DE69602483T2 - Kraftwandler und Herstellungsverfahren dazu - Google Patents

Kraftwandler und Herstellungsverfahren dazu

Info

Publication number
DE69602483T2
DE69602483T2 DE69602483T DE69602483T DE69602483T2 DE 69602483 T2 DE69602483 T2 DE 69602483T2 DE 69602483 T DE69602483 T DE 69602483T DE 69602483 T DE69602483 T DE 69602483T DE 69602483 T2 DE69602483 T2 DE 69602483T2
Authority
DE
Germany
Prior art keywords
manufacturing process
power converter
process therefor
therefor
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69602483T
Other languages
English (en)
Other versions
DE69602483D1 (de
Inventor
Kouji Tsukada
Takeshi Morikawa
Yutaka Nonomura
Sanae Tokumitsu
Masaharu Takeuchi
Kazuyoshi Kawaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Application granted granted Critical
Publication of DE69602483D1 publication Critical patent/DE69602483D1/de
Publication of DE69602483T2 publication Critical patent/DE69602483T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE69602483T 1995-03-31 1996-03-30 Kraftwandler und Herstellungsverfahren dazu Expired - Lifetime DE69602483T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP09968395A JP3317084B2 (ja) 1995-03-31 1995-03-31 力検知素子およびその製造方法

Publications (2)

Publication Number Publication Date
DE69602483D1 DE69602483D1 (de) 1999-06-24
DE69602483T2 true DE69602483T2 (de) 2000-01-20

Family

ID=14253843

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69602483T Expired - Lifetime DE69602483T2 (de) 1995-03-31 1996-03-30 Kraftwandler und Herstellungsverfahren dazu

Country Status (4)

Country Link
US (1) US5773728A (de)
EP (1) EP0735352B1 (de)
JP (1) JP3317084B2 (de)
DE (1) DE69602483T2 (de)

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DE10327147A1 (de) * 2003-06-17 2005-01-05 Daimlerchrysler Ag Vorrichtung zur Erfassung eines Zylinderinnendrucks
DE102005005029B4 (de) * 2004-02-03 2017-05-11 Denso Corporation Drucksensor mit Membran
DE102018106448A1 (de) * 2018-03-20 2019-09-26 CiS Forschungsinstitut für Mikrosensorik GmbH Halbleiterdehnungsmesssensor mit längserstrecktem Dehnungsmesswiderstand

