DE69805126T2 - Dünnschichtmagnetkopf - Google Patents

Dünnschichtmagnetkopf

Info

Publication number
DE69805126T2
DE69805126T2 DE69805126T DE69805126T DE69805126T2 DE 69805126 T2 DE69805126 T2 DE 69805126T2 DE 69805126 T DE69805126 T DE 69805126T DE 69805126 T DE69805126 T DE 69805126T DE 69805126 T2 DE69805126 T2 DE 69805126T2
Authority
DE
Germany
Prior art keywords
thin film
magnetic head
film magnetic
head
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69805126T
Other languages
English (en)
Other versions
DE69805126D1 (de
Inventor
Hitoshi Hirano
Yoichi Domoto
Keiichi Kuramoto
Hisaki Tarui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP04938697A external-priority patent/JP3547930B2/ja
Priority claimed from JP25983297A external-priority patent/JP3561611B2/ja
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Publication of DE69805126D1 publication Critical patent/DE69805126D1/de
Application granted granted Critical
Publication of DE69805126T2 publication Critical patent/DE69805126T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Magnetic Heads (AREA)
DE69805126T 1997-02-13 1998-02-12 Dünnschichtmagnetkopf Expired - Fee Related DE69805126T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2911197 1997-02-13
JP04938697A JP3547930B2 (ja) 1997-02-13 1997-03-04 薄膜磁気ヘッド
JP25983297A JP3561611B2 (ja) 1997-09-25 1997-09-25 硬質炭素系被膜

Publications (2)

Publication Number Publication Date
DE69805126D1 DE69805126D1 (de) 2002-06-06
DE69805126T2 true DE69805126T2 (de) 2002-12-05

Family

ID=27286430

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69805126T Expired - Fee Related DE69805126T2 (de) 1997-02-13 1998-02-12 Dünnschichtmagnetkopf

Country Status (4)

Country Link
US (1) US5986857A (de)
EP (1) EP0859355B1 (de)
CN (1) CN1114902C (de)
DE (1) DE69805126T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6184157B1 (en) * 1998-06-01 2001-02-06 Sharp Laboratories Of America, Inc. Stress-loaded film and method for same
US6198608B1 (en) * 1999-03-18 2001-03-06 Read-Rite Corporation MR sensor with blunt contiguous junction and slow-milling-rate read gap
US6252741B1 (en) * 1999-05-11 2001-06-26 Greenleaf Technologies Thin film magnetic recording head with treated ceramic substrate
JP4221114B2 (ja) * 1999-05-18 2009-02-12 株式会社日立グローバルストレージテクノロジーズ 磁気抵抗効果型ヘッド
US6872993B1 (en) * 1999-05-25 2005-03-29 Micron Technology, Inc. Thin film memory device having local and external magnetic shielding
US20030074784A1 (en) * 1999-10-29 2003-04-24 Yoshiyuki Konishi Method of forming protective film on magnetic head
JP3535871B2 (ja) * 2002-06-13 2004-06-07 キヤノン株式会社 電子放出素子、電子源、画像表示装置及び電子放出素子の製造方法
JP2004265550A (ja) * 2003-03-04 2004-09-24 Fuji Photo Film Co Ltd 磁気ヘッド
JP4154356B2 (ja) 2003-06-11 2008-09-24 キヤノン株式会社 電子放出素子、電子源、画像表示装置及びテレビ
US20050264933A1 (en) * 2004-05-28 2005-12-01 Ning Shi Magnetic recording head with reduced thermally induced protrusion
JP4667031B2 (ja) 2004-12-10 2011-04-06 キヤノン株式会社 電子放出素子の製造方法、および該製造方法を用いた、電子源並びに画像表示装置の製造方法
US20120043518A1 (en) * 2010-08-18 2012-02-23 Applied Materials, Inc. Variable resistance memory element and fabrication methods

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5274626A (en) * 1975-12-18 1977-06-22 Inoue Japax Res Inc Adhesive
DE3421739A1 (de) * 1984-06-12 1985-12-12 Battelle-Institut E.V., 6000 Frankfurt Verfahren zur herstellung von diamantartigen kohlenstoffschichten
JP2620252B2 (ja) * 1987-09-17 1997-06-11 住友電気工業株式会社 窒素含有硬質炭素膜の製造方法
JPH01302203A (ja) * 1988-05-30 1989-12-06 Idemitsu Petrochem Co Ltd 赤外線透過性光学材
JPH0328195A (ja) * 1989-06-21 1991-02-06 Yamaha Corp ダイヤモンド状炭素膜の製法
JPH03199376A (ja) * 1989-12-27 1991-08-30 Shimadzu Corp 硬質カーボン膜形成方法
JPH04366901A (ja) * 1991-06-14 1992-12-18 Canon Inc 炭素膜を有する素子
JPH05274626A (ja) * 1992-03-27 1993-10-22 Yamaha Corp Ｍｒヘッド
US5609948A (en) * 1992-08-21 1997-03-11 Minnesota Mining And Manufacturing Company Laminate containing diamond-like carbon and thin-film magnetic head assembly formed thereon
JPH06223331A (ja) * 1993-01-26 1994-08-12 Matsushita Electric Ind Co Ltd 磁気抵抗効果型薄膜磁気ヘッド
US5699605A (en) * 1994-05-23 1997-12-23 Seagate Technology, Inc. Method for forming a magnetic thin film head with recessed basecoat
JPH07320236A (ja) * 1994-05-26 1995-12-08 Hitachi Ltd 磁気ヘッド
US5838521A (en) * 1995-04-17 1998-11-17 Read-Rite Corporation Magnetoresistive transducer having laminated magnetic shields
JP3028195U (ja) 1996-02-20 1996-08-30 株式会社サンテックス 木目模様様カーテン

Also Published As

Publication number Publication date
CN1190774A (zh) 1998-08-19
US5986857A (en) 1999-11-16
CN1114902C (zh) 2003-07-16
EP0859355B1 (de) 2002-05-02
EP0859355A1 (de) 1998-08-19
DE69805126D1 (de) 2002-06-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee