrodes.
  • the transmitter is used as a slider and the receiver is used as a stator. Electric power is supplied to the transmitting electrodes by electrostatic induction, thus removing the need for electric wires from the slider.
  • the above-described encoders all include certain shortcomings.
  • Embodiments of the present invention are directed to these and other needs.
  • Embodiments of the invention are directed to a linear capacitive encoder comprising a movable plate, the movable plate including at least one incremental reflector and at least one absolute reflector, and a static plate disposed adjacent the movable plate.
  • the static plate can include a plurality of transmitter electrodes disposed on a first layer in a single linear transmitter line extending in a movement direction of the movable plate, a plurality of excitation wires disposed on a second layer, wherein each transmitter electrode is electrically connected to one excitation wire, at least one incremental pickup electrode configured to receive a signal generated from the transmitter electrodes and reflected by the at least one incremental reflector, and at least one absolute pickup electrode configured to receive a signal generated from the transmitter electrodes and reflected by the at least one absolute reflector.
  • Embodiments of the invention can include a signal generator configured to generate an incremental signal to the excitation wires, and an absolute signal to the excitation wires, an incremental processing module, electrically connected to the incremental pickup electrodes and configured to output a signal which varies in amplitude relative to an incremental position of the movable plate to the static plate, an absolute processing module, electrically connected to the absolute pickup electrodes and configured to output a signal which indicates a string of binary code relative to an absolute position of the movable plate to the static plate, and a controller, electrically connected to the incremental processing module and the absolute processing module, and configured to determine a position of the movable plate relative to the static plate.
  • the controller is electrically connected to the signal generator, and configured, when in an incremental mode, to cause the signal generator to generate the incremental signal, and, when in an absolute mode, to cause the signal generator to generate the absolute signal.
  • the controller can be configured to determine an incremental position of the movable plate, relative to the static plate, based on a signal received from the incremental processing module, and the controller can also be configured to determine an absolute position of the movable plate, relative to the static plate, based on a signal received from the absolute position module and the determined incremental position.
  • Embodiments of the invention are also directed to a method of determining the position of a movable plate of a linear capacitive encoder relative to a static plate of the linear capacitive encoder, the movable plate including at least one incremental reflector and at least one absolute reflector, the static plate including a plurality of transmitter electrodes disposed on a first layer in a single linear transmitter line extending in a movement direction of the movable plate, a plurality of excitation wires disposed on a second layer, wherein each transmitter electrode is electrically connected to one excitation wire, at least one incremental pickup electrode configured to receive a signal generated from the transmitter electrodes and reflected by the at least one incremental reflector, and at least one absolute pickup electrode configured to receive a signal generated from the transmitter electrodes and reflected by the at least one absolute reflector.
  • the method can include generating, by a signal generator, an incremental signal to the excitation wires, and an absolute signal to the excitation wires, determining, by a controller, when in an incremental mode, an incremental position of the movable plate relative to the static plate, based on a signal received from an incremental processing module, the incremental processing module being electrically connected to the at least one incremental pickup electrode and configured to output a signal which varies in amplitude relative to the incremental position of the movable plate relative to the static plate, and determining, by the controller, when in an absolute mode, an absolute position of the movable plate relative to the static plate, based on a signal received from an absolute position module and the determined incremental position, the absolute position module being electrically connected to the at least one absolute pickup electrode and configured to output a signal which indicates a string of binary code relative to the absolute position of the movable plate relative to the static plate.
  • a capacitive linear encoder that enables incremental displacement measurement with a differential configuration and determines absolute position by digitally encoding pitch bars disposed in a single linear transmitter line.
  • FIG. 1 is a schematic view of an encoder, showing relative positions of a static plate and a movable plate, in accordance with embodiments of the invention
  • FIG. 2 is a schematic view of the static plate of FIG. 1, in accordance with embodiments of the invention.
  • FIG. 3 is a schematic view of a the movable plate of FIG. 1 , in accordance with embodiments of the invention.
  • FIG. 4 is a schematic view of control circuit for an encoder, in accordance with certain embodiments.
  • Embodiments of the invention provide a capacitive linear encoder that enables incremental displacement measurement with a differential configuration and determines absolute position by digitally encoding pitch bars disposed in a single linear transmitter line.
