DE69809906T2 - Sensorvorrichtung und herstellungsverfahren dazu - Google Patents

Sensorvorrichtung und herstellungsverfahren dazu

Info

Publication number
DE69809906T2
DE69809906T2 DE69809906T DE69809906T DE69809906T2 DE 69809906 T2 DE69809906 T2 DE 69809906T2 DE 69809906 T DE69809906 T DE 69809906T DE 69809906 T DE69809906 T DE 69809906T DE 69809906 T2 DE69809906 T2 DE 69809906T2
Authority
DE
Germany
Prior art keywords
manufacturing
sensor device
method therefor
therefor
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69809906T
Other languages
English (en)
Other versions
DE69809906D1 (de
Inventor
Marc Osajda
Eric Perraud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP USA Inc
Original Assignee
Motorola Semiconducteurs SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Semiconducteurs SA filed Critical Motorola Semiconducteurs SA
Publication of DE69809906D1 publication Critical patent/DE69809906D1/de
Application granted granted Critical
Publication of DE69809906T2 publication Critical patent/DE69809906T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/141—Monolithic housings, e.g. molded or one-piece housings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation
    • H01L2924/1815—Shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
DE69809906T 1997-05-28 1998-05-28 Sensorvorrichtung und herstellungsverfahren dazu Expired - Fee Related DE69809906T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9706523A FR2764113B1 (fr) 1997-05-28 1997-05-28 Dispositif capteur et son procede de fabrication
PCT/EP1998/003192 WO1998054556A2 (en) 1997-05-28 1998-05-28 Sensor device and method of forming a sensor device

Publications (2)

Publication Number Publication Date
DE69809906D1 DE69809906D1 (de) 2003-01-16
DE69809906T2 true DE69809906T2 (de) 2003-04-24

Family

ID=9507318

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69809906T Expired - Fee Related DE69809906T2 (de) 1997-05-28 1998-05-28 Sensorvorrichtung und herstellungsverfahren dazu

Country Status (6)

Country Link
US (1) US6214634B1 (de)
EP (1) EP0985138B1 (de)
JP (1) JP2002514307A (de)
DE (1) DE69809906T2 (de)
FR (1) FR2764113B1 (de)
WO (1) WO1998054556A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005058951B4 (de) * 2004-12-24 2015-09-03 Denso Corporation Säurebeständiger Drucksensor

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU7645300A (en) * 1999-10-05 2001-05-10 Delta Danish Electronics, Light And Acoustics Encapsulation for a three-dimensional microsystem
DE19950538B4 (de) * 1999-10-20 2008-05-29 Denso Corp., Kariya Halbleiterdrucksensorvorrichtung mit Schutzelementen
US7256589B2 (en) 2001-04-27 2007-08-14 Atrua Technologies, Inc. Capacitive sensor system with improved capacitance measuring sensitivity
US20030013328A1 (en) * 2001-05-22 2003-01-16 Andrade Thomas L. Connection assembly for integrated circuit sensors
US7259573B2 (en) * 2001-05-22 2007-08-21 Atrua Technologies, Inc. Surface capacitance sensor system using buried stimulus electrode
JP2004356494A (ja) * 2003-05-30 2004-12-16 Hitachi Ltd 電子装置および圧力検出装置
US20040245590A1 (en) * 2003-06-05 2004-12-09 Jackson Hsieh Image sensor package
US20040245589A1 (en) * 2003-06-05 2004-12-09 Jackson Hsieh Substrate structure for a photosensitive chip package
EP1716400A1 (de) * 2004-02-09 2006-11-02 Robert Bosch Gmbh Korrosionsschutz f r drucksensoren
JP4315833B2 (ja) * 2004-02-18 2009-08-19 三洋電機株式会社 回路装置
DE102004044982A1 (de) * 2004-09-16 2006-04-06 Infineon Technologies Ag Drucksensorvorrichtung und Verfahren zum Herstellen derselben
US20080222884A1 (en) * 2007-03-14 2008-09-18 Honeywell International Inc. Packaging for chip-on-board pressure sensor
US7992441B2 (en) * 2008-07-31 2011-08-09 Sensata Technologies, Inc. Pressure sensor for measuring pressure in a medium
CN101337652B (zh) * 2008-08-11 2011-08-10 美新半导体（无锡）有限公司 传感器元件接触表面的封装结构及其封装方法
JP5029579B2 (ja) * 2008-11-18 2012-09-19 株式会社デンソー 圧力センサの製造方法
US8124953B2 (en) 2009-03-12 2012-02-28 Infineon Technologies Ag Sensor device having a porous structure element
DE102011013912A1 (de) * 2011-03-15 2012-09-20 Volkswagen Aktiengesellschaft Drucksensor
US8476087B2 (en) * 2011-04-21 2013-07-02 Freescale Semiconductor, Inc. Methods for fabricating sensor device package using a sealing structure
US9046546B2 (en) 2012-04-27 2015-06-02 Freescale Semiconductor Inc. Sensor device and related fabrication methods
US8946833B2 (en) * 2012-10-22 2015-02-03 Freescale Semiconductor, Inc. Packaging for semiconductor sensor devices and methods
US20150090030A1 (en) * 2013-09-27 2015-04-02 Infineon Technologies Ag Transducer arrangement comprising a transducer die and method of covering a transducer die
US9598280B2 (en) * 2014-11-10 2017-03-21 Nxp Usa, Inc. Environmental sensor structure
CN107290096A (zh) * 2016-04-11 2017-10-24 飞思卡尔半导体公司 具有膜片的压力感测集成电路器件
CN109313097A (zh) * 2016-07-21 2019-02-05 株式会社鹭宫制作所 压力传感器
GB2555829B (en) 2016-11-11 2019-11-20 Sensata Technologies Inc Encapsulations for MEMS sense elements and wire bonds
US10366641B2 (en) 2016-12-21 2019-07-30 R.J. Reynolds Tobacco Company Product display systems and related methods
US10080388B2 (en) 2017-01-25 2018-09-25 Rai Strategic Holdings, Inc. Aerosol delivery device including a shape-memory alloy and a related method
DE102017209650A1 (de) * 2017-06-08 2018-12-13 Robert Bosch Gmbh Mikromechanische Drucksensoranordnung und Verfahren zum Herstellen einer mikromechanischen Drucksensoranordnung
DE102020214765A1 (de) * 2020-11-25 2022-05-25 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Fertigen eines Drucksensors mit drucksensitivem Medium und Drucksensor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62240025A (ja) * 1986-04-10 1987-10-20 住友電気工業株式会社 カテ−テル型センサ
US4732042A (en) * 1986-04-22 1988-03-22 Motorola Inc. Cast membrane protected pressure sensor
FR2667395B1 (fr) * 1990-09-28 1992-12-31 Jaeger Dispositif de mesure de la pression d'admission du melange air/carburant dans un moteur de vehicule automobile.
FR2686692B1 (fr) * 1992-01-28 1996-08-23 Jaeger Capteur de pression a base de semi-conducteur et procede de fabrication.
DE4219888C2 (de) * 1992-06-17 2003-01-02 Storz Endoskop Gmbh Schaffhaus Medizinischer Druckwandler
WO1997001364A1 (en) * 1993-06-30 1997-01-16 Medex, Inc. Medical pressure transducer with sliding components
US5461922A (en) * 1993-07-27 1995-10-31 Lucas-Novasensor Pressure sensor isolated within housing having integral diaphragm and method of making same
US6117086A (en) * 1996-04-18 2000-09-12 Sunscope International, Inc. Pressure transducer apparatus with disposable dome

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005058951B4 (de) * 2004-12-24 2015-09-03 Denso Corporation Säurebeständiger Drucksensor

Also Published As

Publication number Publication date
US6214634B1 (en) 2001-04-10
WO1998054556A3 (en) 1999-03-04
DE69809906D1 (de) 2003-01-16
WO1998054556A2 (en) 1998-12-03
FR2764113B1 (fr) 2000-08-04
JP2002514307A (ja) 2002-05-14
EP0985138B1 (de) 2002-12-04
EP0985138A2 (de) 2000-03-15
FR2764113A1 (fr) 1998-12-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FREESCALE SEMICONDUCTOR, INC., AUSTIN, TEX., US

8339 Ceased/non-payment of the annual fee