WO2009072301A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

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Publication number
WO2009072301A1
WO2009072301A1 PCT/JP2008/003628 JP2008003628W WO2009072301A1 WO 2009072301 A1 WO2009072301 A1 WO 2009072301A1 JP 2008003628 W JP2008003628 W JP 2008003628W WO 2009072301 A1 WO2009072301 A1 WO 2009072301A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric element
vibration
driving
resonance frequency
driving apparatus
Prior art date
Application number
PCT/JP2008/003628
Other languages
English (en)
French (fr)
Inventor
Yusuke Adachi
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to JP2009527638A priority Critical patent/JP4405590B2/ja
Publication of WO2009072301A1 publication Critical patent/WO2009072301A1/ja
Priority to US12/794,056 priority patent/US8008840B2/en

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/003Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004Rectangular vibrators
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/87Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/87Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

 駆動子の発熱が少ない駆動装置を提供する。  駆動装置は、圧電体層(1)を有する圧電素子(P1)と、圧電素子(P1)に所定周波数の駆動電圧を印加し圧電素子(P1)に伸縮振動と屈曲振動を含む振動を発生させる駆動電源(14)と、圧電素子(P1)の振動により圧電素子(P1)に対して相対的に移動する移動体(9)とを備える。圧電素子(P1)の屈曲振動の共振周波数と圧電素子(P1)の伸縮振動の反共振周波数との差は、圧電素子(P1)の屈曲振動の共振周波数と圧電素子(P1)の伸縮振動の共振周波数との差よりも小さい。
PCT/JP2008/003628 2007-12-07 2008-12-05 駆動装置 WO2009072301A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009527638A JP4405590B2 (ja) 2007-12-07 2008-12-05 駆動装置
US12/794,056 US8008840B2 (en) 2007-12-07 2010-06-04 Drive unit

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007316907 2007-12-07
JP2007-316907 2007-12-07

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/794,056 Continuation US8008840B2 (en) 2007-12-07 2010-06-04 Drive unit

Publications (1)

Publication Number Publication Date
WO2009072301A1 true WO2009072301A1 (ja) 2009-06-11

Family

ID=40717483

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/003628 WO2009072301A1 (ja) 2007-12-07 2008-12-05 駆動装置

Country Status (3)

Country Link
US (1) US8008840B2 (ja)
JP (1) JP4405590B2 (ja)
WO (1) WO2009072301A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2367213A3 (en) * 2010-03-19 2014-11-26 Canon Kabushiki Kaisha Driving unit of vibration-type actuator

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5235856B2 (ja) * 2009-12-25 2013-07-10 パナソニック株式会社 振動型アクチュエータ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007276180A (ja) * 2006-04-03 2007-10-25 Seiko Epson Corp 記録装置、液体噴射装置および駆動機構
JP2007300798A (ja) * 2006-02-07 2007-11-15 Matsushita Electric Ind Co Ltd 圧電素子及び超音波アクチュエータ
JP2007306800A (ja) * 2006-01-12 2007-11-22 Matsushita Electric Ind Co Ltd 超音波アクチュエータ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3453838B2 (ja) 1994-03-23 2003-10-06 株式会社ニコン 超音波モータ
EP0674350B1 (en) * 1994-03-23 2000-05-31 Nikon Corporation Ultrasonic motor
JP3477304B2 (ja) 1996-02-16 2003-12-10 オリンパス株式会社 超音波モータ駆動装置
EP1186063B1 (en) * 1999-05-31 2006-07-12 Nanomotion Ltd. Multilayer piezoelectric motor
JP3614076B2 (ja) 2000-03-16 2005-01-26 セイコーエプソン株式会社 圧電アクチュエータ、時計、携帯機器および圧電アクチュエータの駆動方法
JP2004166479A (ja) * 2002-06-14 2004-06-10 Seiko Epson Corp 回転型駆動装置およびこれを備えた装置
US7671516B2 (en) * 2005-12-05 2010-03-02 Panasonic Corporation Ultrasonic actuator
US7911112B2 (en) * 2005-12-15 2011-03-22 Panasonic Corporation Ultrasonic actuator
JP4035158B2 (ja) * 2006-01-12 2008-01-16 松下電器産業株式会社 超音波アクチュエータ
US7638932B2 (en) * 2006-02-07 2009-12-29 Panasonic Corporation Piezoelectric element and ultrasonic actuator
KR100818482B1 (ko) * 2006-10-16 2008-04-01 삼성전기주식회사 압전 모터

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007306800A (ja) * 2006-01-12 2007-11-22 Matsushita Electric Ind Co Ltd 超音波アクチュエータ
JP2007300798A (ja) * 2006-02-07 2007-11-15 Matsushita Electric Ind Co Ltd 圧電素子及び超音波アクチュエータ
JP2007276180A (ja) * 2006-04-03 2007-10-25 Seiko Epson Corp 記録装置、液体噴射装置および駆動機構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2367213A3 (en) * 2010-03-19 2014-11-26 Canon Kabushiki Kaisha Driving unit of vibration-type actuator
US9048760B2 (en) 2010-03-19 2015-06-02 Canon Kabushiki Kaisha Driving unit of vibration-type actuator

Also Published As

Publication number Publication date
US20100244627A1 (en) 2010-09-30
JP4405590B2 (ja) 2010-01-27
US8008840B2 (en) 2011-08-30
JPWO2009072301A1 (ja) 2011-04-21

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