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US6631646B1 (en) * 1998-02-18 2003-10-14 Honeywell International Inc. Electrically insulated strain gage
US6243077B1 (en) * 1998-11-18 2001-06-05 Boourns, Inc. Sensor and circuit architecture for three axis strain gauge pointing device and force transducer
JP2001304997A (ja) * 2000-04-27 2001-10-31 Toyota Central Res & Dev Lab Inc 半導体圧力センサ
US6915702B2 (en) 2001-11-22 2005-07-12 Kabushiki Kaisha Toyota Chuo Kenkyusho Piezoresistive transducers
US6823744B2 (en) * 2002-01-11 2004-11-30 Honda Giken Kogyo Kabushiki Kaisha Six-axis force sensor
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JP4164676B2 (ja) * 2003-12-25 2008-10-15 株式会社デンソー 力学量センサ素子構造及びその製造方法
US6988412B1 (en) 2004-11-30 2006-01-24 Endevco Corporation Piezoresistive strain concentrator
JP2006220574A (ja) * 2005-02-14 2006-08-24 Hitachi Ltd 回転体力学量測定装置および回転体力学量計測システム
US7441467B2 (en) * 2006-07-12 2008-10-28 Cts Corporation Compression strain sensor
JP4648885B2 (ja) * 2006-09-19 2011-03-09 住友重機械工業株式会社 射出成形機及び射出成形機の制御方法
JP2008196960A (ja) * 2007-02-13 2008-08-28 Toyota Central R&D Labs Inc 半導体センサ
JP2008051820A (ja) * 2007-09-26 2008-03-06 Toyota Central R&D Labs Inc 半導体装置
JP5312853B2 (ja) * 2008-06-18 2013-10-09 株式会社豊田中央研究所 力検知素子とその製造方法
JP2010107500A (ja) 2008-09-30 2010-05-13 Ngk Spark Plug Co Ltd 圧力検出装置
EP2749859B1 (de) 2008-09-30 2018-04-18 NGK Spark Plug Co., Ltd. Drucksensor
JP4810690B2 (ja) 2008-11-11 2011-11-09 株式会社豊田中央研究所 力検知素子
RU2009147327A (ru) * 2009-12-22 2011-06-27 Борис Иванович Пивоненков (RU) Способ измерений физических величин пьезорезистивными преобразователями и преобразователь
ITMI20122241A1 (it) 2012-12-27 2014-06-28 St Microelectronics Srl Dispositivo elettronico integrato per il monitoraggio di sforzo meccanico all'interno di una struttura solida
ITMI20122240A1 (it) 2012-12-27 2014-06-28 St Microelectronics Srl Dispositivo elettronico integrato per la rilevazione di un parametro locale correlato ad una forza avvertita lungo una direzione predeterminata, all'interno di una struttura solida
JP5761536B2 (ja) * 2013-04-24 2015-08-12 横河電機株式会社 力変換素子
EP3094950B1 (de) * 2014-01-13 2022-12-21 Nextinput, Inc. Miniaturisierte und widerstandsfähige mems-kraftsensoren auf waferebene
JP6117139B2 (ja) * 2014-03-26 2017-04-19 株式会社豊田中央研究所 力検知装置
JP6430297B2 (ja) * 2014-06-12 2018-11-28 株式会社豊田中央研究所 力検知装置
WO2015146154A1 (ja) * 2014-03-26 2015-10-01 株式会社デンソー 力検知装置
US10222281B2 (en) 2014-03-26 2019-03-05 Denso Corporation Force detection apparatus having high sensor sensitivity
US9888325B2 (en) 2014-04-01 2018-02-06 Robert Bosch Gmbh Doped substrate regions in MEMS microphones
DE102015201577A1 (de) 2015-01-29 2016-08-04 Robert Bosch Gmbh Sensoranordnung zur indirekten Erfassung eines Drehmoments einer rotierbar gelagerten Welle
JP6333208B2 (ja) * 2015-04-06 2018-05-30 株式会社豊田中央研究所 力検知装置
JP6430327B2 (ja) * 2015-04-22 2018-11-28 株式会社豊田中央研究所 力検知装置
CN107407610A (zh) * 2015-04-06 2017-11-28 株式会社电装 力检测装置
JP6285889B2 (ja) * 2015-04-22 2018-02-28 株式会社豊田中央研究所 力検知装置
CN106197776B (zh) 2015-05-27 2019-11-05 意法半导体股份有限公司 压力传感器、压力测量设备、制动系统和测量压力的方法
CN117486166A (zh) 2015-06-10 2024-02-02 触控解决方案股份有限公司 具有容差沟槽的加固的晶圆级mems力传感器
GB2552025B (en) 2016-07-08 2020-08-12 Sovex Ltd Boom conveyor
US20180180494A1 (en) 2016-12-22 2018-06-28 Honeywell International Inc. High Sensitivity Silicon Piezoresistor Force Sensor
JP2018105806A (ja) * 2016-12-28 2018-07-05 Ntn株式会社 荷重センサおよび電動ブレーキ装置
WO2018148510A1 (en) 2017-02-09 2018-08-16 Nextinput, Inc. Integrated piezoresistive and piezoelectric fusion force sensor
WO2018148503A1 (en) 2017-02-09 2018-08-16 Nextinput, Inc. Integrated digital force sensors and related methods of manufacture
IT201700044301A1 (it) 2017-04-21 2018-10-21 St Microelectronics Srl Sensore di sforzo per il monitoraggio dello stato di salute di strutture fabbricate quali costruzioni, edifici, infrastrutture e simili
IT201700045285A1 (it) 2017-04-26 2018-10-26 St Microelectronics Srl Trasduttore microelettromeccanico basato su trincea e metodo di fabbricazione del trasduttore microelettromeccanico
CN111448446B (zh) 2017-07-19 2022-08-30 触控解决方案股份有限公司 在mems力传感器中的应变传递堆叠
US11423686B2 (en) 2017-07-25 2022-08-23 Qorvo Us, Inc. Integrated fingerprint and force sensor
US11243126B2 (en) 2017-07-27 2022-02-08 Nextinput, Inc. Wafer bonded piezoresistive and piezoelectric force sensor and related methods of manufacture
WO2019079420A1 (en) 2017-10-17 2019-04-25 Nextinput, Inc. SHIFT TEMPERATURE COEFFICIENT COMPENSATION FOR FORCE SENSOR AND STRAIN GAUGE
WO2019090057A1 (en) 2017-11-02 2019-05-09 Nextinput, Inc. Sealed force sensor with etch stop layer
US11874185B2 (en) 2017-11-16 2024-01-16 Nextinput, Inc. Force attenuator for force sensor
CN108225754B (zh) * 2017-12-28 2024-04-26 贵州高峰石油机械股份有限公司 一种用于校核石油井下工具拉压试验架精度的测试装置
US10962427B2 (en) 2019-01-10 2021-03-30 Nextinput, Inc. Slotted MEMS force sensor
DE102020114224B4 (de) 2020-05-27 2023-04-06 CiS Forschungsinstitut für Mikrosensorik GmbH Messsensor zur Dehnungsmessung auf Basis von kristallinem Silizium

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JPH0682847B2 (ja) * 1987-07-31 1994-10-19 株式会社豊田中央研究所 力変換素子
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JP2553199Y2 (ja) * 1991-12-26 1997-11-05 株式会社豊田中央研究所 力変換素子
JP3166015B2 (ja) * 1992-07-16 2001-05-14 株式会社豊田中央研究所 力変換素子およびこれを用いた圧力検出回路
JPH0719981A (ja) * 1993-06-01 1995-01-20 Nippondenso Co Ltd 高温用圧力センサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10327147A1 (de) * 2003-06-17 2005-01-05 Daimlerchrysler Ag Vorrichtung zur Erfassung eines Zylinderinnendrucks
DE102005005029B4 (de) * 2004-02-03 2017-05-11 Denso Corporation Drucksensor mit Membran
DE102018106448A1 (de) * 2018-03-20 2019-09-26 CiS Forschungsinstitut für Mikrosensorik GmbH Halbleiterdehnungsmesssensor mit längserstrecktem Dehnungsmesswiderstand

Also Published As

Publication number Publication date
JP3317084B2 (ja) 2002-08-19
EP0735352A2 (de) 1996-10-02
EP0735352A3 (de) 1997-05-21
US5773728A (en) 1998-06-30
EP0735352B1 (de) 1999-05-19
JPH08271363A (ja) 1996-10-18
DE69602483D1 (de) 1999-06-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: KRAMER - BARSKE - SCHMIDTCHEN, 81245 MUENCHEN