DE69833760T2 - Schutzring zur verminderung des dunkelstroms - Google Patents
Schutzring zur verminderung des dunkelstroms Download PDFInfo
- Publication number
- DE69833760T2 DE69833760T2 DE69833760T DE69833760T DE69833760T2 DE 69833760 T2 DE69833760 T2 DE 69833760T2 DE 69833760 T DE69833760 T DE 69833760T DE 69833760 T DE69833760 T DE 69833760T DE 69833760 T2 DE69833760 T2 DE 69833760T2
- Authority
- DE
- Germany
- Prior art keywords
- photodiode
- guard ring
- substrate
- sti
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000001681 protective effect Effects 0.000 title claims 2
- 239000000758 substrate Substances 0.000 claims description 22
- 238000012805 post-processing Methods 0.000 claims description 2
- 239000002019 doping agent Substances 0.000 claims 1
- 230000007704 transition Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 239000002184 metal Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000002955 isolation Methods 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/112—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
- H01L31/113—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US941800 | 1997-09-30 | ||
US08/941,800 US5859450A (en) | 1997-09-30 | 1997-09-30 | Dark current reducing guard ring |
PCT/US1998/014024 WO1999017380A1 (fr) | 1997-09-30 | 1998-07-06 | Anneau de garde reduisant le courant d'obscurite |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69833760D1 DE69833760D1 (de) | 2006-05-04 |
DE69833760T2 true DE69833760T2 (de) | 2006-09-07 |
Family
ID=25477082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69833760T Expired - Fee Related DE69833760T2 (de) | 1997-09-30 | 1998-07-06 | Schutzring zur verminderung des dunkelstroms |
Country Status (10)
Country | Link |
---|---|
US (1) | US5859450A (fr) |
EP (1) | EP1034570B1 (fr) |
JP (1) | JP4309574B2 (fr) |
KR (1) | KR100371457B1 (fr) |
AU (1) | AU8291798A (fr) |
DE (1) | DE69833760T2 (fr) |
HK (1) | HK1029439A1 (fr) |
RU (1) | RU2178600C1 (fr) |
TW (1) | TW441119B (fr) |
WO (1) | WO1999017380A1 (fr) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100253372B1 (ko) * | 1997-12-08 | 2000-04-15 | 김영환 | 반도체 소자 및 그 제조방법 |
TW396645B (en) * | 1998-06-16 | 2000-07-01 | United Microelectronics Corp | Manufacturing method of CMOS sensor devices |
US6545711B1 (en) * | 1998-11-02 | 2003-04-08 | Agilent Technologies, Inc. | Photo diode pixel sensor array having a guard ring |
US6073343A (en) * | 1998-12-22 | 2000-06-13 | General Electric Company | Method of providing a variable guard ring width between detectors on a substrate |
US6147366A (en) * | 1999-02-08 | 2000-11-14 | Intel Corporation | On chip CMOS optical element |
US6445014B1 (en) | 1999-06-16 | 2002-09-03 | Micron Technology Inc. | Retrograde well structure for a CMOS imager |
US6310366B1 (en) | 1999-06-16 | 2001-10-30 | Micron Technology, Inc. | Retrograde well structure for a CMOS imager |
US6512401B2 (en) | 1999-09-10 | 2003-01-28 | Intel Corporation | Output buffer for high and low voltage bus |
US7133074B1 (en) | 1999-09-28 | 2006-11-07 | Zoran Corporation | Image sensor circuits including sampling circuits used therein for performing correlated double sampling |
US6465862B1 (en) * | 1999-10-05 | 2002-10-15 | Brannon Harris | Method and apparatus for implementing efficient CMOS photo sensors |
US6627475B1 (en) | 2000-01-18 | 2003-09-30 | Taiwan Semiconductor Manufacturing Company | Buried photodiode structure for CMOS image sensor |
US6194258B1 (en) | 2000-01-18 | 2001-02-27 | Taiwan Semiconductor Manufacturing Company | Method of forming an image sensor cell and a CMOS logic circuit device |
DE10003472C1 (de) | 2000-01-27 | 2001-04-26 | Infineon Technologies Ag | Zufallszahlengenerator |
