DE69837718T2 - Integrierter pufferraum, abgabe- und lagersystem - Google Patents

Integrierter pufferraum, abgabe- und lagersystem Download PDF

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Publication number
DE69837718T2
DE69837718T2 DE69837718T DE69837718T DE69837718T2 DE 69837718 T2 DE69837718 T2 DE 69837718T2 DE 69837718 T DE69837718 T DE 69837718T DE 69837718 T DE69837718 T DE 69837718T DE 69837718 T2 DE69837718 T2 DE 69837718T2
Authority
DE
Germany
Prior art keywords
tool
bay
container
tools
containers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69837718T
Other languages
German (de)
English (en)
Other versions
DE69837718D1 (de
Inventor
William J. Austin FOSNIGHT
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASYST TECHNOLOGIES
Asyst Technologies Inc
Original Assignee
ASYST TECHNOLOGIES
Asyst Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASYST TECHNOLOGIES, Asyst Technologies Inc filed Critical ASYST TECHNOLOGIES
Publication of DE69837718D1 publication Critical patent/DE69837718D1/de
Application granted granted Critical
Publication of DE69837718T2 publication Critical patent/DE69837718T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/14—Stack holders or separators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Memory System Of A Hierarchy Structure (AREA)
DE69837718T 1997-04-14 1998-03-26 Integrierter pufferraum, abgabe- und lagersystem Expired - Fee Related DE69837718T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US843245 1997-04-14
US08/843,245 US5980183A (en) 1997-04-14 1997-04-14 Integrated intrabay buffer, delivery, and stocker system
PCT/US1998/005961 WO1998046503A1 (en) 1997-04-14 1998-03-26 Integrated intrabay buffer, delivery, and stocker system

Publications (2)

Publication Number Publication Date
DE69837718D1 DE69837718D1 (de) 2007-06-14
DE69837718T2 true DE69837718T2 (de) 2007-09-06

Family

ID=25289443

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69837718T Expired - Fee Related DE69837718T2 (de) 1997-04-14 1998-03-26 Integrierter pufferraum, abgabe- und lagersystem

Country Status (7)

Country Link
US (1) US5980183A (enExample)
EP (1) EP1028905B1 (enExample)
JP (1) JP4068160B2 (enExample)
KR (1) KR100608391B1 (enExample)
AT (1) ATE361551T1 (enExample)
DE (1) DE69837718T2 (enExample)
WO (1) WO1998046503A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018132814B3 (de) * 2018-12-19 2020-03-26 SSI Schäfer Automation GmbH (DE) Lager- und Kommissioniersystem und Verfahren zum Konfigurieren eines Fahrzeugs

Families Citing this family (139)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2229247T3 (es) 1995-03-28 2005-04-16 Brooks Automation Gmbh Estacion de carga y descarga para instalaciones de tratamiento de semiconductores.
US6540466B2 (en) * 1996-12-11 2003-04-01 Applied Materials, Inc. Compact apparatus and method for storing and loading semiconductor wafer carriers
US6579052B1 (en) * 1997-07-11 2003-06-17 Asyst Technologies, Inc. SMIF pod storage, delivery and retrieval system
JPH1159829A (ja) * 1997-08-08 1999-03-02 Mitsubishi Electric Corp 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法
US6283692B1 (en) * 1998-12-01 2001-09-04 Applied Materials, Inc. Apparatus for storing and moving a cassette
US6435330B1 (en) 1998-12-18 2002-08-20 Asyai Technologies, Inc. In/out load port transfer mechanism
IL128087A (en) * 1999-01-17 2002-04-21 Nova Measuring Instr Ltd Buffer station for a wafer handling system
US6443686B1 (en) 1999-03-05 2002-09-03 Pri Automation, Inc. Material handling and transport system and process
EP1035563A1 (en) * 1999-03-09 2000-09-13 Motorola, Inc. A handling device and method for moving a pod
US6304051B1 (en) * 1999-03-15 2001-10-16 Berkeley Process Control, Inc. Self teaching robotic carrier handling system
DE19913628A1 (de) * 1999-03-25 2000-10-05 Siemens Ag Anlage zur Fertigung von Halbleiterprodukten
DE19921246C2 (de) * 1999-05-07 2003-06-12 Infineon Technologies Ag Anlage zur Fertigung von Halbleiterprodukten
JP3730810B2 (ja) * 1999-07-09 2006-01-05 東京エレクトロン株式会社 容器の移動装置および方法
KR100321545B1 (ko) * 1999-07-15 2002-01-23 김광교 웨이퍼 카세트 이송장치
KR100322620B1 (ko) * 1999-08-16 2002-03-18 황인길 스탠더드 메커니컬 인터페이스 시스템의 카세트 캐리어 이송장치
EP1252079B1 (en) * 1999-12-02 2007-01-17 Asyst Technologies, Inc. Wafer transport system
US6698991B1 (en) 2000-03-02 2004-03-02 Applied Materials, Inc. Fabrication system with extensible equipment sets
JP3559213B2 (ja) 2000-03-03 2004-08-25 株式会社半導体先端テクノロジーズ ロードポート及びそれを用いた生産方式
US6506009B1 (en) * 2000-03-16 2003-01-14 Applied Materials, Inc. Apparatus for storing and moving a cassette
US6652212B2 (en) 2000-05-02 2003-11-25 Ckd Corporation Cylinder, load port using it, and production system
US6889813B1 (en) 2000-06-22 2005-05-10 Amkor Technology, Inc. Material transport method
US6695120B1 (en) 2000-06-22 2004-02-24 Amkor Technology, Inc. Assembly for transporting material
US6632068B2 (en) * 2000-09-27 2003-10-14 Asm International N.V. Wafer handling system
EP1202325A1 (en) * 2000-10-25 2002-05-02 Semiconductor300 GmbH & Co KG Arrangement for transporting a semiconductor wafer carrier
EP1217646A1 (en) * 2000-12-22 2002-06-26 Semiconductor300 GmbH & Co KG Semiconductor product container and equipment for handling a semiconductor product container
US6887026B1 (en) 2000-12-22 2005-05-03 Infineon Technologie Sc300 Gmbh & Co. Kg Semiconductor product container and system for handling a semiconductor product container
US20020090282A1 (en) * 2001-01-05 2002-07-11 Applied Materials, Inc. Actuatable loadport system
US6739820B2 (en) 2001-01-16 2004-05-25 Taiwan Semiconductor Manufacturing Co., Ltd Stocker apparatus with increased input/output capacity
US6516243B2 (en) 2001-01-16 2003-02-04 Taiwan Semiconductor Manufacturing Co., Ltd Stocker apparatus affording manual access
US6677690B2 (en) 2001-02-02 2004-01-13 Asyst Technologies, Inc. System for safeguarding integrated intrabay pod delivery and storage system
JP3829633B2 (ja) * 2001-02-22 2006-10-04 株式会社ダイフク 荷保管設備
US6629813B2 (en) 2001-04-18 2003-10-07 Taiwan Semiconductor Manufacturing Co., Ltd Microelectronic fabrication tool loading method providing enhanced microelectronic fabrication tool operating efficiency
US6879876B2 (en) 2001-06-13 2005-04-12 Advanced Technology Materials, Inc. Liquid handling system with electronic information storage
DE10157192A1 (de) * 2001-11-23 2003-06-12 Ortner C L S Gmbh Lagereinrichtung
US7134826B2 (en) * 2001-11-28 2006-11-14 Dainippon Screen Mfg. Co., Ltd. Substrate transfer apparatus, substrate processing apparatus and holding table
JP4182521B2 (ja) * 2001-12-04 2008-11-19 ローツェ株式会社 容器の一時的搬入、留置、搬出用装置
WO2003050022A1 (en) * 2001-12-11 2003-06-19 Intrabay Automation, Inc. Monorail semiconductor wafer cassette transport system
US6726429B2 (en) 2002-02-19 2004-04-27 Vertical Solutions, Inc. Local store for a wafer processing station
WO2003105216A1 (ja) * 2002-06-07 2003-12-18 平田機工株式会社 容器搬送システム
WO2004001582A1 (en) * 2002-06-19 2003-12-31 Brooks Automation, Inc. Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US6869263B2 (en) 2002-07-22 2005-03-22 Brooks Automation, Inc. Substrate loading and unloading station with buffer
US7677859B2 (en) * 2002-07-22 2010-03-16 Brooks Automation, Inc. Substrate loading and uploading station with buffer
DE10238165B3 (de) * 2002-08-15 2004-03-25 Hans-Heinz Helge Langgestrecktes Rolladenprofil aus Kunststoff oder Metall für Schwimmbadabdeckungen
US7684895B2 (en) 2002-08-31 2010-03-23 Applied Materials, Inc. Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
US20040081546A1 (en) 2002-08-31 2004-04-29 Applied Materials, Inc. Method and apparatus for supplying substrates to a processing tool
US7930061B2 (en) 2002-08-31 2011-04-19 Applied Materials, Inc. Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback
US6955197B2 (en) * 2002-08-31 2005-10-18 Applied Materials, Inc. Substrate carrier having door latching and substrate clamping mechanisms
US7243003B2 (en) 2002-08-31 2007-07-10 Applied Materials, Inc. Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
US7506746B2 (en) 2002-08-31 2009-03-24 Applied Materials, Inc. System for transporting substrate carriers
US7234584B2 (en) 2002-08-31 2007-06-26 Applied Materials, Inc. System for transporting substrate carriers
FR2844258B1 (fr) 2002-09-06 2005-06-03 Recif Sa Systeme de transport et stockage de conteneurs de plaques de semi-conducteur, et mecanisme de transfert
US7487099B2 (en) * 2002-09-10 2009-02-03 International Business Machines Corporation Method, system, and storage medium for resolving transport errors relating to automated material handling system transaction
US20070092359A1 (en) * 2002-10-11 2007-04-26 Brooks Automation, Inc. Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position
KR101323337B1 (ko) * 2002-10-11 2013-10-30 무라타 기카이 가부시키가이샤 자동 재료 핸들링 시스템
KR20040062137A (ko) * 2002-12-31 2004-07-07 엘지.필립스 엘시디 주식회사 기판 반송 시스템
US7077264B2 (en) 2003-01-27 2006-07-18 Applied Material, Inc. Methods and apparatus for transporting substrate carriers
US7578647B2 (en) 2003-01-27 2009-08-25 Applied Materials, Inc. Load port configurations for small lot size substrate carriers
US7221993B2 (en) * 2003-01-27 2007-05-22 Applied Materials, Inc. Systems and methods for transferring small lot size substrate carriers between processing tools
US7778721B2 (en) 2003-01-27 2010-08-17 Applied Materials, Inc. Small lot size lithography bays
US7611318B2 (en) 2003-01-27 2009-11-03 Applied Materials, Inc. Overhead transfer flange and support for suspending a substrate carrier
TWI246501B (en) * 2003-02-03 2006-01-01 Murata Machinery Ltd Overhead traveling carriage system
US6990721B2 (en) * 2003-03-21 2006-01-31 Brooks Automation, Inc. Growth model automated material handling system
US7168198B2 (en) * 2003-06-23 2007-01-30 Reginald Hill Newkirk Gun with user notification
US20050008467A1 (en) * 2003-07-11 2005-01-13 Rich Huang Load port transfer device
KR100999104B1 (ko) * 2003-10-01 2010-12-07 삼성전자주식회사 기판의 반송장치
US6931303B2 (en) * 2003-10-02 2005-08-16 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated transport system
JP3975360B2 (ja) * 2003-10-31 2007-09-12 セイコーエプソン株式会社 供給制御システムおよび方法、プログラム並びに情報記憶媒体
US7720557B2 (en) 2003-11-06 2010-05-18 Applied Materials, Inc. Methods and apparatus for enhanced operation of substrate carrier handlers
US7218983B2 (en) 2003-11-06 2007-05-15 Applied Materials, Inc. Method and apparatus for integrating large and small lot electronic device fabrication facilities
CN1669892B (zh) * 2003-11-13 2011-11-16 应用材料股份有限公司 高速载入器相对于基片传送系统的校准
TWI348450B (en) * 2003-11-13 2011-09-11 Applied Materials Inc Break-away positioning conveyor mount for accommodating conveyor belt bends
US20050167554A1 (en) * 2003-11-13 2005-08-04 Rice Michael R. Kinematic pin with shear member and substrate carrier for use therewith
US7230702B2 (en) * 2003-11-13 2007-06-12 Applied Materials, Inc. Monitoring of smart pin transition timing
US6996448B2 (en) * 2003-12-02 2006-02-07 Taiwan Semiconductor Manufacturing Co., Ltd. Transport system with multiple-load-port stockers
US7101138B2 (en) * 2003-12-03 2006-09-05 Brooks Automation, Inc. Extractor/buffer
US7328836B2 (en) * 2004-02-03 2008-02-12 Taiwan Semiconductor Manufacturing Co., Ltd. Smart tag holder and cover housing
US7274971B2 (en) * 2004-02-28 2007-09-25 Applied Materials, Inc. Methods and apparatus for electronic device manufacturing system monitoring and control
US7413069B2 (en) 2004-02-28 2008-08-19 Applied Materials, Inc. Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
US7177716B2 (en) 2004-02-28 2007-02-13 Applied Materials, Inc. Methods and apparatus for material control system interface
US7611319B2 (en) * 2004-06-16 2009-11-03 Applied Materials, Inc. Methods and apparatus for identifying small lot size substrate carriers
US7409263B2 (en) * 2004-07-14 2008-08-05 Applied Materials, Inc. Methods and apparatus for repositioning support for a substrate carrier
JP2006051886A (ja) * 2004-08-12 2006-02-23 Murata Mach Ltd 天井走行車システム
JP4337683B2 (ja) * 2004-08-16 2009-09-30 村田機械株式会社 搬送システム
EP1803151B1 (en) * 2004-08-23 2011-10-05 Murata Machinery, Ltd. Elevator-based tool loading and buffering system
JP2008510673A (ja) * 2004-08-24 2008-04-10 ブルックス オートメーション インコーポレイテッド 搬送システム
US7720558B2 (en) * 2004-09-04 2010-05-18 Applied Materials, Inc. Methods and apparatus for mapping carrier contents
JP4688533B2 (ja) * 2005-03-18 2011-05-25 大日本スクリーン製造株式会社 基板処理装置
JP2006237559A (ja) * 2005-01-28 2006-09-07 Dainippon Screen Mfg Co Ltd 基板処理装置
CN100413047C (zh) * 2005-01-28 2008-08-20 大日本网目版制造株式会社 基板处理装置
JP4695911B2 (ja) * 2005-03-31 2011-06-08 株式会社Sen 絶縁配管部材、ガス供給装置およびイオンビーム装置
JP4221603B2 (ja) * 2005-03-31 2009-02-12 村田機械株式会社 天井走行車システム
KR100965525B1 (ko) * 2005-05-16 2010-06-23 무라텍 오토메이션 가부시키가이샤 고처리량 ａｍｈｓ용 모듈식 터미널
US7966089B1 (en) * 2005-07-05 2011-06-21 Advanced Micro Devices, Inc. Method and apparatus for automated fab control
KR101275607B1 (ko) * 2005-07-08 2013-06-17 무라다기카이가부시끼가이샤 스톡커
DE102005039453B4 (de) * 2005-08-18 2007-06-28 Asys Automatic Systems Gmbh & Co. Kg Bearbeitungsanlage modularen Aufbaus für flächige Substrate
DE102005040741B4 (de) * 2005-08-26 2007-06-14 Asys Automatic Systems Gmbh & Co. Kg Bearbeitungsanlage modularen Aufbaus für flächige Substrate
US7771150B2 (en) * 2005-08-26 2010-08-10 Jusung Engineering Co., Ltd. Gate valve and substrate-treating apparatus including the same
TWI328854B (en) * 2005-09-14 2010-08-11 Applied Materials Inc Methods and apparatus for a transfer station
US7661919B2 (en) * 2005-09-28 2010-02-16 Muratec Automation Co., Ltd. Discontinuous conveyor system
JP2007096140A (ja) * 2005-09-30 2007-04-12 Asyst Shinko Inc 懸垂式昇降搬送台車における物品の授受方法並びに装置
US7780392B2 (en) * 2005-10-27 2010-08-24 Muratec Automation Co., Ltd. Horizontal array stocker
US8267634B2 (en) * 2005-11-07 2012-09-18 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
US20070201967A1 (en) * 2005-11-07 2007-08-30 Bufano Michael L Reduced capacity carrier, transport, load port, buffer system
WO2007056443A2 (en) * 2005-11-07 2007-05-18 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
US20080107507A1 (en) * 2005-11-07 2008-05-08 Bufano Michael L Reduced capacity carrier, transport, load port, buffer system
WO2007061604A2 (en) * 2005-11-21 2007-05-31 Applied Materials, Inc. Apparatus and methods for a substrate carrier having an inflatable seal
US20070141280A1 (en) * 2005-12-16 2007-06-21 Applied Materials, Inc. Substrate carrier having an interior lining
US20070140822A1 (en) * 2005-12-16 2007-06-21 Applied Materials, Inc. Methods and apparatus for opening and closing substrate carriers
US7536233B1 (en) * 2006-01-30 2009-05-19 Advanced Micro Devices, Inc. Method and apparatus for adjusting processing speeds based on work-in-process levels
CN101490833B (zh) * 2006-05-11 2013-08-14 布鲁克斯自动化公司 容量减少的载物台，传送，加载端口，缓冲系统
EP2041728A4 (en) * 2006-07-10 2011-08-17 Advanced Tech Materials SYSTEMS AND METHODS FOR MANAGING MATERIAL STORAGE CONTAINERS HAVING INFORMATION STORAGE ELEMENTS
WO2008024225A2 (en) 2006-08-18 2008-02-28 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
US20080118334A1 (en) * 2006-11-22 2008-05-22 Bonora Anthony C Variable pitch storage shelves
US8160736B2 (en) * 2007-01-31 2012-04-17 Globalfoundries Singapore Pte. Ltd. Methods and apparatus for white space reduction in a production facility
US8337133B2 (en) * 2007-06-25 2012-12-25 International Business Machines Corporation Segregating wafer carrier types in semiconductor storage devices
JP5369419B2 (ja) * 2007-10-18 2013-12-18 村田機械株式会社 保管庫、保管庫セット及び保管庫付き搬送システム
US8672121B2 (en) 2007-10-22 2014-03-18 Applied Materials, Inc. Methods and apparatus for transporting substrate carriers
JP4992668B2 (ja) * 2007-10-31 2012-08-08 旭硝子株式会社 容器交換装置および容器交換方法
US8070410B2 (en) * 2008-02-05 2011-12-06 Lutz Rebstock Scalable stocker with automatic handling buffer
US9633881B2 (en) * 2008-02-05 2017-04-25 Brooks Automation, Inc. Automatic handling buffer for bare stocker
US8356968B2 (en) * 2008-02-12 2013-01-22 Applied Materials, Inc. Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transfer
JP5256810B2 (ja) * 2008-03-24 2013-08-07 村田機械株式会社 保管庫装置及び保管庫付き搬送システム
US8882433B2 (en) * 2009-05-18 2014-11-11 Brooks Automation, Inc. Integrated systems for interfacing with substrate container storage systems
JP5721701B2 (ja) * 2009-05-18 2015-05-20 ブルックス オートメーション インコーポレイテッド 基板用容器貯蔵システム
TWI496732B (zh) * 2009-07-31 2015-08-21 Murata Machinery Ltd 供工具利用之緩衝儲存和運輸裝置
US8275480B2 (en) * 2009-11-17 2012-09-25 Toyota Motor Engineering & Manufacturing North America, Inc. Methods and systems for transporting parts from a primary process to a secondary process in a first in, first out fashion
JP5633738B2 (ja) * 2010-09-27 2014-12-03 株式会社ダイフク 物品搬送設備
US8888434B2 (en) 2011-09-05 2014-11-18 Dynamic Micro System Container storage add-on for bare workpiece stocker
US9385019B2 (en) 2012-06-21 2016-07-05 Globalfoundries Inc. Overhead substrate handling and storage system
US9748088B2 (en) 2013-12-09 2017-08-29 Globalfoundries Inc. Method, storage medium and system for controlling the processing of lots of workpieces
EP3159921B1 (en) * 2014-06-19 2021-06-16 Murata Machinery, Ltd. Carrier buffering device and storage method
US10520932B2 (en) * 2014-07-03 2019-12-31 Taiwan Semiconductor Manufacturing Co., Ltd Transport system and method
US9632499B2 (en) 2014-11-03 2017-04-25 GlobalFoundries, Inc. Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits
US20160236865A1 (en) * 2015-02-16 2016-08-18 David Altemir Automated Warehouse Storage and Retrieval System
JP6531642B2 (ja) * 2015-12-24 2019-06-19 株式会社ダイフク 物品搬送設備
CN109843751B (zh) * 2016-10-18 2021-06-08 村田机械株式会社 高架输送车以及输送系统
US10651066B2 (en) * 2017-11-24 2020-05-12 Taiwan Semiconductor Manufacturing Co., Ltd. Metrology method in wafer transportation
US11658053B2 (en) 2019-10-21 2023-05-23 Globalfoundries U.S. Inc. Conversion plate for reticle pod storage and a reticle pod storage system
US11569108B2 (en) 2020-06-15 2023-01-31 Globalfoundries U.S. Inc. Reticle pod conversion plate for interfacing with a tool

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU685569A1 (ru) * 1974-03-06 1979-09-15 Ленинградский Государственный Проектный Институт Министерства Промышленнсти Средств Связи Устройство дл загрузки и разгрузки стеллажей склада штучными грузами
US4532970A (en) 1983-09-28 1985-08-06 Hewlett-Packard Company Particle-free dockable interface for integrated circuit processing
US4534389A (en) 1984-03-29 1985-08-13 Hewlett-Packard Company Interlocking door latch for dockable interface for integrated circuit processing
SE451831B (sv) * 1985-09-16 1987-11-02 Knight Konsult Ing Materialhanteringssystem
US4964776A (en) * 1987-12-01 1990-10-23 Tsubakimoto Chain Co. Article transfer and storage system
JPH0630371B2 (ja) * 1988-05-02 1994-04-20 日立機電工業株式会社 クリーンルーム内のウエハキャリアの搬送方法
IT1235835B (it) * 1989-08-08 1992-11-03 Sgs Thomson Microelectronics Movimentazione automatica di contenitori diversi con punti di prelievo e di codificazione standarizzati
JPH0439953A (ja) * 1990-06-05 1992-02-10 Seiko Epson Corp 半導体搬送システム
JPH04158508A (ja) * 1990-10-22 1992-06-01 Mitsubishi Electric Corp 半導体ウェハ搬送システム
US5387265A (en) * 1991-10-29 1995-02-07 Kokusai Electric Co., Ltd. Semiconductor wafer reaction furnace with wafer transfer means
US5363867A (en) * 1992-01-21 1994-11-15 Shinko Electric Co., Ltd. Article storage house in a clean room
JP3082389B2 (ja) * 1992-01-27 2000-08-28 神鋼電機株式会社 クリーンルーム用保管庫
JPH05294410A (ja) * 1992-04-21 1993-11-09 Daifuku Co Ltd 荷保管設備
JPH05299489A (ja) * 1992-04-23 1993-11-12 Fuji Electric Co Ltd ウェーハ搬送用ロボット
JPH0616206A (ja) * 1992-07-03 1994-01-25 Shinko Electric Co Ltd クリーンルーム内搬送システム
ATE129359T1 (de) * 1992-08-04 1995-11-15 Ibm Verteilungseinrichtung mit gaszufuhr- abgabevorrichtung zum handhaben und speichern von abdichtbaren tragbaren unter druck stehenden behältern.
JP3258748B2 (ja) * 1993-02-08 2002-02-18 東京エレクトロン株式会社 熱処理装置
US5527390A (en) * 1993-03-19 1996-06-18 Tokyo Electron Kabushiki Treatment system including a plurality of treatment apparatus
KR100221983B1 (ko) * 1993-04-13 1999-09-15 히가시 데쓰로 처리장치
JPH0722490A (ja) * 1993-06-30 1995-01-24 Mitsubishi Electric Corp ロット自動編成装置及び方法
US5570990A (en) * 1993-11-05 1996-11-05 Asyst Technologies, Inc. Human guided mobile loader stocker
JP3331746B2 (ja) * 1994-05-17 2002-10-07 神鋼電機株式会社 搬送システム
JP3202137B2 (ja) * 1994-10-24 2001-08-27 大日本スクリーン製造株式会社 基板処理装置のキャリア搬入・搬出装置
ES2229247T3 (es) * 1995-03-28 2005-04-16 Brooks Automation Gmbh Estacion de carga y descarga para instalaciones de tratamiento de semiconductores.
JPH0936198A (ja) * 1995-07-19 1997-02-07 Hitachi Ltd 真空処理装置およびそれを用いた半導体製造ライン

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018132814B3 (de) * 2018-12-19 2020-03-26 SSI Schäfer Automation GmbH (DE) Lager- und Kommissioniersystem und Verfahren zum Konfigurieren eines Fahrzeugs

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EP1028905A1 (en) 2000-08-23
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WO1998046503A1 (en) 1998-10-22
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KR20010006331A (ko) 2001-01-26
JP4068160B2 (ja) 2008-03-26

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