DE69938342T2 - Verfahren zur herstellung von gräben in einer siliziumschicht eines substrats in einem plasmasystem hoher plasmadichte - Google Patents

Verfahren zur herstellung von gräben in einer siliziumschicht eines substrats in einem plasmasystem hoher plasmadichte Download PDF

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Publication number
DE69938342T2
DE69938342T2 DE69938342T DE69938342T DE69938342T2 DE 69938342 T2 DE69938342 T2 DE 69938342T2 DE 69938342 T DE69938342 T DE 69938342T DE 69938342 T DE69938342 T DE 69938342T DE 69938342 T2 DE69938342 T2 DE 69938342T2
Authority
DE
Germany
Prior art keywords
plasma
variable
plasma processing
etching
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69938342T
Other languages
German (de)
English (en)
Other versions
DE69938342D1 (de
Inventor
Mark A. Pleasanton KENNARD
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Application granted granted Critical
Publication of DE69938342D1 publication Critical patent/DE69938342D1/de
Publication of DE69938342T2 publication Critical patent/DE69938342T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H01J37/32706—Polarising the substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H01J2237/3343—Problems associated with etching
    • H01J2237/3347—Problems associated with etching bottom of holes or trenches

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE69938342T 1998-03-31 1999-03-30 Verfahren zur herstellung von gräben in einer siliziumschicht eines substrats in einem plasmasystem hoher plasmadichte Expired - Fee Related DE69938342T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US52997 1998-03-31
US09/052,997 US5935874A (en) 1998-03-31 1998-03-31 Techniques for forming trenches in a silicon layer of a substrate in a high density plasma processing system
PCT/US1999/006995 WO1999050897A1 (en) 1998-03-31 1999-03-30 Techniques for forming trenches in a silicon layer of a substrate in a high density plasma processing system

Publications (2)

Publication Number Publication Date
DE69938342D1 DE69938342D1 (de) 2008-04-24
DE69938342T2 true DE69938342T2 (de) 2009-03-12

Family

ID=21981252

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69938342T Expired - Fee Related DE69938342T2 (de) 1998-03-31 1999-03-30 Verfahren zur herstellung von gräben in einer siliziumschicht eines substrats in einem plasmasystem hoher plasmadichte

Country Status (8)

Country Link
US (1) US5935874A (https=)
EP (1) EP1070342B1 (https=)
JP (1) JP2002510860A (https=)
KR (1) KR100574141B1 (https=)
AT (1) ATE389238T1 (https=)
DE (1) DE69938342T2 (https=)
TW (1) TW520405B (https=)
WO (1) WO1999050897A1 (https=)

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US6107192A (en) 1997-12-30 2000-08-22 Applied Materials, Inc. Reactive preclean prior to metallization for sub-quarter micron application
DE19826382C2 (de) * 1998-06-12 2002-02-07 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
US6642149B2 (en) * 1998-09-16 2003-11-04 Tokyo Electron Limited Plasma processing method
US7053002B2 (en) * 1998-12-04 2006-05-30 Applied Materials, Inc Plasma preclean with argon, helium, and hydrogen gases
US6355564B1 (en) * 1999-08-26 2002-03-12 Advanced Micro Devices, Inc. Selective back side reactive ion etch
US6389207B1 (en) * 1999-12-13 2002-05-14 Corning Incorporated Dispersion managed fiber
US6500356B2 (en) * 2000-03-27 2002-12-31 Applied Materials, Inc. Selectively etching silicon using fluorine without plasma
US20030010354A1 (en) * 2000-03-27 2003-01-16 Applied Materials, Inc. Fluorine process for cleaning semiconductor process chamber
US6372567B1 (en) 2000-04-20 2002-04-16 Infineon Technologies Ag Control of oxide thickness in vertical transistor structures
US6843258B2 (en) * 2000-12-19 2005-01-18 Applied Materials, Inc. On-site cleaning gas generation for process chamber cleaning
US6653237B2 (en) * 2001-06-27 2003-11-25 Applied Materials, Inc. High resist-selectivity etch for silicon trench etch applications
JP3527901B2 (ja) * 2001-07-24 2004-05-17 株式会社日立製作所 プラズマエッチング方法
US20030121796A1 (en) * 2001-11-26 2003-07-03 Siegele Stephen H Generation and distribution of molecular fluorine within a fabrication facility
US20040037768A1 (en) * 2001-11-26 2004-02-26 Robert Jackson Method and system for on-site generation and distribution of a process gas
US20090001524A1 (en) * 2001-11-26 2009-01-01 Siegele Stephen H Generation and distribution of a fluorine gas
US20040151656A1 (en) * 2001-11-26 2004-08-05 Siegele Stephen H. Modular molecular halogen gas generation system
US6905968B2 (en) * 2001-12-12 2005-06-14 Applied Materials, Inc. Process for selectively etching dielectric layers
KR100430583B1 (ko) * 2001-12-20 2004-05-10 동부전자 주식회사 플라즈마 에칭 장비를 이용한 반도체 소자의 프로파일조절 방법
US6921724B2 (en) * 2002-04-02 2005-07-26 Lam Research Corporation Variable temperature processes for tunable electrostatic chuck
US6706586B1 (en) 2002-10-23 2004-03-16 International Business Machines Corporation Method of trench sidewall enhancement
US6797610B1 (en) 2002-12-11 2004-09-28 International Business Machines Corporation Sublithographic patterning using microtrenching
DE10331526A1 (de) * 2003-07-11 2005-02-03 Infineon Technologies Ag Verfahren zum anisotropen Ätzen einer Ausnehmung in ein Siliziumsubstrat und Verwendung einer Plasmaätzanlage
JP4723871B2 (ja) * 2004-06-23 2011-07-13 株式会社日立ハイテクノロジーズ ドライエッチング装置
US20060054183A1 (en) * 2004-08-27 2006-03-16 Thomas Nowak Method to reduce plasma damage during cleaning of semiconductor wafer processing chamber
US20060090773A1 (en) * 2004-11-04 2006-05-04 Applied Materials, Inc. Sulfur hexafluoride remote plasma source clean
JP5154013B2 (ja) * 2005-10-12 2013-02-27 パナソニック株式会社 ドライエッチング方法
KR100814901B1 (ko) * 2007-05-22 2008-03-19 한국전자통신연구원 건식 식각 공정을 이용한 산화물 박막 트랜지스터 소자의제조방법
US7704849B2 (en) * 2007-12-03 2010-04-27 Micron Technology, Inc. Methods of forming trench isolation in silicon of a semiconductor substrate by plasma
US20130288485A1 (en) * 2012-04-30 2013-10-31 Applied Materials, Inc. Densification for flowable films
JP6859088B2 (ja) * 2016-12-14 2021-04-14 エイブリック株式会社 半導体装置の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4895810A (en) * 1986-03-21 1990-01-23 Advanced Power Technology, Inc. Iopographic pattern delineated power mosfet with profile tailored recessed source
US5182234A (en) * 1986-03-21 1993-01-26 Advanced Power Technology, Inc. Profile tailored trench etch using a SF6 -O2 etching composition wherein both isotropic and anisotropic etching is achieved by varying the amount of oxygen
US4726879A (en) * 1986-09-08 1988-02-23 International Business Machines Corporation RIE process for etching silicon isolation trenches and polycides with vertical surfaces
FR2616030A1 (fr) * 1987-06-01 1988-12-02 Commissariat Energie Atomique Procede de gravure ou de depot par plasma et dispositif pour la mise en oeuvre du procede
JPH02138472A (ja) * 1988-11-16 1990-05-28 Canon Inc 推積膜形成装置の洗浄方法
JP2519364B2 (ja) * 1990-12-03 1996-07-31 アプライド マテリアルズ インコーポレイテッド Ｕｈｆ／ｖｈｆ共振アンテナ供給源を用いたプラズマリアクタ
US5277752A (en) * 1992-10-19 1994-01-11 At&T Bell Laboratories Method for controlling plasma processes
US5783492A (en) * 1994-03-04 1998-07-21 Tokyo Electron Limited Plasma processing method, plasma processing apparatus, and plasma generating apparatus
US5811022A (en) * 1994-11-15 1998-09-22 Mattson Technology, Inc. Inductive plasma reactor
US5605603A (en) * 1995-03-29 1997-02-25 International Business Machines Corporation Deep trench process

Also Published As

Publication number Publication date
EP1070342A1 (en) 2001-01-24
EP1070342B1 (en) 2008-03-12
US5935874A (en) 1999-08-10
DE69938342D1 (de) 2008-04-24
ATE389238T1 (de) 2008-03-15
TW520405B (en) 2003-02-11
KR20010042106A (ko) 2001-05-25
WO1999050897A1 (en) 1999-10-07
JP2002510860A (ja) 2002-04-09
KR100574141B1 (ko) 2006-04-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee