DE69517232D1 - Ultraschallmotor - Google Patents

Ultraschallmotor

Info

Publication number
DE69517232D1
DE69517232D1 DE69517232T DE69517232T DE69517232D1 DE 69517232 D1 DE69517232 D1 DE 69517232D1 DE 69517232 T DE69517232 T DE 69517232T DE 69517232 T DE69517232 T DE 69517232T DE 69517232 D1 DE69517232 D1 DE 69517232D1
Authority
DE
Germany
Prior art keywords
ultrasonic motor
ultrasonic
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69517232T
Other languages
English (en)
Other versions
DE69517232T2 (de
Inventor
Tadao Takagi
Takatoshi Ashizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP05151494A external-priority patent/JP3453838B2/ja
Priority claimed from JP6275022A external-priority patent/JPH08140377A/ja
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of DE69517232D1 publication Critical patent/DE69517232D1/de
Publication of DE69517232T2 publication Critical patent/DE69517232T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0045—Driving devices, e.g. vibrators using longitudinal or radial modes combined with torsion or shear modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H02N2/008—Means for controlling vibration frequency or phase, e.g. for resonance tracking
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
DE69517232T 1994-03-23 1995-03-22 Ultraschallmotor Expired - Lifetime DE69517232T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP05151494A JP3453838B2 (ja) 1994-03-23 1994-03-23 超音波モータ
JP6275022A JPH08140377A (ja) 1994-11-09 1994-11-09 超音波アクチュエータ

Publications (2)

Publication Number Publication Date
DE69517232D1 true DE69517232D1 (de) 2000-07-06
DE69517232T2 DE69517232T2 (de) 2000-10-26

Family

ID=26392059

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69517232T Expired - Lifetime DE69517232T2 (de) 1994-03-23 1995-03-22 Ultraschallmotor

Country Status (3)

Country Link
US (2) US6252332B1 (de)
EP (1) EP0674350B1 (de)
DE (1) DE69517232T2 (de)

Families Citing this family (52)

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JP3823340B2 (ja) * 1994-08-01 2006-09-20 株式会社ニコン 振動モータ
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JPH099651A (ja) * 1995-06-15 1997-01-10 Nikon Corp 超音波アクチュエータ
JPH09121570A (ja) * 1995-08-22 1997-05-06 Nikon Corp 振動アクチュエータ
EP0764993A1 (de) * 1995-09-19 1997-03-26 Nikon Corporation Vibrationsgetriebener Antrieb
US5763981A (en) * 1995-09-20 1998-06-09 Nikon Corporation Vibration actuator
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US5912525A (en) * 1996-03-21 1999-06-15 Nikon Corporation Vibration actuator
JPH09322572A (ja) * 1996-05-30 1997-12-12 Nikon Corp 振動アクチュエータ
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JP4054092B2 (ja) * 1997-09-30 2008-02-27 オリンパス株式会社 アクチュエータ
JP3609927B2 (ja) * 1997-11-06 2005-01-12 コニカミノルタホールディングス株式会社 駆動装置
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JP3148729B2 (ja) * 1998-04-13 2001-03-26 セイコーインスツルメンツ株式会社 超音波モータ及び超音波モータ付電子機器
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EP2568595A3 (de) * 1998-12-21 2013-05-15 Seiko Epson Corporation Piezoelektrischer Aktor, Uhrwerk und tragbares Gerät
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US6664714B2 (en) * 2000-03-23 2003-12-16 Elliptec Resonant Actuator Ag Vibratory motors and methods of making and using same
JP2002112563A (ja) * 2000-09-29 2002-04-12 Minolta Co Ltd アクチュエータの駆動方法および装置
JP3889956B2 (ja) * 2001-02-27 2007-03-07 シャープ株式会社 移動装置
US20030052574A1 (en) * 2001-09-07 2003-03-20 Yukihiro Matsushita Ultrasonic motor and method for manufacturing the same
NZ534848A (en) * 2002-02-06 2005-10-28 Elliptec Resonant Actuator Ag Piezoelectric motor control
US7157830B2 (en) * 2003-04-02 2007-01-02 Piezomotor Uppsala Ab Near-resonance wide-range operating electromechanical motor
CN1981427B (zh) * 2004-07-07 2011-06-01 精工爱普生株式会社 压电致动器和钟表
US20060066169A1 (en) * 2004-09-30 2006-03-30 Daugherty Roger H Electric motor having different stator lamination and rotor lamination constructions
US7208861B2 (en) * 2005-02-04 2007-04-24 Piezomotor Uppsala Ab Electromechanical drive element
US20070129678A1 (en) * 2005-12-06 2007-06-07 Medtronic, Inc. Regulator
US8159763B2 (en) * 2006-03-22 2012-04-17 Nikon Corporation Vibrating element, vibration actuator, lens barrel, camera system and method for driving vibration actuator
JP4795158B2 (ja) * 2006-08-03 2011-10-19 オリンパス株式会社 超音波モータ
JP2008154304A (ja) * 2006-12-14 2008-07-03 Pentax Corp 超音波モータ
JP4891053B2 (ja) * 2006-12-21 2012-03-07 オリンパス株式会社 超音波モータ
JP4209464B2 (ja) * 2007-03-16 2009-01-14 パナソニック株式会社 超音波アクチュエータ装置
WO2009072301A1 (ja) * 2007-12-07 2009-06-11 Panasonic Corporation 駆動装置
KR101653826B1 (ko) * 2009-06-29 2016-09-02 삼성전자주식회사 초음파 모터 및 그 제조 방법
US8623040B2 (en) 2009-07-01 2014-01-07 Alcon Research, Ltd. Phacoemulsification hook tip
JP5412308B2 (ja) * 2010-02-02 2014-02-12 オリンパス株式会社 超音波モータ
JP5545821B2 (ja) * 2010-02-22 2014-07-09 オリンパス株式会社 超音波モータ
JP5545825B2 (ja) * 2010-03-23 2014-07-09 オリンパス株式会社 超音波モータ
JP5506552B2 (ja) * 2010-06-07 2014-05-28 キヤノン株式会社 振動型アクチュエータの制御装置及び振動型アクチュエータの制御方法
JP2012029381A (ja) * 2010-07-20 2012-02-09 Olympus Corp 超音波モータ
WO2012014640A1 (en) * 2010-07-26 2012-02-02 Canon Kabushiki Kaisha Vibration wave motor
JP2012039690A (ja) * 2010-08-04 2012-02-23 Olympus Corp 超音波モータ
US10258505B2 (en) 2010-09-17 2019-04-16 Alcon Research, Ltd. Balanced phacoemulsification tip
DE102010055848B4 (de) * 2010-12-22 2018-01-18 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallaktor
JP6226559B2 (ja) * 2012-05-30 2017-11-08 キヤノン株式会社 超音波モータおよび、超音波モータの駆動方法
KR102449870B1 (ko) * 2015-05-15 2022-10-04 삼성전자주식회사 압전 초음파 모터 및 압전 초음파 모터의 작동방법
CN113334648B (zh) * 2021-05-28 2022-06-21 华中科技大学 一种高频椭圆振动切削系统及方法

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US4663556A (en) * 1984-01-11 1987-05-05 Hitachi Maxell, Ltd. Torsional mode ultrasonic vibrator
GB2183371B (en) * 1985-10-09 1989-09-27 Canon Kk Vibration wave motor and drive circuit therefor
US4743788A (en) 1985-11-20 1988-05-10 Nippon Kogaku K. K. Input frequency control device for surface acoustic wave motor
US4812697A (en) * 1986-04-09 1989-03-14 Taga Electric Co., Ltd. Ultrasonic vibrator and a method of controllingly driving same
JPH06106028B2 (ja) * 1987-02-02 1994-12-21 リオン株式会社 圧電共振モ−タ
US5061882A (en) * 1987-02-09 1991-10-29 Nikon Corporation Power supply frequency regulating device for vibration wave driven motor
JP2586082B2 (ja) * 1987-02-09 1997-02-26 株式会社ニコン 超音波モータの電源周波数最適化装置
US5159253A (en) * 1987-02-24 1992-10-27 Canon Kabushiki Kaisha Control device for a vibration wave motor
JPS63209482A (ja) * 1987-02-24 1988-08-31 Canon Inc 振動型駆動装置用制御回路
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US4965482A (en) * 1988-06-17 1990-10-23 Nec Corporation Ultrasonic motor and method of adjusting the same
JPH0255585A (ja) * 1988-08-18 1990-02-23 Rion Co Ltd 超音波モータ
US5191688A (en) * 1989-07-27 1993-03-09 Olympus Optical Co., Ltd. Method for producing a superior longitudinal vibrator
JPH044772A (ja) * 1990-04-20 1992-01-09 Olympus Optical Co Ltd 超音波モータ
DE69013263T2 (de) * 1989-08-03 1995-06-08 Asmo Co Ltd Methode und Vorrichtung zur Steuerung eines Ultraschallmotors.
JPH0389875A (ja) * 1989-08-31 1991-04-15 Brother Ind Ltd リニア超音波モータ
JPH03145976A (ja) * 1989-10-30 1991-06-21 Nikon Corp 超音波モータの駆動装置
JPH03183382A (ja) * 1989-12-13 1991-08-09 Alps Electric Co Ltd 超音波リニアモータ
EP0442469B1 (de) * 1990-02-14 1995-07-26 Nikon Corporation Antriebsvorrichtung für einen Ultraschallwellenmotor
US5073739A (en) * 1990-02-27 1991-12-17 Nisca Corporation Vibration-coupling type ultrasonic actuator and method for operating the same
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JP2998978B2 (ja) * 1990-08-03 2000-01-17 キヤノン株式会社 振動波装置および駆動装置
JP3118251B2 (ja) * 1990-11-21 2000-12-18 ニスカ株式会社 超音波駆動装置及びその方法
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JP3171887B2 (ja) * 1991-10-21 2001-06-04 キヤノン株式会社 振動波駆動装置
US5448128A (en) * 1991-12-12 1995-09-05 Honda Denshi Kabushiki Kaisha Vibration type driving device
JPH05344758A (ja) * 1992-06-08 1993-12-24 Alps Electric Co Ltd 超音波モータ
JPH066989A (ja) * 1992-06-15 1994-01-14 Olympus Optical Co Ltd 超音波リニアモータ
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JPH06106028A (ja) * 1992-09-24 1994-04-19 Mitsui Mining Co Ltd 亜酸化窒素含有ガスを処理する方法

Also Published As

Publication number Publication date
US5821667A (en) 1998-10-13
DE69517232T2 (de) 2000-10-26
US6252332B1 (en) 2001-06-26
EP0674350B1 (de) 2000-05-31
EP0674350A1 (de) 1995-09-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition