DE69534968D1 - Halbleiteranordnungen vom Druckkontakttyp - Google Patents

Halbleiteranordnungen vom Druckkontakttyp

Info

Publication number
DE69534968D1
DE69534968D1 DE69534968T DE69534968T DE69534968D1 DE 69534968 D1 DE69534968 D1 DE 69534968D1 DE 69534968 T DE69534968 T DE 69534968T DE 69534968 T DE69534968 T DE 69534968T DE 69534968 D1 DE69534968 D1 DE 69534968D1
Authority
DE
Germany
Prior art keywords
pressure contact
contact type
semiconductor arrangements
arrangements
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69534968T
Other languages
English (en)
Other versions
DE69534968T2 (de
Inventor
Michiaki Hiyoshi
Hisayoshi Muramatsu
Takashi Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE69534968D1 publication Critical patent/DE69534968D1/de
Application granted granted Critical
Publication of DE69534968T2 publication Critical patent/DE69534968T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/71Means for bonding not being attached to, or not being formed on, the surface to be connected
    • H01L24/72Detachable connecting means consisting of mechanical auxiliary parts connecting the device, e.g. pressure contacts using springs or clips
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • H01L23/04Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H01L23/043Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body
    • H01L23/051Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body another lead being formed by a cover plate parallel to the base plate, e.g. sandwich type
    • HELECTRICITY
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    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157Partial encapsulation or coating
    • H01L23/3185Partial encapsulation or coating the coating covering also the sidewalls of the semiconductor body
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    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0655Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
    • HELECTRICITY
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    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
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    • H01L29/74Thyristor-type devices, e.g. having four-zone regenerative action
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    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/72Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H01L29/7395Vertical transistors, e.g. vertical IGBT
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    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/10251Elemental semiconductors, i.e. Group IV
    • H01L2924/10253Silicon [Si]
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    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1203Rectifying Diode
    • H01L2924/12035Zener diode
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    • H01L2924/13Discrete devices, e.g. 3 terminal devices
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    • H01L2924/13Discrete devices, e.g. 3 terminal devices
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    • H01L2924/1305Bipolar Junction Transistor [BJT]
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    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1305Bipolar Junction Transistor [BJT]
    • H01L2924/13055Insulated gate bipolar transistor [IGBT]
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    • H01L2924/13Discrete devices, e.g. 3 terminal devices
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    • H01L2924/1306Field-effect transistor [FET]
    • H01L2924/13091Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
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    • H01L2924/14Integrated circuits
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    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901Structure
    • H01L2924/1904Component type
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    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30107Inductance
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    • H01L2924/30Technical effects
    • H01L2924/35Mechanical effects
    • H01L2924/351Thermal stress

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Die Bonding (AREA)
  • Thyristors (AREA)
DE69534968T 1994-09-15 1995-09-15 Halbleiteranordnungen vom Druckkontakttyp Expired - Lifetime DE69534968T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP24692794 1994-09-15
JP24692794A JP3256636B2 (ja) 1994-09-15 1994-09-15 圧接型半導体装置

Publications (2)

Publication Number Publication Date
DE69534968D1 true DE69534968D1 (de) 2006-06-08
DE69534968T2 DE69534968T2 (de) 2007-02-08

Family

ID=17155834

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69534968T Expired - Lifetime DE69534968T2 (de) 1994-09-15 1995-09-15 Halbleiteranordnungen vom Druckkontakttyp

Country Status (7)

Country Link
US (1) US5610439A (de)
EP (1) EP0702406B1 (de)
JP (1) JP3256636B2 (de)
KR (1) KR100219345B1 (de)
DE (1) DE69534968T2 (de)
MY (1) MY131127A (de)
TW (1) TW281796B (de)

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JP3533317B2 (ja) * 1997-08-28 2004-05-31 株式会社東芝 圧接型半導体装置
JP3344552B2 (ja) * 1997-09-17 2002-11-11 株式会社東芝 圧接型半導体装置
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JP2930074B1 (ja) * 1998-06-02 1999-08-03 富士電機株式会社 半導体装置
DE19843309A1 (de) 1998-09-22 2000-03-23 Asea Brown Boveri Kurzschlussfestes IGBT Modul
JP3612226B2 (ja) * 1998-12-21 2005-01-19 株式会社東芝 半導体装置及び半導体モジュール
JP2001036002A (ja) * 1999-07-23 2001-02-09 Fuji Electric Co Ltd 半導体装置
US20020145188A1 (en) * 1999-09-07 2002-10-10 Hironori Kodama Flat semiconductor device and power converter employing the same
DE10048859B4 (de) * 2000-10-02 2005-12-15 Infineon Technologies Ag Druckkontaktanordnung sowie deren Verwendung
JP3954314B2 (ja) * 2001-01-23 2007-08-08 株式会社東芝 圧接型半導体装置
JP4230681B2 (ja) 2001-07-06 2009-02-25 株式会社東芝 高耐圧半導体装置
US6803667B2 (en) * 2001-08-09 2004-10-12 Denso Corporation Semiconductor device having a protective film
JP2004023083A (ja) * 2002-06-20 2004-01-22 Toshiba Corp 圧接型半導体装置
CN100414690C (zh) * 2003-08-21 2008-08-27 株洲时代集团公司 一种大功率器件及其散热器件的压装方法
JP4157001B2 (ja) * 2003-08-28 2008-09-24 株式会社東芝 マルチチップ圧接型半導体装置
JP4764979B2 (ja) * 2004-06-08 2011-09-07 富士電機株式会社 半導体装置
CN103650137B (zh) * 2011-07-11 2017-09-29 三菱电机株式会社 功率半导体模块
WO2013105161A1 (ja) 2012-01-11 2013-07-18 パナソニック株式会社 圧接型半導体装置及びその製造方法
CN103390642B (zh) 2013-08-01 2016-06-22 株洲南车时代电气股份有限公司 一种igbt器件及整晶圆igbt芯片的封装方法
US9177943B2 (en) * 2013-10-15 2015-11-03 Ixys Corporation Power device cassette with auxiliary emitter contact
CN104733518B (zh) * 2013-12-24 2019-03-19 南京励盛半导体科技有限公司 一种半导体功率器件的结构
DE102014102493A1 (de) * 2014-02-26 2015-08-27 Infineon Technologies Bipolar Gmbh & Co. Kg Verbesserte Scheibenzelle für mehrere druckkontaktierte Halbleiterbauelemente
DE102014104718B3 (de) * 2014-04-03 2015-08-20 Infineon Technologies Ag Halbleiterbaugruppe mit Chiparrays
EP2966681A1 (de) * 2014-07-09 2016-01-13 GE Energy Power Conversion Technology Ltd Leistungshalbleiterbauelemente
US10551165B2 (en) * 2015-05-01 2020-02-04 Adarza Biosystems, Inc. Methods and devices for the high-volume production of silicon chips with uniform anti-reflective coatings
WO2016189953A1 (ja) 2015-05-26 2016-12-01 三菱電機株式会社 圧接型半導体装置
CN107305886B (zh) * 2016-04-25 2024-04-05 华北电力大学 一种便于串联使用的大功率igbt模块
US11302592B2 (en) 2017-03-08 2022-04-12 Mediatek Inc. Semiconductor package having a stiffener ring
CN109801899B (zh) * 2018-12-27 2021-04-23 全球能源互联网研究院有限公司 一种功率半导体模块
US11488903B2 (en) * 2020-01-28 2022-11-01 Littelfuse, Inc. Semiconductor chip package and method of assembly
US11764209B2 (en) 2020-10-19 2023-09-19 MW RF Semiconductors, LLC Power semiconductor device with forced carrier extraction and method of manufacture
CN112687676B (zh) * 2020-12-14 2023-06-27 株洲中车时代半导体有限公司 压接式igbt子模组及压接式igbt模块
DE112021007808T5 (de) 2021-06-11 2024-03-21 Mitsubishi Electric Corporation Halbleitereinrichtung vom druckkontakttyp

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Also Published As

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MY131127A (en) 2007-07-31
EP0702406B1 (de) 2006-05-03
EP0702406A2 (de) 1996-03-20
KR960012561A (ko) 1996-04-20
US5610439A (en) 1997-03-11
KR100219345B1 (ko) 1999-09-01
TW281796B (de) 1996-07-21
DE69534968T2 (de) 2007-02-08
EP0702406A3 (de) 1996-07-31
JP3256636B2 (ja) 2002-02-12
JPH0888240A (ja) 1996-04-02

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