  • a voltage signal is supplied to the pitch bars on a static plate of the encoder, and generates potential distribution in a reflector on a movable plate by electrostatic induction. Movement of the movable plate results in capacitive variations, which can be measured by a receiver electrode on the static plate to detect the displacement of the moving plate to the static plate.
  • the encoder further includes, among other features, a signal generator, a controller, an incremental processing module and an absolute processing module.
  • FIG. 1 there is shown a schematic diagram of a capacitive linear encoder 1, in accordance with certain embodiments.
  • the encoder 1 includes a static plate 10 positioned adjacent a movable plate 20. Movable plate 20 overlays static plate 10 as shown. Static plate 10 and movable plate 20 are described in further detail below.
  • the absolute position of the encoder 1 is determined by the incremental angle and the absolute position of the movable plate 20, as described in further detail below.
  • FIG. 2 there is shown a portion of a static plate 10 (also referred to herein as a "scale") of certain embodiments of the encoder 1.
  • a plurality of transmitter electrodes (also referred to herein as “pitch bars”) 11 are disposed on a first layer of the static plate 10, adjacent each other, forming a line (also referred to herein as a "transmitter track") extending in a moving direction of the movable plate 20.
  • Sixteen excitation wires 12 are printed on a second layer of the static plate 10, and divided into two series: a ONE series and a ZERO series. In alternate embodiments, other numbers of excitation wires 12 can be used.
  • Each of the pitch bars 11 connects to an excitation wire 12 through a via, or connector 15.
  • the encoder 1 can operate in both an incremental mode and an absolute mode.
  • the pitch bars 11 are exited differently in each of the modes.
  • Every four consecutive pitch bars 11 constitutes a spatial period R
  • every four consecutive identical pitch bars are excited by four-phase AC voltage sources in mutual quadrature (e.g., 0°-phase, 90°-phase, 180°-phase and 270°-phase) produced by a signal generator 31 (see FIG. 4).
  • the pitch bars 11 connected to the same phase excitation signal are referred to herein as "in-phase bars”.
  • An in-phase bar repeats every spatial period R
  • the excitation wires 12 are separated into two series. Eight excitation wires 12 at the upper side of the scale are ZERO series wires (A0-H0) designated as ZERO, and another eight at the downward side of the scale are designated as ONE series wires (Al-Hl) indicated as ONE. Every eight consecutive identical pitch bars 11 (e.g., pitch bars 11 A to 11H) represent a digital code of eight binary bits. The individual bars representing the eight binary bits connect to their corresponding excitation wires 12 either in the ZERO series wires (A0-H0) or in the ONE series wires (Al-Hl). When a bar 11 is connected to the ONE series wire or to the ZERO series wire, the binary bit to be expressed by each pitch bar 11 is determined by an electric connection, as described in further detail below.
  • each pitch bar 11 has two optional excitation wires 12 to connect with: either ZERO series wires or ONE series wires.
  • Each pitch bar 11, representing ONE or ZERO in the binary system, is embodied with a special electric connection to dictate which binary number the bar will stand for.
  • a pitch bar 11 connecting to the upper side wire 12 has the meaning of ZERO while the pitch bar 11 connecting to the down wire 12 has the meaning of ONE.
  • Static plate 10 includes four transverse receiver electrodes (also referred to herein as "pickup electrodes") 13a, 13b, 14a, 14b arranged in a parallel formation.
  • Incremental pickup electrodes 13a, 13b are conductive electrodes disposed on opposite sides of the pitch bars 11.
  • the incremental pickup electrodes 13a, 13b each have the same surface area, to obtain the same amplitude of electronic signal with 180° phase difference.
  • Absolute pickup electrodes 14a, 14b are also conductive electrodes disposed on opposite sides of the pitch bars 11, and adjacent and outside of incremental pickup electrodes 13a, 13b, respectively. While a portion of static plate 10 is shown, in some embodiments, static plate 10 can extend outwardly depending on the length to be measured with a particular application.
  • Movable plate 20 of certain embodiments of the encoder 1. Movable plate 20 is used as a reflector, as described in further detail below.
  • Movable plate 20 includes incremental reflectors 23, 24, which have conductive surfaces separated by a sine wave-shaped gap 25.
  • Incremental reflectors 23, 24 are self-compensatory conductive surfaces, with each surface being electrically isolated from each other.
  • Incremental reflectors 23, 24 reflect a pair of differential signals to the receivers 13a, 13b on the static plate 10, and are used for incremental displacement detecting.
  • the length of the incremental reflectors 23, 24 can be multiples to the spatial period R In the shown embodiment, the length of the incremental reflectors 23, 24 is equal to R Increasing the length of the incremental reflectors 23, 24 can produce a larger signal amplitude and improved signal quality.
  • Movable plate 20 also includes absolute reflectors 21, 22, which have rectangular conductive areas that are isolated from each other. Absolute reflectors 21, 21 each are uniformly shaped in the movement direction of the movable plate 20 for absolute code reflecting. Absolute reflector 21 covers the absolute pickup electrode 14a on the static plate. The other absolute reflector 22 covers the absolute pickup electrode 14b. The length of the absolute reflectors 21, 22 can occupy one or more spatial periods P of the transmitter electrodes. In the shown embodiment of the present invention, the absolute reflectors 21, 22 each occupy two spatial periods P (see FIG. 1 for a relevant overlapping view), and start from the position at the same in-phase bars. As described in further detail below, the signal generator 31 produces a group of pulse signals, and the corresponding absolute pickup electrodes 14a, 14b on the static plate 10 receive a relevant digital code, related to a unique physical position.
  • the digital codes are coded on the transmitter track of pitch bars 11.
  • the bit number, n denotes the number of pitch bars that are used for absolute position encoding.
  • the needed bit number, n can be calculated according to the required resolution and the length that the encoder needs to measure.
  • Increasing the length of the absolute reflectors 21, 22 or using a plurality of absolute reflectors can get a longer scale length, while at the same time, requires a more complex encoding scheme for the absolute codes.
  • control circuit in accordance with certain embodiments.
  • the incremental mode is first initiated.
  • the pair of complementary incremental reflectors 23, 24, disposed on movable plate 20, are used for incremental angle detection.
  • Each of the incremental reflectors 23, 24 reflects a coupling capacitance back to a corresponding incremental pickup electrode 13 a, 13b.
  • AGC automatic gain control module
  • the signals are gain controlled. The output signal is directed to two identical channels to provide respective sine and cosine output.
  • Each channel includes a synchronous detector 34a, 34b and a low pass filter 35a, 35b.
  • the synchronous detector (demodulator) 34 is fed by an in-phase reference signal (i.e., 0°-phase) from signal generator 31, and its output is filtered by a low-pass filter 35a to provide the sine signal.
  • the synchronous detector 34b is fed by a quadrature reference signal (i.e. 90°-phase) from the signal generator 31, and its output is filtered by a low-pass filter 35b to provide the cosine signal.
  • Differential amplifier 32, AGC module 33, synchronous detectors 34a, 34b and low-pass filters 35a, 35b comprise incremental processing module 40.
  • absolute positions of the movable plate 20 are encoded with a unique multi-bit binary code and embodied with different electrical connection configurations to the pitch bars 11.
  • the scenario where a pitch bar 11 connects to the ONE series excitation wire 12 represents ONE in the binary system
  • the scenario where a pitch bar 11 connects to a ZERO series wire 12 represents ZERO in the binary system, and vice versa. Therefore, a sequence of pitch bars 11 which each connect to either ONE series or ZERO series wires 12 has a unique meaning, and it can be read based on an excitation-and-detection approach. In such an approach, each pitch bar 11 is excited one after another with a pulsed voltage according to an established sequence.
  • An absolute pickup electrode 14a, 14b detects the interrogation results in which every response is aligned to a corresponding pitch bar 11 by synchronizing a time stamp.
  • a time stamp can be generated by controller 39.
  • the conductive areas of absolute reflectors 21, 22 on the moving plate 20 each overlap at least seven pitch bars 11 at any displacement, so each of the absolute receiver electrodes 14a, 14b can read seven effective bits at once.
  • the signal generator 31 produces a group of pulse signals and applies them to the sixteen excitation wires 12 in sequence, which are one-by-one controlled by controller 39.
  • the corresponding receiver electrodes 14a, 14b on the static plate 10 will couple electrical signals.
  • the multiplexer 36 the receiver signals are amplified by charge amplifiers 37, respectively.
  • the conditioning circuits 38 the pulse signals are rectified and filtered.
  • the output of the conditioning circuits 38 thus indicates a string of binary code.
  • Multiplexor 36, charge amplifiers 37 and conditioning circuits 38 comprise absolute processing module 50.
  • the connection of a specific pitch bar 11 can be determined.
  • the bit expressed by the pitch bar 11 is read.
  • effective bits are selected from the raw bits, and the sequence of the bits is realigned to form a unique absolute code, which translates to an absolute position.
  • the controller 39 determines which pitch bars 11 do not overlap completely with the absolute reflectors 21, 22.
  • the absolute position codes are achieved after the bits for the indeterminacy bars ignored and the sequence of the bits is adjusted, as described above.
  • Embodiments of the invention provide several benefits over conventional devices. For example, by using the above described electrostatic induction technique, only the static plate 10 need be electrically wired. In contrast, the movable plate 20 functions in an electrically passive manner, and does not require any tethered electrical cables. This use of an un-tethered movable plate 20 can facilitate use in sensitive applications where mechanical disturbance caused by an electric wire can be a problem.
  • the incremental reflectors can have self-compensatory conductive surfaces separated by a triangular wave-shaped gap.
  • the movable plate can include only one incremental reflector without having a differential configuration.
  • the incremental reflector in such embodiment is variably shaped (e.g. sine wave-shaped, cosine wave-shaped and triangular wave-shaped, etc.) in the movement direction of the movable plate. Only one incremental pickup electrode is thus necessary, and the structure of the static plate can be simplified.
  • the movable plate can have only one absolute reflector which occupied two spatial periods P. Accordingly, the static plate can have only one absolute pickup electrode.
  • the bit number n 7
  • the movable plate can have two absolute reflectors each occupying one spatial period P.
  • eight excitation wires, with each four excitation wires as ONE series or ZERO series, are included in the static plate.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

Selon certains modes de réalisation, la présente invention concerne un codeur linéaire capacitif qui permet une mesure de déplacement incrémentielle en configuration différentielle et détermine la position absolue d'une plaque mobile en codant numériquement des barres de pas disposées selon une unique ligne de transmetteurs linéaires sur une plaque statique du codeur. Le codeur comprend en outre un générateur de signal, un dispositif de commande, un module de traitement incrémentiel et un module de traitement absolu. Le codeur donne à la fois accès à des modes de mesure incrémentiels et absolus et associe robustesse et résolution de mesure élevée.
PCT/CN2012/087622 2012-12-27 2012-12-27 Codeur capacitif linéaire et procédé de détermination de position WO2014101031A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201280078066.1A CN104919282B (zh) 2012-12-27 2012-12-27 线性电容式编码器和位置确定方法
PCT/CN2012/087622 WO2014101031A1 (fr) 2012-12-27 2012-12-27 Codeur capacitif linéaire et procédé de détermination de position

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2012/087622 WO2014101031A1 (fr) 2012-12-27 2012-12-27 Codeur capacitif linéaire et procédé de détermination de position

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Publication Number Publication Date
WO2014101031A1 true WO2014101031A1 (fr) 2014-07-03

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107806890A (zh) * 2016-09-09 2018-03-16 西门子公司 柱型电容编码器及应用其的电机
CN109724519B (zh) * 2019-01-21 2021-01-22 重庆理工大学 一种基于十进制移位编码的绝对式直线位移传感器
CN111693075B (zh) * 2020-07-09 2022-05-06 赛卓微电子(深圳)有限公司 一种增量式编码器ic中绝对位置输出的方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4429307A (en) * 1982-01-29 1984-01-31 Dataproducts Corporation Capacitive transducer with continuous sinusoidal output
US4906992A (en) * 1988-02-22 1990-03-06 Dynamics Research Corporation Single track absolute encoder
WO2011018497A1 (fr) * 2009-08-13 2011-02-17 Siemens Aktiengesellschaft Dispositif et procédé de mesure d’un déplacement linéaire capacitif
EP2527796A2 (fr) * 2011-05-27 2012-11-28 Siemens Aktiengesellschaft Codeur rotatif capacitif et procédé de détection d'un angle de rotation

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4893071A (en) * 1988-05-24 1990-01-09 American Telephone And Telegraph Company, At&T Bell Laboratories Capacitive incremental position measurement and motion control
US6492911B1 (en) * 1999-04-19 2002-12-10 Netzer Motion Sensors Ltd. Capacitive displacement encoder
US7119718B2 (en) * 2004-06-23 2006-10-10 Fe Technical Services, Inc. Encoding techniques for a capacitance-based sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4429307A (en) * 1982-01-29 1984-01-31 Dataproducts Corporation Capacitive transducer with continuous sinusoidal output
US4906992A (en) * 1988-02-22 1990-03-06 Dynamics Research Corporation Single track absolute encoder
WO2011018497A1 (fr) * 2009-08-13 2011-02-17 Siemens Aktiengesellschaft Dispositif et procédé de mesure d’un déplacement linéaire capacitif
EP2527796A2 (fr) * 2011-05-27 2012-11-28 Siemens Aktiengesellschaft Codeur rotatif capacitif et procédé de détection d'un angle de rotation

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CN104919282A (zh) 2015-09-16
CN104919282B (zh) 2017-11-17

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