DE69931168D1 - Elastomer-gebundene teile fuer plasmaverfahren, deren herstellung und verwendung - Google Patents

Elastomer-gebundene teile fuer plasmaverfahren, deren herstellung und verwendung

Info

Publication number
DE69931168D1
DE69931168D1 DE69931168T DE69931168T DE69931168D1 DE 69931168 D1 DE69931168 D1 DE 69931168D1 DE 69931168 T DE69931168 T DE 69931168T DE 69931168 T DE69931168 T DE 69931168T DE 69931168 D1 DE69931168 D1 DE 69931168D1
Authority
DE
Germany
Prior art keywords
elastomer
manufacture
plasma process
linked parts
linked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69931168T
Other languages
English (en)
Other versions
DE69931168T2 (de
Inventor
John Lilleland
S Hubacek
S Kennedy
A Maraschin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of DE69931168D1 publication Critical patent/DE69931168D1/de
Application granted granted Critical
Publication of DE69931168T2 publication Critical patent/DE69931168T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
DE69931168T 1998-06-30 1999-06-30 Elastomer-gebundene teile fuer plasmaverfahren, deren herstellung und verwendung Expired - Lifetime DE69931168T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/107,471 US6073577A (en) 1998-06-30 1998-06-30 Electrode for plasma processes and method for manufacture and use thereof
US107471 1998-06-30
PCT/US1999/014790 WO2000000999A1 (en) 1998-06-30 1999-06-30 Elastomer bonded parts for plasma processes and method for manufacture and use thereof

Publications (2)

Publication Number Publication Date
DE69931168D1 true DE69931168D1 (de) 2006-06-08
DE69931168T2 DE69931168T2 (de) 2007-03-08

Family

ID=22316783

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69939606T Expired - Lifetime DE69939606D1 (de) 1998-06-30 1999-06-30 Verfahren zum Ersetzen einer Elektrodenanordnung für Plasmabehandlungsverfahren
DE69920453T Expired - Lifetime DE69920453T2 (de) 1998-06-30 1999-06-30 Elektrode für plasmabehandlungsverfahren und verfahren zur herstellung und anwendung derselben
DE69931168T Expired - Lifetime DE69931168T2 (de) 1998-06-30 1999-06-30 Elastomer-gebundene teile fuer plasmaverfahren, deren herstellung und verwendung

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE69939606T Expired - Lifetime DE69939606D1 (de) 1998-06-30 1999-06-30 Verfahren zum Ersetzen einer Elektrodenanordnung für Plasmabehandlungsverfahren
DE69920453T Expired - Lifetime DE69920453T2 (de) 1998-06-30 1999-06-30 Elektrode für plasmabehandlungsverfahren und verfahren zur herstellung und anwendung derselben

Country Status (11)

Country Link
US (4) US6073577A (de)
EP (3) EP1475820B1 (de)
JP (3) JP3450828B2 (de)
KR (3) KR100426149B1 (de)
CN (2) CN100585794C (de)
AU (2) AU4963699A (de)
DE (3) DE69939606D1 (de)
ES (2) ES2264263T3 (de)
MY (1) MY120364A (de)
TW (1) TW423072B (de)
WO (2) WO2000000999A1 (de)

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* Cited by examiner, † Cited by third party
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KR20010071688A (ko) 2001-07-31
CN1312954A (zh) 2001-09-12
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EP1475820A1 (de) 2004-11-10
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DE69920453T2 (de) 2005-11-24
DE69920453D1 (de) 2004-10-28
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US6194322B1 (en) 2001-02-27
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