DE69733928T2 - Mikroelektronische kontaktstruktur und herstellungsverfahren dazu - Google Patents

Mikroelektronische kontaktstruktur und herstellungsverfahren dazu Download PDF

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Publication number
DE69733928T2
DE69733928T2 DE69733928T DE69733928T DE69733928T2 DE 69733928 T2 DE69733928 T2 DE 69733928T2 DE 69733928 T DE69733928 T DE 69733928T DE 69733928 T DE69733928 T DE 69733928T DE 69733928 T2 DE69733928 T2 DE 69733928T2
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DE
Germany
Prior art keywords
manufacturing
contact structure
method therefor
microelectronic contact
microelectronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69733928T
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English (en)
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DE69733928D1 (de
Inventor
Y Khandros
N Eldridge
L Mathieu
W Grube
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Inc
Original Assignee
FormFactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1996/008107 external-priority patent/WO1996037332A1/en
Priority claimed from US08/784,862 external-priority patent/US6064213A/en
Priority claimed from US08/788,740 external-priority patent/US5994152A/en
Priority claimed from US08/802,054 external-priority patent/US6482013B2/en
Application filed by FormFactor Inc filed Critical FormFactor Inc
Application granted granted Critical
Publication of DE69733928D1 publication Critical patent/DE69733928D1/de
Publication of DE69733928T2 publication Critical patent/DE69733928T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
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    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams
    • G—PHYSICS
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    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
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    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/10251—Elemental semiconductors, i.e. Group IV
    • H01L2924/10253—Silicon [Si]
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    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12042—LASER
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    • H01L2924/14—Integrated circuits
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    • H01L2924/3025—Electromagnetic shielding
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341—Surface mounted components
    • H05K3/3421—Leaded components
DE69733928T 1996-05-17 1997-05-15 Mikroelektronische kontaktstruktur und herstellungsverfahren dazu Expired - Fee Related DE69733928T2 (de)

Applications Claiming Priority (14)

Application Number Priority Date Filing Date Title
US518996P 1996-05-17 1996-05-17
PCT/US1996/008107 WO1996037332A1 (en) 1995-05-26 1996-05-24 Fabricating interconnects and tips using sacrificial substrates
US2086996P 1996-06-27 1996-06-27
US2440596P 1996-08-22 1996-08-22
US2455596P 1996-08-26 1996-08-26
US3069796P 1996-11-13 1996-11-13
US3266696P 1996-12-13 1996-12-13
US3405396P 1996-12-31 1996-12-31
US08/784,862 US6064213A (en) 1993-11-16 1997-01-15 Wafer-level burn-in and test
US08/788,740 US5994152A (en) 1996-02-21 1997-01-24 Fabricating interconnects and tips using sacrificial substrates
US08/802,054 US6482013B2 (en) 1993-11-16 1997-02-18 Microelectronic spring contact element and electronic component having a plurality of spring contact elements
US81946497A 1997-03-17 1997-03-17
US9230497P 1997-05-06 1997-05-06
PCT/US1997/008271 WO1997044676A1 (en) 1996-05-17 1997-05-15 Microelectronic contact structure and method of making same

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AU (1) AU3127797A (de)
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DE102010011854B4 (de) * 2010-03-18 2018-11-15 Epcos Ag Messkopf für eine verbesserte Kontaktierung

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JP2001526772A (ja) 2001-12-18
EP1482314B1 (de) 2009-11-11
JP2008275646A (ja) 2008-11-13
AU3127797A (en) 1997-12-09
EP1482314A1 (de) 2004-12-01
JP2008046139A (ja) 2008-02-28
EP2058667A2 (de) 2009-05-13
JP4084180B2 (ja) 2008-04-30
WO1997044676A1 (en) 1997-11-27
EP0839322A1 (de) 1998-05-06
JP2008014957A (ja) 2008-01-24
DE69733928D1 (de) 2005-09-15
EP0839322B1 (de) 2005-08-10
JP2003232809A (ja) 2003-08-22

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