DE69637881D1 - Photoelektrische Umwandlungsvorrichtung und Herstellungsverfahren dazu - Google Patents
Photoelektrische Umwandlungsvorrichtung und Herstellungsverfahren dazuInfo
- Publication number
- DE69637881D1 DE69637881D1 DE69637881T DE69637881T DE69637881D1 DE 69637881 D1 DE69637881 D1 DE 69637881D1 DE 69637881 T DE69637881 T DE 69637881T DE 69637881 T DE69637881 T DE 69637881T DE 69637881 D1 DE69637881 D1 DE 69637881D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- photoelectric conversion
- conversion device
- photoelectric
- conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14634—Assemblies, i.e. Hybrid structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02322—Optical elements or arrangements associated with the device comprising luminescent members, e.g. fluorescent sheets upon the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
- H01L27/14676—X-ray, gamma-ray or corpuscular radiation imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
- Y10T156/1062—Prior to assembly
- Y10T156/1075—Prior to assembly of plural laminae from single stock and assembling to each other or to additional lamina
- Y10T156/1077—Applying plural cut laminae to single face of additional lamina
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1089—Methods of surface bonding and/or assembly therefor of discrete laminae to single face of additional lamina
- Y10T156/1092—All laminae planar and face to face
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Measurement Of Radiation (AREA)
- Light Receiving Elements (AREA)
- Facsimile Heads (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Facsimile Scanning Arrangements (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27299795 | 1995-10-20 | ||
JP732496 | 1996-01-19 | ||
JP26713896A JP3805031B2 (ja) | 1995-10-20 | 1996-10-08 | 光電変換装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69637881D1 true DE69637881D1 (de) | 2009-04-30 |
Family
ID=27277562
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69637881T Expired - Lifetime DE69637881D1 (de) | 1995-10-20 | 1996-10-18 | Photoelektrische Umwandlungsvorrichtung und Herstellungsverfahren dazu |
DE69636404T Expired - Lifetime DE69636404T2 (de) | 1995-10-20 | 1996-10-18 | Verfahren zur Herstellung einer photoelektrischen Umwandlungsvorrichtung |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69636404T Expired - Lifetime DE69636404T2 (de) | 1995-10-20 | 1996-10-18 | Verfahren zur Herstellung einer photoelektrischen Umwandlungsvorrichtung |
Country Status (5)
Country | Link |
---|---|
US (2) | US5856699A (de) |
EP (2) | EP0769817B1 (de) |
JP (1) | JP3805031B2 (de) |
DE (2) | DE69637881D1 (de) |
TW (1) | TW402817B (de) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3805031B2 (ja) * | 1995-10-20 | 2006-08-02 | キヤノン株式会社 | 光電変換装置 |
JP3618973B2 (ja) * | 1997-10-01 | 2005-02-09 | キヤノン株式会社 | 半導体装置及び光検出装置の製造方法 |
GB9925227D0 (en) | 1999-10-25 | 1999-12-22 | Internet Limited | Data storage retrieval and access system |
AU2001234152A1 (en) | 2000-02-25 | 2001-09-03 | Hamamatsu Photonics K.K. | X-ray imaging device and method of manufacture thereof |
JP4302279B2 (ja) * | 2000-02-29 | 2009-07-22 | 富士フイルム株式会社 | 固体撮像装置及びその製造方法 |
JP2001264442A (ja) * | 2000-03-22 | 2001-09-26 | Fuji Photo Film Co Ltd | 画像記録媒体 |
JP3978971B2 (ja) * | 2000-03-28 | 2007-09-19 | 株式会社島津製作所 | 2次元画像検出器およびその製造方法 |
US6855935B2 (en) | 2000-03-31 | 2005-02-15 | Canon Kabushiki Kaisha | Electromagnetic wave detector |
JP2003168794A (ja) * | 2001-11-30 | 2003-06-13 | Canon Inc | 放射線検出素子、放射線撮像装置、放射線検出方法、及び放射線撮像方法 |
US6953934B2 (en) * | 2002-03-06 | 2005-10-11 | Canon Kabushiki Kaisha | Radiation detection apparatus and system |
JP3722367B2 (ja) * | 2002-03-19 | 2005-11-30 | ソニー株式会社 | 固体撮像素子の製造方法 |
US7127793B2 (en) * | 2002-04-24 | 2006-10-31 | Fuji Photo Film Co., Ltd. | Method of producing solid state pickup device |
KR100539234B1 (ko) * | 2003-06-11 | 2005-12-27 | 삼성전자주식회사 | 투명 고분자 소재를 적용한 씨모스형 이미지 센서 모듈 및그 제조방법 |
US20050009239A1 (en) * | 2003-07-07 | 2005-01-13 | Wolff Larry Lee | Optoelectronic packaging with embedded window |
JP4563042B2 (ja) * | 2004-01-29 | 2010-10-13 | 浜松ホトニクス株式会社 | 放射線イメージセンサ |
JP4389626B2 (ja) * | 2004-03-29 | 2009-12-24 | ソニー株式会社 | 固体撮像素子の製造方法 |
DE202004011854U1 (de) * | 2004-07-28 | 2004-11-04 | Microelectronic Packaging Dresden Gmbh | Image-Modul |
WO2006112320A1 (ja) * | 2005-04-15 | 2006-10-26 | Hitachi Medical Corporation | X線平面検出器及びx線画像診断装置 |
JP4622670B2 (ja) * | 2005-05-17 | 2011-02-02 | 株式会社島津製作所 | 2次元放射線検出器 |
TWI278694B (en) * | 2005-09-20 | 2007-04-11 | Ind Tech Res Inst | Method for supporting a flexible substrate and method for manufacturing a flexible display |
JP2006139316A (ja) * | 2006-02-10 | 2006-06-01 | Ushio Inc | 原稿読み取り用光源装置 |
JP4871629B2 (ja) * | 2006-04-12 | 2012-02-08 | キヤノン株式会社 | 放射線撮像装置の製造方法及び放射線撮像システム |
JP2008014900A (ja) * | 2006-07-10 | 2008-01-24 | Fujifilm Corp | 放射線像変換パネルの製造方法および放射線像変換パネル |
DE102006038969B4 (de) * | 2006-08-21 | 2013-02-28 | Siemens Aktiengesellschaft | Röntgenkonverterelement und Verfahren zu dessen Herstellung |
DE102007027207A1 (de) * | 2006-10-21 | 2008-04-24 | Sunzenit Gmbh | Photovoltaikmodul mit Kühleinrichtung |
KR20080114695A (ko) * | 2006-12-27 | 2008-12-31 | 가부시끼가이샤 도시바 | 방사선 검출기 |
JP5004848B2 (ja) * | 2007-04-18 | 2012-08-22 | キヤノン株式会社 | 放射線検出装置及び放射線検出システム |
JP5350604B2 (ja) * | 2007-05-16 | 2013-11-27 | スパンション エルエルシー | 半導体装置及びその製造方法 |
JP5124227B2 (ja) * | 2007-10-01 | 2013-01-23 | 浜松ホトニクス株式会社 | 放射線検出器 |
US9105773B2 (en) * | 2008-04-29 | 2015-08-11 | Koninklijke Philips N.V. | Photo-detector with wavelength converter |
US8718226B2 (en) * | 2008-11-21 | 2014-05-06 | Trixell | Assembly method for a tiled radiation detector |
US9496442B2 (en) * | 2009-01-22 | 2016-11-15 | Omnipv | Solar modules including spectral concentrators and related manufacturing methods |
JP5665494B2 (ja) * | 2010-06-24 | 2015-02-04 | キヤノン株式会社 | 放射線検出装置及び放射線撮像システム |
JP2012047487A (ja) | 2010-08-24 | 2012-03-08 | Hamamatsu Photonics Kk | 放射線検出器 |
JP5966925B2 (ja) * | 2010-09-07 | 2016-08-10 | コニカミノルタ株式会社 | 放射線画像検出器の製造方法 |
JP2012154696A (ja) | 2011-01-24 | 2012-08-16 | Canon Inc | シンチレータパネル、放射線検出装置およびそれらの製造方法 |
JP5709572B2 (ja) | 2011-02-18 | 2015-04-30 | キヤノン株式会社 | 撮像装置および撮像システム |
US9012262B2 (en) * | 2011-04-19 | 2015-04-21 | Teledyne Rad-Icon Imaging Corp. | Method of direct tiling of an image sensor array |
EA021593B1 (ru) * | 2012-11-21 | 2015-07-30 | Закрытое Акционерное Общество "Импульс" | Детектор рентгеновского изображения, способ изготовления фоточувствительного элемента и способ изготовления детектора |
JP2015049121A (ja) * | 2013-08-30 | 2015-03-16 | 株式会社東芝 | 検出器モジュール製造方法、検出器モジュール及び医用画像診断装置 |
WO2016014047A1 (en) | 2014-07-23 | 2016-01-28 | Apple Inc. | Adaptive processes for improving integrity of surfaces |
US10649497B2 (en) * | 2014-07-23 | 2020-05-12 | Apple Inc. | Adaptive processes for improving integrity of surfaces |
US9599723B2 (en) | 2015-08-18 | 2017-03-21 | Carestream Health, Inc. | Method and apparatus with tiled image sensors |
DE102018200845B4 (de) * | 2018-01-19 | 2021-05-06 | Siemens Healthcare Gmbh | Montageverfahren für die Herstellung eines Röntgendetektors, Röntgendetektor und Röntgengerät |
JP7427410B2 (ja) | 2019-10-11 | 2024-02-05 | キヤノン株式会社 | 撮像装置及びカメラ |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4537827A (en) * | 1983-02-07 | 1985-08-27 | Hughes Aircraft Company | Optically flat semiconductor baseplate structure |
DE68911420T2 (de) | 1988-08-18 | 1994-05-11 | Seiko Epson Corp | Festkörper-Bildaufnahmevorrichtung. |
JPH0287869A (ja) | 1988-09-26 | 1990-03-28 | Ricoh Co Ltd | 千鳥配列マルチチツプ型イメージセンサ |
JPH02143466A (ja) * | 1988-11-25 | 1990-06-01 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
GB2262658B (en) * | 1989-02-21 | 1993-09-29 | Canon Kk | Photoelectric converter |
US4999077A (en) * | 1989-08-31 | 1991-03-12 | Xerox Corporation | Method of fabricating full width scanning or imaging arrays from subunits |
US5132539A (en) * | 1991-08-29 | 1992-07-21 | General Electric Company | Planar X-ray imager having a moisture-resistant sealing structure |
JP3805031B2 (ja) * | 1995-10-20 | 2006-08-02 | キヤノン株式会社 | 光電変換装置 |
-
1996
- 1996-10-08 JP JP26713896A patent/JP3805031B2/ja not_active Expired - Fee Related
- 1996-10-18 DE DE69637881T patent/DE69637881D1/de not_active Expired - Lifetime
- 1996-10-18 DE DE69636404T patent/DE69636404T2/de not_active Expired - Lifetime
- 1996-10-18 EP EP96116758A patent/EP0769817B1/de not_active Expired - Lifetime
- 1996-10-18 US US08/733,772 patent/US5856699A/en not_active Expired - Lifetime
- 1996-10-18 EP EP04027466A patent/EP1513201B1/de not_active Expired - Lifetime
- 1996-12-18 TW TW085112756A patent/TW402817B/zh not_active IP Right Cessation
-
1998
- 1998-10-21 US US09/176,258 patent/US6352875B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH09260626A (ja) | 1997-10-03 |
EP0769817A3 (de) | 1998-04-01 |
EP0769817B1 (de) | 2006-08-02 |
EP1513201A3 (de) | 2007-03-14 |
EP1513201A2 (de) | 2005-03-09 |
DE69636404T2 (de) | 2007-02-01 |
US6352875B1 (en) | 2002-03-05 |
JP3805031B2 (ja) | 2006-08-02 |
TW402817B (en) | 2000-08-21 |
US5856699A (en) | 1999-01-05 |
EP1513201B1 (de) | 2009-03-18 |
DE69636404D1 (de) | 2006-09-14 |
EP0769817A2 (de) | 1997-04-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |