DK1264205T3 - Mikroskop egnet til screening ved höj kapacitet og med en autofokusanordning - Google Patents
Mikroskop egnet til screening ved höj kapacitet og med en autofokusanordningInfo
- Publication number
- DK1264205T3 DK1264205T3 DK01911762T DK01911762T DK1264205T3 DK 1264205 T3 DK1264205 T3 DK 1264205T3 DK 01911762 T DK01911762 T DK 01911762T DK 01911762 T DK01911762 T DK 01911762T DK 1264205 T3 DK1264205 T3 DK 1264205T3
- Authority
- DK
- Denmark
- Prior art keywords
- autofocusing
- image
- plane
- microscope
- focus
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/244—Devices for focusing using image analysis techniques
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Computer Vision & Pattern Recognition (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automatic Focus Adjustment (AREA)
- Microscoopes, Condenser (AREA)
- Eye Examination Apparatus (AREA)
- Developing Agents For Electrophotography (AREA)
- Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
- Inorganic Insulating Materials (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/521,618 US6974938B1 (en) | 2000-03-08 | 2000-03-08 | Microscope having a stable autofocusing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
DK1264205T3 true DK1264205T3 (da) | 2006-05-08 |
Family
ID=24077439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK01911762T DK1264205T3 (da) | 2000-03-08 | 2001-03-08 | Mikroskop egnet til screening ved höj kapacitet og med en autofokusanordning |
Country Status (14)
Country | Link |
---|---|
US (2) | US6974938B1 (de) |
EP (1) | EP1264205B1 (de) |
JP (1) | JP2003526814A (de) |
AT (1) | ATE314672T1 (de) |
AU (1) | AU779909B2 (de) |
CA (1) | CA2400841A1 (de) |
DE (1) | DE60116268T2 (de) |
DK (1) | DK1264205T3 (de) |
ES (1) | ES2256207T3 (de) |
NO (1) | NO20024302L (de) |
NZ (1) | NZ520525A (de) |
PT (1) | PT1264205E (de) |
TW (1) | TW594045B (de) |
WO (1) | WO2001067154A2 (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6974938B1 (en) | 2000-03-08 | 2005-12-13 | Tibotec Bvba | Microscope having a stable autofocusing apparatus |
DE10106698A1 (de) * | 2001-02-14 | 2002-08-29 | Leica Microsystems | Verfahren und Vorrichtung zum automatischen Fokussieren eines optischen Gerätes |
GB0200844D0 (en) * | 2002-01-15 | 2002-03-06 | Solexa Ltd | Linear response auto focussing device and method |
WO2004081549A1 (en) * | 2003-03-11 | 2004-09-23 | Koninklijke Philips Electronics N.V. | Spectroscopic analysis apparatus and method with excitation system and focus monitoring system |
US7196300B2 (en) * | 2003-07-18 | 2007-03-27 | Rudolph Technologies, Inc. | Dynamic focusing method and apparatus |
JP4914715B2 (ja) * | 2004-06-21 | 2012-04-11 | オリンパス株式会社 | 倒立顕微鏡システム |
US20060012793A1 (en) * | 2004-07-19 | 2006-01-19 | Helicos Biosciences Corporation | Apparatus and methods for analyzing samples |
US7276720B2 (en) * | 2004-07-19 | 2007-10-02 | Helicos Biosciences Corporation | Apparatus and methods for analyzing samples |
CA2588122A1 (en) * | 2004-11-16 | 2006-05-26 | Helicos Biosciences Corporation | Tirf single molecule analysis and method of sequencing nucleic acids |
JP2006145810A (ja) * | 2004-11-19 | 2006-06-08 | Canon Inc | 自動焦点装置、レーザ加工装置およびレーザ割断装置 |
JP4790420B2 (ja) * | 2006-01-12 | 2011-10-12 | オリンパス株式会社 | 自動焦点機構を備えた顕微鏡およびその調整方法 |
US7700903B2 (en) * | 2006-06-09 | 2010-04-20 | Wdi Wise Device Inc. | Method and apparatus for the auto-focussing infinity corrected microscopes |
US20080179301A1 (en) * | 2006-08-25 | 2008-07-31 | Guy Garty | Systems and methods for etching materials |
US9255348B2 (en) | 2006-08-25 | 2016-02-09 | The Trustees Of Columbia University In The City Of New York | Systems and methods for biodosimetry with biochip using gene expression signatures |
JP5172204B2 (ja) * | 2007-05-16 | 2013-03-27 | 大塚電子株式会社 | 光学特性測定装置およびフォーカス調整方法 |
US8331627B2 (en) * | 2007-09-26 | 2012-12-11 | Agency For Science, Technology And Research | Method and system for generating an entirely well-focused image of a large three-dimensional scene |
DE102008018864B4 (de) | 2008-04-15 | 2022-01-05 | Carl Zeiss Microscopy Gmbh | Mikroskop mit Haltefokus-Steuerung |
JP5696396B2 (ja) | 2010-08-16 | 2015-04-08 | ソニー株式会社 | 顕微鏡及びゴースト除去方法 |
TWI452336B (zh) * | 2010-11-15 | 2014-09-11 | Univ China Medical | 顯微掃瞄系統及其方法 |
DE102011003807A1 (de) | 2011-02-08 | 2012-08-09 | Leica Microsystems Cms Gmbh | Mikroskop mit Autofokuseinrichtung und Verfahren zur Autofokussierung bei Mikroskopen |
JP4919307B1 (ja) * | 2011-05-13 | 2012-04-18 | レーザーテック株式会社 | 基板検査装置及びマスク検査装置 |
DE102011055294B4 (de) * | 2011-11-11 | 2013-11-07 | Leica Microsystems Cms Gmbh | Mikroskopische Einrichtung und Verfahren zur dreidimensionalen Lokalisierung von punktförmigen Objekten in einer Probe |
US9857361B2 (en) | 2013-03-15 | 2018-01-02 | Iris International, Inc. | Flowcell, sheath fluid, and autofocus systems and methods for particle analysis in urine samples |
JP6523245B2 (ja) | 2013-03-15 | 2019-05-29 | アイリス インターナショナル, インコーポレイテッド | 血液試料における粒子分析のためのシース液システム及び方法 |
US10429292B2 (en) | 2013-03-15 | 2019-10-01 | Iris International, Inc. | Dynamic range extension systems and methods for particle analysis in blood samples |
DE102013219544A1 (de) * | 2013-09-27 | 2015-04-02 | Siemens Aktiengesellschaft | Durchflusseinrichtung für ein Spektrometersystem und Verfahren zum Betreiben einer solchen |
GB201318919D0 (en) * | 2013-10-25 | 2013-12-11 | Isis Innovation | Compact microscope |
US9804029B2 (en) | 2014-03-05 | 2017-10-31 | Hitachi High-Technologies Corporation | Microspectroscopy device |
TWI571341B (zh) * | 2014-12-04 | 2017-02-21 | Metal Ind Res And Dev Centre | An auto focus system and method that can focus on beam sensitivity |
CN107430265A (zh) * | 2015-01-30 | 2017-12-01 | 分子装置有限公司 | 高内涵成像系统以及操作高内涵成像系统的方法 |
GB201507021D0 (en) | 2015-04-24 | 2015-06-10 | Isis Innovation | Compact microscope |
NL2018857B1 (en) * | 2017-05-05 | 2018-11-09 | Illumina Inc | Systems and methods for improved focus tracking using a light source configuration |
NL2018853B1 (en) | 2017-05-05 | 2018-11-14 | Illumina Inc | Systems and methods for improved focus tracking using a hybrid mode light source |
NL2018854B1 (en) | 2017-05-05 | 2018-11-14 | Illumina Inc | Systems and methodes for improved focus tracking using blocking structures |
EP3441812B1 (de) | 2017-08-11 | 2020-07-01 | Tecan Trading Ag | Muster-basiertes autofokus-verfahren für ein mikroskop |
EP3474060A1 (de) * | 2017-10-23 | 2019-04-24 | Max-Delbrück-Centrum für Molekulare Medizin in der Helmholtz-Gemeinschaft | Autofokussteuerung eines mikroskops mit einer elektrisch abstimmbaren linse |
CN112136071B (zh) * | 2018-02-26 | 2023-08-11 | 凯利博成像和诊断公司 | 用于对体外组织进行宏观和微观成像的系统和方法 |
EP3614192A1 (de) * | 2018-08-20 | 2020-02-26 | Till GmbH | Mikroskopvorrichtung |
DE102019113975B4 (de) * | 2019-05-24 | 2023-10-19 | Abberior Instruments Gmbh | Verfahren und Vorrichtung zum Überwachen des Fokuszustands eines Mikroskops sowie Mikroskop |
CA3158318A1 (en) * | 2019-10-19 | 2021-04-20 | SequLITE Genomics US, Inc. | Virtual fiducials |
EP3816611B1 (de) * | 2019-10-29 | 2023-01-25 | Leica Microsystems CMS GmbH | Mikroskop und verfahren zur bestimmung einer aberration in einem mikroskop |
US12106505B2 (en) * | 2020-09-02 | 2024-10-01 | International Business Machines Corporation | Reflection-based distance perception |
CN114280769B (zh) * | 2020-12-28 | 2024-07-26 | 深圳同舟光电科技有限公司 | 一种高灵敏度光学成像系统、方法和装置 |
CN115150519B (zh) * | 2022-09-05 | 2022-12-23 | 武汉精立电子技术有限公司 | 一种基于线扫描的自动聚焦系统、方法及应用 |
Family Cites Families (64)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE354721B (de) | 1970-12-30 | 1973-03-19 | Johansson C Ab | |
DE2102922C3 (de) | 1971-01-22 | 1978-08-24 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Anordnung zum selbsttätigen Fokussieren auf in optischen Geräten zu betrachtende Objekte |
GB1401179A (en) | 1971-09-22 | 1975-07-16 | Image Analysing Computers Ltd | Automated image analysis employing automatic fucussing |
DE2423136C3 (de) | 1974-05-13 | 1982-07-29 | Fa. Carl Zeiss, 7920 Heidenheim | Vorrichtung zur automatischen Fokussierung von Stereomikroskopen |
DE2615841C3 (de) | 1976-04-10 | 1978-10-19 | Fa. Carl Zeiss, 7920 Heidenheim | Verfahren zum automatischen Nachführen der Scharfeinstellung eines mit einer Fernsehkamera ausgerüsteten Mikroskops |
DE2644341C2 (de) | 1976-10-01 | 1984-08-02 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Verfahren und Anordnungen zur automatischen Verwirklichung des Köhler'schen Beleuchtungsprinzipes |
AT351797B (de) | 1976-12-22 | 1979-08-10 | Philips Nv | Verfahren zum herstellen einer rotierend antreibbaren magnetkopfanordnung und nach einem solchen verfahren hergestellte magnetkopf- anordnung |
JPS5576310A (en) | 1978-12-05 | 1980-06-09 | Nippon Kogaku Kk <Nikon> | Automatic focusing device |
US4387975A (en) * | 1979-10-31 | 1983-06-14 | Ricoh Company, Ltd. | Automatic focusing position detection apparatus |
GB2076176B (en) | 1980-05-19 | 1983-11-23 | Vickers Ltd | Focusing optical apparatus |
JPS57192909A (en) | 1981-05-25 | 1982-11-27 | Hitachi Ltd | Automatic focusing device for optical system expanding obserbation apparatus |
JPS5764712A (en) | 1980-10-09 | 1982-04-20 | Hitachi Ltd | Detector for focusing position |
US4433235A (en) | 1980-10-09 | 1984-02-21 | Hitachi, Ltd. | Focusing position detecting device in optical magnifying and observing apparatus |
JPS57108811A (en) * | 1980-12-26 | 1982-07-07 | Hitachi Ltd | Optical focus position detector |
JPS58160907A (ja) | 1982-03-19 | 1983-09-24 | Nippon Kogaku Kk <Nikon> | 顕微鏡用焦点検出装置 |
DE3219503C2 (de) * | 1982-05-25 | 1985-08-08 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Vorrichtung zum selbsttätigen Fokussieren auf in optischen Geräten zu betrachtende Objekte |
GB2129955B (en) | 1982-11-02 | 1986-07-09 | Martock Design Ltd | Adjustable mountings |
EP0116753B1 (de) * | 1982-12-07 | 1987-06-24 | Secretary of State for Trade and Industry in Her Britannic Majesty's Gov. of the U.K. of Great Britain and Northern Ireland | Vorrichtung zum Fokussieren von Licht auf einer Oberfläche |
DE3446727C2 (de) | 1983-08-10 | 1986-12-04 | Fa. Carl Zeiss, 7920 Heidenheim | Autofokuseinrichtung für Mikroskope |
DE3328821C2 (de) | 1983-08-10 | 1986-10-02 | Fa. Carl Zeiss, 7920 Heidenheim | Autofokus für Mikroskope |
US4600832A (en) | 1983-10-28 | 1986-07-15 | Nanometrics Incorporated | Method and apparatus for automatic optical focusing on an optically discernible feature on an object |
DE3339970A1 (de) | 1983-11-04 | 1985-05-15 | Karl Süss KG, Präzisionsgeräte für Wissenschaft und Industrie GmbH & Co, 8046 Garching | Einrichtung zum automatischen fokussieren von optischen geraeten |
JPS60118814A (ja) | 1983-11-30 | 1985-06-26 | Nippon Kogaku Kk <Nikon> | 落射照明型顕微鏡装置 |
US4639587A (en) | 1984-02-22 | 1987-01-27 | Kla Instruments Corporation | Automatic focusing system for a microscope |
JPS60217322A (ja) | 1984-04-13 | 1985-10-30 | Nippon Kogaku Kk <Nikon> | 焦点検出装置 |
US4766302A (en) * | 1984-05-17 | 1988-08-23 | Minolta Camera Kabushiki Kaisha | Focus detecting device including means for determining a priority of correlation calculations |
DE3521047C1 (de) | 1985-06-12 | 1986-09-04 | C. Reichert Optische Werke Ag, Wien | Mikroskop |
JPS61143709A (ja) | 1985-09-21 | 1986-07-01 | Nippon Kogaku Kk <Nikon> | 焦点調節装置 |
DE3707487A1 (de) | 1986-05-16 | 1987-11-26 | Reichert Optische Werke Ag | Verfahren zur autofokussierung von mikroskopen und mikroskope mit einer autofokussierung |
US4935612A (en) | 1986-05-16 | 1990-06-19 | Reichert Jung Optische Werks, A.G. | Autofocus system and method of using the same |
CH671902A5 (de) * | 1987-02-09 | 1989-10-13 | Elpatronic Ag | |
FR2620537B1 (fr) | 1987-09-14 | 1991-07-26 | Micro Controle | Dispositif optique a mise au point automatique et appareil optique comportant un tel dispositif |
DE3739223A1 (de) | 1987-11-19 | 1989-06-01 | Reichert Optische Werke Ag | Verfahren zur autofokussierung von mikroskopen und mikroskope mit einer autofokussierung |
ES2064432T3 (es) * | 1988-02-20 | 1995-02-01 | Fujitsu Ltd | Tarjetas de circuito integrado. |
DE3828381C2 (de) | 1988-08-20 | 1997-09-11 | Zeiss Carl Fa | Verfahren und Einrichtung zur automatischen Fokussierung eines optischen Systems |
US4945220A (en) | 1988-11-16 | 1990-07-31 | Prometrix Corporation | Autofocusing system for microscope having contrast detection means |
FR2640040B1 (fr) * | 1988-12-05 | 1994-10-28 | Micro Controle | Procede et dispositif de mesure optique |
JP2561160B2 (ja) | 1989-11-06 | 1996-12-04 | 富士写真フイルム株式会社 | 走査型顕微鏡 |
US5122648A (en) | 1990-06-01 | 1992-06-16 | Wyko Corporation | Apparatus and method for automatically focusing an interference microscope |
WO1992006359A1 (en) | 1990-10-09 | 1992-04-16 | Metronics, Inc. | Laser autofocus apparatus and method |
JP3136661B2 (ja) * | 1991-06-24 | 2001-02-19 | 株式会社ニコン | 自動焦点調節装置 |
DE4128669A1 (de) | 1991-08-29 | 1993-03-04 | Zeiss Carl Jena Gmbh | Dreidimensional verstellbare deckenaufhaengung fuer operationsmikroskope |
US5434703A (en) | 1991-10-09 | 1995-07-18 | Fuji Photo Optical Co., Ltd. | Binocular stereomicroscope |
DE4133788A1 (de) | 1991-10-11 | 1993-04-15 | Leica Ag | Verfahren zur autofokussierung von mikroskopen und autofokussystem fuer mikroskope |
DE4134481C2 (de) * | 1991-10-18 | 1998-04-09 | Zeiss Carl Fa | Operationsmikroskop zur rechnergestützten, stereotaktischen Mikrochirurgie |
US5483079A (en) | 1992-11-24 | 1996-01-09 | Nikon Corporation | Apparatus for detecting an in-focus position of a substrate surface having a movable light intercepting member and a thickness detector |
US5483055A (en) | 1994-01-18 | 1996-01-09 | Thompson; Timothy V. | Method and apparatus for performing an automatic focus operation for a microscope |
JPH0772378A (ja) | 1993-09-02 | 1995-03-17 | Nikon Corp | 合焦装置 |
US5557097A (en) | 1994-09-20 | 1996-09-17 | Neopath, Inc. | Cytological system autofocus integrity checking apparatus |
JP3458017B2 (ja) | 1994-12-28 | 2003-10-20 | オリンパス光学工業株式会社 | 顕微鏡自動焦点位置検出装置 |
JP3872836B2 (ja) | 1996-04-17 | 2007-01-24 | オリンパス株式会社 | 手術用顕微鏡 |
US5804813A (en) | 1996-06-06 | 1998-09-08 | National Science Council Of Republic Of China | Differential confocal microscopy |
FR2750221A1 (fr) | 1996-06-25 | 1997-12-26 | Lemaire Christian | Dispositif de caracterisation de mise au point de microscope optique |
CH692254A5 (de) | 1996-06-29 | 2002-04-15 | Zeiss Carl | Mikroskop mit einer Autofokus-Anordnung. |
US5811821A (en) | 1996-08-09 | 1998-09-22 | Park Scientific Instruments | Single axis vibration reducing system |
JPH1096848A (ja) | 1996-09-20 | 1998-04-14 | Olympus Optical Co Ltd | 自動焦点検出装置 |
JPH10161195A (ja) * | 1996-12-02 | 1998-06-19 | Sony Corp | オートフォーカス方法及びオートフォーカス装置 |
DE19654208C2 (de) * | 1996-12-24 | 2001-05-10 | Leica Microsystems | Mikroskop |
US5995143A (en) | 1997-02-07 | 1999-11-30 | Q3Dm, Llc | Analog circuit for an autofocus microscope system |
JP3825869B2 (ja) | 1997-03-19 | 2006-09-27 | キヤノン株式会社 | 能動除振装置 |
DE69836017T2 (de) | 1997-05-16 | 2007-06-06 | Sanyo Electric Co., Ltd., Moriguchi | Automatische fokusiereinrichtung |
JP3019835B2 (ja) * | 1998-04-22 | 2000-03-13 | 日本電気株式会社 | 焦点検出装置 |
US6974938B1 (en) | 2000-03-08 | 2005-12-13 | Tibotec Bvba | Microscope having a stable autofocusing apparatus |
US6611374B2 (en) * | 2002-01-31 | 2003-08-26 | General Instrument Corporation | Optical amplifier controller having adjustable slew-rate limiter |
-
2000
- 2000-03-08 US US09/521,618 patent/US6974938B1/en not_active Expired - Fee Related
-
2001
- 2001-03-08 DE DE60116268T patent/DE60116268T2/de not_active Expired - Fee Related
- 2001-03-08 AU AU40694/01A patent/AU779909B2/en not_active Ceased
- 2001-03-08 US US10/220,872 patent/US7016110B2/en not_active Expired - Fee Related
- 2001-03-08 EP EP01911762A patent/EP1264205B1/de not_active Expired - Lifetime
- 2001-03-08 NZ NZ520525A patent/NZ520525A/en unknown
- 2001-03-08 CA CA002400841A patent/CA2400841A1/en not_active Abandoned
- 2001-03-08 PT PT01911762T patent/PT1264205E/pt unknown
- 2001-03-08 WO PCT/EP2001/002807 patent/WO2001067154A2/en active IP Right Grant
- 2001-03-08 ES ES01911762T patent/ES2256207T3/es not_active Expired - Lifetime
- 2001-03-08 AT AT01911762T patent/ATE314672T1/de not_active IP Right Cessation
- 2001-03-08 JP JP2001566072A patent/JP2003526814A/ja active Pending
- 2001-03-08 DK DK01911762T patent/DK1264205T3/da active
- 2001-03-16 TW TW090106130A patent/TW594045B/zh not_active IP Right Cessation
-
2002
- 2002-09-09 NO NO20024302A patent/NO20024302L/no not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP1264205B1 (de) | 2005-12-28 |
TW594045B (en) | 2004-06-21 |
JP2003526814A (ja) | 2003-09-09 |
NO20024302D0 (no) | 2002-09-09 |
NO20024302L (no) | 2002-09-09 |
ATE314672T1 (de) | 2006-01-15 |
AU4069401A (en) | 2001-09-17 |
ES2256207T3 (es) | 2006-07-16 |
WO2001067154A3 (en) | 2002-01-10 |
US6974938B1 (en) | 2005-12-13 |
DE60116268D1 (de) | 2006-02-02 |
PT1264205E (pt) | 2006-05-31 |
US20030142398A1 (en) | 2003-07-31 |
NZ520525A (en) | 2004-09-24 |
DE60116268T2 (de) | 2006-09-07 |
AU779909B2 (en) | 2005-02-17 |
US7016110B2 (en) | 2006-03-21 |
EP1264205A2 (de) | 2002-12-11 |
CA2400841A1 (en) | 2001-09-13 |
WO2001067154A2 (en) | 2001-09-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DK1264205T3 (da) | Mikroskop egnet til screening ved höj kapacitet og med en autofokusanordning | |
MY149114A (en) | Focusing an optical beam to two foci | |
ATE405860T1 (de) | Vorrichtung und verfahren zur verminderung von speckle | |
JP2018151624A5 (de) | ||
ATE455312T1 (de) | Laser-scanning-mikroskop | |
PT1247133E (pt) | Meio auxiliar de visao sob a forma de oculos telescopicos providos de um dispositivo de focagem automatica | |
JP2003200286A (ja) | レーザマイクロスポット溶接装置 | |
SE9901881D0 (sv) | A device and a method for an infrared image analysing autofocus | |
US7486329B2 (en) | Focusing state signal output apparatus for a microscope representing a relative distance between a subject and an image sensing apparatus | |
WO2003103886A3 (en) | AUTOMATIC FOCUSING LASER MACHINING APPARATUS | |
JP2002321080A (ja) | レーザ微細加工用オートフォーカス装置 | |
JP4974060B2 (ja) | 創薬スクリーニング方法 | |
JP5446263B2 (ja) | 光ファイバ増幅器、光源装置、露光装置、被検査物検査装置及び加工装置 | |
EP1081523A3 (de) | Optisches Gerät zur Fokussierung und Strahlausrichtung | |
JP6523106B2 (ja) | 顕微鏡システム、顕微鏡システムの制御方法及び顕微鏡システムの制御プログラム | |
JP2007271979A (ja) | 生物顕微鏡 | |
JP4681821B2 (ja) | レーザ集光光学系及びレーザ加工装置 | |
KR102129239B1 (ko) | 다중 초점식 광학 검사장치 | |
JPH09159572A (ja) | 光学装置 | |
EP1276102A3 (de) | Vorrichtung und Verfahren zur Fokussierung eines Lichtstrahls, und Belichtungsapparat | |
JP2008032524A (ja) | レーザ加工装置および計測用レーザ光の焦点検出方法 | |
JP3175731B2 (ja) | レーザcvd装置 | |
US11953449B2 (en) | Visual inspection device | |
KR20200019386A (ko) | 레이저 가공 장치 | |
JP2007271978A (ja) | 顕微鏡 |