DE69520521T2 - Magnetischer dünner Film und Bildungsverfahren derselben, und Magnetkopf - Google Patents

Magnetischer dünner Film und Bildungsverfahren derselben, und Magnetkopf

Info

Publication number
DE69520521T2
DE69520521T2 DE1995620521 DE69520521T DE69520521T2 DE 69520521 T2 DE69520521 T2 DE 69520521T2 DE 1995620521 DE1995620521 DE 1995620521 DE 69520521 T DE69520521 T DE 69520521T DE 69520521 T2 DE69520521 T2 DE 69520521T2
Authority
DE
Germany
Prior art keywords
magnetic
thin film
formation method
magnetic head
magnetic thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1995620521
Other languages
English (en)
Other versions
DE69520521D1 (de
Inventor
Masayoshi Hiramoto
Osamu Inoue
Koichi Kugimiya
Kenji Iijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69520521D1 publication Critical patent/DE69520521D1/de
Application granted granted Critical
Publication of DE69520521T2 publication Critical patent/DE69520521T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/1875—"Composite" pole pieces, i.e. poles composed in some parts of magnetic particles and in some other parts of magnetic metal layers
    • G11B5/1877—"Composite" pole pieces, i.e. poles composed in some parts of magnetic particles and in some other parts of magnetic metal layers including at least one magnetic thin film
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3113—Details for improving the magnetic domain structure or avoiding the formation or displacement of undesirable magnetic domains
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/26—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
    • H01F10/30—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers characterised by the composition of the intermediate layers, e.g. seed, buffer, template, diffusion preventing, cap layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/147—Structure or manufacture of heads, e.g. inductive with cores being composed of metal sheets, i.e. laminated cores with cores composed of isolated magnetic layers, e.g. sheets
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
    • G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
    • G11B5/3153—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers including at least one magnetic thin film coupled by interfacing to the basic magnetic thin film structure
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
    • G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
    • G11B5/3153—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers including at least one magnetic thin film coupled by interfacing to the basic magnetic thin film structure
    • G11B5/3156—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers including at least one magnetic thin film coupled by interfacing to the basic magnetic thin film structure providing interaction by induced or exchange coupling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/90—Magnetic feature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
DE1995620521 1994-05-16 1995-05-15 Magnetischer dünner Film und Bildungsverfahren derselben, und Magnetkopf Expired - Lifetime DE69520521T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10093994 1994-05-16
JP11645494 1994-05-30
JP30361494 1994-12-07

Publications (2)

Publication Number Publication Date
DE69520521D1 DE69520521D1 (de) 2001-05-10
DE69520521T2 true DE69520521T2 (de) 2002-03-28

Family

ID=27309348

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1995620521 Expired - Lifetime DE69520521T2 (de) 1994-05-16 1995-05-15 Magnetischer dünner Film und Bildungsverfahren derselben, und Magnetkopf

Country Status (6)