US6309905B1 (en) | 2000-01-31 | 2001-10-30 | Taiwan Semiconductor Manufacturing Company | Stripe photodiode element with high quantum efficiency for an image sensor cell |
EP1208599A1 (fr) | 2000-03-09 | 2002-05-29 | Koninklijke Philips Electronics N.V. | Capteur d'imagerie a l'etat solide utilise dans une technologie submicronique et procede de fabrication et d'utilisation d'un capteur d'imagerie a l'etat solide |
US6365926B1 (en) | 2000-09-20 | 2002-04-02 | Eastman Kodak Company | CMOS active pixel with scavenging diode |
KR20020096336A (ko) * | 2001-06-19 | 2002-12-31 | 삼성전자 주식회사 | 씨모스형 촬상 장치 |
US20030049925A1 (en) * | 2001-09-10 | 2003-03-13 | Layman Paul Arthur | High-density inter-die interconnect structure |
KR100454074B1 (ko) * | 2001-12-26 | 2004-10-26 | 동부전자 주식회사 | 반도체 소자의 이미지 센서 제조 방법 |
US6534356B1 (en) | 2002-04-09 | 2003-03-18 | Taiwan Semiconductor Manufacturing Company | Method of reducing dark current for an image sensor device via use of a polysilicon pad |
AU2002354316A1 (en) * | 2002-11-05 | 2004-06-07 | Akademia Gorniczo-Hutnicza | Monolithic active pixel dosimeter |
US6818930B2 (en) * | 2002-11-12 | 2004-11-16 | Micron Technology, Inc. | Gated isolation structure for imagers |
KR100907884B1 (ko) * | 2002-12-31 | 2009-07-15 | 동부일렉트로닉스 주식회사 | 반도체 포토 다이오드 및 이의 제조 방법 |
US6897082B2 (en) * | 2003-06-16 | 2005-05-24 | Micron Technology, Inc. | Method of forming well for CMOS imager |
KR100535924B1 (ko) * | 2003-09-22 | 2005-12-09 | 동부아남반도체 주식회사 | 시모스 이미지 센서 및 그 제조방법 |
US7180049B2 (en) * | 2004-11-08 | 2007-02-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Image sensor with optical guard rings and method for forming the same |
US7348651B2 (en) * | 2004-12-09 | 2008-03-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Pinned photodiode fabricated with shallow trench isolation |
US7342268B2 (en) * | 2004-12-23 | 2008-03-11 | International Business Machines Corporation | CMOS imager with Cu wiring and method of eliminating high reflectivity interfaces therefrom |
US7564083B2 (en) * | 2005-02-25 | 2009-07-21 | United Microelectronics Corp. | Active pixel sensor |
KR100949753B1 (ko) * | 2005-08-31 | 2010-03-25 | 후지쯔 마이크로일렉트로닉스 가부시키가이샤 | 포토 다이오드, 고체 촬상 장치, 및 그 제조 방법 |
WO2008113067A2 (fr) * | 2007-03-15 | 2008-09-18 | Johns Hopkins University | Pixel de photodétecteur monophotonique cmos nano et submicronique profondeur avec des circuits basés sur des événements pour une réduction de vitesse de données de lecture |
US7598575B1 (en) * | 2007-09-12 | 2009-10-06 | National Semiconductor Corporation | Semiconductor die with reduced RF attenuation |
US8188578B2 (en) * | 2008-05-29 | 2012-05-29 | Mediatek Inc. | Seal ring structure for integrated circuits |
US8815634B2 (en) * | 2008-10-31 | 2014-08-26 | Varian Semiconductor Equipment Associates, Inc. | Dark currents and reducing defects in image sensors and photovoltaic junctions |
US8138531B2 (en) * | 2009-09-17 | 2012-03-20 | International Business Machines Corporation | Structures, design structures and methods of fabricating global shutter pixel sensor cells |
US9171726B2 (en) * | 2009-11-06 | 2015-10-27 | Infineon Technologies Ag | Low noise semiconductor devices |
JP5631668B2 (ja) * | 2010-09-02 | 2014-11-26 | Nttエレクトロニクス株式会社 | アバランシ・フォトダイオード |
KR101804268B1 (ko) * | 2010-11-02 | 2018-01-11 | 삼성전자주식회사 | 후면수광 이미지 센서에서 노이즈 차단을 위한 깊은 가드링 구조 및 잡음방지영역을 갖는 이미지센서 및 그 제조방법 |
RU2497319C1 (ru) * | 2012-02-28 | 2013-10-27 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Национальный исследовательский университет "Высшая школа экономики" | Печатная плата для бортовой радиоэлектронной аппаратуры космических аппаратов |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS526097A (en) * | 1975-07-03 | 1977-01-18 | Moririka:Kk | Planar type photodiode |
US4096622A (en) * | 1975-07-31 | 1978-06-27 | General Motors Corporation | Ion implanted Schottky barrier diode |
US4137109A (en) * | 1976-04-12 | 1979-01-30 | Texas Instruments Incorporated | Selective diffusion and etching method for isolation of integrated logic circuit |
US4261095A (en) * | 1978-12-11 | 1981-04-14 | International Business Machines Corporation | Self aligned schottky guard ring |
US4414737A (en) * | 1981-01-30 | 1983-11-15 | Tokyo Shibaura Denki Kabushiki Kaisha | Production of Schottky barrier diode |
US4691435A (en) * | 1981-05-13 | 1987-09-08 | International Business Machines Corporation | Method for making Schottky diode having limited area self-aligned guard ring |
JPS58115873A (ja) * | 1981-12-28 | 1983-07-09 | Fujitsu Ltd | 半導体受光素子 |
US4507853A (en) * | 1982-08-23 | 1985-04-02 | Texas Instruments Incorporated | Metallization process for integrated circuits |
US4549914A (en) * | 1984-04-09 | 1985-10-29 | At&T Bell Laboratories | Integrated circuit contact technique |
US4656732A (en) * | 1984-09-26 | 1987-04-14 | Texas Instruments Incorporated | Integrated circuit fabrication process |
US4722910A (en) * | 1986-05-27 | 1988-02-02 | Analog Devices, Inc. | Partially self-aligned metal contact process |
US5221856A (en) * | 1989-04-05 | 1993-06-22 | U.S. Philips Corp. | Bipolar transistor with floating guard region under extrinsic base |
JPH036860A (ja) * | 1989-06-02 | 1991-01-14 | Nec Corp | 固体撮像素子 |
JP2661341B2 (ja) * | 1990-07-24 | 1997-10-08 | 三菱電機株式会社 | 半導体受光素子 |
JPH0582823A (ja) * | 1991-09-20 | 1993-04-02 | Sharp Corp | フオトトランジスタ |
JPH0677452A (ja) * | 1992-06-26 | 1994-03-18 | Nikon Corp | 固体撮像装置 |
US5438217A (en) * | 1994-04-29 | 1995-08-01 | General Electric Company | Planar avalanche photodiode array with sidewall segment |
US5614744A (en) * | 1995-08-04 | 1997-03-25 | National Semiconductor Corporation | CMOS-based, low leakage active pixel array with anti-blooming isolation |
US5841158A (en) * | 1996-03-01 | 1998-11-24 | Foveonics, Inc. | Low-stress photodiode with reduced junction leakage |
JPH09321332A (ja) * | 1996-05-31 | 1997-12-12 | Oki Electric Ind Co Ltd | 半導体受光素子の製造方法 |
JP2996943B2 (ja) * | 1998-03-09 | 2000-01-11 | 株式会社東芝 | 半導体受光装置及びその製造方法 |
-
1997
- 1997-09-30 US US08/941,800 patent/US5859450A/en not_active Expired - Fee Related
-
1998
- 1998-07-06 EP EP98933209A patent/EP1034570B1/fr not_active Expired - Lifetime
- 1998-07-06 JP JP2000514343A patent/JP4309574B2/ja not_active Expired - Fee Related
- 1998-07-06 AU AU82917/98A patent/AU8291798A/en not_active Abandoned
- 1998-07-06 KR KR10-2000-7003432A patent/KR100371457B1/ko not_active IP Right Cessation
- 1998-07-06 WO PCT/US1998/014024 patent/WO1999017380A1/fr active IP Right Grant
- 1998-07-06 DE DE69833760T patent/DE69833760T2/de not_active Expired - Fee Related
- 1998-07-06 RU RU2000111514/28A patent/RU2178600C1/ru not_active IP Right Cessation
- 1998-07-14 TW TW087111407A patent/TW441119B/zh not_active IP Right Cessation
-
2000
- 2000-12-29 HK HK00108568A patent/HK1029439A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP4309574B2 (ja) | 2009-08-05 |
JP2001518719A (ja) | 2001-10-16 |
EP1034570A4 (fr) | 2002-09-25 |
TW441119B (en) | 2001-06-16 |
AU8291798A (en) | 1999-04-23 |
WO1999017380A1 (fr) | 1999-04-08 |
US5859450A (en) | 1999-01-12 |
HK1029439A1 (en) | 2001-03-30 |
RU2178600C1 (ru) | 2002-01-20 |
EP1034570A1 (fr) | 2000-09-13 |
DE69833760D1 (de) | 2006-05-04 |
EP1034570B1 (fr) | 2006-03-08 |
KR20010030818A (ko) | 2001-04-16 |
KR100371457B1 (ko) | 2003-02-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: HEYER, V., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 806 |
|
8339 | Ceased/non-payment of the annual fee |