JP4704843B2 - プローブ - Google Patents
プローブ Download PDFInfo
- Publication number
- JP4704843B2 JP4704843B2 JP2005222876A JP2005222876A JP4704843B2 JP 4704843 B2 JP4704843 B2 JP 4704843B2 JP 2005222876 A JP2005222876 A JP 2005222876A JP 2005222876 A JP2005222876 A JP 2005222876A JP 4704843 B2 JP4704843 B2 JP 4704843B2
- Authority
- JP
- Japan
- Prior art keywords
- deformation
- probe
- fulcrum
- electrode
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000523 sample Substances 0.000 title claims description 60
- 238000003825 pressing Methods 0.000 claims description 9
- 230000005489 elastic deformation Effects 0.000 claims description 8
- 238000005201 scrubbing Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Images
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
Description
2 支持部
3 アーム部
4 第1のアーム部
5 第2のアーム部
6 第1の支点
7 第2の支点
8 先端部
9 基板
10 電極
11 第1変形部
12 第2変形部
13 停止部
14 第3変形部
15 第3のアーム部
16 第3の支点
Claims (2)
- 先端部および上記先端部と一体の弾性変形部を有し、上記弾性変形部が、上記先端部に加えられる軸方向の押圧力によって変形して上記先端部を所定の第1の方向に動かす第1変形部と、上記第1変形部の変形が所定の状態になった後に、上記押圧力の増加によって変形して上記第1の方向とは逆方向の第2の方向に上記先端部を動かす第2変形部とを備えたことを特徴とするプローブ。
- 第1変形部が、第1の支点と、上記第1の支点を支点として回動する第1のアーム部と、上記第1のアーム部の回動を所定量で停止させる停止部とを備えたことを特徴とする請求項1に記載のプローブ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005222876A JP4704843B2 (ja) | 2005-08-01 | 2005-08-01 | プローブ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005222876A JP4704843B2 (ja) | 2005-08-01 | 2005-08-01 | プローブ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007040743A JP2007040743A (ja) | 2007-02-15 |
JP2007040743A5 JP2007040743A5 (ja) | 2008-09-18 |
JP4704843B2 true JP4704843B2 (ja) | 2011-06-22 |
Family
ID=37798885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005222876A Active JP4704843B2 (ja) | 2005-08-01 | 2005-08-01 | プローブ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4704843B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100869046B1 (ko) | 2007-02-09 | 2008-11-18 | 한국기계연구원 | Afm 프로브 |
JP2009236611A (ja) * | 2008-03-26 | 2009-10-15 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
KR100984876B1 (ko) | 2008-05-08 | 2010-10-04 | 한국기계연구원 | 가변강성 기능을 가진 수직형 미세 접촉 프로브 |
JP5185686B2 (ja) * | 2008-05-13 | 2013-04-17 | 日本電子材料株式会社 | プローブ、及びプローブの製造方法 |
JP6337633B2 (ja) | 2014-06-16 | 2018-06-06 | オムロン株式会社 | プローブピン |
TWI783744B (zh) * | 2021-10-22 | 2022-11-11 | 中華精測科技股份有限公司 | 懸臂式探針結構 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003232808A (ja) * | 2002-02-08 | 2003-08-22 | Nec Kyushu Ltd | プローブカード |
-
2005
- 2005-08-01 JP JP2005222876A patent/JP4704843B2/ja active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003232808A (ja) * | 2002-02-08 | 2003-08-22 | Nec Kyushu Ltd | プローブカード |
Also Published As
Publication number | Publication date |
---|---|
JP2007040743A (ja) | 2007-02-15 |
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