Country Link
US (2) US5589221A (de)
EP (1) EP0683497B1 (de)
KR (1) KR100216086B1 (de)
CN (1) CN1126126C (de)
DE (1) DE69520521T2 (de)
ES (1) ES2155485T3 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5796560A (en) * 1995-03-13 1998-08-18 Kabushiki Kaisha Toshiba Magnetoresistive head
DE69726834T2 (de) * 1997-04-18 2004-11-04 Plasma Metal S.A. Verfahren und Ofen zum Nitrieren
US6072671A (en) * 1998-07-31 2000-06-06 International Business Machines Corporation Write head with high thermal stability material
KR100348920B1 (ko) * 1998-09-03 2002-08-14 마쯔시다덴기산교 가부시키가이샤 자성막과 그 제조 방법
US6233116B1 (en) 1998-11-13 2001-05-15 Read-Rite Corporation Thin film write head with improved laminated flux carrying structure and method of fabrication
US6410170B1 (en) * 1999-05-20 2002-06-25 Read-Rite Corporation High resistivity FeXN sputtered films for magnetic storage devices and method of fabrication
JP3396455B2 (ja) * 1999-06-22 2003-04-14 アルプス電気株式会社 軟磁性膜及びその製造方法、ならびにこの軟磁性膜を用いた薄膜磁気ヘッド
US20040206300A1 (en) * 1999-07-28 2004-10-21 Sapozhnikov Victor B. Method for forming thin films with lateral composition modulations
US6473960B1 (en) * 2000-01-07 2002-11-05 Storage Technology Corporation Method of making nitrided active elements
JP2001236643A (ja) * 2000-02-23 2001-08-31 Fuji Electric Co Ltd 磁気記録媒体製造用スパッタリングターゲット、それを用いた磁気記録媒体の製造方法および磁気記録媒体
EP1361586A4 (de) * 2001-01-18 2008-06-11 Taiyo Yuden Kk "granularer dünner magnetfilm und verfahren zur herstellung des films, laminierter magnetfilm, magnetisches teil und elektronisches bauelement"
JP2004284241A (ja) * 2003-03-24 2004-10-14 Tdk Corp 光記録媒体及び光記録媒体用スパッタリングターゲット
JP4286792B2 (ja) * 2003-04-30 2009-07-01 富士通株式会社 磁気ヘッド
US20070242395A1 (en) * 2004-10-15 2007-10-18 Bailey William E Methods of manipulating the relaxation rate in magnetic materials and devices for using the same
JP2007220850A (ja) * 2006-02-16 2007-08-30 Fujitsu Ltd 積層磁性膜および磁気ヘッド
JP4719109B2 (ja) * 2006-04-21 2011-07-06 株式会社東芝 磁性材料およびアンテナデバイス
CN102758183A (zh) * 2011-04-27 2012-10-31 鸿富锦精密工业（深圳）有限公司 镀膜件及其制备方法
US10609843B2 (en) * 2012-10-04 2020-03-31 Compass Datacenters, Llc Magnetic blocking tiles for a datacenter facility
KR102611463B1 (ko) * 2016-08-02 2023-12-08 삼성전자주식회사 자기 기억 소자 및 그 제조방법
CN110607503B (zh) * 2019-10-18 2021-11-05 西南应用磁学研究所 一种高频磁芯用软磁复合膜及其制备方法
JP7456363B2 (ja) * 2020-12-09 2024-03-27 Tdk株式会社 積層コイル部品
CN114395753B (zh) * 2022-01-06 2022-11-15 中国科学院宁波材料技术与工程研究所 一种多层结构的Fe-Cr-Al基防护涂层及其制备方法

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JPS599905A (ja) * 1982-07-09 1984-01-19 Hitachi Ltd 磁性体膜およびそれを用いた磁気ヘッド
JPS61233409A (ja) * 1985-04-08 1986-10-17 Matsushita Electric Ind Co Ltd 高周波用積層型磁気ヘツドコアの製造方法及び磁気ヘツドコア
JPS62154212A (ja) * 1985-12-27 1987-07-09 Hitachi Ltd 鉄一酸素系積層磁性体膜
JPS6357758A (ja) * 1986-08-26 1988-03-12 Matsushita Electric Ind Co Ltd 窒化磁性合金膜及びその形成法
JPS62210607A (ja) * 1986-03-12 1987-09-16 Matsushita Electric Ind Co Ltd 軟磁性合金膜及びその形成法
JP2790451B2 (ja) * 1987-04-10 1998-08-27 松下電器産業株式会社 窒素を含む軟磁性合金膜
JPH01238106A (ja) * 1988-03-18 1989-09-22 Nec Corp 耐食性強磁性薄膜
EP0380136B1 (de) * 1989-01-26 1995-01-04 Fuji Photo Film Co., Ltd. Weichmagnetischer dünner Film, Verfahren zu seiner Herstellung und Magnetkopf
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JPH06338410A (ja) * 1993-03-31 1994-12-06 Matsushita Electric Ind Co Ltd 軟磁性多層膜と磁気ヘッド

Also Published As

Publication number Publication date
DE69520521D1 (de) 2001-05-10
CN1126126C (zh) 2003-10-29
KR950034087A (ko) 1995-12-26
EP0683497A1 (de) 1995-11-22
KR100216086B1 (ko) 1999-08-16
CN1121633A (zh) 1996-05-01
EP0683497B1 (de) 2001-04-04
US5849400A (en) 1998-12-15
US5589221A (en) 1996-12-31
ES2155485T3 (es) 2001-05-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP