HK1029439A1 - Dark current reducing guard ring - Google Patents
Dark current reducing guard ringInfo
- Publication number
- HK1029439A1 HK1029439A1 HK00108568A HK00108568A HK1029439A1 HK 1029439 A1 HK1029439 A1 HK 1029439A1 HK 00108568 A HK00108568 A HK 00108568A HK 00108568 A HK00108568 A HK 00108568A HK 1029439 A1 HK1029439 A1 HK 1029439A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- guard ring
- dark current
- current reducing
- reducing guard
- dark
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/112—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
- H01L31/113—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/941,800 US5859450A (en) | 1997-09-30 | 1997-09-30 | Dark current reducing guard ring |
PCT/US1998/014024 WO1999017380A1 (en) | 1997-09-30 | 1998-07-06 | Dark current reducing guard ring |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1029439A1 true HK1029439A1 (en) | 2001-03-30 |
Family
ID=25477082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK00108568A HK1029439A1 (en) | 1997-09-30 | 2000-12-29 | Dark current reducing guard ring |
Country Status (10)
Country | Link |
---|---|
US (1) | US5859450A (xx) |
EP (1) | EP1034570B1 (xx) |
JP (1) | JP4309574B2 (xx) |
KR (1) | KR100371457B1 (xx) |
AU (1) | AU8291798A (xx) |
DE (1) | DE69833760T2 (xx) |
HK (1) | HK1029439A1 (xx) |
RU (1) | RU2178600C1 (xx) |
TW (1) | TW441119B (xx) |
WO (1) | WO1999017380A1 (xx) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100253372B1 (ko) | 1997-12-08 | 2000-04-15 | 김영환 | 반도체 소자 및 그 제조방법 |
TW396645B (en) * | 1998-06-16 | 2000-07-01 | United Microelectronics Corp | Manufacturing method of CMOS sensor devices |
US6545711B1 (en) * | 1998-11-02 | 2003-04-08 | Agilent Technologies, Inc. | Photo diode pixel sensor array having a guard ring |
US6073343A (en) * | 1998-12-22 | 2000-06-13 | General Electric Company | Method of providing a variable guard ring width between detectors on a substrate |
US6147366A (en) * | 1999-02-08 | 2000-11-14 | Intel Corporation | On chip CMOS optical element |
US6310366B1 (en) * | 1999-06-16 | 2001-10-30 | Micron Technology, Inc. | Retrograde well structure for a CMOS imager |
US6445014B1 (en) | 1999-06-16 | 2002-09-03 | Micron Technology Inc. | Retrograde well structure for a CMOS imager |
US6512401B2 (en) | 1999-09-10 | 2003-01-28 | Intel Corporation | Output buffer for high and low voltage bus |
US7133074B1 (en) | 1999-09-28 | 2006-11-07 | Zoran Corporation | Image sensor circuits including sampling circuits used therein for performing correlated double sampling |
US6465862B1 (en) * | 1999-10-05 | 2002-10-15 | Brannon Harris | Method and apparatus for implementing efficient CMOS photo sensors |
US6194258B1 (en) | 2000-01-18 | 2001-02-27 | Taiwan Semiconductor Manufacturing Company | Method of forming an image sensor cell and a CMOS logic circuit device |
US6627475B1 (en) | 2000-01-18 | 2003-09-30 | Taiwan Semiconductor Manufacturing Company | Buried photodiode structure for CMOS image sensor |
DE10003472C1 (de) | 2000-01-27 | 2001-04-26 | Infineon Technologies Ag | Zufallszahlengenerator |
US6309905B1 (en) | 2000-01-31 | 2001-10-30 | Taiwan Semiconductor Manufacturing Company | Stripe photodiode element with high quantum efficiency for an image sensor cell |
JP2003526925A (ja) | 2000-03-09 | 2003-09-09 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | サブミクロン技術による固体イメージング・センサおよび固体イメージング・センサの製造および使用方法 |
US6365926B1 (en) | 2000-09-20 | 2002-04-02 | Eastman Kodak Company | CMOS active pixel with scavenging diode |
KR20020096336A (ko) * | 2001-06-19 | 2002-12-31 | 삼성전자 주식회사 | 씨모스형 촬상 장치 |
US20030049925A1 (en) * | 2001-09-10 | 2003-03-13 | Layman Paul Arthur | High-density inter-die interconnect structure |
KR100454074B1 (ko) * | 2001-12-26 | 2004-10-26 | 동부전자 주식회사 | 반도체 소자의 이미지 센서 제조 방법 |
US6534356B1 (en) | 2002-04-09 | 2003-03-18 | Taiwan Semiconductor Manufacturing Company | Method of reducing dark current for an image sensor device via use of a polysilicon pad |
AU2002354316A1 (en) * | 2002-11-05 | 2004-06-07 | Akademia Gorniczo-Hutnicza | Monolithic active pixel dosimeter |
US6818930B2 (en) * | 2002-11-12 | 2004-11-16 | Micron Technology, Inc. | Gated isolation structure for imagers |
KR100907884B1 (ko) * | 2002-12-31 | 2009-07-15 | 동부일렉트로닉스 주식회사 | 반도체 포토 다이오드 및 이의 제조 방법 |
US6897082B2 (en) * | 2003-06-16 | 2005-05-24 | Micron Technology, Inc. | Method of forming well for CMOS imager |
KR100535924B1 (ko) * | 2003-09-22 | 2005-12-09 | 동부아남반도체 주식회사 | 시모스 이미지 센서 및 그 제조방법 |
US7180049B2 (en) * | 2004-11-08 | 2007-02-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Image sensor with optical guard rings and method for forming the same |
US7348651B2 (en) * | 2004-12-09 | 2008-03-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Pinned photodiode fabricated with shallow trench isolation |
US7342268B2 (en) * | 2004-12-23 | 2008-03-11 | International Business Machines Corporation | CMOS imager with Cu wiring and method of eliminating high reflectivity interfaces therefrom |
US7564083B2 (en) * | 2005-02-25 | 2009-07-21 | United Microelectronics Corp. | Active pixel sensor |
JP4751395B2 (ja) * | 2005-08-31 | 2011-08-17 | 富士通セミコンダクター株式会社 | フォトダイオード、固体撮像装置、およびその製造方法 |
US8259293B2 (en) * | 2007-03-15 | 2012-09-04 | Johns Hopkins University | Deep submicron and nano CMOS single photon photodetector pixel with event based circuits for readout data-rate reduction communication system |
US7598575B1 (en) * | 2007-09-12 | 2009-10-06 | National Semiconductor Corporation | Semiconductor die with reduced RF attenuation |
US8188578B2 (en) * | 2008-05-29 | 2012-05-29 | Mediatek Inc. | Seal ring structure for integrated circuits |
US8815634B2 (en) * | 2008-10-31 | 2014-08-26 | Varian Semiconductor Equipment Associates, Inc. | Dark currents and reducing defects in image sensors and photovoltaic junctions |
US8138531B2 (en) * | 2009-09-17 | 2012-03-20 | International Business Machines Corporation | Structures, design structures and methods of fabricating global shutter pixel sensor cells |
US9171726B2 (en) | 2009-11-06 | 2015-10-27 | Infineon Technologies Ag | Low noise semiconductor devices |
JP5631668B2 (ja) * | 2010-09-02 | 2014-11-26 | Nttエレクトロニクス株式会社 | アバランシ・フォトダイオード |
KR101804268B1 (ko) | 2010-11-02 | 2018-01-11 | 삼성전자주식회사 | 후면수광 이미지 센서에서 노이즈 차단을 위한 깊은 가드링 구조 및 잡음방지영역을 갖는 이미지센서 및 그 제조방법 |
RU2497319C1 (ru) * | 2012-02-28 | 2013-10-27 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Национальный исследовательский университет "Высшая школа экономики" | Печатная плата для бортовой радиоэлектронной аппаратуры космических аппаратов |
Family Cites Families (21)
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JPS526097A (en) * | 1975-07-03 | 1977-01-18 | Moririka:Kk | Planar type photodiode |
US4096622A (en) * | 1975-07-31 | 1978-06-27 | General Motors Corporation | Ion implanted Schottky barrier diode |
US4137109A (en) * | 1976-04-12 | 1979-01-30 | Texas Instruments Incorporated | Selective diffusion and etching method for isolation of integrated logic circuit |
US4261095A (en) * | 1978-12-11 | 1981-04-14 | International Business Machines Corporation | Self aligned schottky guard ring |
US4414737A (en) * | 1981-01-30 | 1983-11-15 | Tokyo Shibaura Denki Kabushiki Kaisha | Production of Schottky barrier diode |
US4691435A (en) * | 1981-05-13 | 1987-09-08 | International Business Machines Corporation | Method for making Schottky diode having limited area self-aligned guard ring |
JPS58115873A (ja) * | 1981-12-28 | 1983-07-09 | Fujitsu Ltd | 半導体受光素子 |
US4507853A (en) * | 1982-08-23 | 1985-04-02 | Texas Instruments Incorporated | Metallization process for integrated circuits |
US4549914A (en) * | 1984-04-09 | 1985-10-29 | At&T Bell Laboratories | Integrated circuit contact technique |
US4656732A (en) * | 1984-09-26 | 1987-04-14 | Texas Instruments Incorporated | Integrated circuit fabrication process |
US4722910A (en) * | 1986-05-27 | 1988-02-02 | Analog Devices, Inc. | Partially self-aligned metal contact process |
US5221856A (en) * | 1989-04-05 | 1993-06-22 | U.S. Philips Corp. | Bipolar transistor with floating guard region under extrinsic base |
JPH036860A (ja) * | 1989-06-02 | 1991-01-14 | Nec Corp | 固体撮像素子 |
JP2661341B2 (ja) * | 1990-07-24 | 1997-10-08 | 三菱電機株式会社 | 半導体受光素子 |
JPH0582823A (ja) * | 1991-09-20 | 1993-04-02 | Sharp Corp | フオトトランジスタ |
JPH0677452A (ja) * | 1992-06-26 | 1994-03-18 | Nikon Corp | 固体撮像装置 |
US5438217A (en) * | 1994-04-29 | 1995-08-01 | General Electric Company | Planar avalanche photodiode array with sidewall segment |
US5614744A (en) * | 1995-08-04 | 1997-03-25 | National Semiconductor Corporation | CMOS-based, low leakage active pixel array with anti-blooming isolation |
US5841158A (en) * | 1996-03-01 | 1998-11-24 | Foveonics, Inc. | Low-stress photodiode with reduced junction leakage |
JPH09321332A (ja) * | 1996-05-31 | 1997-12-12 | Oki Electric Ind Co Ltd | 半導体受光素子の製造方法 |
JP2996943B2 (ja) * | 1998-03-09 | 2000-01-11 | 株式会社東芝 | 半導体受光装置及びその製造方法 |
-
1997
- 1997-09-30 US US08/941,800 patent/US5859450A/en not_active Expired - Fee Related
-
1998
- 1998-07-06 KR KR10-2000-7003432A patent/KR100371457B1/ko not_active IP Right Cessation
- 1998-07-06 JP JP2000514343A patent/JP4309574B2/ja not_active Expired - Fee Related
- 1998-07-06 EP EP98933209A patent/EP1034570B1/en not_active Expired - Lifetime
- 1998-07-06 WO PCT/US1998/014024 patent/WO1999017380A1/en active IP Right Grant
- 1998-07-06 AU AU82917/98A patent/AU8291798A/en not_active Abandoned
- 1998-07-06 DE DE69833760T patent/DE69833760T2/de not_active Expired - Fee Related
- 1998-07-06 RU RU2000111514/28A patent/RU2178600C1/ru not_active IP Right Cessation
- 1998-07-14 TW TW087111407A patent/TW441119B/zh not_active IP Right Cessation
-
2000
- 2000-12-29 HK HK00108568A patent/HK1029439A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE69833760D1 (de) | 2006-05-04 |
KR100371457B1 (ko) | 2003-02-07 |
JP2001518719A (ja) | 2001-10-16 |
EP1034570B1 (en) | 2006-03-08 |
JP4309574B2 (ja) | 2009-08-05 |
EP1034570A1 (en) | 2000-09-13 |
KR20010030818A (ko) | 2001-04-16 |
RU2178600C1 (ru) | 2002-01-20 |
TW441119B (en) | 2001-06-16 |
DE69833760T2 (de) | 2006-09-07 |
EP1034570A4 (en) | 2002-09-25 |
AU8291798A (en) | 1999-04-23 |
US5859450A (en) | 1999-01-12 |
WO1999017380A1 (en) | 1999-04-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20100706 |