DE69829774T2 - Vorrichtung und verfahren zur dampfphasenabscheidung einer beschichtung - Google Patents
Vorrichtung und verfahren zur dampfphasenabscheidung einer beschichtung Download PDFInfo
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- DE69829774T2 DE69829774T2 DE69829774T DE69829774T DE69829774T2 DE 69829774 T2 DE69829774 T2 DE 69829774T2 DE 69829774 T DE69829774 T DE 69829774T DE 69829774 T DE69829774 T DE 69829774T DE 69829774 T2 DE69829774 T2 DE 69829774T2
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- liquid mixture
- vapor
- carrier gas
- coating
- stream
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- JTJMJGYZQZDUJJ-UHFFFAOYSA-N phencyclidine Chemical compound C1CCCCN1C1(C=2C=CC=CC=2)CCCCC1 JTJMJGYZQZDUJJ-UHFFFAOYSA-N 0.000 description 1
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- 125000003011 styrenyl group Chemical group [H]\C(*)=C(/[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- USPTVMVRNZEXCP-UHFFFAOYSA-N sulfamoyl fluoride Chemical compound NS(F)(=O)=O USPTVMVRNZEXCP-UHFFFAOYSA-N 0.000 description 1
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- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- JMXKSZRRTHPKDL-UHFFFAOYSA-N titanium ethoxide Chemical compound [Ti+4].CC[O-].CC[O-].CC[O-].CC[O-] JMXKSZRRTHPKDL-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- ORVMIVQULIKXCP-UHFFFAOYSA-N trichloro(phenyl)silane Chemical compound Cl[Si](Cl)(Cl)C1=CC=CC=C1 ORVMIVQULIKXCP-UHFFFAOYSA-N 0.000 description 1
- FRGPKMWIYVTFIQ-UHFFFAOYSA-N triethoxy(3-isocyanatopropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCCN=C=O FRGPKMWIYVTFIQ-UHFFFAOYSA-N 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 description 1
- NBXZNTLFQLUFES-UHFFFAOYSA-N triethoxy(propyl)silane Chemical compound CCC[Si](OCC)(OCC)OCC NBXZNTLFQLUFES-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- 150000003672 ureas Chemical class 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
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- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
- B05B7/0807—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets
- B05B7/0861—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets with one single jet constituted by a liquid or a mixture containing a liquid and several gas jets
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Nozzles (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/980,947 US6045864A (en) | 1997-12-01 | 1997-12-01 | Vapor coating method |
| US980947 | 1997-12-01 | ||
| PCT/US1998/024230 WO1999028051A1 (en) | 1997-12-01 | 1998-11-12 | Vapor coating apparatus and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69829774D1 DE69829774D1 (de) | 2005-05-19 |
| DE69829774T2 true DE69829774T2 (de) | 2006-03-09 |
Family
ID=25527985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69829774T Expired - Lifetime DE69829774T2 (de) | 1997-12-01 | 1998-11-12 | Vorrichtung und verfahren zur dampfphasenabscheidung einer beschichtung |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6045864A (https=) |
| EP (1) | EP1035927B1 (https=) |
| JP (1) | JP4526704B2 (https=) |
| KR (1) | KR100571893B1 (https=) |
| DE (1) | DE69829774T2 (https=) |
| WO (1) | WO1999028051A1 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011014311A1 (de) * | 2011-03-17 | 2012-09-20 | Centrotherm Thermal Solutions Gmbh & Co. Kg | Verfahren und Vorrichtung zum Einbringen eines Prozessgases in einem Prozessraum einer Prozesskammer |
| DE102024202567A1 (de) | 2024-03-19 | 2025-09-25 | Robert Bosch Gesellschaft mit beschränkter Haftung | Kondensationsbeschichtungsverfahren für Schaltungsträger |
Families Citing this family (192)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6224948B1 (en) | 1997-09-29 | 2001-05-01 | Battelle Memorial Institute | Plasma enhanced chemical deposition with low vapor pressure compounds |
| FR2774013B1 (fr) * | 1998-01-23 | 2000-04-07 | Jean Paul Garidel | Procede de traitement thermique d'une piece a l'aide d'au moins un liquide de transfert thermique et four a condensation pour sa mise en oeuvre |
| US6546757B1 (en) * | 1998-07-28 | 2003-04-15 | Brown University Research Foundation | Liquid spray pyrolysis method for the fabrication of optical fiber preforms, with reactant mixing |
| EP1127381B1 (en) | 1998-11-02 | 2015-09-23 | 3M Innovative Properties Company | Transparent conductive oxides for plastic flat panel displays |
| US6217947B1 (en) | 1998-12-16 | 2001-04-17 | Battelle Memorial Institute | Plasma enhanced polymer deposition onto fixtures |
| US6207238B1 (en) * | 1998-12-16 | 2001-03-27 | Battelle Memorial Institute | Plasma enhanced chemical deposition for high and/or low index of refraction polymers |
| US6207239B1 (en) | 1998-12-16 | 2001-03-27 | Battelle Memorial Institute | Plasma enhanced chemical deposition of conjugated polymer |
| US6228434B1 (en) * | 1998-12-16 | 2001-05-08 | Battelle Memorial Institute | Method of making a conformal coating of a microtextured surface |
| US6268695B1 (en) | 1998-12-16 | 2001-07-31 | Battelle Memorial Institute | Environmental barrier material for organic light emitting device and method of making |
| US6274204B1 (en) | 1998-12-16 | 2001-08-14 | Battelle Memorial Institute | Method of making non-linear optical polymer |
| US6228436B1 (en) | 1998-12-16 | 2001-05-08 | Battelle Memorial Institute | Method of making light emitting polymer composite material |
| US6503564B1 (en) * | 1999-02-26 | 2003-01-07 | 3M Innovative Properties Company | Method of coating microstructured substrates with polymeric layer(s), allowing preservation of surface feature profile |
| US6358570B1 (en) | 1999-03-31 | 2002-03-19 | Battelle Memorial Institute | Vacuum deposition and curing of oligomers and resins |
| US6506461B2 (en) * | 1999-03-31 | 2003-01-14 | Battelle Memorial Institute | Methods for making polyurethanes as thin films |
| US6503561B1 (en) * | 1999-07-08 | 2003-01-07 | Air Products And Chemicals, Inc. | Liquid precursor mixtures for deposition of multicomponent metal containing materials |
| US6238734B1 (en) * | 1999-07-08 | 2001-05-29 | Air Products And Chemicals, Inc. | Liquid precursor mixtures for deposition of multicomponent metal containing materials |
| US6229640B1 (en) * | 1999-08-11 | 2001-05-08 | Adc Telecommunications, Inc. | Microelectromechanical optical switch and method of manufacture thereof |
| US7081277B1 (en) * | 1999-10-22 | 2006-07-25 | Fujitsu Limited | Magnetic disk drive having a surface coating on a magnetic disk |
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1999
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011014311A1 (de) * | 2011-03-17 | 2012-09-20 | Centrotherm Thermal Solutions Gmbh & Co. Kg | Verfahren und Vorrichtung zum Einbringen eines Prozessgases in einem Prozessraum einer Prozesskammer |
| DE102024202567A1 (de) | 2024-03-19 | 2025-09-25 | Robert Bosch Gesellschaft mit beschränkter Haftung | Kondensationsbeschichtungsverfahren für Schaltungsträger |
Also Published As
| Publication number | Publication date |
|---|---|
| US6245150B1 (en) | 2001-06-12 |
| KR100571893B1 (ko) | 2006-04-18 |
| JP4526704B2 (ja) | 2010-08-18 |
| JP2001524386A (ja) | 2001-12-04 |
| DE69829774D1 (de) | 2005-05-19 |
| KR20010032621A (ko) | 2001-04-25 |
| EP1035927A1 (en) | 2000-09-20 |
| EP1035927B1 (en) | 2005-04-13 |
| WO1999028051A1 (en) | 1999-06-10 |
| US6045864A (en) | 2000-04-04 |
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