JP5630947B2 - カンチレバー型プローブ - Google Patents
カンチレバー型プローブ Download PDFInfo
- Publication number
- JP5630947B2 JP5630947B2 JP2008084018A JP2008084018A JP5630947B2 JP 5630947 B2 JP5630947 B2 JP 5630947B2 JP 2008084018 A JP2008084018 A JP 2008084018A JP 2008084018 A JP2008084018 A JP 2008084018A JP 5630947 B2 JP5630947 B2 JP 5630947B2
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- JP
- Japan
- Prior art keywords
- probe
- tip
- shape
- cantilever type
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
11 先端接触部
111 先端
12 弾性変形部
13 後端支持部
2 プローブカード
3 検査台
4 半導体ウエハ
41 電極
α スクラブ方向
Claims (1)
- 先端部が折り曲げられたカンチレバー型プローブにおいて、前記折り曲げられた部分と先端の接触部との間のテーパ角を先端側から段階的に小さくし、前記接触部よりも後の部分が、前記折り曲げられた部分までの間で外側に膨らんだ形状にしたことを特徴とするカンチレバー型プローブ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2008084018A JP5630947B2 (ja) | 2008-03-27 | 2008-03-27 | カンチレバー型プローブ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008084018A JP5630947B2 (ja) | 2008-03-27 | 2008-03-27 | カンチレバー型プローブ |
Publications (2)
Publication Number | Publication Date |
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JP2009236724A JP2009236724A (ja) | 2009-10-15 |
JP5630947B2 true JP5630947B2 (ja) | 2014-11-26 |
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ID=41250857
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008084018A Active JP5630947B2 (ja) | 2008-03-27 | 2008-03-27 | カンチレバー型プローブ |
Country Status (1)
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JP (1) | JP5630947B2 (ja) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2572403B2 (ja) * | 1987-12-14 | 1997-01-16 | バブコツク日立株式会社 | ボイラ装置 |
EP0839322B1 (en) * | 1996-05-17 | 2005-08-10 | Formfactor, Inc. | Microelectronic contact structure and method of making same |
JP4659972B2 (ja) * | 2000-12-05 | 2011-03-30 | 株式会社東芝 | プローブピン用タングステン合金線およびその製造方法 |
JP2004093355A (ja) * | 2002-08-30 | 2004-03-25 | Toshiba Corp | Pd合金系プローブピンおよびそれを用いたプローブピン装置 |
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2008
- 2008-03-27 JP JP2008084018A patent/JP5630947B2/ja active Active
Also Published As
Publication number | Publication date |
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JP2009236724A (ja) | 2009-10-15 |
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